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12 条记录 (耗时 0.055 秒)

    Active segmented mirror including a plurality of piezoelectric drivers
    9.
    发明授权
    Active segmented mirror including a plurality of piezoelectric drivers 失效
    有源分段镜包括多个压电驱动器

    公开(公告)号：US4944580A

    公开(公告)日：1990-07-31

    申请号：US225092

    申请日：1988-07-27

    申请人： MacDonald Bruce G. ,  William G. Hulburd ,  Raymond A. LaBelle

    发明人： MacDonald Bruce G. ,  William G. Hulburd ,  Raymond A. LaBelle

    IPC分类号： G02B26/06 ,  H01L41/09

    CPC分类号： G02B26/06

    摘要： A low cost segmented mirror for making wavefront corrections. The segmented mirror is comprised of a large number of closely spaced mirror element assemblies. Each assembly is comprised of an essentially flat mirror surface backed by a substrate and a tubular shaped piezoelectric driver divided axially into at least three parts each part having its own independent voltage source. The independent voltages sources are variable over a voltage range including zero volts. Each driver is attached at one of its ends to a base support. During fabrication, the segmented mirrors are held in place on an essentially flat vacuum chuck while the other ends of the drivers are attached to the mirror substrates with an epoxy. The result is an essentially flat segmented mirror surface when the independent voltage sources are at zero volts. Wavefront corrections are produced by varying the voltage to each individual part of each piezoelectric driver so as to adjust each of the segmented mirror surfaces in tilt, tip, and piston.

    摘要翻译： 用于波前校正的低成本分段镜。 分段镜包括大量紧密间隔的镜元件组件。 每个组件由基板和由管状压电驱动器构成的基本平坦的反射镜表面构成，所述管状压电驱动器被轴向分成至少三部分，每部分具有其独立的独立电压源。 独立的电压源可以在包括零伏的电压范围内变化。 每个驱动器的一端连接到基座上。 在制造期间，分段镜保持在基本上平坦的真空吸盘上的适当位置，而驱动器的另一端用环氧树脂附着到镜面基板上。 结果是当独立电压源处于零伏特时基本平坦的分段镜面。 通过改变每个压电驱动器的每个单独部分的电压来产生波前校正，以便在倾斜，尖端和活塞中调整每个分段镜面。

    Line narrowing unit with flexural grating mount
    10.
    发明授权
    Line narrowing unit with flexural grating mount 有权
    带有弯曲光栅安装的线窄变单元

    公开(公告)号：US06496528B2

    公开(公告)日：2002-12-17

    申请号：US09895664

    申请日：2001-06-29

    申请人： Clay C. Titus ,  William G. Hulburd ,  Raymond F. Cybulski ,  John M. Algots ,  Michael S. Lysik

    发明人： Clay C. Titus ,  William G. Hulburd ,  Raymond F. Cybulski ,  John M. Algots ,  Michael S. Lysik

    IPC分类号： H01S308

    CPC分类号： H01S3/036 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/034 ,  H01S3/0401 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A grating based line narrowing device for line narrowing lasers producing high energy laser beams. Techniques are provided for minimizing adverse effects of heat produced by the laser beam inside the line narrowing device. A flexural grating mount is provided which virtually eliminates stress on the grating caused by differential thermal expansion between the grating and the LNP housing structure. In a preferred embodiment the grating which is comprised of a very thin lined aluminum surface on a thick ultra low expansion glass substrate is attached to an aluminum housing structure using a flexural grating mount. At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the aluminum housing without producing undesirable mechanical stresses in the glass substrate of the grating. In some embodiments the mount comprises a metal plate and the flexure joint is a H-Flex joint which is machined into the metal plate. In another embodiment two H-Flex joints are provided. In other embodiments, the flexure joint is a dovetail joint permitting one end of the mount to slip relative to the other. In another preferred embodiments a stream of gas is directed across the face of the grating. In other embodiments the effect of a hot gas layer on the face of the grating is reduced with the use of helium as a purge gas and in other embodiments the purge gas pressure is reduced to reduce the optical effects of the hot gas layer.

    摘要翻译： 用于生产高能量激光束的线窄激光器的基于光栅的线窄化装置。 提供了用于最小化由线束变窄装置内部的激光束产生的热的不利影响的技术。提供了一种弯曲光栅安装件，其实际上消除了由光栅和LNP壳体结构之间的差分热膨胀引起的对光栅的应力。 在优选实施例中，由厚的超低膨胀玻璃基板上的非常薄的衬里的铝表面组成的光栅使用弯曲光栅安装件附接到铝外壳结构。 在光栅安装件中提供至少一个弯曲接头，其允许铝外壳的热膨胀和收缩，而不会在光栅的玻璃基板中产生不期望的机械应力。 在一些实施例中，安装件包括金属板，并且挠曲接头是被加工成金属板的H-Flex接头。 在另一个实施例中，提供了两个H-Flex接头。 在其它实施例中，挠曲接头是燕尾接头，允许安装座的一端相对于另一端滑动。在另一优选实施例中，气流被引导穿过光栅的表面。 在其他实施例中，使用氦气作为净化气体来减少热气体层在光栅表面上的影响，并且在其它实施例中，减少吹扫气体压力以减少热气体层的光学效应。