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公开(公告)号：US20200173021A1
公开(公告)日：2020-06-04
申请号：US16674195
申请日：2019-11-05
Applicant: Moxtek, Inc.
Inventor： Matthew R. Linford , Brian Johnson , Anubhav Diwan
IPC: C23C16/455 , C23C16/40 , C23C16/48 , C23C16/56 , G02B5/30
Abstract: Thick, inorganic coatings can be deposited on a polarizer by chemical vapor deposition. In one embodiment, the method can comprise activating a surface of the polarizer with an oxygen plasma in an oven; injecting a solution including tetrakis(dimethylamino)silane dissolved in cyclohexane and water into the oven; and vapor depositing silicon dioxide onto the polarizer. These three steps can be repeated multiple times until desired thickness is attained.
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公开(公告)号：US10534120B2
公开(公告)日：2020-01-14
申请号：US15631256
申请日：2017-06-23
Applicant: Moxtek, Inc.
Inventor： R. Stewart Nielson , Mathew Free , Bradley R. Williams , Matthew R. Linford , Anubhav Diwan , Fred Lane , Shaun Ogden
IPC: G02B5/30 , G02B1/14 , C09D5/08 , C23C16/44 , C23C16/56 , C23C16/02 , C23C14/24 , C23C14/02 , C23C14/58 , B05D1/00 , C23C14/12 , C23C16/30 , C23C16/34 , C23C16/40 , C23C16/455 , G02B1/04 , H04N9/31 , G02B1/18 , B05D3/06 , B05D3/10 , B05D3/14 , G03B21/20
Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.
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公开(公告)号：US20160291227A1
公开(公告)日：2016-10-06
申请号：US15078549
申请日：2016-03-23
Applicant: Moxtek, Inc.
Inventor： Stew Nielson , Ted Wangensteen , Fred Lane , Matt Linford , Anubhav Diwan
IPC: G02B5/30 , G02B1/14 , G02B1/04 , C23C14/08 , B05D5/08 , C23C16/40 , C23C16/34 , C23C16/30 , C23C16/32 , G02B1/18 , C23C14/06
CPC classification number: G02B5/3058 , B05D1/60 , B05D5/08 , C09D5/084 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/0635 , C23C14/0652 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/083 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B1/14 , G02B1/18
Abstract: Wire grid polarizer (WGP) performance can be improved by use of certain water-soluble materials. Such water-soluble materials can be protected by a conformal coating, which can be applied by an anhydrous method, such as vapor deposition for example.
Abstract translation: 线栅偏振器（WGP）性能可以通过使用某些水溶性材料来改善。 这种水溶性材料可以通过保形涂层来保护，可以通过无水方法例如气相沉积来施加。
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公开(公告)号：US20160291209A1
公开(公告)日：2016-10-06
申请号：US15078695
申请日：2016-03-23
Applicant: Brigham Young University , Moxtek, Inc.
Inventor： Anubhav Diwan , Matt Linford , Fred Lane
IPC: G02B1/14 , G02B5/30 , C23C16/40 , C09D183/02 , C09D185/02 , C23C16/455 , G02B1/04 , C09D5/08
CPC classification number: G02B5/3058 , B05D1/60 , B05D5/08 , C09D5/084 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/0635 , C23C14/0652 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/083 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B1/14 , G02B1/18
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g.In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.
Abstract translation: 在上述WGP和方法中，X可以与肋骨结合; 每个R1可以是疏水基团; 每个R3（如果有的话）可以是任何化学元素或基团; d可以是1,2或3，e可以是1,2或3，g可以是0,1或2，d + e + g = 4; R2可以是硅烷反应性基团; 并且每个R 6可以是烷基，芳基或其组合。
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公开(公告)号：US11746418B2
公开(公告)日：2023-09-05
申请号：US16674195
申请日：2019-11-05
Applicant: Moxtek, Inc.
