Abstract:
A read only memory having the capability of being written into once after manufacture. The cells of the memory are capable of being fused or permanently altered by directing a fusing current to the selected cells. The cell is a monolithic semiconductor device comprising a diode to be biased in a forward direction and a diode to be biased in the reverse direction structured so as to form back-to-back diodes. The reverse diode has a lower reverse breakdown voltage than the forward diode, and a metal connection, unconnected to any remaining circuit elements contacts the semiconductor device between diode junctions. The fusing current causes a metal-semiconductor alloy to form and short out the reverse diode.
Abstract:
A semiconductor device and a method for fabricating the same which is composed of a monocrystalline semiconductor body having a surface crystallographic orientation substantially parallel to a plane and having a PN junction formed in the body. The body has an insulator coating, such as silicon dioxide, over the PN junction. The surface state density at the semiconductorinsulator interface is very low. This low density is believed to be a reason for the increased beta in the oriented material semiconductor device. Further, the device has a low defect density and few dopant precipitate sites even at high dopant levels. A monolithic integrated circuit structure composed of the monocrystalline semiconductor substrate having a surface crystallographic orientation substantially parallel to a plane with a plurality of semiconductor devices within the substrate is described. The devices are isolated from one another by PN junctions. The tolerance in a given isolated device, between the PN junction and the nearest region having a different conductivity is less than approximately 0.3 mils. This very close spacing allows substantially greater compactness of semiconductor devices within a monocrystalline semiconductor body than has ever been previously accomplished.
Abstract:
A METHOD FOR FORMING ALUMINUM OHMIC CONTACTS AND CONDUCTIVE CONNECTORS ON SEMICONDUCTOR DEVICES HAVING SILICON DIOXIDE PASSIVATING MASKS COVERING PORTIONS OF A SEMICONDUCTOR SUBSTRATE. THE ALUMINUM CONTACTS AND CONNECTORS ARE FORMED BY THE DISPROPORTIONATION OF ALUMINUM MONO-HALIDE VAPOR IN THE PRESENCE OF THE SILICON DIOXIDE
MASKED SUBSTRATE. THE ALUMINUM FORMED BY THE DISPROPORTIONATION IS DEPOSITED AS A LAYER OVER THE MASKED SUBSTRATE. THEN, PORTIONS OF THE ALUMINUM LAYER ARE SELECTIVELY REMOVED TO LEAVE A PATTERN OHMIC CONTACTS AND CONDUCTIVE CONNECTORS.
Abstract:
1,193,532. Semi-conductor devices. INTERNATIONAL BUSINESS MACHINES CORP. 8 Jan., 1968 [13 Jan., 1967], No. 1001/68. Heading H1K. [Also in Division C7] Electrical contact is made to a semi-conductor region with an impurity concentration of at least 1018 atoms cm. -3 by depositing first a film of chromium, aluminium or titanium and then a film of nickel, silver, copper or copper chromium alloy. In one embodiment an antimony-doped N+type silicon wafer carrying an epitaxial N type layer is first provided with a silicon oxide coating by heating in dry oxygen and then in steam, or by R.F. sputtering, or with a layer of silicon nitride or alumina. Base and emitter regions are then formed by successive diffusions of boron and phosphorus into the N layer using standard planar techniques, the second diffusion doping the emitter and collector contact region with 5 Î 10 20 atoms/c.c. of phosphorus. Aluminium base and emitter contacts are next provided by vapour deposition overall followed by form-etching and sintering. Glass is subsequently deposited over the contacted face of the wafer in two stages of R.F. sputtering each followed by a firing stage. The wafer is then inverted in an evacuated vapour deposition chamber and its back collector contact face coated with successive layers of chromium, copper and gold of specified thickness while the wafer is held at 200-250‹ C. Holes are next etched through the glass layer to expose the aluminium contacts upon which similar layers of Cr, Cu and Au are then deposited through masks followed by layers of lead-tin solder by means of which nickel-plated copper balls are attached to the contacts. Finally the completed elements are attached to silver palladium lands on an alumina mounting plate and the ball contacts connected via nickel-plated copper strips to adjacent lands using lead-tin solder. In alternative planar diode and transistor embodiments the outer layer of gold is omitted.