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    Rotating cup coating device
    1.
    发明授权
    Rotating cup coating device 失效
    旋转杯涂装置

    公开(公告)号：US5879457A

    公开(公告)日：1999-03-09

    申请号：US783988

    申请日：1997-01-14

    申请人： Tsutomu Sahoda ,  Koji Ueda ,  Hiroki Endo ,  Hidenori Miyamoto

    发明人： Tsutomu Sahoda ,  Koji Ueda ,  Hiroki Endo ,  Hidenori Miyamoto

    IPC分类号： B05C11/08 ,  G03F7/16 ,  H01L21/00 ,  H01L21/027 ,  B05C5/00 ,  B05C13/00

    CPC分类号： H01L21/6715 ,  B05C11/08

    摘要： A rotating cup type liquid coating device with structure for suppressing pulsatory movement of the coated liquid when stopping rotation of the inner cup 3, includes a buffer space S formed for connecting an inner space of the inner cup 3 and an inner space of an outer cup 2 surrounding the inner cup, on an outer periphery of the inner cup 3 , through respective throttle portions 16, 17.

    摘要翻译： 具有用于在停止内杯3的旋转时抑制被涂液体的脉动运动的结构的旋转杯式液体涂布装置包括形成为用于连接内杯3的内部空间和外杯的内部空间的缓冲空间S 2通过相应的节流部分16,17围绕内杯3在内杯3的外周上。

    Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus
    2.
    发明授权
    Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus 失效
    旋转杯式涂布装置以及用这种旋转杯式涂布装置涂覆物体的方法

    公开(公告)号：US5707687A

    公开(公告)日：1998-01-13

    申请号：US637357

    申请日：1996-04-24

    申请人： Koji Ueda ,  Hiroki Endo ,  Hidenori Miyamoto

    发明人： Koji Ueda ,  Hiroki Endo ,  Hidenori Miyamoto

    IPC分类号： B05D1/40 ,  B05C11/08 ,  G03F7/16 ,  H01L21/00 ,  H01L21/027 ,  B05D3/12 ,  B05C11/02 ,  B05D1/18

    CPC分类号： H01L21/6715 ,  B05C11/08 ,  G03F7/162

    摘要： A suction chuck and an inner cup are rotated in unison with each other to spread a coating solution uniformly over a planar object in the inner cup under centrifugal forces. Vent holes defined in an outer cup lid which closes an outer cup are held out of communication with vent holes defined in a ring-shaped closure member, so that the interior space in the outer cup is kept out of communication with the exterior space around the outer cup. The concentration of a solvent in the outer cup remains so high that no mist is produced in the outer cup. After the planar object has been coated and before the outer cup lid is opened, the ring-shaped closure member is turned to align the vent holes in the outer cup lid with the vent holes in the ring-shaped closure member, breaking any vacuum in the outer cup with ambient air introduced through the vent holes into the outer cup. Thereafter, the outer and inner cup lids are opened, and the coated planar object is taken out.

    摘要翻译： 吸盘和内杯彼此一致地旋转，以在离心力下在内杯中的平面物体上均匀地涂覆涂布溶液。 限定在封闭外杯的外杯盖中的排气孔与环形封闭构件中限定的通气孔保持不连通，使得外杯中的内部空间与外围空间相连接 外杯。 外杯中的溶剂的浓度保持如此高，使得外杯中不产生雾。 在平面物体被涂覆之后并且在外杯盖打开之前，环形封闭构件被转动以使外杯盖中的通气孔与环形封闭构件中的通气孔对齐，从而破坏 具有环境空气的外杯通过通气孔引入外杯中。 此后，打开外杯盖和内杯盖，并取出涂覆的平面物体。

    Method of forming coating film on a substrate
    3.
    发明授权
    Method of forming coating film on a substrate 失效
    在基材上形成涂膜的方法

    公开(公告)号：US06277441B1

    公开(公告)日：2001-08-21

    申请号：US08389119

    申请日：1995-02-15

    申请人： Hiroki Endo ,  Hideya Kobari ,  Koji Ueda ,  Hiroyoshi Sago

    发明人： Hiroki Endo ,  Hideya Kobari ,  Koji Ueda ,  Hiroyoshi Sago

    IPC分类号： B05D312

    CPC分类号： H01L21/6715 ,  B05D1/005 ,  C03C17/001 ,  C03C2218/116 ,  H01L21/02126 ,  H01L21/02282 ,  H01L21/31051 ,  H01L21/316

