公开(公告)号：US20120319297A1

公开(公告)日：2012-12-20

申请号：US13524985

申请日：2012-06-15

Applicant: Yu-Lin YEN ,  Chien-Hui CHEN ,  Tsang-Yu LIU ,  Yen-Shih HO

Inventor： Yu-Lin YEN ,  Chien-Hui CHEN ,  Tsang-Yu LIU ,  Yen-Shih HO

IPC: H01L23/48 ,  H01L21/78

CPC classification number: H01L23/3128 ,  H01L23/3114 ,  H01L23/481 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2924/1461 ,  H01L2924/014 ,  H01L2924/00

Abstract: An embodiment of the invention provides a chip package which includes: a substrate having a plurality of sides and a plurality of corner regions, wherein each of the corner regions is located at an intersection of at least two of the sides of the substrate; a device region formed in the substrate; a conducting layer disposed on the substrate and electrically connected to the device region; an insulating layer disposed between the substrate and the conducting layer; and a carrier substrate, wherein the substrate is disposed on the carrier substrate, and the substrate has a recess extending towards the carrier substrate in at least one of the corner regions.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有多个侧面和多个拐角区域的基板，其中每个所述拐角区域位于所述基板的至少两个侧面的相交处; 形成在所述基板中的器件区域; 导电层，其设置在所述基板上并电连接到所述器件区域; 设置在所述基板和所述导电层之间的绝缘层; 以及载体基板，其中所述基板设置在所述载体基板上，并且所述基板具有在至少一个所述拐角区域中朝向所述载体基板延伸的凹部。

公开(公告)号：US20110278735A1

公开(公告)日：2011-11-17

申请号：US13190408

申请日：2011-07-25

Applicant: Yu-Lin YEN ,  Chien-Hui CHEN ,  Tsang-Yu LIU ,  Long-Sheng YEOU

Inventor： Yu-Lin YEN ,  Chien-Hui CHEN ,  Tsang-Yu LIU ,  Long-Sheng YEOU

IPC: H01L23/48 ,  H01L21/283

CPC classification number: H01L21/76879 ,  B81B7/007 ,  B81B2207/07 ,  B81B2207/092 ,  H01L21/76898 ,  H01L23/3114 ,  H01L23/481 ,  H01L23/49827 ,  H01L24/06 ,  H01L24/32 ,  H01L24/94 ,  H01L2221/68377 ,  H01L2224/0557 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01021 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/00 ,  H01L2224/05552

Abstract: According to an embodiment of the invention, a chip package is provided. The chip package includes: a substrate having an upper surface and a lower surface; a plurality of conducting pads located under the lower surface of the substrate; a dielectric layer located between the conducting pads; a trench extending from the upper surface towards the lower surface of the substrate; a hole extending from a bottom of the trench towards the lower surface of the substrate, wherein a sidewall of the hole is substantially perpendicular to the lower surface of the substrate, and the sidewall or a bottom of the hole exposes a portion of the conducting pads; and a conducting layer located in the hole and electrically connected to at least one of the conducting pads.

Abstract translation: 根据本发明的实施例，提供了芯片封装。 芯片封装包括：具有上表面和下表面的基板; 位于所述基板的下表面下方的多个导电垫; 位于导电垫之间的电介质层; 从衬底的上表面延伸到下表面的沟槽; 从所述沟槽的底部延伸到所述衬底的下表面的孔，其中所述孔的侧壁基本上垂直于所述衬底的下表面，并且所述孔的侧壁或所述底部露出所述导电垫的一部分 ; 以及导电层，其位于所述孔中并电连接到至少一个所述导电焊盘。

公开(公告)号：US20070218410A1

公开(公告)日：2007-09-20

申请号：US11377159

申请日：2006-03-15

Applicant: Yu-Lin Yen

Inventor： Yu-Lin Yen

IPC: G03F7/26

CPC classification number: G03F7/091 ,  G03F7/095 ,  G03F7/168

Abstract: A method for forming a material layer with an anti-reflective layer as the top surface. The method comprises steps of providing a material layer and performing an ion implantation process to change a plurality of physical properties of a portion of the material layer near a top surface of the material layer so as to covert the portion of the material layer into an anti-reflective layer.

