公开(公告)号：US20090255555A1

公开(公告)日：2009-10-15

申请号：US12082750

申请日：2008-04-14

Applicant: Roman Gouk ,  Chung-Huan Jeon ,  Zhiyong Li ,  Madhava Rao Yalamanchili ,  James S. Papanu

Inventor： Roman Gouk ,  Chung-Huan Jeon ,  Zhiyong Li ,  Madhava Rao Yalamanchili ,  James S. Papanu

IPC: B08B3/12 ,  B08B13/00

CPC classification number: B08B3/12 ,  B08B3/02 ,  B08B7/028 ,  G03F1/82 ,  H01L21/67051

Abstract: A method and apparatus for cleaning a workpiece are disclosed. A gas and cleaning solution are supplied to an atomizing nozzle which atomizes the cleaning solution and sprays the top surface of a workpiece with an atomized spray. A liquid having a controlled gas content is flowed to the top surface of the workpiece from a rinse nozzle. Megasonic energy is applied from the backside of the workpiece.

Abstract translation: 公开了一种用于清洁工件的方法和设备。 将气体和清洁溶液供应到雾化喷嘴，该雾化喷嘴使清洁溶液雾化并用雾化喷雾喷射工件的顶表面。 具有受控气体含量的液体从冲洗喷嘴流到工件的顶表面。 从工件的背面施加超声波能量。

公开(公告)号：US20090245718A1

公开(公告)日：2009-10-01

申请号：US12253123

申请日：2008-10-16

Applicant: Zhiyong Li ,  Michael Tan ,  Shih-Yuan Wang ,  Wei Wu ,  Jing Tang

Inventor： Zhiyong Li ,  Michael Tan ,  Shih-Yuan Wang ,  Wei Wu ,  Jing Tang

IPC: G02B6/00

CPC classification number: G02B6/02328 ,  B82Y20/00 ,  G01N21/05 ,  G01N21/31 ,  G01N21/645 ,  G01N21/658 ,  G01N2021/0346 ,  G01N2021/052 ,  G01N2021/6467 ,  G01N2021/7763 ,  G01N2021/7783 ,  G02B6/1226

Abstract: An optical sensor, sensing system and method of sensing employ a half-core hollow optical waveguide adjacent to a surface of an optical waveguide layer of a substrate. The half-core hollow optical waveguide and the adjacent optical waveguide layer cooperatively provide both an optical path that confines and guides an optical signal and an internal hollow channel. The optical path and channel extend longitudinally along a hollow core of the half-core hollow optical waveguide. The system further includes an optical source at an input of the optical path and an optical detector at an output of the optical path. A spectroscopic interaction between an analyte material that is introduced into the channel and an optical signal propagating along the optical path determines a characteristic of the analyte material.

Abstract translation: 光学传感器，感测系统和感测方法使用与衬底的光波导层的表面相邻的半芯空心光波导。 半芯空心光波导和相邻的光波导层协同地提供限制和引导光信号和内部中空通道的光路。 光路和通道沿半芯空心光波导的中空芯纵向延伸。 该系统还包括在光路的输入处的光源和在光路的输出处的光学检测器。 引入到通道中的分析物质与沿光路传播的光信号之间的光谱相互作用决定了分析物质的特性。

公开(公告)号：US07507293B2

公开(公告)日：2009-03-24

申请号：US11096669

申请日：2005-03-31

Applicant: Zhiyong Li ,  R. Stanley Williams ,  M. Saif Islam ,  Philip J. Kuekes

Inventor： Zhiyong Li ,  R. Stanley Williams ,  M. Saif Islam ,  Philip J. Kuekes

IPC: C30B25/02

CPC classification number: C30B11/12 ,  B82Y10/00 ,  B82Y30/00 ,  C30B11/00 ,  C30B29/605 ,  Y10S977/762 ,  Y10S977/813

Abstract: Fabrication of a photonic crystal is described. A patterned array of nanowires is formed, the nanowires extending outward from a surface, the nanowires comprising a catalytically grown nanowire material. Spaces between the nanowires are filled with a slab material, the patterned array of nanowires defining a patterned array of channels in the slab material. The nanowire material is then removed from the channels.

