Field-emitter having a sharp apex and small-apertured gate and method
for fabricating emitter
    11.
    发明授权
    Field-emitter having a sharp apex and small-apertured gate and method for fabricating emitter 失效
    具有尖锐顶点和小孔栅极的场致发射体以及用于制造发射极的方法

    公开(公告)号:US5494179A

    公开(公告)日:1996-02-27

    申请号:US275354

    申请日:1994-07-15

    CPC classification number: H01J1/3042 H01J9/025 H01J2201/319

    Abstract: The invention is a field-emission element having a cathode with a sharp apex and a gate with an aperture diameter less than 1 .mu.m that is fabricated by covering a silicon substrate with a silicon oxide layer, forming an etching mask of 1.0 .mu.m diameter from a silicon oxide layer by photolithography, wet-etching the etching mask to form a minute etching mask of less diameter, dry etching the substrate to form a cylindrical solid structure, followed by anisotropic etching to form a couple of minute conical-shaped structures facing each other and connected by their respective tops, vacuum evaporating around the minute structures an insulating layer and thereon a conducting layer for use as a gate electrode, and etching the minute structure to lift off the upper part of the minute conical shaped structures.

    Abstract translation: 本发明是一种场发射元件,其具有具有尖锐顶点的阴极和具有小于1μm的孔径的栅极,其通过用硅氧化物层覆盖硅衬底制成,形成1.0μm直径的蚀刻掩模 通过光刻从氧化硅层湿式蚀刻蚀刻掩模以形成较小直径的微小蚀刻掩模,干蚀刻基板以形成圆柱形固体结构,随后进行各向异性蚀刻以形成面对的微小锥形结构 彼此连接并通过其各自的顶部连接,在微小结构周围蒸发真空绝缘层,并在其上形成用作栅电极的导电层,并且蚀刻微小结构以剥离微小锥形结构的上部。

    X-RAY SENSOR, METHOD FOR TESTING THE X-RAY SENSOR, AND X-RAY DIAGNOSTIC DEVICE EQUIPPED WITH THE X-RAY SENSOR
    13.
    发明申请
    X-RAY SENSOR, METHOD FOR TESTING THE X-RAY SENSOR, AND X-RAY DIAGNOSTIC DEVICE EQUIPPED WITH THE X-RAY SENSOR 审中-公开
    X射线传感器,测试X射线传感器的方法和配备X射线传感器的X射线诊断装置

    公开(公告)号:US20130223593A1

    公开(公告)日:2013-08-29

    申请号:US13883230

    申请日:2011-11-16

    CPC classification number: G01T1/17 H01J31/28 H01L31/085 H01L31/115 H04N5/32

    Abstract: An X-ray sensor according to the present invention includes: a light-transmissive substrate (17); a light-transmissive electrode (21) formed on one surface of the light-transmissive substrate (17); and a photoconductive film (18) including a hole injection blocking layer (22), a field buffer layer (23), a hole trap layer (24), a photoconductive sensitive layer (25) having a charge-multiplying function, and an electron injection blocking layer (26), the layers being sequentially provided on the one surface of the light-transmissive substrate (17) having the light-transmissive electrode (21). The field buffer layer (23) is larger in thickness than a layer composed of the light-transmissive electrode (21) and the hole injection blocking layer (22).

    Abstract translation: 根据本发明的X射线传感器包括:透光基板(17); 形成在所述透光性基板(17)的一个面上的透光性电极(21)。 以及包含空穴注入阻挡层(22),场缓冲层(23),空穴俘获层(24),具有电荷倍增功能的光敏层(25)和电子 注入阻挡层(26),所述层依次设置在具有透光电极(21)的透光性基板(17)的一个面上。 场缓冲层(23)的厚度大于由透光电极(21)和空穴注入阻挡层(22)构成的层。

    Field-emission electron source apparatus
    14.
    发明申请
    Field-emission electron source apparatus 审中-公开
    场发射电子源装置

