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    Discharge laser having electrodes with sputter cavities and discharge peaks
    13.
    发明授权
    Discharge laser having electrodes with sputter cavities and discharge peaks 失效
    放电激光器具有带溅射腔和放电峰的电极

    公开(公告)号：US06560263B1

    公开(公告)日：2003-05-06

    申请号：US09590958

    申请日：2000-06-09

    Applicant: Richard G. Morton ,  Zsolt Bor ,  Eckehard D. Onkels

    Inventor： Richard G. Morton ,  Zsolt Bor ,  Eckehard D. Onkels

    IPC: H01S322

    CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/708 ,  H01S3/036 ,  H01S3/0385

    Abstract: A gas discharge laser having a laser chamber with two elongated electrode elements, each having a discharge section having an optimum array of discharge peaks and sputter cavities. The sputter cavities provide sputter metal ions to contribute to a plasma between the electrodes and support a glow-type discharge. The peaks provide very high fields which produce a very large number of filament-type discharges. The electrodes erode gradually but since the discharge region is confined to the array of discharge peaks and sputter cavities, the shape of he discharge remains approximately constant for billions of pulses. A pulse power system provides electrical pulses of at least 2J at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

    Abstract translation: 一种气体放电激光器，其具有具有两个细长电极元件的激光室，每个具有放电部分，其具有最佳放电峰阵列和溅射腔。 溅射腔提供溅射金属离子以有助于电极之间的等离子体并且支持辉光型放电。 这些峰提供非常高的场，其产生非常大量的灯丝型放电。 电极逐渐腐蚀，但是由于放电区被限制在放电峰和溅射腔阵列中，所以放电的形状在几十亿个脉冲中保持近似恒定。 脉冲功率系统以至少1KHz的速率提供至少2J的电脉冲。 鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

    Single chamber gas discharge laser with line narrowed seed beam
    14.
    发明授权
    Single chamber gas discharge laser with line narrowed seed beam 有权
    单室气体放电激光器具有线窄的种子束

    公开(公告)号：US06359922B1

    公开(公告)日：2002-03-19

    申请号：US09421701

    申请日：1999-10-20

    Applicant: William N. Partlo ,  Xiaojiang Pan ,  Eckehard D. Onkels

    Inventor： William N. Partlo ,  Xiaojiang Pan ,  Eckehard D. Onkels

    IPC: H01S322

    CPC classification number: H01S3/2366 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/073 ,  H01S3/225 ,  H01S3/2333

    Abstract: A single chamber gas discharge laser system having a pulse power source for producing electrical discharges at the rate of at least 1000 pulses per second. The discharge along with laser optics create two short lived gain media, one for producing a seed beam and the other for amplifying the seed beam. Laser gas circulation around a chamber circulation path is provided and the electrodes and discharges are arranged so that debris from one of the gain media is not circulated to the other gain media during discharges until the debris has made a loop around at least 90% of the chamber circulation path.

    Abstract translation: 具有用于以每秒至少1000个脉冲的速率产生放电的脉冲电源的单室气体放电激光器系统。 放射与激光光学器件一起产生两个短寿命增益介质，一个用于产生种子束，另一个用于放大种子束。 提供了围绕室循环路径的激光气体循环，并且电极和排出物被布置成使得来自增益介质之一的碎屑在排放期间不循环到另一增益介质，直到碎片已经围绕至少90％的循环 室循环路径。

    Electric discharge laser with acoustic chirp correction
    20.
    发明授权
    Electric discharge laser with acoustic chirp correction 有权
    具有声啁啾校正的放电激光器

    公开(公告)号：US06317447B1

    公开(公告)日：2001-11-13

    申请号：US09490835

    申请日：2000-01-25

    Applicant: William N. Partlo ,  Igor V. Fomenkov ,  Jean-Marc Hueber ,  Zsolt Bor ,  Eckehard D. Onkels ,  Michael C. Cates ,  Richard C. Ujazdowski ,  Vladimir B. Fleurov ,  Dmitri V. Gaidarenko

    Inventor： William N. Partlo ,  Igor V. Fomenkov ,  Jean-Marc Hueber ,  Zsolt Bor ,  Eckehard D. Onkels ,  Michael C. Cates ,  Richard C. Ujazdowski ,  Vladimir B. Fleurov ,  Dmitri V. Gaidarenko

    IPC: H01S322

    CPC classification number: G03F7/70025 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382

    Abstract: Methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rates. Applicants have identified the major cause of wavelength chirp in high pulse rate gas discharge lithography lasers as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. The timing of the arrival of the pressure wave is determined by the temperature of the laser gas through which the wave is traveling. During burst mode operation, the laser gas temperature in prior art lasers changes by several degrees over periods of a few milliseconds. These changing temperatures change the location of the coincident pressure waves from pulse to pulse within the discharge region causing a variation in the pressure of the laser gas which in turn affects the index of refraction of the discharge region causing the laser beam exiting the rear of the laser to slightly change direction. This change in beam direction causes the grating in the LNP to reflect back to the discharge region light at a slightly different wavelength causing the wavelength chirp. Solution to the problem is to include in the laser chamber structural elements to moderate or disperse the pressure waves and to maintain the laser gas temperature as close as feasible to constant values.

    Abstract translation: 气体放电激光器的方法和结构变化，以最大限度地减少高脉冲波长啁啾。 申请人已经确定了在高脉冲气体放电光刻激光器中的波长啁啾的主要原因，因为从反射回到放电区域的放电的压力波与随后的放电一致。 压力波的到达时间由波浪行进的激光气体的温度决定。 在突发模式操作期间，现有技术的激光器中的激光气体温度在几毫秒的时间内改变了几度。 这些变化的温度改变了放电区域内重合压力波从脉冲到脉冲的位置，导致激光气体的压力变化，这反过来影响放电区域的折射率，导致激光束离开 激光稍微改变方向。 光束方向的这种变化导致LNP中的光栅以稍微不同的波长反射回到放电区域，导致波长啁啾。 解决问题的方法是在激光室结构元件中包括中压或分散压力波，并将激光气体温度保持在尽可能接近的恒定值。

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