Gas detector, gas detection method and optical component

    公开(公告)号:US09791366B2

    公开(公告)日:2017-10-17

    申请号:US14784548

    申请日:2014-04-08

    Abstract: A gas detector (10) includes a cell internal space (130) into which a target gas is supplied, the target gas exhibiting an absorption peak in an absorption spectrum; a light source (410) configured to generate light having at least a wavelength belonging to the absorption peak; and a photodetector (420) configured to detect the light that has emitted from the light source (410) and has propagated through the cell internal space (130). The gas detector (10) further includes a conductive thin film (220) in which a plurality of optical apertures (222) are regularly arranged such that a transmission peak in a transmission spectrum is superimposed over the absorption peak in the absorption spectrum along a wavelength axis. The conductive thin film (220) is provided on an optical path extending from the light source (410) to the photodetector (420), and is provided so as to be contactable with the target gas within the cell internal space (130).

    OBSERVATION APPARATUS AND METHOD FOR SHARPENING FINAL IMAGE

    公开(公告)号:US20170131210A1

    公开(公告)日:2017-05-11

    申请号:US15410828

    申请日:2017-01-20

    Inventor: Hiroya FUKUYAMA

    Abstract: Acquiring a sharp final image by preventing, even when an intermediate image is formed at a position overlapping an optical element, a flaw or the like on the optical element from being superimposed on the intermediate image. An observation apparatus including: an image-forming optical system having image-forming lenses that form a final image and an intermediate image, a first phase modulator that applies a spatial disturbance to the wavefront of light, and a second phase modulator that cancels out the spatial disturbance; a light source; an XY-scanning part including a first and a second scanner; and a photodetector. The two phase modulators are disposed at positions optically conjugate with the first scanner and have one-dimensional phase-distribution characteristics changing in the scanning direction of the illumination light.

    Enhanced Surface Plasmon Resonance method

    公开(公告)号:US09632022B2

    公开(公告)日:2017-04-25

    申请号:US14382334

    申请日:2013-03-05

    Applicant: BIOSURFIT S.A.

    Abstract: The disclosure relates to processing SPR signals, in particular signals obtained by illuminating a conductive surface with light at two wavelengths. Processing SPR signals can involve processing a first and second signal indicative of an intensity of light, received from a conductive layer at which SPR has occurred, as a function of angle of incidence, reflection or diffraction at the layer. The first and second signals each have two dips corresponding to a respective wavelength of the light at a respective angle at which surface plasmon resonance occurs for the respective wavelength and a peak between the two dips. The processing includes deriving a first and second value of a quantity indicative of signal magnitudes in the region of the peak. The first and second values can be compared to detect a change in refractive index at the layer after the first signal and before the second signal was captured.

    3D inspection using cameras and projectors with multiple-line patterns
    179.
    发明授权
    3D inspection using cameras and projectors with multiple-line patterns 有权
    使用具有多行图案的相机和投影机进行3D检查

    公开(公告)号:US09170207B2

    公开(公告)日:2015-10-27

    申请号:US13190195

    申请日:2011-07-25

    Abstract: An installation of optical inspection of integrated circuits or the like includes a photographic system placed above a scene in a plane defined by a first and a second direction, the photographic system having several digital cameras each having an orthogonal array of pixels, all cameras having their respective optical axes inclined by a first angle with respect to a third direction perpendicular to the two others; and two projectors of determined patterns, these patterns being such that two straight lines projected by each of the projectors are aligned in the plane defined by the first two directions and are coplanar with a straight line interconnecting the optical centers of the two projectors.

    Abstract translation: 集成电路等的光学检查的安装包括放置在由第一和第二方向限定的平面中的场景之上的摄影系统,该摄影系统具有多个数字照相机,每个摄像系统具有正交的像素阵列,所有照相机具有它们的 相应的光轴相对于垂直于另外两个的第三方向倾斜第一角度; 以及具有确定图案的两个投影仪,这些图案使得由每个投影仪投影的两条直线在由前两个方向限定的平面中对准,并且与连接两个投影仪的光学中心的直线共面。

    ENHANCED SURFACE PLASMON RESONANCE METHOD
    180.
    发明申请
    ENHANCED SURFACE PLASMON RESONANCE METHOD 有权
    增强表面等离子体共振方法

    公开(公告)号:US20150109614A1

    公开(公告)日:2015-04-23

    申请号:US14382334

    申请日:2013-03-05

    Applicant: BIOSURFIT S.A.

    Abstract: The disclosure relates to processing SPR signals, in particular signals obtained by illuminating a conductive surface with light at two wavelengths. Processing SPR signals can involve processing a first and second signal indicative of an intensity of light, received from a conductive layer at which SPR has occurred, as a function of angle of incidence, reflection or diffraction at the layer. The first and second signals each have two dips corresponding to a respective wavelength of the light at a respective angle at which surface plasmon resonance occurs for the respective wavelength and a peak between the two dips. The processing includes deriving a first and second value of a quantity indicative of signal magnitudes in the region of the peak. The first and second values can be compared to detect a change in refractive index at the layer after the first signal and before the second signal was captured.

    Abstract translation: 本公开涉及处理SPR信号,特别是通过用两个波长的光照射导电表面而获得的信号。 处理SPR信号可以涉及处理表示从已经发生SPR的导电层接收的光的强度的第一和第二信号作为该层处的入射角,反射或衍射的函数。 第一和第二信号各自具有对应于在相应波长的相应波长处的两个倾斜,在该角度处,针对相应波长发生表面等离子体共振并且在两个下降之间产生峰值。 该处理包括导出指示峰值区域中的信号幅度的量的第一值和第二值。 可以比较第一和第二值以检测第一信号之后的层和第二信号被捕获之前的折射率的变化。

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