Magnetic random access memory device and method of forming the same
    113.
    发明授权
    Magnetic random access memory device and method of forming the same 有权
    磁性随机存取存储器件及其形成方法

    公开(公告)号:US07645619B2

    公开(公告)日:2010-01-12

    申请号:US12073098

    申请日:2008-02-29

    IPC分类号: H01L21/00

    摘要: Example embodiments of the present invention disclose a semiconductor memory device and a method of forming a memory device. A semiconductor memory device may include a digit line disposed on a substrate, an intermediate insulating layer covering the digit line, a magnetic tunnel junction (MTJ) pattern disposed on the intermediate insulating layer and over the digit line, the MTJ pattern including a sequentially stacked lower magnetic pattern, upper magnetic pattern, and capping pattern, wherein the capping pattern does not react with the upper magnetic pattern at a temperature above about 280° C., and a bit line connected to the capping pattern and disposed to intersect the digit line. A method of forming a semiconductor memory device may include forming a digit line on a substrate, forming an intermediate insulating layer covering the digit line, forming a magnetic tunnel junction (MTJ) pattern on the intermediate insulating layer, the MTJ pattern including a sequentially stacked lower magnetic pattern, upper magnetic pattern, and capping pattern, wherein the capping pattern does not react with the upper magnetic pattern at a temperature above about 280° C., performing an annealing operation at a temperature of about 350° C. or higher, and forming a bit line connected to the capping pattern and disposed to intersect the digit line.

    摘要翻译: 本发明的示例性实施例公开了半导体存储器件和形成存储器件的方法。 半导体存储器件可以包括设置在衬底上的数字线,覆盖数字线的中间绝缘层,设置在中间绝缘层上方和数字线上的磁性隧道结(MTJ)图案,MTJ图案包括顺序堆叠 下磁性图案,上磁性图案和封盖图案,其中封盖图案在高于约280℃的温度下不与上磁性图案反应,而位线连接到封盖图案并且设置成与数字线相交 。 形成半导体存储器件的方法可以包括在衬底上形成数字线,形成覆盖数字线的中间绝缘层,在中间绝缘层上形成磁隧道结(MTJ)图案,MTJ图案包括顺序层叠的 较低的磁性图案,上部磁性图案和封盖图案,其中封盖图案在高于约280℃的温度下不与上部磁性图案反应,在约350℃或更高的温度下进行退火操作, 并且形成连接到所述封盖图案并且设置成与所述数字线相交的位线。

    Apparatus and Method for Verifying Pattern of Semiconductor Device
    115.
    发明申请
    Apparatus and Method for Verifying Pattern of Semiconductor Device 审中-公开
    用于验证半导体器件图案的装置和方法

    公开(公告)号:US20090110261A1

    公开(公告)日:2009-04-30

    申请号:US12133570

    申请日:2008-06-05

    申请人: Hyun Jo Yang

    发明人: Hyun Jo Yang

    IPC分类号: G06K9/00

    CPC分类号: G06F17/5081 G01R31/318364

    摘要: An apparatus and method for verifying the pattern of a semiconductor device provides for automatically detecting the leaning of pattern by using a design layout and the upper and the lower SEM (Scanning Electron Microscope) image of the pattern formed according to the design layout.

    摘要翻译: 用于验证半导体器件的图案的装置和方法通过使用根据设计布局形成的图案的设计布局和上和下扫描(扫描电子显微镜)图像来自动检测图案的倾斜。

    Apparatus for removing offset of phase locked loop circuit and method thereof
    117.
    发明授权
    Apparatus for removing offset of phase locked loop circuit and method thereof 失效
    用于去除锁相环电路偏移的装置及其方法

    公开(公告)号:US07496008B2

    公开(公告)日:2009-02-24

    申请号:US10892208

    申请日:2004-07-16

    IPC分类号: G11B7/00

    CPC分类号: H03L7/06

    摘要: An apparatus and a method removing offset of a Phase Lock Loop (PLL) circuit in a disc drive without using a disc when data playback is performed, the apparatus including an ENDEC module and a PLL circuit. The ENDEC module outputs a binary signal if an offset removal mode is set. The PLL circuit removes the offset of the PLL circuit by comparing a phase of the binary signal with a phase of a channel bit clock signal. Therefore, a time to remove the offset of the PLL circuit is reduced and the possibility not to remove the offset of the PLL circuit due to a damaged disc is prevented.

