Abstract:
A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
Abstract:
Methods for forming a string of memory cells, an apparatus having a string of memory cells, and a system are disclosed. A method for forming the string of memory cells comprises forming a metal silicide source material over a substrate. The metal silicide source material is doped. A vertical string of memory cells is formed over the metal silicide source material. A semiconductor material is formed vertically and adjacent to the vertical string of memory cells and coupled to the metal silicide source material.
Abstract:
A method of forming a memory array includes forming a dielectric over a semiconductor, forming a charge-storage structure over the dielectric, forming an isolation region through the dielectric and the charge-storage structure and extending into the semiconductor, recessing the isolation region to a level below a level of an upper surface of the dielectric and at or above a level of an upper surface of the semiconductor, forming an access line over the charge-storage structure and the recessed isolation region, and forming an air gap over the recessed isolation region so that the air gap passes through the charge-storage structure, so that the air gap extends to and terminates at a bottom surface of the access line, and so that the entire air gap is between the bottom surface of the access line and the upper surface of the semiconductor.
Abstract:
Back gates and related apparatuses, systems, and methods are disclosed. An apparatus includes a channel material including a first side and a second side opposite the first side. The apparatus also includes word lines comprising electrically conductive material spaced along the first side of the channel material. The apparatus further includes a back gate comprising electrically conductive material proximate to the second side of the channel material. A method includes biasing a bit line and a word line associated with a memory cell according to a memory operation and biasing the back gate while biasing the bit line and the word line.
Abstract:
A memory device includes a string of series-connected memory cells, a data line, a first select transistor, a common source, a second select transistor, and a gate leakage transistor. The string of series-connected memory cells includes a vertical channel region. Each memory cell of the string of series-connected memory cells includes a first gate stack structure. The data line is connected to the vertical channel region. The first select transistor is connected between the data line and the string of series-connected memory cells. The second select transistor is connected between the common source and the string of series-connected memory cells. The gate leakage transistor is connected between the first select transistor and the second select transistor. The gate leakage transistor includes a second gate stack structure different from the first gate stack structure.
Abstract:
Processing logic in a memory device receives a request to execute a programming operation on a set of memory cells of the memory device. A first set of programming pulses corresponding to a first step voltage level are caused to be applied to one or more wordlines associated with the set of memory cells. The processing logic determines that a programming voltage level associated with a programming pulse of the first set of programming pulses satisfies a condition. A second set of programming pulses corresponding to a second step voltage level is caused to be applied to the one or more wordlines associated with the set of memory cells in response to the condition being satisfied.
Abstract:
Methods for programming sense flags may include programming memory cells coupled to first data lines in a main memory array, and programming memory cells coupled to second data lines in the main memory array while programming memory cells coupled to data lines in a flag memory array with flag data indicative of the memory cells coupled to the second data lines being programmed. Methods for sensing flags may include performing a sense operation on memory cells coupled to first data lines of a main memory array and memory cells coupled to data lines of a flag memory array, and determining a program indication of memory cells coupled to second data lines of the main memory array from the sense operation performed on the memory cells coupled to the data lines of the flag memory array.
Abstract:
Memory devices, methods for programming sense flags, methods for sensing flags, and memory systems are disclosed. In one such memory device, the odd bit lines of a flag memory cell array are connected with a short circuit to a dynamic data cache. The even bit lines of the flag memory cell array are disconnected from the dynamic data cache. When an even page of a main memory cell array is read, the odd flag memory cells, comprising flag data, are read at the same time so that it can be determined whether the odd page of the main memory cell array has been programmed. If the flag data indicates that the odd page has not been programmed, threshold voltage windows can be adjusted to determine the states of the sensed even memory cell page.
Abstract:
Methods for forming a string of memory cells, an apparatus having a string of memory cells, and a system are disclosed. A method for forming the string of memory cells comprises forming a metal silicide source material over a substrate. The metal silicide source material is doped. A vertical string of memory cells is formed over the metal silicide source material. A semiconductor material is formed vertically and adjacent to the vertical string of memory cells and coupled to the metal silicide source material.
Abstract:
Methods of forming semiconductor device structures are disclosed. One method comprises forming a plurality of loops of a conductive material. Each loop of the plurality of loops comprises a uniform pattern. In one embodiment, a portion of the conductive material is removed from at least one location in each loop of the plurality of loops. Contacts are formed to the conductive material. A semiconductor device structure is also disclosed.