Abstract translation: 描述了光子晶体的制造。 形成纳米线的图案阵列，纳米线从表面向外延伸，纳米线包含催化生长的纳米线材料。 在纳米线之间的空间填充有板坯材料，图案化的纳米线阵列在板坯材料中限定了图案化的通道阵列。 然后从通道中除去纳米线材料。

公开(公告)号：US07474396B2

公开(公告)日：2009-01-06

申请号：US11257073

申请日：2006-01-17

Applicant: Wei Wu ,  Zhiyong Li ,  Shih-Yuan Wang

Inventor： Wei Wu ,  Zhiyong Li ,  Shih-Yuan Wang

IPC: G01J3/44 ,  G01J3/00

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0227 ,  G01J3/0256 ,  G01J3/18 ,  G01N21/65 ,  G01N21/658 ,  G02B5/1809

Abstract: A Raman spectroscopy system is disclosed which includes a sub-wavelength resonant grating filter and a photodiode with integrated sub-wavelength resonant grating filter are disclosed. The resonant grating filter comprises an array of diffraction elements having a periodic spacing that is less than the wavelength of radiation to be filtered and which are formed over a waveguide layer. The filter, which can reject a specific wavelength of radiation, can be placed between a Raman sample and a Raman detector in order to filter radiation that is elastically scattered from the sample while transmitting other wavelengths. The wavelength rejected by the filter can be selected by tilting the filter with respect to the radiation incident upon the filter.

Abstract translation: 公开了一种拉曼光谱系统，其包括亚波长谐振光栅滤光器和具有集成子波长谐振光栅滤光器的光电二极管。 谐振光栅滤波器包括衍射元件的阵列，其具有小于待滤波的辐射的波长并且在波导层上形成的周期性间隔。 可以将能够抑制特定波长的辐射的滤光器放置在拉曼样品和拉曼检测器之间，以便过滤从样品弹性散射的辐射，同时传输其他波长。 可以通过使过滤器相对于入射到过滤器上的辐射倾斜来选择由过滤器拒绝的波长。

公开(公告)号：US20080218740A1

公开(公告)日：2008-09-11

申请号：US12074133

申请日：2008-02-29

Applicant: R. Stanley Williams ,  Shih-Yuan Wang ,  Philip J. Kuekes ,  Theodore I. Kamins ,  Duncan Stewart ,  Alexandre M. Bratkovski ,  Jason Blackstock ,  Zhiyong Li

Inventor： R. Stanley Williams ,  Shih-Yuan Wang ,  Philip J. Kuekes ,  Theodore I. Kamins ,  Duncan Stewart ,  Alexandre M. Bratkovski ,  Jason Blackstock ,  Zhiyong Li

IPC: G01N21/00

CPC classification number: H01L33/18 ,  B82Y20/00 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/068 ,  H01L33/06 ,  H01L33/08 ,  H01S5/341 ,  H01S5/4031

Abstract: Embodiments of the present invention are related to nanowire-based devices that can be configured and operated as modulators, chemical sensors, and light-detection devices. In one aspect, a nanowire-based device includes a reflective member, a resonant cavity surrounded by at least a portion of the reflective member, and at least one nanowire disposed within the resonant cavity. The nanowire includes at least one active segment selectively disposed along the length of the nanowire to substantially coincide with at least one antinode of light resonating within the cavity. The active segment can be configured to interact with the light resonating within the cavity.

Abstract translation: 本发明的实施例涉及可以配置和操作为调制器，化学传感器和光检测装置的基于纳米线的器件。 在一个方面，基于纳米线的器件包括反射部件，由反射部件的至少一部分包围的谐振腔以及设置在谐振腔内的至少一个纳米线。 纳米线包括至少一个有源区段，沿着纳米线的长度选择性地设置，以与腔内谐振的至少一个光波导基本重合。 活动段可以被配置为与腔内共振的光相互作用。

公开(公告)号：US20080193359A1

公开(公告)日：2008-08-14

申请号：US11707601

申请日：2007-02-13

Applicant: Zhaoning Yu ,  Zhiyong Li ,  Wei Wu ,  Shih-Yuan Wang ,  R. Stanley Williams

