Stud bumping apparatus
    2.
    发明授权
    Stud bumping apparatus 有权
    螺柱碰撞装置

    公开(公告)号:US07303109B2

    公开(公告)日:2007-12-04

    申请号:US10612383

    申请日:2003-07-01

    IPC分类号: B23K1/06 B23K37/04

    摘要: The invention provides an apparatus and a method for forming conductive bumps on a plurality of semiconductor devices with an oxidizable material. The apparatus comprises a bump forming device, a chamber system adapted to house the semiconductor devices and a gas supply for supplying an inert gas into the chamber system. A support table is provided for supporting the semiconductor devices during bumping, and the said support table is operative to move the semiconductor devices from a bumping site into the chamber system after bumping.

    摘要翻译: 本发明提供了一种在具有可氧化材料的多个半导体器件上形成导电凸块的装置和方法。 该装置包括凸块形成装置,适于容纳半导体装置的室系统和用于将惰性气体供应到室系统中的气体供应装置。 提供了用于在凸起期间支撑半导体器件的支撑台,并且所述支撑台可操作以在撞击之后将半导体器件从凸起部位移动到腔室系统中。

    Apparatus for detecting the oscillation amplitude of an oscillating object
    5.
    发明授权
    Apparatus for detecting the oscillation amplitude of an oscillating object 有权
    用于检测振荡物体的振荡幅度的装置

    公开(公告)号:US06827247B1

    公开(公告)日:2004-12-07

    申请号:US09913014

    申请日:2001-08-08

    IPC分类号: B23K520

    摘要: Apparatus for detecting the oscillation amplitude of an oscillating object (3) includes an optical radiation source (9) and a detector (10) including first and second optical radiation sensing areas (24A, 24B) adjacent each other. The detector (10) and the optical radiation source (9) are adapted to be located opposite each other with the oscillating object (3) located between the source (9) and the detector (10) so that the object (3) blocks a portion of the sensing areas (24A, 24B) from receiving optical radiation from the source (9). A processor (18) coupled to the detector (10) receives first and second output signals representing the magnitude of optical radiation sensed by the first and second optical radiation sensing areas (24A, 24B), respectively. The processor (18) processes the first and second output signals to obtain an indication of the amplitude of oscillation of the object (3).

    摘要翻译: 用于检测振荡物体(3)的振荡幅度的装置包括光辐射源(9)和包括彼此相邻的第一和第二光学辐射感测区域(24A,24B)的检测器(10)。 检测器(10)和光辐射源(9)适于彼此相对定位,其中振荡对象(3)位于源(9)和检测器(10)之间,使得物体(3)阻挡 感测区域(24A,24B)的一部分不接收来自源(9)的光辐射。 耦合到检测器(10)的处理器(18)分别接收表示由第一和第二光学辐射感测区域(24A,24B)感测的光辐射的大小的第一和第二输出信号。 处理器(18)处理第一和第二输出信号以获得对象(3)的振荡幅度的指示。