公开(公告)号：US10183861B2

公开(公告)日：2019-01-22

申请号：US15368740

申请日：2016-12-05

申请人： Robert Bosch GmbH

发明人： Achim Breitling ,  Frank Reichenbach ,  Jochen Reinmuth ,  Julia Amthor

IPC分类号： H01L21/00 ,  B81C1/00 ,  B81B7/04 ,  G01C19/5783 ,  G01P15/08 ,  B81B7/02 ,  G01C19/5769

摘要： A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or of the cap with the aid of a laser. A layer for protecting the sealed access opening is applied to or deposited on or grown on a material area, which transitions into a liquid aggregate state and then transitions into a solid aggregate state and seals the access opening.

公开(公告)号：US20180186626A1

公开(公告)日：2018-07-05

申请号：US15858321

申请日：2017-12-29

申请人： NEWTONOID TECHNOLOGIES, L.L.C.

发明人： FIELDING B. STATON ,  DAVID STRUMPF

IPC分类号： B81B7/04 ,  G01K7/22 ,  B81B7/00 ,  B23Q11/00

CPC分类号： B81B7/04 ,  B23Q11/0032 ,  B81B7/0029 ,  B81B2201/02 ,  B81B2201/03 ,  E04H9/00 ,  E04H9/14 ,  G01K7/22

摘要： A construction component for detecting the application of energy and responding to the energy input wherein a plurality of particles are distributed throughout the component with each particle being configured to sense component state information. The component includes at least one processor configured to receive sensing information from the plurality of particle sensors. The processor configured to receive component state information and to process the information to determine a response to selectively alter attributes of the construction component to affect the behavior of the component. The plurality of particles capable of converting a portion of the energy applied to the construction component into an alternative form of energy, wherein the converted energy is harvested for utilization elsewhere.

公开(公告)号：US20180033564A1

公开(公告)日：2018-02-01

申请号：US15470431

申请日：2017-03-27

申请人： STMICROELECTRONICS S.R.L.

发明人： Giovanni Campardo ,  Carlo Valzasina

IPC分类号： H01H1/00 ,  B81B7/00 ,  B81B7/04

CPC分类号： H01H1/0036 ,  B81B7/0003 ,  B81B7/007 ,  B81B7/04 ,  B81B2201/01 ,  B81B2203/0118 ,  B81B2207/01 ,  H01H1/0094 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2001/0078 ,  H01H2001/145

摘要： A microelectromechanical device, in particular a non-volatile memory module or a relay, comprising: a mobile body including a top region and a bottom region; top electrodes facing the top region; and bottom electrodes, facing the bottom region. The mobile body is, in a resting condition, at a distance from the electrodes. The latter can be biased for generating a movement of the mobile body for causing a direct contact of the top region with the top electrodes and, in a different operating condition, a direct contact of the bottom region with the bottom electrodes. In the absence of biasing, molecular-attraction forces maintain in stable mutual contact the top region and the top electrodes or, alternatively, the bottom region and the bottom electrodes.

公开(公告)号：US09695039B1

公开(公告)日：2017-07-04

申请号：US15143762

申请日：2016-05-02

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Yu-Chia Liu ,  Chia-Hua Chu ,  Chun-Wen Cheng ,  Kuei-Sung Chang ,  Jung-Huei Peng

IPC分类号： H01L21/00 ,  B81B7/04 ,  B81C1/00

CPC分类号： B81B3/0051 ,  B81B7/02 ,  B81C2203/0118

摘要： The present disclosure relates to a microelectromechanical systems (MEMS) package having two MEMS devices with different pressures, and an associated method of formation. In some embodiments, the (MEMS) package includes a device substrate and a cap substrate bonded together. The device substrate includes a first trench and a second trench. A first MEMS device is disposed over the first trench and a second MEMS device is disposed over the second trench. A first stopper is raised from a first trench bottom surface of the first trench but below a top surface of the device substrate and a second stopper is raised from a second trench bottom surface of the second trench but below the top surface of the device substrate. A first depth of the first trench is greater than a second depth of the second trench.

