公开(公告)号：US06615681B1

公开(公告)日：2003-09-09

申请号：US09916020

申请日：2001-07-26

Applicant: Lyle J. Jenkins ,  Ralph E. Hopkins ,  Kaplesh Kumar ,  Paul Greiff ,  Edmund R. Foster ,  Richard M. Walker ,  Richard H. Coco ,  Anthony M. Moscaritolo

Inventor： Lyle J. Jenkins ,  Ralph E. Hopkins ,  Kaplesh Kumar ,  Paul Greiff ,  Edmund R. Foster ,  Richard M. Walker ,  Richard H. Coco ,  Anthony M. Moscaritolo

IPC: G01C1930

CPC classification number: G01C19/06 ,  Y10T74/125 ,  Y10T74/1282 ,  Y10T74/1293

Abstract: A hybrid wafer gyroscope includes a combination of micro-machined components and traditional electromechanical components to form a miniature gyroscope having a high degree of stability. The gyroscope includes a rotor, gimbal, flexures, and stop cutouts micro-machined out of one or more layers of silicon, forming a unitary, planar, and disk-shaped rotor subassembly, which spins about a drive shaft.

Abstract translation: 混合晶片陀螺仪包括微加工部件和传统机电部件的组合，以形成具有高度稳定性的微型陀螺仪。 陀螺仪包括由一个或多个硅层微机加工的转子，万向架，弯曲和停止切口，形成围绕驱动轴旋转的整体的，平面的和盘形的转子子组件。

公开(公告)号：US5760305A

公开(公告)日：1998-06-02

申请号：US602512

申请日：1996-02-20

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/00

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A monolithic, micromechanical vibrating beam accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally collinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction collinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer. Further disclosed is an alternative embodiment of the aforementioned accelerometer characterized by a low profile, and alternative planar processing methods for fabrication of these and other embodiments.

Abstract translation: 具有可调谐谐振频率的单片微机械振动束加速度计由硅衬底制成，硅衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。 谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。 每个柔性元件设置成与加速度计的至少一个加速度敏感轴线大致共线。 至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。 具有高纵横比的质量支撑梁支撑蚀刻坑的质量，同时允许质量沿与柔性元件共线的方向自由移动。 还公开了一种用于制造这种加速度计的方法。 进一步公开的是上述加速度计的替代实施例，其特征在于具有低轮廓和用于制造这些和其它实施例的替代平面处理方法。

公开(公告)号：US5725729A

公开(公告)日：1998-03-10

申请号：US698479

申请日：1996-08-15

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P15/08 ,  H01L21/3105

CPC classification number: B81C1/0019 ,  G01P15/0802 ,  B81B2207/015 ,  B81C2201/019 ,  G01P2015/0828 ,  G01P2015/0831

Abstract: An improved process for fabricating micromechanical devices having movable members, such as gyros and accelerometers. A starting wafer includes an oxidized silicon wafer which has been wafer bonded to a second silicon wafer which has a thin N layer on a P substrate. The wafer is patterned, doped and etched in a series of process steps which include the deposition of epitaxial layers to configure critical device dimensions and geometry. Metallizations are deposited for electrical/electronic interconnections. The process includes an ability to integrate on-chip electronics on the silicon substrate. Alignment difficulties and thermal mismatch associated with prior art processes are minimized.

Abstract translation: 一种用于制造具有可移动构件的微机械装置的改进方法，例如陀螺仪和加速度计。 起始晶片包括已经晶片结合到在P基板上具有薄N层的第二硅晶片的氧化硅晶片。 在一系列工艺步骤中对晶片进行图案化，掺杂和蚀刻，其中包括沉积外延层以配置关键器件尺寸和几何形状。 为电气/电子互连保留金属化。 该过程包括在硅衬底上集成片上电子器件的能力。 与现有技术方法相关联的对准困难和热失配被最小化。

公开(公告)号：US5581035A

公开(公告)日：1996-12-03

申请号：US297655

申请日：1994-08-29

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/13

CPC classification number: G01P15/131 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

