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101.发明授权Intraluminal prostheses having polymeric material with selectively modified crystallinity and methods of making same 失效具有选择性改性结晶度的聚合材料的管腔内假体及其制备方法公开(公告)号：US06932930B2
公开(公告)日：2005-08-23
申请号：US10701101
申请日：2003-11-04
CPC分类号： A61F2/07 , A61L27/44 , A61L27/54 , A61L27/58 , A61L31/04 , A61L31/14 , A61L2300/20 , Y10T428/1352 , Y10T428/139
摘要： Methods of manufacturing polymeric intraluminal prostheses include annealing the polymeric material to selectively modify the crystallinity thereof. Annealing may be utilized to selectively modify various properties of the polymeric material of an intraluminal prosthesis, including: selectively increasing the modulus of the polymeric material; selectively increasing the hoop strength of the intraluminal prosthesis; selectively modifying the elution rate (increase or decrease) of a pharmacological agent subsequently disposed on or within the annealed polymeric material; selectively increasing/decreasing stress in the intraluminal prosthesis; and selectively modifying the polymeric material such that it erodes at a different rate.
摘要翻译： 制造聚合物腔内假体的方法包括退火聚合物材料以选择性地改变其结晶度。 可以使用退火来选择性地修改管腔内假体的聚合材料的各种性质，包括：选择性地增加聚合材料的模量; 选择性地增加腔内假体的环箍强度; 选择性地改变随后设置在退火的聚合材料上或其内的药剂的洗脱速率（增加或减少）; 在腔内假体中选择性增加/减少应力; 并且选择性地改性聚合材料，使得其以不同的速率腐蚀。
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公开(公告)号：US06900267B2
公开(公告)日：2005-05-31
申请号：US10317506
申请日：2002-12-12
IPC分类号： C08F2/00 , C08F8/00 , C08F8/04 , C08F257/02 , C08F289/00 , C08F291/00 , C08L51/00 , C08L51/08 , C08F255/06 , C08J9/00
CPC分类号： C08F8/00 , C08F8/04 , C08F257/02 , C08F289/00 , C08F291/00 , C08L51/003 , C08L51/08 , C08F12/00 , C08F20/00 , C08L2666/02
摘要： Methods of carrying out a reactive extrusion processes are described that include combining at least one polymer, oligomer, or combination thereof, a carbon dioxide containing fluid, and at least one reactant in an extruder to form a mixture such that the carbon dioxide containing fluid comes into intimate contact with the at least one polymer, oligomer, or combination thereof and assists in a reaction between the at least one polymer, oligomer, or combination thereof and the at least one reactant, and wherein the at least one polymer, oligomer, or combination thereof is modified upon reaction with the at least one reactant.
摘要翻译： 描述了进行反应性挤出方法的方法，其包括在挤出机中组合至少一种聚合物，低聚物或其组合，含二氧化碳的流体和至少一种反应物以形成混合物，使得含二氧化碳的流体来 与所述至少一种聚合物，低聚物或其组合紧密接触并有助于所述至少一种聚合物，低聚物或其组合与所述至少一种反应物之间的反应，并且其中所述至少一种聚合物，低聚物或 当与至少一种反应物反应时，其组合被修饰。
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103.发明授权CO2-processes photoresists, polymers, and photoactive compounds for microlithography 失效二氧化碳处理光刻胶，聚合物和光敏化合物用于微光刻公开(公告)号：US06764809B2
公开(公告)日：2004-07-20
申请号：US09975211
申请日：2001-10-10
IPC分类号： C03F700
CPC分类号： G03F7/36 , G03F7/0046 , G03F7/0048 , G03F7/0392 , G03F7/0395 , G03F7/16 , G03F7/162 , G03F7/26 , G03F7/30 , G03F7/32 , G03F7/325 , G03F7/42 , G03F7/422 , Y10S430/126
摘要： A process of forming a resist image in a microelectronic substrate comprises the steps of contacting the substrate with a composition first comprising carbon dioxide and a component selected from the group consisting of at least one polymeric precursor, at least one monomer, at least one polymeric material, and mixtures thereof to deposit the component on the substrate and form a coating thereon; then imagewise exposing the coating to radiation such that exposed and unexposed coating portions are formed; then subjecting the coating to a second composition comprising carbon dioxide having such that either one of the exposed or the unexposed coating portions are removed from the substrate and the other coating portion is developed and remains on the coating to form an image thereon.