Abstract translation: 一种形成具有抗反射层作为顶表面的材料层的方法。 该方法包括以下步骤：提供材料层并执行离子注入工艺以改变材料层的顶表面附近的材料层的一部分的多个物理性能，以将材料层的该部分隐蔽成反层 反射层。

公开(公告)号：US06960411B2

公开(公告)日：2005-11-01

申请号：US10314959

申请日：2002-12-10

Applicant: Yu-Lin Yen ,  Ching-Yu Chang ,  Shun-Li Lin

Inventor： Yu-Lin Yen ,  Ching-Yu Chang ,  Shun-Li Lin

IPC: G03F1/00 ,  G03F1/36 ,  H01L21/762 ,  G03F9/00

CPC classification number: G03F1/36 ,  H01L21/76224

Abstract: A mask with extended mask window for forming patterns on a semiconductor substrate. The mask includes a main chip array having four sides for forming patterns of a main chip in a semiconductor substrate and a plurality of extended mask windows arranged around the main chip array. A method of dummy exposure using the mask includes providing a semiconductor substrate comprising a nitride layer with a plurality of main chip areas therein, and a plurality of unpatterned areas therein, forming a resist layer on the semiconductor substrate, providing an exposure mask comprising a main chip array and a plurality of extended mask windows, patterning the main chip areas of the semiconductor substrate using the main chip array of the exposure mask, patterning the unpatterned areas of the semiconductor substrate using the windows of the exposure mask, and removing the unexposed portions of the resist layer.

Abstract translation: 具有用于在半导体衬底上形成图案的扩展掩模窗口的掩模。 掩模包括具有用于形成半导体衬底中的主芯片的图案的四个侧面的主芯片阵列和布置在主芯片阵列周围的多个扩展掩模窗口。 使用掩模的伪曝光方法包括提供包括其中具有多个主芯片区域的氮化物层和其中多个未图案化区域的半导体衬底，在半导体衬底上形成抗蚀剂层，提供包括主体的曝光掩模 芯片阵列和多个扩展掩模窗口，使用曝光掩模的主芯片阵列图案化半导体衬底的主芯片区域，使用曝光掩模的窗口对半导体衬底的未图案化区域进行图案化，以及去除未曝光部分 的抗蚀剂层。

公开(公告)号：US09024437B2

公开(公告)日：2015-05-05

申请号：US13524985

申请日：2012-06-15

Applicant: Yu-Lin Yen ,  Chien-Hui Chen ,  Tsang-Yu Liu ,  Yen-Shih Ho

Inventor： Yu-Lin Yen ,  Chien-Hui Chen ,  Tsang-Yu Liu ,  Yen-Shih Ho

IPC: H01L23/48 ,  H01L21/78 ,  H01L23/31

CPC classification number: H01L23/3128 ,  H01L23/3114 ,  H01L23/481 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2924/1461 ,  H01L2924/014 ,  H01L2924/00

Abstract: An embodiment of the invention provides a chip package which includes: a substrate having a plurality of sides and a plurality of corner regions, wherein each of the corner regions is located at an intersection of at least two of the sides of the substrate; a device region formed in the substrate; a conducting layer disposed on the substrate and electrically connected to the device region; an insulating layer disposed between the substrate and the conducting layer; and a carrier substrate, wherein the substrate is disposed on the carrier substrate, and the substrate has a recess extending towards the carrier substrate in at least one of the corner regions.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有多个侧面和多个拐角区域的基板，其中每个所述拐角区域位于所述基板的至少两个侧面的相交处; 形成在所述基板中的器件区域; 导电层，其设置在所述基板上并电连接到所述器件区域; 设置在所述基板和所述导电层之间的绝缘层; 以及载体基板，其中所述基板设置在所述载体基板上，并且所述基板具有在至少一个所述拐角区域中朝向所述载体基板延伸的凹部。

