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公开(公告)号：US09240305B2
公开(公告)日：2016-01-19
申请号：US14422186
申请日：2013-07-03
CPC分类号： H01J37/20 , H01J37/18 , H01J37/261 , H01J37/28 , H01J2237/16 , H01J2237/20 , H01J2237/2003 , H01J2237/20235 , H01J2237/20292 , H01J2237/2605 , H01J2237/2608
摘要： All of the conventional charged particle beam devices are designed only for the observation at atmospheric pressure or in gas atmosphere at a pressure substantially equal to the atmospheric pressure, and there is no device enabling easy observation using a typical high-vacuum charged particle microscope at atmospheric pressure or in gas atmosphere at a pressure substantially equal to the atmospheric pressure. Such a conventional technique has another problem that the distance between the diaphragm and a sample cannot be controlled, and so it has a high risk of breakage of the diaphragm. Then, the device of the present invention includes a diaphragm configured to separate a space to place a sample therein so that pressure of the space to place the sample therein is kept larger than pressure of the interior of the enclosure, the diaphragm letting the primary charged particle beam transmit or pass therethrough and being removable; a contact prevention member configured to prevent a contact between the sample and the diaphragm; and an adjustment mechanism configured to let at least a part of the contact prevention member in an optical axis direction of the charged particle optic column.
摘要翻译： 所有常规的带电粒子束装置均设计用于在大气压力或气体大气压力基本等于大气压力下进行观察，并且不存在使用典型的高真空带电粒子显微镜在大气中容易观察的装置 压力或气体气氛中的压力基本上等于大气压力。 这种传统技术具有不能控制隔膜与样品之间的距离的问题，因此隔膜的破损风险高。 然后，本发明的装置包括隔膜，其被配置为分隔空间以将样品放置在其中，使得将样品放置在其中的空间的压力保持大于外壳内部的压力，所述隔膜使初级带电 粒子束传播或通过并可移除; 接触防止构件，被配置为防止样品与隔膜之间的接触; 以及调整机构，其构造成使所述接触防止部件的至少一部分沿所述带电粒子光学柱的光轴方向。
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12.发明授权Inspection or observation apparatus and sample inspection or observation method 有权检验或观察仪器和样品检查或观察方法公开(公告)号：US09236217B2
公开(公告)日：2016-01-12
申请号：US14562260
申请日：2014-12-05
CPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/226 , H01J37/261 , H01J37/28 , H01J2237/166 , H01J2237/182 , H01J2237/2007 , H01J2237/204 , H01J2237/2602 , H01J2237/2608
摘要： A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance.
摘要翻译： 样品观察方法使用带电粒子束装置，其包括照射带电粒子束的带电粒子光学柱，真空室和能够存储样品的样品室。 该方法包括通过允许带电粒子束透射的薄膜来保持样品室的压力高于真空室的压力，确定薄膜的下表面的高度与薄膜的高度之间的关系 基于光学显微镜的镜筒的下端，测量样品和镜筒之间的距离，并根据关系和距离设定样品和薄膜之间的距离。
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13.发明申请Sample Storage Container, Charged Particle Beam Apparatus, and Image Acquiring Method 有权样品储存容器，带电粒子束装置和图像采集方法公开(公告)号：US20150255244A1
公开(公告)日：2015-09-10
申请号：US14438691
申请日：2013-10-29
CPC分类号： H01J37/16 , H01J37/20 , H01J37/28 , H01J2237/164 , H01J2237/182 , H01J2237/188 , H01J2237/2003 , H01J2237/2006 , H01J2237/20221 , H01J2237/20235 , H01J2237/28
摘要： A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.
摘要翻译： 本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103） 存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器 带电粒子束装置。
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公开(公告)号：US09466457B2
公开(公告)日：2016-10-11
申请号：US14422531
申请日：2013-07-01
发明人： Yusuke Ominami , Mami Konomi , Shinsuke Kawanishi , Sukehiro Ito
IPC分类号： H01J37/18 , H01J37/20 , H01J37/22 , H01J37/28 , H01J37/04 , H01J37/16 , H01J37/09 , H01J37/26
CPC分类号： H01J37/18 , H01J37/04 , H01J37/09 , H01J37/16 , H01J37/20 , H01J37/228 , H01J37/261 , H01J37/28 , H01J2237/045 , H01J2237/164 , H01J2237/1825 , H01J2237/2602 , H01J2237/2605
摘要： Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.
摘要翻译： 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相对侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。
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公开(公告)号：US09373480B2
公开(公告)日：2016-06-21
申请号：US14782695
申请日：2014-03-05
CPC分类号： H01J37/16 , H01J37/026 , H01J37/18 , H01J37/20 , H01J37/26 , H01J2237/0213 , H01J2237/022 , H01J2237/2003 , H01J2237/2006
摘要： In a SEM device which enables observations under an atmospheric pressure, in the event that a diaphragm is damaged during an observation of a sample, air flows into a charged particle optical barrel from the vicinity of the sample, due to the differential pressure between the inside of the charged particle optical barrel under vacuum and the vicinity of the sample under the atmospheric pressure. At this time, the sample may be sucked into the charged particle optical barrel. In this case, a charged particle optical system and a detector are contaminated thereby, which causes performance degradation or failures of the charged particle microscope. For coping therewith, it is necessary to prevent the charged particle optical barrel from being contaminated, without inducing a time lag, with a simple structure. In a charged particle beam device adapted to place a sample in a non-vacuum environment, there is provided a filter member which is placed on the path of a primary charged particle beam at least in a state where the primary charged particle beam is directed to the sample and, further, is adapted to transmit or pass, therethrough, the primary charged particle beam and secondary charged particles derived from the sample, while intercepting at least a portion of a scattering substance which is scattered in the event of a fracture of the diaphragm.