Inventor： Matthew R. Linford , Brian Johnson , Anubhav Diwan
IPC: C23C16/455 , C23C16/40 , C23C16/48 , C23C16/56 , G02B5/30 , C23C16/50 , C23C16/448 , C23C16/02
CPC classification number: C23C16/45548 , C23C16/02 , C23C16/402 , C23C16/4485 , C23C16/48 , C23C16/50 , C23C16/56 , G02B5/3025
Abstract: Thick, inorganic coatings can be deposited on a polarizer by chemical vapor deposition. In one embodiment, the method can comprise activating a surface of the polarizer with an oxygen plasma in an oven; injecting a solution including tetrakis(dimethylamino)silane dissolved in cyclohexane and water into the oven; and vapor depositing silicon dioxide onto the polarizer. These three steps can be repeated multiple times until desired thickness is attained.
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Patent Agency Ranking
公开(公告)号：US20210325589A1
公开(公告)日：2021-10-21
申请号：US17359923
申请日：2021-06-28
Applicant: Moxtek, Inc.
Inventor： Bradley R. Williams , R. Stewart Nielson , Anubhav Diwan , Eric Gardner , Shaun Patrick Ogden , Bob West
Abstract: A method of making a polarizer can include applying a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, then forming this into a different phase including a solid, interconnecting network of the inorganic nanoparticles. This method can improve manufacturability and reducing manufacturing cost. This method can be used to provide an antireflective coating, to provide a protective coating on polarization structures, to provide thin films for optical properties, or to form the polarization structures themselves.
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公开(公告)号：US20190032202A1
公开(公告)日：2019-01-31
申请号：US16028039
申请日：2018-07-05
Applicant: Moxtek, Inc. , Brigham Young University
Inventor： Anubhav Diwan , Matt Linford
IPC: C23C16/40 , C23C16/52 , C23C16/455 , G02B1/14
Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.
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公开(公告)号：US10025015B2
公开(公告)日：2018-07-17
申请号：US15613985
申请日：2017-06-05
Applicant: Moxtek, Inc.
Inventor： Matt Linford , Anubhav Diwan , Fred Lane , Stew Nielson , Ted Wangensteen
IPC: G02B5/30 , G02B1/04 , H04N9/31 , G02B1/18 , G02B1/14 , C23C16/455 , C23C16/40 , C23C16/34 , C23C16/30 , B05D1/00 , C23C14/12 , G03B21/20 , B05D3/06 , B05D3/10 , B05D3/14
Abstract: A wire grid polarizer (WGP) can have a phosphonate conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a chemical: where R1 can include a hydrophobic group, Z can include a bond to the ribs, and R5 can be any suitable chemical element or group. A method of applying a phosphonate conformal-coating over a WGP can include exposing the WGP to (R1)iPO(R4)j(R5)k, where: i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; each R1 can independently include a hydrophobic group; R4 can include a phosphonate-reactive-group; each R6 can independently include an alkyl group, an aryl group, or combinations thereof; and each R5, if any, can independently be any suitable chemical element or group.
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公开(公告)号：US09995864B2
公开(公告)日：2018-06-12
申请号：US15078695
申请日：2016-03-23
Applicant: Moxtek, Inc.
Inventor： Anubhav Diwan , Matt Linford , Fred Lane , Matthew C. George
IPC: G02B5/30 , G02B1/14 , G02B1/18 , C09D5/08 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/06 , C23C14/08 , C23C16/30 , C23C16/32 , G02B1/04 , C23C16/40 , C23C16/34 , C23C16/455 , B05D5/08 , B05D1/00
CPC classification number: G02B5/3058 , B05D1/60 , B05D5/08 , C09D5/084 , C09D183/02 , C09D183/04 , C09D185/02 , C23C14/0635 , C23C14/0652 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/083 , C23C16/308 , C23C16/325 , C23C16/345 , C23C16/401 , C23C16/403 , C23C16/405 , C23C16/45555 , G02B1/04 , G02B1/14 , G02B1/18
Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.
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公开(公告)号：US09939351B1
公开(公告)日：2018-04-10
申请号：US14563981
申请日：2014-12-08
Applicant: Moxtek, Inc.
Inventor： Matthew R. Linford , Anubhav Diwan , Bhupinder Singh
CPC classification number: G01N1/2214 , C23C14/10 , C23C14/185 , C23C14/34 , C23C14/35 , C23C14/5846 , G01N1/10 , G01N1/405 , G01N33/0011
Abstract: An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.
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