公开(公告)号：US08698316B2

公开(公告)日：2014-04-15

申请号：US13190408

申请日：2011-07-25

Applicant: Yu-Lin Yen ,  Chien-Hui Chen ,  Tsang-Yu Liu ,  Long-Sheng Yeou

Inventor： Yu-Lin Yen ,  Chien-Hui Chen ,  Tsang-Yu Liu ,  Long-Sheng Yeou

IPC: H01L23/48

CPC classification number: H01L21/76879 ,  B81B7/007 ,  B81B2207/07 ,  B81B2207/092 ,  H01L21/76898 ,  H01L23/3114 ,  H01L23/481 ,  H01L23/49827 ,  H01L24/06 ,  H01L24/32 ,  H01L24/94 ,  H01L2221/68377 ,  H01L2224/0557 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01021 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/00 ,  H01L2224/05552

Abstract: According to an embodiment of the invention, a chip package is provided. The chip package includes: a substrate having an upper surface and a lower surface; a plurality of conducting pads located under the lower surface of the substrate; a dielectric layer located between the conducting pads; a trench extending from the upper surface towards the lower surface of the substrate; a hole extending from a bottom of the trench towards the lower surface of the substrate, wherein a sidewall of the hole is substantially perpendicular to the lower surface of the substrate, and the sidewall or a bottom of the hole exposes a portion of the conducting pads; and a conducting layer located in the hole and electrically connected to at least one of the conducting pads.

Abstract translation: 根据本发明的实施例，提供了芯片封装。 芯片封装包括：具有上表面和下表面的基板; 位于所述基板的下表面下方的多个导电焊盘; 位于导电垫之间的电介质层; 从衬底的上表面延伸到下表面的沟槽; 从所述沟槽的底部延伸到所述衬底的下表面的孔，其中所述孔的侧壁基本上垂直于所述衬底的下表面，并且所述孔的侧壁或所述底部露出所述导电垫的一部分 ; 以及导电层，其位于所述孔中并电连接到至少一个所述导电焊盘。

公开(公告)号：US08581386B2

公开(公告)日：2013-11-12

申请号：US13350690

申请日：2012-01-13

Applicant: Yu-Lin Yen ,  Shih-Ming Chen ,  Hsi-Chien Lin ,  Yu-Lung Huang ,  Tsang-Yu Liu

Inventor： Yu-Lin Yen ,  Shih-Ming Chen ,  Hsi-Chien Lin ,  Yu-Lung Huang ,  Tsang-Yu Liu

IPC: H01L23/04 ,  H01L23/12

CPC classification number: H01L31/0203 ,  H01L23/3114 ,  H01L23/3171 ,  H01L23/481 ,  H01L27/14618 ,  H01L27/14627 ,  H01L27/14683 ,  H01L27/14685 ,  H01L31/048 ,  H01L2224/16 ,  H01L2924/1461 ,  Y02E10/50 ,  H01L2924/00

Abstract: An embodiment of the invention provides a chip package, which includes: a semiconductor substrate having a device region and a non-device region neighboring the device region; a package layer disposed on the semiconductor substrate; a spacing layer disposed between the semiconductor substrate and the package layer and surrounding the device region and the non-device region; a ring structure disposed between the semiconductor substrate and the package layer, and between the spacing layer and the device region, and surrounding a portion of the non-device region; and an auxiliary pattern including a hollow pattern formed in the spacing layer or the ring structure, a material pattern located between the spacing layer and the device region, or combinations thereof.

Abstract translation: 本发明的一个实施例提供了一种芯片封装，其包括：半导体衬底，具有与器件区域相邻的器件区域和非器件区域; 封装层，设置在所述半导体衬底上; 间隔层，设置在所述半导体衬底和所述封装层之间并且围绕所述器件区域和所述非器件区域; 设置在所述半导体衬底和所述封装层之间以及所述间隔层和所述器件区域之间并围绕所述非器件区域的一部分的环形结构; 以及包括形成在间隔层或环结构中的中空图案的辅助图案，位于间隔层和器件区域之间的材料图案，或其组合。

