Wavefront correction of light beam
    182.
    发明授权
    Wavefront correction of light beam 有权
    光束波前校正

    公开(公告)号:US08716677B2

    公开(公告)日:2014-05-06

    申请号:US13353029

    申请日:2012-01-18

    Applicant: Meng Cui

    Inventor: Meng Cui

    Abstract: An apparatus includes a transverse scanning optical system in the path of a first light beam traveling along a first optic axis; a wavefront correction system in the path of a second light beam traveling along a second optic axis, the wavefront correction system including a wavefront correction device having a spatial phase profile on its surface; a beam combiner that receives the first light beam and the second light beam and outputs an interference beam having a beat frequency equal to a difference frequency between the first light beam and second light beam; and a detection system placed relative to a random scattering medium, which is in the path of the interference beam. The detection system detects measurement light produced by the random scattering medium while the interference beam strikes the random scattering medium.

    Abstract translation: 一种装置包括在沿着第一光轴行进的第一光束的路径中的横向扫描光学系统; 所述波前校正系统包括沿着第二光轴行进的第二光束的路径中的波前校正系统,所述波前校正系统包括在其表面上具有空间相位轮廓的波前校正装置; 接收第一光束和第二光束并且输出具有等于第一光束和第二光束之间的差分频率的拍频的干涉光束的光束组合器; 以及相对于在干涉光束的路径中的随机散射介质放置的检测系统。 检测系统检测由随机散射介质产生的测量光,同时干涉光束照射随机散射介质。

    INTERFEROMETER, OPTICAL ASSEMBLY AND METHOD OF MOUNTING SAME
    184.
    发明申请
    INTERFEROMETER, OPTICAL ASSEMBLY AND METHOD OF MOUNTING SAME 有权
    干涉仪,光学装置及其安装方法

    公开(公告)号:US20140029009A1

    公开(公告)日:2014-01-30

    申请号:US13560510

    申请日:2012-07-27

    Abstract: A frame for optics used in interferometers that may include different materials having substantially similar, identical, or as close as practicable coefficients of thermal expansion from the material(s) used to make the beamsplitter and/or compensator without warping, bending, tilting or distorting the optics. The beamsplitter and/or compensator are mounted onto the frame of the interferometer using a three-point method of mounting, preferably using three pins for each component. Preferably, the pins are made of the same material as the beamsplitter and compensator, and all three components are made of Potassium Bromide (“KBr”) or Calcium Fluoride (“CaF2”) such that the optic instrument can operate to scan into the mid or far infrared. Stability in optical alignment is therefore achieved without requiring the optic instrument include only one material. The invention provides stability in situations where it is not possible to utilize a single material for every component of the interferometer.

    Abstract translation: 用于干涉仪的光学框架可以包括不同材料,其具有与用于制造分束器和/或补偿器的材料的实际可能的热膨胀系数基本相似,相同或相近的材料,而没有翘曲,弯曲,倾斜或变形 光学。 分束器和/或补偿器使用三点安装方法安装在干涉仪的框架上,优选地,每个部件使用三个引脚。 优选地,销由与分束器和补偿器相同的材料制成,并且所有三个部件由溴化钾(“KBr”)或氟化钙(“CaF 2”)制成,使得光学仪器可以操作以扫描到中间 或远红外线。 因此,在不需要光学仪器仅包括一种材料的情况下实现光学对准的稳定性。 本发明在不可能对干涉仪的每个部件使用单一材料的情况下提供稳定性。

    METHOD AND SYSTEM FOR MEASURING PATTERNED STRUCTURES
    186.
    发明申请
    METHOD AND SYSTEM FOR MEASURING PATTERNED STRUCTURES 审中-公开
    用于测量图形结构的方法和系统

    公开(公告)号:US20140009760A1

    公开(公告)日:2014-01-09

    申请号:US14021765

    申请日:2013-09-09

    Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure

    Abstract translation: 提出了一种用于确定图案化结构中的线轮廓的方法和系统,其目的在于控制该结构的制造过程。 图案化结构包括多个不同的层,结构中的图案由图案化区域和未图案化区域形成。 进行至少第一次和第二次测量,每次利用具有在一定入射角度指向结构的入射光的宽波长带的结构照明,检测从该结构返回的光的光谱特性,以及产生测量 数据代表。 分析通过第一测量获得的测量数据,从而确定结构的至少一个参数。 然后,利用该确定的参数,同时分析通过第二测量获得的测量数据,使得能够确定结构的轮廓

    Spectrometric Instrument
    188.
    发明申请
    Spectrometric Instrument 有权
    光谱仪