    公开(公告)号:US20070188090A1

    公开(公告)日:2007-08-16

    申请号:US11706531

    申请日:2007-02-13

    CPC classification number: H01J1/46 H01J3/021 H01J29/467 H01J31/123

    Abstract: An electron beam emitted from a field-emission electron source array passes through a plurality of through holes formed in a trimming electrode and reaches a target. Each of the plurality of through holes in the trimming electrode has an opening on a side of the field-emission electron source array and an electron beam passageway that continues from the opening. The length of the electron beam passageway is larger than the diameter of the opening. Part of the electron beam that has entered the through holes is absorbed and removed by a lateral wall of the electron beam passageway. In this way, it is possible to provide a high-definition field-emission electron source apparatus in which divergence of an electron beam emitted from a field-emission electron source array is suppressed.

    Abstract translation: 从场发射电子源阵列发射的电子束通过形成在修整电极中的多个通孔并达到目标。 修整电极中的多个通孔中的每一个在场发射电子源阵列的一侧具有开口,并且具有从开口延续的电子束通道。 电子束通道的长度大于开口的直径。 已经进入通孔的电子束的一部分被电子束通道的侧壁吸收和去除。 以这种方式,可以提供抑制从场发射电子源阵列发射的电子束的发散的高清晰度场致发射电子源装置。

    Electron gun and cathode-ray tube
    16.
    发明授权

    公开(公告)号:US06661166B2

    公开(公告)日:2003-12-09

    申请号:US10163146

    申请日:2002-06-04

    CPC classification number: H01J29/04 H01J3/022

    Abstract: A cathode includes emitter tips provided on a substrate, a gate electrode with an electric field formed between the gate electrode and the emitter tips, and terminals and leads for supplying voltages to the emitter tips and the gate electrode, respectively. A shield electrode further is provided between the cathode and a control electrode, and the shield electrode has a cylindrical projecting portion projecting toward the cathode, through which electron beams pass. The disturbance of an electric field by the leads influences the electron beams; however, this can be prevented by the projecting portion. Because of this, even if the size of the cathode is reduced, the distortion of an electron beam spot on a phosphor screen can be reduced. As a result, a cathode-ray tube with high resolution can be provided at a low cost.

    Vacuum-sealed field-emission electron source and method of manufacturing
the same
    17.
    发明授权
    Vacuum-sealed field-emission electron source and method of manufacturing the same 失效
    真空密封场致发射电子源及其制造方法

    公开(公告)号:US5909033A

    公开(公告)日:1999-06-01

    申请号:US967020

    申请日:1997-11-10

    CPC classification number: H01J3/022 H01J2329/00

    Abstract: A recess portion in a bowl-like shape is formed at the center of a silicon substrate, and plural cathodes are formed in a matrix with a predetermined distance therebetween on the bottom of the recess portion. Around each cathode on the silicon substrate, a withdrawn electrode is formed with an insulating film disposed therebelow. A first wire layer connected with the withdrawn electrode at one end extends along a slant side face of the recess portion and on the top face of a protrusion portion. A sealing cover in the shape of a flat plate of a transparent glass plate or the like is integrated with the silicon substrate with a circular sealing material disposed therebetween. A space formed among the silicon substrate, the circular sealing material and the sealing cover is retained to be vacuated.

    Abstract translation: 在硅基板的中心形成碗状形状的凹部,在凹部的底部以多个阴极以规定间隔形成多个阴极。 在硅衬底上的每个阴极周围,引出电极形成有布置在其下方的绝缘膜。 与退出电极的一端连接的第一线层沿着凹部的倾斜侧面和突出部的顶面延伸。 透明玻璃板等的平板形状的密封盖与硅基板一体地设置在其间的圆形密封材料。 在硅衬底,圆形密封材料和密封盖之间形成的空间被保持为真空。

    Field-emission electron source and method of manufacturing the same
    18.
    发明授权
    Field-emission electron source and method of manufacturing the same 失效
    场发射电子源及其制造方法