摘要翻译： 在微电子衬底中形成抗蚀剂图像的方法包括以下步骤：使基底与首先包含二氧化碳和选自至少一种聚合物前体，至少一种单体，至少一种聚合物材料 及其混合物以将组分沉积在基材上并在其上形成涂层; 然后将涂层成像曝光到辐射，从而形成曝光和未曝光的涂层部分; 然后对涂层进行包含二氧化碳的第二组合物，所述二氧化碳具有使得暴露的或未曝光的涂层部分中的任一个从基板移除，并且另一个涂覆部分被显影并保留在涂层上以在其上形成图像。
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104.发明授权公开(公告)号：US06763840B2
公开(公告)日：2004-07-20
申请号：US09953061
申请日：2001-09-14
IPC分类号： B08B300
CPC分类号： H01L21/67057 , B08B7/0021 , C11D7/02 , C11D11/0047 , H01L21/02063 , Y10S134/902
摘要： Methods for cleaning a microelectronic substrate in a cluster tool are described that include placing the substrate in a pressure chamber of a module in a cluster tool; pressurizing the pressure chamber; introducing liquid CO2 into the pressure chamber; cleaning the substrate in the pressure chamber; removing the liquid CO2 from the pressure chamber, depressurizing the pressure chamber, and removing the substrate from the pressure chamber. Apparatus for processing a microelectronic substrate are also disclosed that that include a transfer module, a first processing module that employs liquid carbon dioxide as a cleaning fluid coupled to the transfer module, a second processing module coupled to the transfer module, and a transfer mechanism coupled to the transfer module. The transfer mechanism is configured to move the substrate between the first processing module and the second processing module.
摘要翻译： 描述了用于清洁簇工具中的微电子衬底的方法，其包括将衬底放置在组件工具的模块的压力室中; 对压力室加压; 将液体CO 2引入压力室中; 清洗压力室中的基板; 从压力室中除去液态二氧化碳，减压压力室，并从压力室中取出基板。 还公开了一种用于处理微电子衬底的装置，其包括转移模块，使用液态二氧化碳作为耦合到转移模块的清洁流体的第一处理模块，耦合到转移模块的第二处理模块，以及耦合到 到传输模块。 传送机构构造成在第一处理模块和第二处理模块之间移动衬底。
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105.发明授权Carbon dioxide-soluble polymers and swellable polymers for carbon dioxide applications 失效用于二氧化碳应用的二氧化碳可溶性聚合物和可溶胀聚合物公开(公告)号：US06747179B1
公开(公告)日：2004-06-08
申请号：US09641815
申请日：2000-08-18
申请人： Joseph M. DeSimone , Eva Birnbaum , Ruben G. Carbonell , Stephanie Crette , James B. McClain , T. Mark McCleskey , Kimberly R. Powell , Timothy J. Romack , William Tumas
发明人： Joseph M. DeSimone , Eva Birnbaum , Ruben G. Carbonell , Stephanie Crette , James B. McClain , T. Mark McCleskey , Kimberly R. Powell , Timothy J. Romack , William Tumas
IPC分类号： C07C502
CPC分类号： B01J31/06 , B01J3/008 , B01J31/003 , B01J31/006 , B01J31/1658 , B01J31/1805 , B01J31/1845 , B01J31/2208 , B01J31/2404 , B01J2231/321 , B01J2231/4205 , B01J2231/645 , B01J2231/72 , B01J2531/64 , B01J2531/821 , B01J2531/822 , B01J2531/824 , B01J2531/828 , B01J2531/922
摘要： A method for carrying out a catalysis reaction in carbon dioxide comprising contacting a fluid mixture with a catalyst bound to a polymer, the fluid mixture comprising at least one reactant and carbon dioxide, wherein the reactant interacts with the catalyst to form a reaction product. A composition of matter comprises carbon dioxide and a polymer and a reactant present in the carbon dioxide. The polymer has bound thereto a catalyst at a plurality of chains along the length of the polymer, and wherein the reactant interacts with the catalyst to form a reaction product.
摘要翻译： 一种在二氧化碳中进行催化反应的方法，包括使流体混合物与结合到聚合物上的催化剂接触，所述流体混合物包含至少一种反应物和二氧化碳，其中反应物与催化剂相互作用以形成反应产物。 物质组合物包含二氧化碳和存在于二氧化碳中的聚合物和反应物。 聚合物沿着聚合物的长度在多个链上结合有催化剂，并且其中反应物与催化剂相互作用以形成反应产物。
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106.发明授权公开(公告)号：US06743078B2
公开(公告)日：2004-06-01
申请号：US10447251
申请日：2003-05-28
IPC分类号： B24B100
CPC分类号： B24B57/02 , B24B37/042
摘要： Methods and apparatus for chemical mechanical planarization of an article such as a semiconductor wafer use polishing slurries including a carbon dioxide solvent or a carbon dioxide-philic composition. A carbon dioxide cleaning solvent step and apparatus may also be employed.