    公开(公告)号:US20130188192A1

    公开(公告)日:2013-07-25

    申请号:US13583534

    申请日:2012-04-26

    CPC classification number: G01J3/45 G01J3/4535

    Abstract: A spectrometric instrument comprising: a scanning interferometer having a beamsplitter for dividing incident optical radiation into a reflected beam, following a reflected beam path and a transmitted beam following a transmitted beam path; a monochromatic optical radiation source for launching a reference beam into the interferometer along a first propagation path to be initially incident on a first face of the beamsplitter; an observation optical radiation source for launching a divergent observation beam into the interferometer along a second propagation path to be initially incident on the first face of beamsplitter and overlap the reference beam at the first face; wherein the radiation sources cooperate to generate a first angle between the directions of propagation of the two beams along respective first and second propagation paths when initially and simultaneously incident at the first face which is larger than a divergence half-angle of the observation beam 64.

    Abstract translation: 一种光谱仪,包括:扫描干涉仪,具有分束器,用于将入射光辐射分成反射光束,跟随反射光束路径和发射光束跟随传输光束路径; 用于沿着第一传播路径将参考光束发射到干涉仪中以最初入射在分束器的第一面上的单色光辐射源; 观测光辐射源,用于沿着第二传播路径将发散观测光束发射到干涉仪中,以最初入射到分束器的第一面上,并在第一面处与参考光束重叠; 其中所述辐射源在最初并且同时入射在大于所述观察光束64的发散半角的所述第一面时在所述两个光束沿着相应的第一和第二传播路径的传播方向之间产生第一角度。

    Signal spectra detection system
    189.
    发明授权
    Signal spectra detection system 有权
    信号光谱检测系统

    公开(公告)号:US08487979B2

    公开(公告)日:2013-07-16

    申请号:US12324709

    申请日:2008-11-26

    CPC classification number: G01J3/45 G06T7/11 G06T7/168 G06T7/194

    Abstract: The invention is a detection system that provides for background removal from a field of view (FOV) of spectra. A panoramic field of regard may be partitioned into a large number of FOV's. An FOV may include spectra including that of a target substance. Such detection may require removing the spectra other than that of the target. This may amount to removal of the background with an estimated background developed from spectra of one or more FOV's which may be similar to the background of the FOV with the target. An estimation of the background may be a sum of a number of FOV spectra where each spectrum is assigned a weight, the total amount of the weights being one.

    Abstract translation: 本发明是提供从光谱视场(FOV)的背景去除的检测系统。 全景视野可分为大量FOV。 FOV可以包括包括目标物质的光谱。 这种检测可能需要除去目标以外的光谱。 这可能相当于从一个或多个FOV的光谱开发的估计背景的去除,其可以类似于具有目标的FOV的背景。 背景的估计可以是FOV光谱的数量的总和,其中每个光谱被分配一个权重,权重的总量是1。

    COMPOSITE FABRY-PÉROT SENSOR
    190.
    发明申请
    COMPOSITE FABRY-PÉROT SENSOR 有权
    复合皮革传感器

    公开(公告)号:US20130169970A1

    公开(公告)日:2013-07-04

    申请号:US13729983

    申请日:2012-12-28

    CPC classification number: G01J3/45 G01N21/274 G01N21/39 G01N30/74

    Abstract: A self-referencing composite Fabry-Pérot cavity sensor, including methods of use and manufacture. The cavity sensor comprises a substrate defining a first cavity portion juxtaposed to a second cavity portion. The first and second cavity portions are provided having a predetermined depth offset. A polymer or other dielectric material is disposed within the first and second cavity portions. An interference spectrum resulting from a light source of a known wavelength is reflected through the sensor and produces a first refractive index from the first cavity portion offset by a second refractive index from the second cavity portion. The difference in refractive indices can be used to determine various physical parameters. An optical sensor according to the present technology may be used with vapor sensing, pressure sensing, protein detection, photo-acoustic imaging, and the like.

    Abstract translation: 自参考复合法布里 - 珀罗腔传感器,包括使用和制造方法。 空腔传感器包括限定与第二空腔部分并置的第一空腔部分的基板。 第一和第二空腔部分具有预定的深度偏移。 聚合物或其它介电材料设置在第一和第二空腔部分内。 由已知波长的光源产生的干涉光谱通过传感器反射,并从第一空腔部分产生偏离第二空腔部分的第二折射率的第一折射率。 折射率的差异可用于确定各种物理参数。 根据本技术的光学传感器可以与蒸气感测,压力感测,蛋白质检测,光声成像等一起使用。

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