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    MEMS variable optical attenuator
    11.
    发明授权
    MEMS variable optical attenuator 失效
    MEMS可变光衰减器

    公开(公告)号：US06275320B1

    公开(公告)日：2001-08-14

    申请号：US09405789

    申请日：1999-09-27

    Applicant: Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

    Inventor： Vijayakumar R. Dhuler ,  Edward A. Hill ,  Ramaswamy Mahadevan ,  Mark David Walters ,  Robert L. Wood

    IPC: G02B2600

    CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/038 ,  B81B2201/047 ,  G02B6/266

    Abstract: A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.

    Abstract translation: 提供了一种能够在全光范围内进行光衰减的MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括微电子衬底，MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。 可变光衰减器能够衰减其光轴平行且垂直于衬底的光束。 另外，本发明的MEMS致动器可以包括MEMS致动器的阵列，其能够向光学快门提供更大的位移距离，并且因此具有更宽的光学衰减范围。 在本发明的一个实施例中，MEMS致动器包括热拱形梁致动器。 另外，本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。 该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。 热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。 在激活时，热双压电晶片截取光束的路径并提供所需的光衰减水平。 本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。

    Reflective mems actuator with a laser
    12.
    发明授权
    Reflective mems actuator with a laser 有权
    带激光的反射式MEMs执行器

    公开(公告)号：US6134042A

    公开(公告)日：2000-10-17

    申请号：US283030

    申请日：1999-04-01

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: G02B26/10 ,  B32B3/10 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Microelectromechanical devices including rotating plates and related methods
    15.
    发明授权
    Microelectromechanical devices including rotating plates and related methods 失效
    微机电装置包括旋转板及相关方法

    公开(公告)号：US5914801A

    公开(公告)日：1999-06-22

    申请号：US719711

    申请日：1996-09-27

    Applicant: Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    Inventor： Vijayakumar R. Dhuler ,  David A. Koester ,  Mark D. Walters ,  Karen W. Markus

    IPC: G02B26/10 ,  B32B3/10 ,  B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H02N1/00 ,  G02B26/02

    CPC classification number: G02B26/0841 ,  B81B3/0051 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/90 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/24479

    Abstract: An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

    Abstract translation: 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。

    Moveable microelectromechanical mirror structures and associated methods
    16.
    发明授权
    Moveable microelectromechanical mirror structures and associated methods 有权
    可移动微机电镜结构及相关方法

    公开(公告)号：US06428173B1

    公开(公告)日：2002-08-06

    申请号：US09304301

    申请日：1999-05-03

    Applicant: Vijayakumar R. Dhuler ,  Mark David Walters ,  Edward A. Hill ,  Allen Bruce Cowen

    Inventor： Vijayakumar R. Dhuler ,  Mark David Walters ,  Edward A. Hill ,  Allen Bruce Cowen

    IPC: G02B508

    CPC classification number: G02B26/0841 ,  G02B6/357 ,  G02B6/358 ,  H01H2001/0047 ,  H01H2001/0063

    Abstract: Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror is adapted to move accordingly with the microactuator between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators, thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch and/or an electrostatic latch for controllably clamping the mirror in position. A MEMS moveable mirror array is also provided which permits individualized control of each individual MEMS moveable mirror structure within the array. The MEMS moveable mirror structures and the associated arrays can be used in a variety of applications including applications involving the controlled redirection of electromagnetic radiation. Accordingly, a method of redirecting electromagnetic radiation is provided. A method of fabricating MEMS moveable mirror structures is further provided.

    Abstract translation: 提供微机电结构（MEMS），其适于响应于选择性热致动而可控地移动反射镜。 在一个实施例中，MEMS可移动镜结构包括热致动的微致动器，其适于可控制地沿着基本上平行于下面的微电子衬底的第一主表面的预定路径移动。 镜子适于随着微致动器在非致动位置和致动位置之间相应地移动。 在所有位置，反射镜具有相对于微电子衬底的第一主表面设置在平面外的镜面。 本文提供的微致动器可以包括各种热拱形梁致动器，热致动复合梁致动器，排列的致动器及其组合。 MEMS可移动镜结构还可以包括用于可控地将镜子夹持在适当位置的机械闩锁和/或静电闩锁。 还提供了MEMS移动反射镜阵列，其允许对阵列内的每个单独的MEMS可移动镜像结构进行个性化的控制。 MEMS可移动镜结构和相关阵列可用于各种应用，包括涉及电磁辐射的受控重定向的应用。 因此，提供了一种重定向电磁辐射的方法。 还提供了制造MEMS可移动镜结构的方法。

    Microelectromechanical valves including single crystalline material components
    17.
    发明授权
    Microelectromechanical valves including single crystalline material components 有权
    微电机阀包括单晶材料组分

    公开(公告)号：US06386507B2

    公开(公告)日：2002-05-14

    申请号：US09802260

    申请日：2001-03-08

    Applicant: Vijayakumar R. Dhuler ,  Mark David Walters

    Inventor： Vijayakumar R. Dhuler ,  Mark David Walters

    IPC: F16K3100

    CPC classification number: F15C5/00 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  B81C2203/031 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0009 ,  F16K99/0011 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2001/0042

    Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening.

    Abstract translation: 提供了一种微电子机械（MEMS）装置，其包括微电子基板和热致动的微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关部​​件由热致动器由微致动器致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。

    In-plane MEMS thermal actuator and associated fabrication methods
    18.
    发明授权
    In-plane MEMS thermal actuator and associated fabrication methods 有权
    平面MEMS热致动器

    公开(公告)号：US06211598B1

    公开(公告)日：2001-04-03

    申请号：US09395068

    申请日：1999-09-13

    Applicant: Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    Inventor： Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    IPC: H02N1000

    CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0036 ,  F16K99/0042 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H1/0036 ,  H01H37/32 ,  H01H2037/008 ,  Y10S310/06

    Abstract: A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate.

    Abstract translation: 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，MEMS热致动器可以提供独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并且覆盖在基底的第一表面上。 组合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。

    Microelectromechanical device having single crystalline components and metallic components
    20.
    发明授权
    Microelectromechanical device having single crystalline components and metallic components 有权
    具有单晶组分和金属组分的微机电装置

    公开(公告)号：US06628039B2

    公开(公告)日：2003-09-30

    申请号：US09891700

    申请日：2001-06-26

    Applicant: Vijayakumar R. Dhuler

    Inventor： Vijayakumar R. Dhuler

    IPC: H02N1000

    CPC classification number: H01H1/0036 ,  H01H59/0009 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0078 ,  H01H2061/006

    Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator that may include a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure.

    Abstract translation: 提供了一种微机电（MEMS）器件，其包括微电子衬底，设置在衬底上并由单晶材料形成的微致动器，以及设置在与微致动器相邻的衬底上的至少一个金属结构。虽然MEMS器件可以包括各种微致动器， 微致动器的一个实施例是热致动微致动器，其可以包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 因此，在致动时，微致动器在其中微致动器与至少一个金属结构间隔开的第一位置移动到第二位置，在第二位置，微致动器可操作地接合至少一个金属结构。

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