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公开(公告)号:US10468579B2
公开(公告)日:2019-11-05
申请号:US16062064
申请日:2015-12-30
Applicant: Google LLC
Inventor: Joshua Yousouf Mutus , Erik Anthony Lucero
IPC: H01L23/498 , H01L39/04 , H01L23/00 , H01L25/065 , H01L27/18 , H01L25/00 , H01L25/18
Abstract: A device (100) includes a first chip (104) having a first circuit element (112), a first interconnect pad (116) in electrical contact (118) with the first circuit element, and a barrier layer (120) on the first interconnect pad, a superconducting bump bond (106) on the barrier layer, and a second chip (102) joined to the first chip by the superconducting bump bond, the second chip having a quantum circuit element (108), in which the superconducting bump bond provides an electrical connection between the first circuit element and the quantum circuit element.
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公开(公告)号:US20180366634A1
公开(公告)日:2018-12-20
申请号:US16062064
申请日:2015-12-30
Applicant: Joshua Yousouf MUTUS , Anthony Erik LUCERO , GOOGLE LLC
Inventor: Joshua Yousouf Mutus , Erik Anthony LUCERO
IPC: H01L39/04 , H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H01L39/045 , H01L23/49816 , H01L23/49888 , H01L24/03 , H01L24/05 , H01L24/10 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/81 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L27/18 , H01L2224/0345 , H01L2224/0362 , H01L2224/0381 , H01L2224/03826 , H01L2224/0384 , H01L2224/0401 , H01L2224/05023 , H01L2224/05025 , H01L2224/05124 , H01L2224/05179 , H01L2224/05186 , H01L2224/05564 , H01L2224/05568 , H01L2224/05669 , H01L2224/05684 , H01L2224/05686 , H01L2224/1145 , H01L2224/1181 , H01L2224/13023 , H01L2224/13109 , H01L2224/13116 , H01L2224/13164 , H01L2224/13179 , H01L2224/13183 , H01L2224/16145 , H01L2224/81013 , H01L2224/81193 , H01L2224/81201 , H01L2224/81409 , H01L2225/06513 , H01L2225/06541 , H01L2924/10253 , H01L2924/10271 , H01L2924/10329 , H01L2924/20102 , H01L2924/00014 , H01L2924/04941
Abstract: A device (100) includes a first chip (104) having a first circuit element (112), a first interconnect pad (116) in electrical contact (118) with the first circuit element, and a barrier layer (120) on the first interconnect pad, a superconducting bump bond (106) on the barrier layer, and a second chip (102) joined to the first chip by the superconducting bump bond, the second chip having a quantum circuit element (108), in which the superconducting bump bond provides an electrical connection between the first circuit element and the quantum circuit element.
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公开(公告)号:US12033029B2
公开(公告)日:2024-07-09
申请号:US17902731
申请日:2022-09-02
Applicant: Google LLC
Inventor: Julian Shaw Kelly , Joshua Yousouf Mutus
IPC: G06N10/00 , H01L25/065 , H10N60/20
CPC classification number: G06N10/00 , H01L25/0657 , H10N60/20
Abstract: A stacked quantum computing device including a first chip that includes a first dielectric substrate and a superconducting qubit on the first dielectric substrate, and a second chip that is bonded to the first chip and includes a second dielectric substrate, a qubit readout element on the second dielectric substrate, a control wire on the second dielectric substrate, a dielectric layer covering the control wire, and a shielding layer covering the dielectric layer.
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公开(公告)号:US20240162050A1
公开(公告)日:2024-05-16
申请号:US18516711
申请日:2023-11-21
Applicant: Google LLC
Inventor: Evan Jeffrey , Joshua Yousouf Mutus
IPC: H01L21/48 , G06N10/00 , H01L23/498 , H01L33/06
CPC classification number: H01L21/4857 , G06N10/00 , H01L23/49822 , H01L33/06
Abstract: A method of fabricating a carrier chip for distributing signals among circuit elements of a quantum computing device, includes: providing a multilayer wiring stack, the multilayer wiring stack comprising alternating layers of dielectric material and wiring; bonding a capping layer to the multilayer wiring stack, in which the capping layer includes a single crystal silicon dielectric layer; forming a via hole within the capping layer, in which the via hole extends to a first wiring layer of the multilayer wiring stack; forming an electrically conductive via within the via hole and electrically coupled to the first wiring layer; and forming a circuit element on a surface of the capping layer, in which the circuit element is directly electrically coupled to the electrically conductive via.