Inventor： Zhaoning Yu ,  Zhiyong Li ,  Wei Wu ,  Shih-Yuan Wang ,  R. Stanley Williams

IPC: C01B21/068

CPC classification number: C30B29/10 ,  C30B29/60

Abstract: Various embodiments of the present invention are directed to methods of forming single-crystal metal-silicide nanowires and resulting nanowire structures. In one embodiment of the present invention, a method of fabricating nanowires is disclosed. In the method, a number of nanowire-precursor members are formed. Each of the nanowire-precursor members includes a substantially single-crystal silicon region and a polycrystalline- metallic region. The substantially single-crystal silicon region and the polycrystalline-metallic region of each of the nanowire-precursor members is reacted to form corresponding substantially single-crystal metal-silicide nanowires. In another embodiment of the present invention, a nanowire structure is disclosed. The nanowire structure includes a substrate having an electrically insulating layer. A number of substantially single-crystal metal-silicide nanowires are positioned on the electrically insulating layer.

Abstract translation: 本发明的各种实施方案涉及形成单晶金属硅化物纳米线和所得纳米线结构的方法。 在本发明的一个实施例中，公开了一种制造纳米线的方法。 在该方法中，形成许多纳米线前体部件。 每个纳米线前体构件包括大致单晶硅区域和多晶金属区域。 每个纳米线前体部件的大致单晶硅区域和多晶金属区域反应形成对应的基本单晶金属硅化物纳米线。 在本发明的另一个实施方案中，公开了一种纳米线结构。 纳米线结构包括具有电绝缘层的衬底。 大量单晶金属硅化物纳米线位于电绝缘层上。

公开(公告)号：US20080099929A1

公开(公告)日：2008-05-01

申请号：US11590492

申请日：2006-10-30

Applicant: Zhiyong Li ,  Warren Robinett

Inventor： Zhiyong Li ,  Warren Robinett

IPC: H01L23/52 ,  H01L21/44

CPC classification number: G11C5/06 ,  B82B1/00 ,  B82B3/00 ,  B82Y10/00 ,  B82Y40/00 ,  G11C5/12 ,  G11C2213/81 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/0676 ,  H01L29/068 ,  H01L51/0595 ,  Y10S977/762 ,  Y10S977/94

Abstract: Certain embodiments of the present invention are directed to a method of fabricating a mixed-scale electronic interface. A substrate is provided with a first set of conductive elements. A first layer of nanowires may be formed over the first set of conductive elements. A number of channels may be formed, with each of the channels extending diagonally through a number of the nanowires of the first layer. A number of pads may be formed, each of which is electrically interconnected with an underlying conductive element of the first set of conductive elements and one or more adjacent nanowires of the first layer of nanowires. The pads and corresponding electrically interconnected nanowires define a number of pad-interconnected-nanowire-units. Additional embodiments are directed to a method of forming a nanoimprinting mold and a method of selectively programming nanowire-to-conductive element electrical connections.

Abstract translation: 本发明的某些实施例涉及一种制造混合比例电子接口的方法。 衬底设置有第一组导电元件。 可以在第一组导电元件上形成第一层纳米线。 可以形成多个通道，其中每个通道对角地延伸穿过第一层的多个纳米线。 可以形成多个焊盘，每个焊盘与第一组导电元件的下面的导电元件和第一纳米线层的一个或多个相邻的纳米线电互连。 焊盘和相应的电互连纳米线限定了多个衬垫互连的纳米线单元。 另外的实施例涉及形成纳米压印模具的方法和选择性地编程纳米线至导电元件电连接的方法。

公开(公告)号：US20080093217A1

公开(公告)日：2008-04-24

申请号：US11584678

申请日：2006-10-20

Applicant: Wei Wu ,  R. Stanley Williams ,  Shih-Yuan Wang ,  Philip J. Kuekes ,  Zhiyong Li

Inventor： Wei Wu ,  R. Stanley Williams ,  Shih-Yuan Wang ,  Philip J. Kuekes ,  Zhiyong Li

IPC: G01N27/26

CPC classification number: G01N21/658

Abstract: A method of forming a plurality of NERS-active structures is disclosed. Particularly, a substrate having a surface and a liquid including nanoparticles is deposited on at least a portion of the surface of the substrate. At least one electric field may be generated proximate to the surface and at least a portion of the nanoparticles may be arranged via the electric field. A system includes at least two electrodes configured for producing at least one electric field for substantially arranging nanoparticles substantially according to a selected pattern. A NERS-active structure includes a substrate and a plurality of features located at predetermined positions on a surface of the substrate and at least one NERS-active nanoparticle at least partially embedded therein.

