公开(公告)号：US11754515B2

公开(公告)日：2023-09-12

申请号：US17442169

申请日：2020-01-08

Applicant: RIGAKU CORPORATION

Inventor： Naoki Matsushima ,  Kiyoshi Ogata ,  Sei Yoshihara ,  Yoshiyasu Ito ,  Kazuhiko Omote ,  Hiroshi Motono ,  Shigematsu Asano ,  Katsutaka Horada ,  Sensui Yasuda

IPC: G01N23/201 ,  G01N23/20016 ,  G01N23/20025

CPC classification number: G01N23/201 ,  G01N23/20016 ,  G01N23/20025 ,  G01N2223/054 ,  G01N2223/3306 ,  G01N2223/6116

Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.

公开(公告)号：US20180328868A1

公开(公告)日：2018-11-15

申请号：US15974962

申请日：2018-05-09

Applicant: KLA-Tencor Corporation

Inventor： Alexander Bykanov ,  Nikolay Artemiev ,  Joseph A. Di Regolo ,  Antonio Gellineau ,  Alexander Kuznetsov ,  Andrei Veldman ,  John Hench

IPC: G01N23/201 ,  H01L21/67 ,  G01N23/205 ,  H01L21/68 ,  G01N23/207 ,  H01L21/687

CPC classification number: G01N23/201 ,  G01N23/205 ,  G01N23/207 ,  G01N2223/6116 ,  H01L21/67259 ,  H01L21/67282 ,  H01L21/67288 ,  H01L21/681 ,  H01L21/68764

Abstract: Methods and systems for positioning a specimen and characterizing an x-ray beam incident onto the specimen in a Transmission, Small-Angle X-ray Scatterometry (T-SAXS) metrology system are described herein. A specimen positioning system locates a wafer vertically and actively positions the wafer in six degrees of freedom with respect to the x-ray illumination beam without attenuating the transmitted radiation. In some embodiments, a cylindrically shaped occlusion element is scanned across the illumination beam while the detected intensity of the transmitted flux is measured to precisely locate the beam center. In some other embodiments, a periodic calibration target is employed to precisely locate the beam center. The periodic calibration target includes one or more spatially defined zones having different periodic structures that diffract X-ray illumination light into distinct, measurable diffraction patterns.

公开(公告)号：US09927336B2

公开(公告)日：2018-03-27

申请号：US14405253

申请日：2013-06-04

Applicant: CORNELL UNIVERSITY

Inventor： Stephen P. Meisberger ,  Matthew A. Warkentin ,  Jesse B. Hopkins ,  Andrea M. Katz ,  Lois Pollack ,  Robert E. Thorne

IPC: G01N23/00 ,  G01N1/42 ,  G01N23/201

CPC classification number: G01N1/42 ,  G01N23/201 ,  G01N2223/3103

Abstract: Apparatus and methods for performing small angle X-ray scattering (SAXS) at low (cryogenic) temperatures for determining the structure of and changes in the structure of proteins, DNA, RNA, and other biological molecules and biomolecular assemblies and structures. A cryogenic, small angle X-ray scattering (SAXS) application sample holder, includes a sample cell including a base portion and at least two parallel walls disposed on the base, wherein the sample cell has a liquid volume capacity defined by the walls and the base portion of 0.001 to 10 microliters. A method for performing cryogenic SAXS on a sample includes the steps of providing a sample biomolecule solution containing an aqueous buffer, a biomolecule, and a cryoprotectant agent, wherein the cryoprotectant agent comprises up to 60% (w/w) of the biomolecule solution, and other known components as necessary to solubilize and stabilize the biomolecule, in a sample holder of claim 1, cryogenically cooling the sample solution in the sample holder at a rate equal to or greater than 100 K/sec without ice formation, and examining the cooled sample using small angle X-ray scattering by passing a beam of X-rays through the sample.

公开(公告)号：US09874531B2

公开(公告)日：2018-01-23

申请号：US14712917

申请日：2015-05-15

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC: G01N23/20 ,  G01N23/201 ,  A61B6/00 ,  G21K1/02 ,  H01J35/08

CPC classification number: G01N23/20075 ,  A61B6/4007 ,  A61B6/4291 ,  A61B6/484 ,  A61B6/508 ,  G01N23/201 ,  G21K1/02 ,  G21K2207/005 ,  H01J35/08 ,  H01J2235/086

Abstract: Periodic spatial patterns of x-ray illumination are used to gather information about periodic objects. The structured illumination may be created using the interaction of a coherent or partially coherent x-ray source with a beam splitting grating to create a Talbot interference pattern with periodic structure. The object having periodic structures to be measured is then placed into the structured illumination, and the ensemble of signals from the multiple illumination spots is analyzed to determine various properties of the object and its structures. Applications to x-ray absorption/transmission, small angle x-ray scattering, x-ray fluorescence, x-ray reflectance, and x-ray diffraction are all possible using the method of the invention.

公开(公告)号：US20180010051A1

公开(公告)日：2018-01-11

申请号：US15545408

申请日：2016-02-09

Applicant: Neste Oyj

Inventor： Petri LINDQVIST ,  Tuula LEHTIMAA ,  Väinö SIPPOLA ,  Olli-Pekka LEHTINEN ,  Gerard FAAIJ

IPC: C10G3/00 ,  B01D3/14 ,  G01N23/201 ,  C11B1/04

CPC classification number: C10G3/46 ,  B01D3/14 ,  C10G3/50 ,  C10G2300/1014 ,  C10G2300/1018 ,  C11B1/04 ,  G01N23/201 ,  Y02P30/20

Abstract: This disclosure relates to the field of renewable oil compositions and to the use of renewable oil compositions for production of hydrocarbon compositions, which can be used for traffic fuels and other solutions. An exemplary composition contains free fatty acids and triglycerides, in a concentration of free fatty acids from 15 wt-% to 80 wt-% and a remainder being predominantly triglycerides. A method for producing hydrocarbons from a renewable oil feedstock, in which the feedstock which contains free fatty acids from 15 wt-% to 80 wt-%, and a remainder being predominantly triglycerides, is subjected to a pretreatment process followed by a hydrotreatment process for obtaining hydrocarbons.