Abstract: An electrostatically actuated micromechanical sensor having a guard band electrode for reducing the effect of transients associated with a dielectric substrate of the sensor. A proof mass, responsive to an input, is suspended over the substrate and one or more electrodes are disposed on the substrate in electrostatic communication with the proof mass to sense the input acceleration and/or to torque the proof mass back to a null position. A guard band electrode is disposed over the dielectric substrate in overlapping relationship with the electrodes and maintains the surface of the substrate at a reference potential, thereby shielding the proof mass from transients and enhancing the accuracy of the sensor.

Abstract translation: 一种具有保护带电极的静电致动微机械传感器，用于降低与传感器的电介质基板相关的瞬变的影响。 响应于输入的检测质量块悬挂在衬底上，并且一个或多个电极设置在衬底上，与校准物质静电连通以感测输入加速度和/或将校准质量块扭转回到零位置。 保护带电极以与电极重叠的关系设置在电介质基板上，并将基板的表面保持在参考电位，从而屏蔽了质量不受瞬态影响，并提高了传感器的精度。

公开(公告)号：US5507911A

公开(公告)日：1996-04-16

申请号：US422432

申请日：1995-04-14

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  H01L21/00

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0831 ,  Y10S438/978

Abstract: A monolithic, micromechanical vibrating string accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally colinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support, beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction colinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer with high aspect ratio tension relief and mass support beams.

Abstract translation: 具有可调谐谐振频率的单片微机械振弦系统加速度计由硅衬底制成，该衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。 谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。 每个柔性元件通常与加速度计的至少一个加速度敏感轴线共线设置。 至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。 质量支撑，具有高纵横比的梁支撑蚀刻凹坑上的质量，同时允许质量在与柔性元件的共线方向上自由移动。 还公开了一种用于制造具有高纵横比张力释放和质量支撑梁的这种加速度计的方法。

公开(公告)号：US5126812A

公开(公告)日：1992-06-30

申请号：US528051

申请日：1990-05-23

Applicant: Paul Greiff

Inventor： Paul Greiff

IPC: G01C19/5719 ,  G01P15/08

CPC classification number: G01C19/5719 ,  G01P15/0802 ,  G01P15/0888

Abstract: A micromechanical accelerometer is disclosed comprising a mass of monocrystalline silicon in which a substantially symmetrical plate attached to a silicon frame by flexible linkages is produced by selective etching. The plate has a plurality of apertures patterned and etched therethrough to speed further etching and freeing of the plate and flexible linkages, suspending them above a void etched beneath. The plate has a weight disposed thereon near an end remote from the flexible linkages. The plate is capable of limited motion about an axis created by the flexible linkages. Stop means limit motion of the plate about the axis. Strain relief tension beams are provided to relieve stress induced by boron diffusion necessary to provide etch stopping and the tension beams are trimmable in a manner which permits tuning of the resonant frequency of the plate. Grooves or depressions are provided in the flexible linkages to resist bending or buckling without increasing torsional stiffness. The plate and flexible linkages are electrically isolated from the silicon mass and frame by dielectric or P-N junction isolation. Integral P-N junction electrodes and surface bridging electrodes may be used to provide top to bottom symmetry in torquing and sensing of the plate while maintaining isolation and monlithic construction. Bias and readout circuitry used to sense and torque the plate may be provided integrally with the plate and formed during plate processing.