    摘要翻译: 该装置和方法在执行数据重放时不使用盘来去除磁盘驱动器中的锁相环(PLL)电路的偏移,该装置包括ENDEC模块和PLL电路。 如果设置了偏移消除模式,则ENDEC模块将输出二进制信号。 PLL电路通过将二进制信号的相位与通道位时钟信号的相位进行比较来消除PLL电路的偏移。 因此,减少了消除PLL电路的偏移的时间,并且防止了由于损坏的盘而导致的PLL电路偏移的可能性。

    EXPOSURE APPARATUS HAVING THE SAME ID BIAS
    118.
    发明申请
    EXPOSURE APPARATUS HAVING THE SAME ID BIAS 失效
    具有同一ID偏差的曝光装置

    公开(公告)号:US20090002672A1

    公开(公告)日:2009-01-01

    申请号:US11952448

    申请日:2007-12-07

    申请人: Hyun Jo Yang

    发明人: Hyun Jo Yang

    IPC分类号: G03B27/72

    CPC分类号: G03F7/70308

    摘要: An exposure apparatus includes an exposure light source generating light to be emitted to photomask, a projection lens for projecting the light having passed through the photomask to wafer, and a transmittance adjustment filter in projection lens the transmittance adjustment filter varies the transmittance of the light projected into the projection lens as a function of position in the projection lens.

    摘要翻译: 曝光装置包括产生要发射到光掩模的光的曝光光源,用于将通过光掩模的光投射到晶片的投影透镜,以及投影透镜中的透射率调节滤光器,透射率调节滤光器改变投影光的透射率 作为投影透镜中的位置的函数进入投影透镜。

    Hydraulic pump for vehicle
    119.
    发明申请
    Hydraulic pump for vehicle 审中-公开
    车用液压泵

    公开(公告)号:US20080145255A1

    公开(公告)日:2008-06-19

    申请号:US11784018

    申请日:2007-04-05

    申请人: Sok Hyun Jo

    发明人: Sok Hyun Jo

    IPC分类号: F03C2/08

    CPC分类号: F04C2/102 F04C15/0061

    摘要: A hydraulic pump for a vehicle includes: a block; a pulley receiving an engine torque and rotating; a pump housing attached to the block; an outer rotor mounted in the pump housing; an inner rotor mounted inside the outer rotor, with gear teeth at an interior surface thereof; a pinion gear engaged to the interior surface of the inner rotor; a planet carrier connected to and rotating the pinion gear and having a carrier drive shaft with an end fixedly connected to the pulley; and a sun gear engaged to the pinion gear and having a sun gear drive shaft, housed in the carrier drive shaft, and axially slidable. A first end of the sun gear drive shaft is attached to the carrier drive shaft under a first operating condition, and a second end of the sun gear drive shaft is attached to the block under a second operating condition.

    摘要翻译: 一种用于车辆的液压泵包括:一块; 一个接收发动机扭矩并旋转的滑轮; 附接到所述块的泵壳体; 安装在泵壳体中的外转子; 安装在外转子内部的内转子,其内表面具有齿轮齿; 与所述内转子的内表面接合的小齿轮; 连接到所述小齿轮并旋转所述小齿轮并具有托架驱动轴的行星架,所述托架驱动轴的端部固定地连接到所述滑轮; 以及与所述小齿轮接合并具有容纳在所述托架驱动轴中并具有轴向可滑动的太阳齿轮传动轴的太阳齿轮。 太阳齿轮传动轴的第一端在第一操作条件下附接到托架驱动轴,并且太阳齿轮传动轴的第二端在第二操作条件下附接到块。