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公开(公告)号:US20240126970A1
公开(公告)日:2024-04-18
申请号:US18341495
申请日:2023-06-26
Applicant: Google LLC
Inventor: Evan Jeffrey , Julian Shaw Kelly , Joshua Yousouf Mutus
IPC: G06F30/39
CPC classification number: G06F30/39 , G06F2111/02
Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for parameterization of physical dimensions of discrete circuit components for component definitions that define discrete circuit components. The component definitions may be selected for use in a device design. When a parametrization of a particular version of a discrete circuit component definition is changed, the version level of the device design is also changed and the circuit layout for the device design is physically verified for the new version level.
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公开(公告)号:US11854833B2
公开(公告)日:2023-12-26
申请号:US17263619
申请日:2018-07-30
Applicant: Google LLC
Inventor: Evan Jeffrey , Joshua Yousouf Mutus
IPC: H01L21/48 , G06N10/00 , H01L23/498 , H01L33/06
CPC classification number: H01L21/4857 , G06N10/00 , H01L23/49822 , H01L33/06
Abstract: A method of fabricating a carrier chip for distributing signals among circuit elements of a quantum computing device, includes: providing a multilayer wiring stack, the multilayer wiring stack comprising alternating layers of dielectric material and wiring; bonding a capping layer to the multilayer wiring stack, in which the capping layer includes a single crystal silicon dielectric layer; forming a via hole within the capping layer, in which the via hole extends to a first wiring layer of the multilayer wiring stack; forming an electrically conductive via within the via hole and electrically coupled to the first wiring layer; and forming a circuit element on a surface of the capping layer, in which the circuit element is directly electrically coupled to the electrically conductive via.
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公开(公告)号:US20230004848A1
公开(公告)日:2023-01-05
申请号:US17902731
申请日:2022-09-02
Applicant: Google LLC
Inventor: Julian Shaw Kelly , Joshua Yousouf Mutus
IPC: G06N10/00 , H01L25/065 , H01L39/14
Abstract: A stacked quantum computing device including a first chip that includes a first dielectric substrate and a superconducting qubit on the first dielectric substrate, and a second chip that is bonded to the first chip and includes a second dielectric substrate, a qubit readout element on the second dielectric substrate, a control wire on the second dielectric substrate, a dielectric layer covering the control wire, and a shielding layer covering the dielectric layer.
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公开(公告)号:US20200006620A1
公开(公告)日:2020-01-02
申请号:US16557378
申请日:2019-08-30
Applicant: Google LLC
Inventor: Joshua Yousouf Mutus , Erik Anthony Lucero
IPC: H01L39/04 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: A device includes a first chip having a first circuit element, a first interconnect pad in electrical contact with the first circuit element, and a barrier layer on the first interconnect pad, a superconducting bump bond on the barrier layer, and a second chip joined to the first chip by the superconducting bump bond, the second chip having a first quantum circuit element, in which the superconducting bump bond provides an electrical connection between the first circuit element and the first quantum circuit element.
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公开(公告)号:US12217129B2
公开(公告)日:2025-02-04
申请号:US17902695
申请日:2022-09-02
Applicant: Google LLC
Inventor: Julian Shaw Kelly , Joshua Yousouf Mutus
IPC: G06N10/00 , H01L25/065 , H10N60/20
Abstract: A stacked quantum computing device including a first chip that includes a first dielectric substrate and a superconducting qubit on the first dielectric substrate, and a second chip that is bonded to the first chip and includes a second dielectric substrate, a qubit readout element on the second dielectric substrate, a control wire on the second dielectric substrate, a dielectric layer covering the control wire, and a shielding layer covering the dielectric layer.
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公开(公告)号:US11937520B2
公开(公告)日:2024-03-19
申请号:US17989833
申请日:2022-11-18
Applicant: Google LLC
Inventor: Julian Shaw Kelly , Joshua Yousouf Mutus
IPC: H10N69/00 , G06N10/00 , H01L25/065
CPC classification number: H10N69/00 , G06N10/00 , H01L25/0657 , H01L2225/06513
Abstract: A stacked quantum computing device including: a first chip including a superconducting qubit, where the superconducting qubit includes a superconducting quantum interference device (SQUID) region, a control region, and a readout region, and a second chip bonded to the first chip, where the second chip includes a first control element overlapping with the SQUID region, a second control element displaced laterally from the control region and without overlapping the control region, and a readout device overlapping the readout region.
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