Abstract translation: 公开了一种微机械加速度计，其包括大量单晶硅，其中通过选择性蚀刻产生通过柔性连接件附接到硅框架的基本上对称的板。 该板具有图案化并通过其蚀刻的多个孔，以进一步蚀刻和释放板和柔性连接件，将它们悬挂在蚀刻在下面的空隙之上。 该板在其远离柔性连杆的端部附近设置有重物。 该板能够围绕由柔性连杆产生的轴限制运动。 停止是指限制板围绕轴的运动。 应力消除张力梁被提供以减轻由于提供蚀刻停止所需的硼扩散引起的应力，并且张力束可以以允许调谐板的谐振频率的方式进行调整。 在柔性连杆中提供凹槽或凹陷以抵抗弯曲或屈曲，而不增加扭转刚度。 板和柔性连接件通过电介质或P-N结隔离与硅质量块和框架电隔离。 整体P-N结电极和表面桥接电极可以用于在保持隔离和单层结构的同时在板的扭转和感测中提供顶对称对称性。 用于感测和扭转板的偏置和读出电路可以与板一体地设置并在板处理期间形成。

公开(公告)号：US20150372634A1

公开(公告)日：2015-12-24

申请号：US14740559

申请日：2015-06-16

Applicant: Paul Greiff ,  Jose M. Borrego

Inventor： Paul Greiff ,  Jose M. Borrego

IPC: H02S10/30 ,  H01L31/18 ,  H01L31/056

CPC classification number: H02S10/30 ,  H01L31/046 ,  H01L31/0465 ,  H01L31/056 ,  H01L31/068 ,  H01L31/1808 ,  Y02E10/52 ,  Y02E10/547

Abstract: A device, method and process of fabricating an interdigitated multicell thermo-photo-voltaic component that is particularly efficient for generating electrical energy from photons in the red and near-infrared spectrum received from a heat source in the near field. Where the absorbing region is germanium, the device is capable of generating electrical energy by absorbing photon energy in the greater than 0.67 electron volt range corresponding to radiation in the infrared and near-infrared spectrum. Use of germanium semiconductor material provides a good match for converting energy from a low temperature heat source. The side that is opposite the photon receiving side of the device includes metal interconnections and dielectric material which provide an excellent back surface reflector for recycling below band photons back to the emitter. Multiple cells may be fabricated and interconnected as a monolithic large scale array for improved performance.

Abstract translation: 一种用于制造交叉指示的多单元热电荷分量的装置，方法和过程，其特别有效地用于从近场中的热源接收的红色和近红外光谱中的光子产生电能。 在吸收区域是锗的情况下，该装置能够通过在大于0.67电子伏范围内吸收光子能量来产生电能，该范围对应于红外和近红外光谱中的辐射。 使用锗半导体材料可以很好地匹配从低温热源转换能量。 与器件的光子接收侧相对的一侧包括金属互连和电介质材料，其提供优良的后表面反射器，用于将低于光谱的光子再循环回发射器。 可以制造多个单元并将其互连成单片大规模阵列，以提高性能。

公开(公告)号：US20130298963A1

公开(公告)日：2013-11-14

申请号：US13469842

申请日：2012-05-11

Applicant: Paul Greiff ,  Jose M. Borrega

Inventor： Paul Greiff ,  Jose M. Borrega

IPC: H01L31/052 ,  H01L29/66 ,  H01L31/042

CPC classification number: H02S10/30 ,  H01L31/046 ,  H01L31/0465 ,  H01L31/056 ,  H01L31/068 ,  H01L31/1808 ,  Y02E10/52 ,  Y02E10/547

Abstract: A device, method and process of fabricating an interdigitated multicell thermo-photo-voltaic component that is particularly efficient for generating electrical energy from photons in the red and near-infrared spectrum received from a heat source in the near field. Where the absorbing region is germanium, the device is capable of generating electrical energy by absorbing photon energy in the greater than 0.67 electron volt range corresponding to radiation in the infrared and near-infrared spectrum. Use of germanium semiconductor material provides a good match for converting energy from a low temperature heat source. The side that is opposite the photon receiving side of the device includes metal interconnections and dielectric material which provide an excellent back surface reflector for recycling below band photons back to the emitter. Multiple cells may be fabricated and interconnected as a monolithic large scale array for improved performance.