公开(公告)号：US20160200567A1

公开(公告)日：2016-07-14

申请号：US15077925

申请日：2016-03-23

申请人： Infineon Technologies AG

发明人： Alfons DEHE ,  Roland HELM

IPC分类号： B81B7/04 ,  G01L13/02 ,  H04R19/00 ,  G01L9/00

CPC分类号： B81B7/04 ,  B81B7/0041 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L1/14 ,  G01L9/0041 ,  G01L9/0042 ,  G01L9/0072 ,  G01L9/0073 ,  G01L13/025 ,  H04R19/005 ,  H04R23/00 ,  H04R2201/003

摘要： In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.

公开(公告)号：US20150076923A1

公开(公告)日：2015-03-19

申请号：US14027818

申请日：2013-09-16

申请人： Michael Y. Frankel ,  John P. Mateosky

发明人： Michael Y. Frankel ,  John P. Mateosky

IPC分类号： B81B7/00 ,  H04Q11/00 ,  B81B7/04

CPC分类号： B81B7/008 ,  B81B7/04 ,  B81B2201/012 ,  H01H59/0009 ,  H04Q11/00 ,  H04Q11/0005 ,  H04Q2011/0039 ,  H04Q2213/1302 ,  H04Q2213/1304 ,  Y10T307/747

摘要： A Microelectromechanical systems (MEMS)-based N×M cross-point switch, a MEMS-based system, and a method provide MEMS-based cross-point electrical switching for a Layer 0 flow-based switch. The N×M cross-point switch includes N inputs each at least 10 Gbps, M output each at least 10 Gbps, a plurality of Radio Frequency (RF) MEMS switches selectively interconnecting the N inputs to the M outputs; and control and addressing circuitry to selectively control the plurality of RF MEMS switches to switch each of the N inputs to a corresponding output of the M outputs. The systems and methods provide an electrical switching fabric for flow-based switching of wavelengths that can be part of a Reconfigurable Electrical Add/Drop Multiplexer (READM) with similar functionality as a ROADM in the electronic domain.

摘要翻译： 基于微机电系统（MEMS）的N×M交叉点开关，基于MEMS的系统和方法为基于层0的基于流的交换机提供基于MEMS的交叉点电气交换。 N×M交叉点开关包括每个至少10Gbps的N个输入，每个至少10Gbps的M个输出;多个射频（RF）MEMS开关，其将N个输入选择性地互连到M个输出; 以及控制和寻址电路，以选择性地控制多个RF MEMS开关以将N个输入中的每一个切换到M个输出的相应输出。 这些系统和方法提供了用于基于流的基于波长的交换的电交换结构，其可以是具有与电子域中的ROADM类似的功能的可重构电附加多路复用器（READM）的一部分。

公开(公告)号：US20100112681A1

公开(公告)日：2010-05-06

申请号：US12530377

申请日：2008-03-04

申请人： Minoru Asogawa ,  Hisashi Hagiwara ,  Tohru Hiramatsu

发明人： Minoru Asogawa ,  Hisashi Hagiwara ,  Tohru Hiramatsu

IPC分类号： G01N35/08 ,  G01N37/00 ,  G01N33/50 ,  B81B7/04

CPC分类号： G01N35/08

摘要： Compressed gas is supplied from above to a specimen vessel having an open top. Transfer channels to reaction vessels are provided under a microchip and transfer channels extending from the reaction vessels are provided on the microchip. Transfer element is provided outside the microchip so as to supply the compressed gas from a member (cover) holding the microchip.

摘要翻译： 压缩气体从上方供给到具有开口顶部的试样容器。 在微芯片下面设置向反应容器的转移通道，并且将从反应容器延伸的转移通道设置在微芯片上。 转移元件设置在微芯片外部，以从保持微芯片的构件（盖）供应压缩气体。

公开(公告)号：US20090317301A1

公开(公告)日：2009-12-24

申请号：US12142782

申请日：2008-06-20

申请人： Gregory John McAvoy ,  Kia Silverbrook

发明人： Gregory John McAvoy ,  Kia Silverbrook

IPC分类号： B81B7/04 ,  B01L3/00

CPC分类号： B41J2/1623 ,  B01L3/0268 ,  B01L3/50273 ,  B01L2300/123 ,  B01L2400/0481 ,  B01L2400/0484 ,  B01L2400/0655 ,  B41J2/14427 ,  B41J2/1631 ,  B41J2/1645 ,  F04B19/006

摘要： A microfluidic system comprising a MEMS integrated circuit bonded to a polymeric microfluidics platform. The system comprises one or more microfluidic devices. At least one of the microfluidic devices comprises a MEMS actuator positioned in a MEMS layer of the integrated circuit.