    摘要： According to the invention disclosed, application liquid such as spin-on-glass (SOG) is dropped on the surface of a substrate such as a semiconductor wafer having irregularities thereon and is dispersed on the substrate surface using a centrifugal force generated by rotating the substrate. The rotation of the substrate is performed in a first rotational action at a low speed and a second rotational action at a high speed, the first and second rotational actions being separated by a time interval. The second rotation may be at a constant speed. Alternatively, the rotational speed of the second rotational action may comprise rotation at an intermediate speed continuously followed by rotation at a higher speed. The time interval between the first and second rotational actions is ten times the duration of the first rotational action or longer. The duration of the second rotational action is three times that of the first rotational action or longer. Such time interval and relative durations make the application liquid more conformable to the substrate surface and causes the application liquid to be sufficiently dispersed on the substrate to provide a film having the desired thickness on the substrate, even though the substrate has irregularities thereon.

    摘要翻译： 根据所公开的发明，将诸如旋涂玻璃（SOG）的涂布液滴落在其上具有不规则性的半导体晶片等基板的表面上，并使用通过旋转基板产生的离心力将其分散在基板表面上 。 基板的旋转以低速的第一旋转动作和高速的第二旋转动作进行，第一和第二旋转动作以时间间隔分开。 第二旋转可以是恒定的速度。 或者，第二旋转动作的旋转速度可以包括以中间速度连续地以较高速度旋转的旋转。 第一和第二旋转动作之间的时间间隔是第一旋转动作的持续时间的十倍或更长。 第二旋转动作的持续时间是第一旋转动作的持续时间的3倍以上。 这样的时间间隔和相对持续时间使得施加液体更适合于衬底表面，并且使得施加液体充分地分散在衬底上，以在衬底上提供具有期望厚度的膜，即使衬底在其上具有不规则性。

    HYBRID VEHICLE AND CONTROL METHOD THEREFOR
    5.
    发明申请
    HYBRID VEHICLE AND CONTROL METHOD THEREFOR 有权
    混合动力车辆及其控制方法

    公开(公告)号：US20140180517A1

    公开(公告)日：2014-06-26

    申请号：US14138227

    申请日：2013-12-23

    申请人： Hiroki Endo

    发明人： Hiroki Endo

    IPC分类号： B60W20/00 ,  B60W10/08 ,  B60W10/26 ,  B60W10/06

    CPC分类号： B60W20/1062 ,  B60K6/445 ,  B60W10/06 ,  B60W10/08 ,  B60W10/26 ,  B60W20/14 ,  B60W2510/085 ,  B60W2710/0644 ,  Y02T10/6239 ,  Y02T10/6286 ,  Y02T10/7258 ,  Y10S903/93

    摘要： A hybrid vehicle includes a controller that executes control such that a second motor is regeneratively driven within the range of input and output limits of a high-voltage battery that exchanges electric power with the second motor that outputs power for traveling without running an engine using a first motor when charging electric power is smaller than the input limit of the high-voltage battery and an EV traveling priority mode is set. The invention also relates to a control method for the hybrid vehicle.

    摘要翻译： 混合动力车辆包括执行控制的控制器，使得第二电动机在与不使用发动机运行的情况下输出动力的第二电动机交换电力的高压电池的输入和输出限制的范围内再生驱动 第一电动机在充电电力小于高电压电池的输入极限时，设定EV行驶优先模式。 本发明还涉及一种混合动力车辆的控制方法。

    VEHICLE CONTROL APPARATUS AND VEHICLE CONTROL METHOD
    8.
    发明申请
    VEHICLE CONTROL APPARATUS AND VEHICLE CONTROL METHOD 审中-公开
    车辆控制装置和车辆控制方法

    公开(公告)号：US20120323427A1

    公开(公告)日：2012-12-20

    申请号：US13581422

    申请日：2010-03-30

    申请人： Hiroki Endo ,  Masaya Yamamoto

    发明人： Hiroki Endo ,  Masaya Yamamoto

    IPC分类号： B60W10/26 ,  B60W20/00

    CPC分类号： B60W20/50 ,  B60K6/445 ,  B60W10/06 ,  B60W10/08 ,  B60W20/00 ,  B60W30/184 ,  B60W2510/246 ,  Y02T10/6239 ,  Y02T10/6269 ,  Y02T10/6286

    摘要： An ECU executes a program including the steps of: executing first restriction control if the temperature of coolant is equal to or greater than a first temperature and smaller than a second temperature; executing second restriction control if the temperature of the coolant is equal to or greater than the second temperature; and executing normal control if the temperature of the coolant is smaller than the first temperature.