公开(公告)号：US20170362304A1

公开(公告)日：2017-12-21

申请号：US15503441

申请日：2015-08-20

Applicant: CHUGAI SEIYAKU KABUSHIKI KAISHA

Inventor： Masakazu Fukuda ,  Akira Hayasaka ,  Tomoyuki Igawa ,  Atsuhiko Maeda ,  Machiko Fujino

IPC: C07K16/00 ,  G01N11/00 ,  G01N23/201 ,  C07K16/28 ,  C07K16/30 ,  C07K16/36

CPC classification number: C07K16/00 ,  C07K16/18 ,  C07K16/2866 ,  C07K16/303 ,  C07K16/36 ,  C07K2317/24 ,  C07K2317/31 ,  C07K2317/90 ,  C07K2317/94 ,  G01N11/00 ,  G01N23/201

Abstract: The inventors discovered that viscosity of a protein solution can be estimated by measuring the apparent particle size or apparent molecular weight by a small angle X-ray scattering (SAXS) method or X-ray solution scattering method, which enables measurement of small amounts of samples, and then correlating those measurement results with viscosity of the protein solution.

公开(公告)号：US09693439B1

公开(公告)日：2017-06-27

申请号：US14304329

申请日：2014-06-13

Applicant: KLA-Tencor Corporation

Inventor： Guorong V. Zhuang ,  Michael S. Bakeman ,  Andrei V. Shchegrov ,  Jonathan M. Madsen

IPC: H05G2/00 ,  G01N23/201

CPC classification number: H05G2/005 ,  G01N23/201 ,  G21K1/06 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H05G2/008

Abstract: Methods and systems for realizing a high brightness liquid metal droplet based x-ray source suitable for high throughput x-ray metrology are presented herein. A high power laser bombards a solid target material to generate liquid metal droplets. The laser generated liquid metal droplets are excited with a focused, high power excitation beam such as an electron or laser beam. The excitation beam is synchronized with the stream of liquid metal droplets stimulated by the high power laser to achieve a stable x-ray emission generated by the excited liquid metal droplets. In some embodiments, x-ray optics are designed to efficiently collect and focus radiation within a desired emission band onto a measurement target. Reliability is improved by shielding the excitation source and the x-ray optics from the region of interaction between the excitation beam and the liquid metal droplet anode by a localized curtain of shielding gas.

公开(公告)号：US20170176354A1

公开(公告)日：2017-06-22

申请号：US15451104

申请日：2017-03-06

Applicant: Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

Inventor： Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

IPC: G01N23/201

CPC classification number: G01N23/201 ,  G01N2223/054 ,  H01L22/12

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

公开(公告)号：US09588066B2

公开(公告)日：2017-03-07

申请号：US14161942

申请日：2014-01-23

Applicant: Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

Inventor： Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

IPC: G01N23/201 ,  H01L21/66

CPC classification number: G01N23/201 ,  G01N2223/054 ,  H01L22/12

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Abstract translation: 公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。 例如，通过X射线反射散射法测量样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个 入射角和多个方位角。 该方法还涉及收集散射的X射线束的至少一部分。

公开(公告)号：US20170010226A1

公开(公告)日：2017-01-12

申请号：US15114209

申请日：2015-02-02

Applicant: RIGAKU CORPORATION

Inventor： Kazuhiko Omote ,  Kazuki Ito

IPC: G01N23/201 ,  G21K1/06

CPC classification number: G01N23/201 ,  G01N2223/054 ,  G01N2223/056 ,  G01N2223/315 ,  G21K1/06 ,  G21K1/10

Abstract: A micro beam generation unit capable of simultaneously capturing anisotropic images in a high signal-to-background ratio with a compact configuration and an X-ray small-angle scattering apparatus are provided. A micro beam generation unit 110 generates X-rays having a micro spot size, with which a sample is irradiated, in order to detect diffracted X-rays by a one-dimensional detector or a two-dimensional detector. The micro beam generation unit 110 includes a slit 115 that is provided on an X-ray optical path and reshapes X-rays into parallel beams, and two channel-cut monochromator crystals 117 and 118 that are arranged in arrangement of (+, −, −, +) and remove parasitic scattering of parallel beams reshaped by the slit. Accordingly, it is possible to simultaneously obtain anisotropic images in a high signal-to-background ratio with a compact configuration.

Abstract translation: 提供了一种能够以紧凑型配置和X射线小角度散射装置同时捕获高信号到背景比的各向异性图像的微光束产生单元。 为了通过一维检测器或二维检测器检测衍射X射线，微光束产生单元110产生具有照射样品的微点尺寸的X射线。 微光束产生单元110包括设置在X射线光路上并将X射线成为平行光束的狭缝115，以及排列成（+， - ， - ）的两个通道切割单色仪晶体117和118， - ，+），并消除由狭缝重新形成的平行光束的寄生散射。 因此，可以以紧凑的结构同时获得高信号到背景比的各向异性图像。