Abstract translation: 公开了一种形成多个NERS-活性结构的方法。 特别地，具有表面和包含纳米颗粒的液体的基底沉积在基底表面的至少一部分上。 可以在表面附近产生至少一个电场，并且可以经由电场布置至少一部分纳米颗粒。 一种系统包括至少两个电极，所述至少两个电极被配置用于产生至少一个电场，用于基本上根据所选择的图案基本上布置纳米颗粒。 NERS活性结构包括基底和位于基底表面上的预定位置的多个特征以及至少部分地嵌入其中的至少一个NERS-活性纳米颗粒。

公开(公告)号：US20080053486A1

公开(公告)日：2008-03-06

申请号：US11891339

申请日：2007-08-09

Applicant: Jianshe Tang ,  Wei Lu ,  Zhiyong Li ,  Bo Xie ,  Alexander Ko

Inventor： Jianshe Tang ,  Wei Lu ,  Zhiyong Li ,  Bo Xie ,  Alexander Ko

IPC: B08B3/02

CPC classification number: B08B3/04 ,  B08B3/02 ,  H01L21/67028

Abstract: A semiconductor substrate processing apparatus and a method for processing semiconductor substrates are provided. The semiconductor substrate processing apparatus may include a liquid container where a semiconductor substrate may be immersed in a semiconductor processing liquid. The semiconductor substrate may then be removed from the semiconductor processing liquid while vapor is directed at a surface of the semiconductor substrate where the semiconductor substrate contacts a surface of the processing liquid.

Abstract translation: 提供半导体衬底处理设备和半导体衬底的处理方法。 半导体基板处理装置可以包括其中半导体基板可以浸入半导体处理液体中的液体容器。 然后可以从半导体处理液体中去除半导体衬底，同时蒸汽指向半导体衬底的半导体衬底接触处理液表面的表面。

公开(公告)号：US20070252981A1

公开(公告)日：2007-11-01

申请号：US11413877

申请日：2006-04-27

Applicant: Sean Spillane ,  Raymond Beausoleil ,  Zhiyong Li ,  Duncan Stewart

Inventor： Sean Spillane ,  Raymond Beausoleil ,  Zhiyong Li ,  Duncan Stewart

IPC: G01J3/44 ,  G01N21/66

CPC classification number: G01J3/44 ,  G01N21/658

Abstract: Raman-enhancing structures include a photonic crystal having a resonant cavity and at least one waveguide coupled to the resonant cavity. A nanostructure comprising a Raman-enhancing material is disposed proximate the resonant cavity of the photonic crystal. Raman-enhancing structures include a microdisk resonator, at least one waveguide coupled to the microdisk resonator, and a nanostructure comprising a Raman-enhancing material disposed proximate the microdisk resonator. Methods for performing Raman spectroscopy include generating radiation, guiding the radiation through a waveguide to a resonant cavity in a photonic crystal or a microdisk resonator, resonating the radiation in the resonant cavity or microdisk resonator, providing an analyte proximate the resonant cavity or microdisk resonator, subjecting the analyte to the resonating radiation, and detecting Raman scattered radiation.

Abstract translation: 拉曼增强结构包括具有谐振腔和耦合到谐振腔的至少一个波导的光子晶体。 包含拉曼增强材料的纳米结构设置在光子晶体的谐振腔附近。 拉曼增强结构包括微盘谐振器，耦合到微盘谐振器的至少一个波导和包括靠近微盘谐振器设置的拉曼增强材料的纳米结构。 用于执行拉曼光谱的方法包括产生辐射，将辐射通过波导引导到光子晶体或微盘谐振器中的谐振腔，谐振谐振腔或微盘谐振器中的辐射，提供靠近谐振腔或微盘谐振器的分析物， 对分析物进行共振辐射，并检测拉曼散射辐射。