    摘要翻译： ECU执行程序，包括以下步骤：如果冷却剂的温度等于或大于第一温度且小于第二温度，则执行第一限制控制; 如果冷却剂的温度等于或大于第二温度则执行第二限制控制; 并且如果冷却剂的温度小于第一温度，则执行正常控制。

    IP network system
    9.
    发明申请
    IP network system 有权
    IP网络系统

    公开(公告)号：US20090103550A1

    公开(公告)日：2009-04-23

    申请号：US12288151

    申请日：2008-10-16

    申请人： Hiroshi Miyata ,  Yukiyo Akisada ,  Masahito Endo ,  Hiroki Endo ,  Kensuke Hosoya

    发明人： Hiroshi Miyata ,  Yukiyo Akisada ,  Masahito Endo ,  Hiroki Endo ,  Kensuke Hosoya

    IPC分类号： H04L12/56

    CPC分类号： H04L12/427 ,  H04L12/4633 ,  H04L45/22 ,  H04L45/28

    摘要： There is provided an IP network system. The IP network system includes: a plurality of relays making up a ring network; a source host for transmitting a packet and connected to the ring network; and a destination host which conducts a packet communication with the source host through the ring network. Each of the relays is operable to transfer received packets containing a transfer direction information to the destination host through a right-handed route of the ring network and through a left-handed route of the ring network, based on the transfer direction information.

    摘要翻译： 提供了一个IP网络系统。 IP网络系统包括：组成环网的多个中继; 用于发送分组并连接到环网的源主机; 以及通过环形网络与源主机进行分组通信的目的地主机。 每个中继器可操作以基于传送方向信息，通过环形网络的右手路径和通过环形网络的左撇子路径将包含传送方向信息的接收分组传送到目的地主机。

    Method for forming a coating film on a plate-like workpiece
    10.
    发明授权
    Method for forming a coating film on a plate-like workpiece 有权
    在板状工件上形成涂膜的方法

    公开(公告)号：US07300889B2

    公开(公告)日：2007-11-27

    申请号：US10914523

    申请日：2004-08-09

    申请人： Hiroki Endo ,  Taiichiro Aoki ,  Akihiko Nakamura

    发明人： Hiroki Endo ,  Taiichiro Aoki ,  Akihiko Nakamura

    IPC分类号： H01L

    CPC分类号： H01L21/02337 ,  H01L21/02282 ,  H01L21/316 ,  H01L21/76828

    摘要： A method for forming a coating film, comprises the steps of: applying a raw material of a low dielectric constant onto a surface of a plate-like material; reducing oxygen concentration in the atmosphere surrounding the plate-like material to be less than or equal to 1% before a surface temperature of said plate-like material to be treated rises to 200° C.; thereafter heating said plate-like material to a temperature greater than or equal to 400° C.; and then maintaining the oxygen content in the atmosphere to be less than or equal to 1% until the surface temperature of said plate-like material to be treated lowers to 200° C. The raw material is an organic SOG obtained by hydrolyzing and condensing at least one alkoxysilane compound into an organic solvent under an acid catalyst.

    摘要翻译： 形成涂膜的方法包括以下步骤：将低介电常数的原料施加到板状材料的表面上; 在板状材料的表面温度升高到200℃之前，将板状材料周围的气氛中的氧浓度降低至1％以下。 然后将所述板状材料加热至大于或等于400℃的温度; 然后将大气中的氧含量保持在1％以下，直到所述板状材料的表面温度降低到200℃为止。原料是通过水解和缩合至少一种烷氧基硅烷得到的有机SOG 在酸催化剂下形成有机溶剂。