Trench Schottky barrier diode
    14.
    发明授权
    Trench Schottky barrier diode 有权
    沟槽肖特基势垒二极管

    公开(公告)号:US06855593B2

    公开(公告)日:2005-02-15

    申请号:US10193783

    申请日:2002-07-11

    Abstract: A fabrication process for a Schottky barrier structure includes forming a nitride layer directly on a surface of an epitaxial (“epi”) layer and subsequently forming a plurality of trenches in the epi layer. The interior walls of the trenches are then deposited with a final oxide layer without forming a sacrificial oxide layer to avoid formation of a beak bird at the tops of the interior trench walls. A termination trench is etched in the same process step for forming the plurality of trenches in the active area.

    Abstract translation: 用于肖特基势垒结构的制造方法包括在外延(“epi”)层的表面上直接形成氮化物层,随后在外延层中形成多个沟槽。 然后将沟槽的内壁沉积有最终的氧化物层,而不形成牺牲氧化物层,以避免在内部沟槽壁的顶部形成喙鸟。 在用于在有源区域中形成多个沟槽的相同工艺步骤中蚀刻端接沟槽。

    Trench IGBT for highly capacitive loads
    16.
    发明授权
    Trench IGBT for highly capacitive loads 有权
    用于高容性负载的沟槽IGBT

    公开(公告)号:US07655977B2

    公开(公告)日:2010-02-02

    申请号:US11252642

    申请日:2005-10-18

    CPC classification number: H01L29/7397 H01L29/402 H01L2924/0002 H01L2924/00

    Abstract: An IGBT for controlling the application of power to a plasma display panel has an increased current conduction capability and a reduced conduction loss at the expense of a reduced safe operating area. For a device with a 300 volt breakdown voltage rating, the die has a substrate resistivity less than 10 m ohm cm; a buffer layer thickness of about 8 μm resistivity in the range of 0.05 to 0.10 ohm cm, and an epi layer for receiving junction patterns and trenches, which has a thickness of from 31 to 37 μm and resistivity in te range of 14 to 18 ohm cm.

    Abstract translation: 用于控制对等离子体显示面板的电力施加的IGBT具有增加的导电能力和降低的传导损耗,而降低安全操作区域。 对于具有300伏击穿电压额定值的器件,裸片具有小于10mΩcm的衬底电阻; 具有约0.05μm至0.10欧姆cm范围内的约8μm电阻率的缓冲层厚度,以及用于接收结形图案和沟槽的外延层,其厚度为31至37μm,电阻率范围为14至18欧姆 厘米。

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