公开(公告)号：US08525345B2

公开(公告)日：2013-09-03

申请号：US13044457

申请日：2011-03-09

Applicant: Yu-Lin Yen ,  Chien-Hui Chen ,  Tsang-Yu Liu ,  Long-Sheng Yeou

Inventor： Yu-Lin Yen ,  Chien-Hui Chen ,  Tsang-Yu Liu ,  Long-Sheng Yeou

IPC: H01L23/48

CPC classification number: H01L23/49827 ,  H01L21/561 ,  H01L21/76805 ,  H01L23/3114 ,  H01L23/3178 ,  H01L23/481 ,  H01L24/06 ,  H01L24/32 ,  H01L24/94 ,  H01L25/0657 ,  H01L2224/0557 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/01014 ,  H01L2924/01021 ,  H01L2924/01033 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2924/00 ,  H01L2224/05552

Abstract: According to an embodiment of the invention, a chip package is provided. The chip package includes a substrate having an upper surface and a lower surface, a plurality of conducting pads located in the substrate or under the lower surface thereof, a dielectric layer located between the conducting pads, a hole extending from the upper surface towards the lower surface of the substrate and exposing a portion of the conducting pads, and a conducting layer located in the hole and electrically contacting the conducting pads.

Abstract translation: 根据本发明的实施例，提供了芯片封装。 芯片封装包括具有上表面和下表面的衬底，位于衬底中或其下表面下方的多个导电焊盘，位于导电焊盘之间的介电层，从上表面向下延伸的孔 表面并暴露一部分导电焊盘，以及导电层，其位于孔中并与导电焊盘电接触。

公开(公告)号：US08415088B2

公开(公告)日：2013-04-09

申请号：US11377159

申请日：2006-03-15

Applicant: Yu-Lin Yen

Inventor： Yu-Lin Yen

IPC: G06F7/26

CPC classification number: G03F7/091 ,  G03F7/095 ,  G03F7/168

Abstract: A method for forming a material layer with an anti-reflective layer as the top surface. The method comprises steps of providing a material layer and performing an ion implantation process to change a plurality of physical properties of a portion of the material layer near a top surface of the material layer so as to covert the portion of the material layer into an anti-reflective layer.

Abstract translation: 一种形成具有抗反射层作为顶表面的材料层的方法。 该方法包括以下步骤：提供材料层并执行离子注入工艺以改变材料层的顶表面附近的材料层的一部分的多个物理性能，以将材料层的该部分隐蔽成反层 反射层。

公开(公告)号：US20110156074A1

公开(公告)日：2011-06-30

申请号：US12981600

申请日：2010-12-30

Applicant: Tsang-Yu LIU ,  Yu-Lin Yen ,  Chuan-Jin Shiu ,  Po-Shen Lin

Inventor： Tsang-Yu LIU ,  Yu-Lin Yen ,  Chuan-Jin Shiu ,  Po-Shen Lin

IPC: H01L33/60 ,  H01L33/48

CPC classification number: H01L27/14618 ,  H01L21/76898 ,  H01L23/055 ,  H01L23/16 ,  H01L27/14683 ,  H01L31/0203 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The present invention provides a chip package, including: a chip having a semiconductor device thereon; a cap layer over the semiconductor device; a spacer layer between the chip and the cap layer, wherein the spacer layer surrounds the semiconductor device and forms a cavity between the chip and the cap layer; and an anti-reflective layer between the cap layer and the chip, wherein the anti-reflective layer has a overlapping region with the spacer layer and extends into the cavity. Furthermore, a method for fabricating a chip package is also provided.

Abstract translation: 本发明提供了一种芯片封装，包括：其上具有半导体器件的芯片; 半导体器件上的覆盖层; 在所述芯片和所述盖层之间的间隔层，其中所述间隔层围绕所述半导体器件并且在所述芯片和所述盖层之间形成空腔; 以及在所述盖层和所述芯片之间的抗反射层，其中所述抗反射层具有与所述间隔层的重叠区域并延伸到所述空腔中。 此外，还提供了一种用于制造芯片封装的方法。