摘要翻译： 一种微流体系统，包括结合到聚合微流体平台的MEMS集成电路。 该系统包括一个或多个微流体装置。 至少一个微流体装置包括位于集成电路的MEMS层中的MEMS致动器。

公开(公告)号：US20090289606A1

公开(公告)日：2009-11-26

申请号：US12126698

申请日：2008-05-23

申请人： Stefan Clemens Lauxtermann ,  Hakan Durmus

发明人： Stefan Clemens Lauxtermann ,  Hakan Durmus

IPC分类号： B81B7/04 ,  H02J7/00

CPC分类号： G09G3/3433 ,  G09G2300/0809

摘要： An actuator and method for MEMS array actuation is disclosed. In one embodiment, the actuator having a pixel coupled to a charge integration circuit, the pixel comprising a voltage bias, a variable gap capacitor, and a switch, all in series, the charge integration circuit configured to modulate charge on the variable gap capacitor during an actuation cycle. In one embodiment, the MEMS actuator having a unit cell with parasitic capacitance and coupled to a negative feedback sampling circuit, the unit cell comprising a variable gap capacitor, a voltage bias, a modulated current source, and a voltage-to-current converter, the negative feedback sampling circuit configured to receive an output current from the unit cell, convert the output current from the unit cell to a low voltage signal, sample the low voltage signal, and provide a feedback signal to the modulated current source to compensate for the parasitic capacitance in the unit cell.

摘要翻译： 公开了一种用于MEMS阵列致动的致动器和方法。 在一个实施例中，致动器具有耦合到电荷积分电路的像素，所述像素包括电压偏置，可变间隙电容器和开关，全部是串联的，电荷积分电路被配置为调制可变间隙电容器上的电荷 一个致动循环。 在一个实施例中，MEMS致动器具有具有寄生电容并且耦合到负反馈采样电路的单位单元，该单元包括可变间隙电容器，电压偏置，调制电流源和电压 - 电流转换器， 负反馈采样电路被配置为从单元接收输出电流，将来自单位单元的输出电流转换为低电压信号，对低电压信号进行采样，并向调制电流源提供反馈信号以补偿 单元电池中的寄生电容。

公开(公告)号：US20090231778A1

公开(公告)日：2009-09-17

申请号：US12402031

申请日：2009-03-11

申请人： Shigeru Hiura ,  Hiroaki Yamazaki ,  Tamio Ikehashi

发明人： Shigeru Hiura ,  Hiroaki Yamazaki ,  Tamio Ikehashi

IPC分类号： H01G5/16 ,  B81B7/02 ,  B81B7/04

CPC分类号： H01P1/127 ,  H01H59/0009

摘要： A high frequency MEMS 1 as a high frequency electrical element has a silicon substrate 2 wholly formed with an insulation film, a first signal line 4 provided on the silicon substrate 2, a second signal line 5 provided on the silicon substrate 2, the second signal line 5 crossing the first signal line 4 within a first region above the silicon substrate 2, and a dielectric film 9 interposed between the first signal line 4 and the second signal line 5, and provided on one of the first signal line 4 and the second signal line 5, within the first region, the first signal line 4 and the second signal line 5 being relatively movable in directions for a contacting approach and a mutual spacing in between.

摘要翻译： 作为高频电气元件的高频MEMS1具有完全由绝缘膜形成的硅基板2，设置在硅基板2上的第一信号线4，设置在硅基板2上的第二信号线5，第二信号 线5在硅衬底2上方的第一区域内与第一信号线4交叉，以及介于第一信号线4和第二信号线5之间的电介质膜9，并且设置在第一信号线4和第二信号线4之一上 信号线5在第一区域内，第一信号线4和第二信号线5在接触方向的方向和相互间的相互间隔相对移动。