    公开(公告)号:US5897790A

    公开(公告)日:1999-04-27

    申请号:US995839

    申请日:1997-12-22

    CPC classification number: H01J9/025 H01J2201/30426

    Abstract: A withdrawn electrode is formed on a silicon substrate with intervention of upper and lower silicon oxide films each having circular openings corresponding to regions in which cathodes are to be formed. Tower-shaped cathodes are formed in the respective openings of the upper and lower silicon oxide films and of the withdrawn electrode. Each of the cathodes has a sharply tapered tip portion having a radius of 2 nm or less, which has been formed by crystal anisotropic etching and thermal oxidation process for silicon. The region of the silicon substrate exposed in the openings of the upper and lower silicon oxide films and the cathode have their surfaces coated with a thin surface coating film made of a material having a low work function.

    Abstract translation: 引出电极形成在硅衬底上,介于上和下氧化硅膜之间,每个氧化硅膜具有对应于其中将形成阴极的区域的圆形开口。 在上下氧化硅膜和引出电极的各个开口中形成塔状阴极。 每个阴极具有通过晶体各向异性蚀刻和硅的热氧化工艺形成的具有2nm或更小半径的尖锐尖端部分。 暴露在上,下氧化硅膜和阴极的开口中的硅衬底的区域的表面涂覆有由具有低功函数的材料制成的薄表面涂膜。

    Matrix-type cold-cathode electron source device
    19.
    发明授权
    Matrix-type cold-cathode electron source device 失效
    矩阵型冷阴极电子源装置

    公开(公告)号:US08294351B2

    公开(公告)日:2012-10-23

    申请号:US12920011

    申请日:2009-02-19

    Abstract: A matrix-type cold-cathode electron source device includes a mesh structure (8) on which through-holes (9) are formed and drive portions (7a, 7b). The through-hole (9) has an opening diameter of 1/N or less of the alignment pitch of electron source elements (4) and the drive portions (7a, 7b) drive the mesh structure (8) every 1/N of the alignment pitch of the electron source elements (4). Thus it is possible to increase a resolution without reducing the size of an electron source.

    Abstract translation: 矩阵型冷阴极电子源器件包括其上形成有通孔(9)的网状结构(8)和驱动部(7a,7b)。 通孔(9)的开口直径为电子源元件(4)的取向间距的1 / N以下,驱动部(7a,7b)每隔1 / N驱动网状结构(8) 电子源元件(4)的对准间距。 因此,可以在不减小电子源尺寸的情况下提高分辨率。

    HEAT GENERATING BODY BOX HOUSING REFRIGERATION DEVICE
    20.
    发明申请
    HEAT GENERATING BODY BOX HOUSING REFRIGERATION DEVICE 有权
    热发电机体外壳制冷装置

    公开(公告)号:US20120234034A1

    公开(公告)日:2012-09-20

    申请号:US13511458

    申请日:2010-11-19

    CPC classification number: H05K7/20681 F28D15/0266

    Abstract: A heat generating body box housing refrigeration device includes a first refrigerant cycle in which a first condenser and a first evaporator are connected by a first refrigerant liquid pipe and a first refrigerant steam pipe and a second refrigerant cycle in which a second condenser and a second evaporator are connected by a second refrigerant liquid pipe and a second refrigerant steam pipe. The first refrigerant liquid pipe is connected between a first joint and a second joint, the first refrigerant steam pipe is connected between a third joint and a fourth joint, the second refrigerant liquid pipe is connected between a fifth joint and a sixth joint, and the second refrigerant steam pipe is connected between a seventh joint and an eighth joint.

    Abstract translation: 发热体箱体的制冷装置包括:第一制冷剂循环,其中第一冷凝器和第一蒸发器通过第一制冷剂液体管和第一制冷剂蒸汽管和第二制冷剂循环连接,第二制冷剂循环中第二冷凝器和第二蒸发器 通过第二制冷剂液体管道和第二制冷剂蒸汽管道连接。 第一制冷剂液体管连接在第一接头和第二接头之间,第一制冷剂蒸汽管连接在第三接头和第四接头之间,第二制冷剂液体管连接在第五接头和第六接头之间, 第二制冷剂蒸汽管连接在第七关节和第八关节之间。

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