摘要翻译： 用于诸如半导体晶片的物品的化学机械平面化的方法和装置使用包括二氧化碳溶剂或二氧化碳亲油性组合物的抛光浆料。 还可以使用二氧化碳清洗溶剂步骤和装置。
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公开(公告)号：US06736996B1
公开(公告)日：2004-05-18
申请号：US09619993
申请日：2000-07-20
IPC分类号： C09K300
CPC分类号： C09D171/02 , B05D1/025 , B05D5/083 , C04B41/4842 , C04B41/5072 , C08G65/007 , Y10S526/942 , C04B41/4519
摘要： A method of protecting a civil infrastructure substrate from the damaging effects of pollution, noxious fumes, weather, and the like. The method comprises (a) providing a composition comprising carbon dioxide and a fluorocarbon such as a fluoropolyether (preferably a perfluoropolyether) or a fluorocarbon elastomer, optionally having at least one anchoring group such as an amide covalently joined thereto, and then (b) applying that composition to the civil infrastructure substrate to form a protective coating thereon. The applying step is preferably carried out by spraying. Compositions useful for carrying out the process of the invention are also disclosed.
摘要翻译： 一种保护民用基础设施基材免受污染，有害烟雾，天气等的破坏性影响的方法。 该方法包括（a）提供包含二氧化碳和氟碳化合物的组合物，例如氟聚醚（优选全氟聚醚）或氟碳弹性体，任选具有至少一个与其共价连接的锚定基团如酰胺，然后（b） 该组合物到民用基础设施基材上以在其上形成保护涂层。 施涂步骤优选通过喷雾进行。 还公开了可用于实施本发明方法的组合物。
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公开(公告)号：US06652920B2
公开(公告)日：2003-11-25
申请号：US10207294
申请日：2002-07-29
IPC分类号： B05D118
CPC分类号： D06B1/08 , B05D1/18 , B05D2401/90 , D06B3/10 , D06M23/00 , D06M23/10 , D06M23/105
摘要： A method of coating a substrate comprises immersing a surface portion of a substrate in a first phase comprising carbon dioxide and a coating component comprising a polymeric precursor; then withdrawing the substrate from the first phase into a distinct second phase so that the coating component is deposited on the surface portion; and then subjecting the substrate to conditions sufficient to polymerize the polymeric precursor and form a polymerized coating.
摘要翻译： 涂覆基材的方法包括将基材的表面部分浸入包含二氧化碳的第一相和包含聚合物前体的涂料组分; 然后将衬底从第一相中提取到不同的第二相中，使得涂层组分沉积在表面部分上; 然后使基底经受足以使聚合物前体聚合并形成聚合涂层的条件。
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公开(公告)号：US06641678B2
公开(公告)日：2003-11-04
申请号：US09951249
申请日：2001-09-13
IPC分类号： B08B300
CPC分类号： B08B7/0021 , C23G5/00 , H01L21/02063 , Y10S134/902 , Y10S438/906
摘要： A method of cleaning and removing water and entrained solutes during a manufacturing process from a microelectronic device such as a resist-coated semiconductor substrate, a MEM's device, or an optoelectronic device comprising the steps of: (a) providing a partially fabricated integrated circuit, MEM's device, or optoelectronic device having water and entrained solutes on the substrate; (b) providing a densified (e.g., liquid or supercritical) carbon dioxide drying composition, the cleaning composition comprising carbon dioxide, water, and, optionally but preferably, a cleaning adjunct; (c) immersing the surface portion in the densified carbon dioxide cleaning composition; and then (d) removing the cleaning composition from the surface portion.
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公开(公告)号：US06426391B1
公开(公告)日：2002-07-30
申请号：US09307107
申请日：1999-05-07
IPC分类号： C08F820
CPC分类号： C08J7/126 , C07B39/00 , C07C17/10 , C07C17/16 , C07J9/00 , C08F8/22 , Y02P20/544 , C07C22/00 , C07C23/10 , C07C19/08 , C07C22/08
摘要： A method of fluorinating a substance comprises providing a reaction mixture comprising a liquid or supercritical carbon dioxide reaction medium, a first reactant, and a second reactant, wherein the first reactant is a fluorinating reagent, and then contacting the first reactant and the second reactant in the carbon dioxide such that the first reactant fluorinates the second reactant.
摘要翻译： 氟化物质的方法包括提供包含液体或超临界二氧化碳反应介质，第一反应物和第二反应物的反应混合物，其中第一反应物是氟化试剂，然后使第一反应物和第二反应物接触 所述二氧化碳使得所述第一反应物氟化所述第二反应物。
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