摘要翻译： 在能够在大气压下进行观察的SEM装置中，在样品观察期间膜片损伤的情况下，由于内部的压差，空气从样品附近流入带电粒子光学镜筒 的带电粒子光学筒在真空下和样品在大气压附近。 此时，样品可以被吸入带电粒子光学筒中。 在这种情况下，带电粒子光学系统和检测器被污染，导致带电粒子显微镜的性能下降或失效。 为了应对，需要以简单的结构防止带电粒子光学筒被污染，而不会引起时间滞后。 在适于将样品置于非真空环境中的带电粒子束装置中，设置有过滤构件，其至少在初级带电粒子束被引导到 样品，并且还适于透射或通过从样品衍生的初级带电粒子束和二次带电粒子，同时截留至少一部分在发生断裂的情况下散射的散射物质 隔膜
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16.发明申请Charged Particle Beam Device, Position Adjusting Method for Diaphragm, and Diaphragm Position Adjusting Jig 有权带电粒子束装置，隔膜位置调节方法和隔膜位置调节夹具公开(公告)号：US20150228449A1
公开(公告)日：2015-08-13
申请号：US14431061
申请日：2013-09-25
CPC分类号： H01J37/20 , H01J37/16 , H01J37/18 , H01J2237/164 , H01J2237/2608
摘要： In a charged particle beam device that performs observation of a sample under a gas environment in atmospheric pressure or pressure substantially equal to the atmospheric pressure, a diaphragm that separates an atmospheric pressure space, in which the sample is placed, and a vacuum space in an interior of an electron optical lens barrel is made very thin in order to allow an electron beam to transmit therethrough and damaged with a high possibility. Although at the time of replacing the diaphragm, it is necessary to adjust a position of a diaphragm, it is impossible to easily perform the adjustment of the position of the diaphragm by a conventional method. In a charged particle beam device with a configuration in which a thin film that separates a vacuum environment and an atmospheric environment or a gas environment is employed, a detachable diaphragm that partitions a space, in which a sample is placed, in such a manner that pressure in the space in which the sample is placed is maintained at a level larger than pressure in an interior of a housing, and that allows transmission or passage of a primary charged particle beam therethrough, and a movable member that can move the diaphragm in a state where the pressure in the space, in which the sample is placed, and the pressure in the interior of the housing are maintained as they are, are provided.
摘要翻译： 在大气压或基本上等于大气压的气体环境下对样品进行观察的带电粒子束装置中，分离放置样品的大气压力空间的膜片和 电子光学镜筒的内部被制成非常薄，以便允许电子束透射并且以很高的可能性被损坏。 虽然在更换隔膜时，需要调节隔膜的位置，但是不可能通过常规方法容易地进行隔膜位置的调节。 在采用分离真空环境和大气环境或气体环境的薄膜的结构的带电粒子束装置中，可以将放置样品的空间分隔开的可拆卸隔膜， 放置样品的空间中的压力保持在比壳体内部的压力大的水平面上，并且允许一次带电粒子束通过其的传播或通过;以及可移动膜片的可动件， 提供其中放置样品的空间中的压力以及壳体内部的压力原样保持的状态。
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公开(公告)号：USD730962S1
公开(公告)日：2015-06-02
申请号：US29484245
申请日：2014-03-07
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公开(公告)号：US10141157B2
公开(公告)日：2018-11-27
申请号：US15580403
申请日：2015-06-29
摘要： In a device for performing observation with a charged particle microscope at an atmospheric pressure using a diaphragm, while there was a demand that a distance between the diaphragm and a sample be reduced as much as possible, there was a problem that a limit for how close the diaphragm and the sample can be brought to each other was unknown in the past. In the present invention, a height adjustment member is used, and the position of a diaphragm in a charged particle beam device with respect to the height adjustment member is defined as the specific point of an optical device, so that the positional relationship between the height adjustment member and the diaphragm in the optical device is reproduced, and the height of a sample table with a Z-axis driving mechanism is adjusted so as to locate the surface of the sample at the position of the specific point of the optical device. According to this, the distance between the diaphragm and the sample can be safely and simply adjusted, and thus, an object is to adjust the distance between the diaphragm and the sample so that the distance is reduced as much as possible or the distance is fixed every time the sample is replaced.
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公开(公告)号：US09875877B2
公开(公告)日：2018-01-23
申请号：US15111907
申请日：2015-02-10
CPC分类号： H01J37/18 , H01J37/16 , H01J37/28 , H01J2237/0213 , H01J2237/022 , H01J2237/164 , H01J2237/182 , H01J2237/2605
摘要： In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.
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公开(公告)号：US09633817B2
公开(公告)日：2017-04-25
申请号：US14911681
申请日：2014-03-10
CPC分类号： H01J37/20 , G01M3/02 , H01J37/16 , H01J37/18 , H01J37/26 , H01J37/28 , H01J2237/188 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/2608 , H01J2237/2802
摘要： Conventional devices have been difficult to use due to insufficient consideration being given to factors such as the cost necessary for diaphragm replacement and the convenience of the work. In the present invention, a diaphragm mounting member installed in a charged particle beam device for radiating a primary charged particle beam through a diaphragm separating a vacuum space and an atmospheric pressure space onto a sample placed in the atmospheric pressure space is provided with a diaphragm installation portion to which a TEM membrane is mounted and a casing fixing portion mounted on a casing of the charged particle beam device. The diaphragm installation portion has a positioning structure for positioning a platform on which the diaphragm is held.
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