公开(公告)号：US07356922B2

公开(公告)日：2008-04-15

申请号：US11113965

申请日：2005-04-25

Applicant: Charles R. Dauwalter ,  Donato Cardarelli ,  Paul Greiff

Inventor： Charles R. Dauwalter ,  Donato Cardarelli ,  Paul Greiff

IPC: H05K3/02 ,  H05K3/10

CPC classification number: H02K19/103 ,  G01C19/24 ,  G01P15/18 ,  H02K7/09 ,  Y10T29/4902 ,  Y10T29/49048 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49167

Abstract: Three magnetic substrates are provided, the first substrate forms the rotor and the other two form the outer stator. A series of spaced concentric grooves and spaced spiral grooves are formed in the central region of both faces of the first substrate. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves, forming a central wheel. A series of spaced serpentine grooves and generally radial grooves are formed on each active face of the other two substrates. A conductor is then deposited into the serpentine grooves, and a magnetic material is deposited into the generally radial grooves. The two outer substrates are then bonded against the first substrate such that the outer end of each magnetic path overlays a filled hole in the first substrate, creating the stator of an axial air gap reluctance motor.

Abstract translation: 提供三个磁性基板，第一基板形成转子，另外两个形成外部定子。 在第一基板的两个表面的中心区域中形成一系列间隔开的同心凹槽和间隔开的螺旋槽。 在螺旋槽的中心放置一个孔，并填充有磁性材料。 然后将导体沉积到螺旋槽中，形成中心轮。 在其他两个基板的每个有效面上形成一系列间隔的蛇形槽和大体上的径向槽。 然后将导体沉积到蛇形槽中，并且将磁性材料沉积到大致径向的凹槽中。 然后将两个外部基板接合在第一基板上，使得每个磁路的外端覆盖第一基板中的填充孔，从而产生轴向气隙磁阻电动机的定子。

公开(公告)号：US5650568A

公开(公告)日：1997-07-22

申请号：US440536

申请日：1995-05-12

Applicant: Paul Greiff ,  Bernard M. Antkowiak

Inventor： Paul Greiff ,  Bernard M. Antkowiak

IPC: B81B3/00 ,  G01C19/5712 ,  G01P15/08 ,  G01P15/125 ,  G01P9/04

CPC classification number: G01C19/5712 ,  B81B3/0051 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0242 ,  B81B2203/056 ,  B81B2203/058

Abstract: A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis for providing an output torque about a coplanar output axis. The gyroscope also includes a post assembly extending between the support and the wheel assembly for supporting the wheel assembly. The wheel assembly has an inner hub, an outer wheel, and spoke flexures extending between the inner hub and the outer wheel and being stiff along both the input and output axes. A flexure is incorporated in the post assembly between the support and the wheel assembly inner hub and is relatively flexible along the output axis and relatively stiff along the input axis. Also provided is a single semiconductor crystal fabrication technique and a dissolved wafer fabrication technique. In one embodiment, the gyroscope includes comb drive electrodes. Also described is a box-shaped strain relief structure for use in the spoke flexures and additional strain relief features.

Abstract translation: 用于检测惯性空间中的旋转速度的摇摆陀螺陀螺仪。 陀螺仪包括定位在第一平面中的支撑件和布置在平行于第一平面的支撑件上的车轮组件。 车轮组件适于在第一平面中以预定频率旋转地旋转，并且响应于围绕共面输入轴的旋转速率，以提供围绕共面输出轴的输出扭矩。 陀螺仪还包括在支撑件和车轮组件之间延伸的支柱组件的支柱组件。 车轮组件具有内轮毂，外轮和在内轮毂和外轮之间延伸并且沿着输入轴和输出轴线都是刚性的轮辐弯曲件。 在支架和车轮组件内轮毂之间的后组件中并入弯曲部，并且沿着输出轴线相对柔性并且沿着输入轴线相对刚性。 还提供了单个半导体晶体制造技术和溶解晶片制造技术。 在一个实施例中，陀螺仪包括梳状驱动电极。 还描述了一种用于辐条弯曲和附加应变消除特征的箱形应变消除结构。