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175 条记录 (耗时 0.037 秒)

    Pulse power generating circuit with energy recovery
    14.
    发明授权
    Pulse power generating circuit with energy recovery 失效
    具有能量回收的脉冲发电电路

    公开(公告)号：US5729562A

    公开(公告)日：1998-03-17

    申请号：US739873

    申请日：1996-10-31

    申请人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

    发明人： Daniel L. Birx ,  Palash P. Das ,  Igor V. Fomenkov ,  William N. Partlo ,  Tom A. Watson

    IPC分类号： H01S3/00 ,  H01S3/097 ,  H01S3/225 ,  H02M9/04 ,  H03K3/57 ,  H03K17/00 ,  H03K17/80 ,  H05H1/06

    CPC分类号： H05H1/06 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225 ,  H03K2217/0036

    摘要： A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.

    摘要翻译： 公开了一种能够提供能量回收的高压脉冲发生电路。 能量效率脉冲发生电路源包括周期性地排放到压缩机电路中的高电压电荷存储元件。 耦合到压缩机电路的能量恢复电路反转由脉冲发电电路消耗的能量的极性，并将废能转移回电源。 在优选实施例中，本发明的脉冲发生电路利用SCR开关来周期性地对电荷存储元件进行放电。 本发明的该实施例一致地提供脉冲，并且甚至不会提供单个错过的脉冲。

    Laser having improved beam quality and reduced operating cost
    15.
    发明授权
    Laser having improved beam quality and reduced operating cost 失效
    激光器具有改善的光束质量和降低的操作成本

    公开(公告)号：US5748656A

    公开(公告)日：1998-05-05

    申请号：US583302

    申请日：1996-01-05

    申请人： Tom A. Watson ,  William N. Partlo ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    发明人： Tom A. Watson ,  William N. Partlo ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  H01S3/225 ,  H01S3/045

    CPC分类号： H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  F28D2021/0077 ,  H01S3/225

    摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

    摘要翻译： 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

    Smart laser with fast deformable grating
    16.
    发明授权
    Smart laser with fast deformable grating 失效
    具有快速可变形光栅的智能激光

    公开(公告)号：US06493374B1

    公开(公告)日：2002-12-10

    申请号：US09703317

    申请日：2000-10-31

    申请人： Igor V. Fomenkov ,  Frederick G. Erie ,  Jesse D. Buck ,  Palash P. Das

    发明人： Igor V. Fomenkov ,  Frederick G. Erie ,  Jesse D. Buck ,  Palash P. Das

    IPC分类号： H01S308

    CPC分类号： H01S3/13 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/0401 ,  H01S3/08059 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/139 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.

    摘要翻译： 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。 通过控制RMAX镜的位置来控制放电电压，波长来控制脉冲能量，通过调整光栅的曲率使形状比简单的凸形或简单的凹形更复杂，带宽是控制器。 优选实施例在5个水平位置上在光栅背面提供七个压电驱动压力 - 张力位置，以产生诸如S形，W形和扭曲形状的形状。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。

    Narrow band laser with fine wavelength control
    17.
    发明授权
    Narrow band laser with fine wavelength control 有权
    窄带激光器，具有良好的波长控制

    公开(公告)号：US06192064B1

    公开(公告)日：2001-02-20

    申请号：US09470724

    申请日：1999-12-22

    申请人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    发明人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    IPC分类号： H01S308

    CPC分类号： G03F7/70025 ,  G02B5/1828 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/08081 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.

    摘要翻译： 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。 通过控制放电电压来控制脉冲能量。 通过在线窄模块中的RMAX镜子的非常精细和快速的定位来控制波长。 带宽是通过调整线窄化模块中的光栅的曲率来控制的。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。 其它优选实施例包括在谐振腔内自动调整激光室的水平位置。 在优选实施例中，使用来自波长监视器的反馈信号来定位RMAX镜。 在其它优选实施例中，使用从RMAX镜反射到光电二极管阵列上的分离的激光束来定位反射镜。

    Pulse energy control for excimer laser
    19.
    发明授权
    Pulse energy control for excimer laser 失效
    准分子激光脉冲能量控制

    公开(公告)号：US06005879A

    公开(公告)日：1999-12-21

    申请号：US34870

    申请日：1998-03-04

    申请人： Richard L. Sandstrom ,  Herve Andre Besaucele ,  Igor V. Fomenkov ,  Palash P. Das

    发明人： Richard L. Sandstrom ,  Herve Andre Besaucele ,  Igor V. Fomenkov ,  Palash P. Das

    IPC分类号： H01S3/038 ,  G03F7/20 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/08 ,  H01S3/081 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/225 ,  H01S3/00

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70216 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/134 ,  H01S3/225 ,  H01S3/036 ,  H01S3/08009 ,  H01S3/0812 ,  H01S3/09713 ,  H01S3/2251 ,  H01S3/2256

    摘要： A process for controlling pulse energy and integrated energy dose in bursts of pulses produced by an excimer laser. The energy of each pulse in each burst is measured. The rate of change of pulse energy with charging voltage is determined. A pulse energy error is determined for a previous pulse of the present burst. An integrated dose error is also determined for all previous pulses in the current burst. A charging voltage for the next pulse is determined using the pulse energy error, the integrated dose error, the rate of change of energy with charging voltage and a reference voltage. In a preferred embodiment, the rate of change of energy with voltage is determined by dithering the voltage during two pulses of each burst, once lower and once higher. The reference voltage is a voltage calculated using prior energy and voltage data. In this embodiment, the method of determining the reference voltage during a first portion of the pulse is different from the method used during a latter portion of the burst. During the first set of pulses (40 in this embodiment), for each pulse, a specified voltage calculated using voltage and energy data from a corresponding pulse in a previous burst is utilized as a prediction of the voltage needed to produce a pulse energy converging on a target pulse energy. For pulses 41 and thereafter the reference voltage for each pulse is the specified voltage for the previous pulse.

    摘要翻译： 用于在由准分子激光器产生的脉冲脉冲中控制脉冲能量和积分能量剂量的过程。 测量每个脉冲中每个脉冲的能量。 确定脉冲能量随充电电压的变化率。 针对当前脉冲串的先前脉冲确定脉冲能量误差。 还针对当前突发中的所有先前脉冲确定积分剂量误差。 使用脉冲能量误差，积分剂量误差，带充电电压的能量变化率和参考电压确定下一个脉冲的充电电压。 在优选实施例中，通过在每个脉冲串的两个脉冲期间抖动电压来确定能量与电压的变化率，一旦较低和一次较高。 参考电压是使用先前的能量和电压数据计算的电压。 在本实施例中，在脉冲的第一部分期间确定参考电压的方法与在脉冲串的后一部分期间使用的方法不同。 在第一组脉冲（在本实施例中为40）中，对于每个脉冲，使用从先前脉冲串中的对应脉冲的电压和能量数据计算的指定电压作为产生脉冲能量收敛所需的电压的预测 目标脉冲能量。 对于脉冲41，此后每个脉冲的参考电压是先前脉冲的指定电压。

    Laser-illuminated stepper or scanner with energy sensor feedback
    20.
    发明授权
    Laser-illuminated stepper or scanner with energy sensor feedback 失效
    具有能量传感器反馈的激光照明步进或扫描仪

    公开(公告)号：US6067306A

    公开(公告)日：2000-05-23

    申请号：US81374

    申请日：1998-05-19

    申请人： Richard L. Sandstrom ,  Palash P. Das ,  Igor V. Fomenkov ,  Herve A. Besaucele ,  Robert G. Ozarski

    发明人： Richard L. Sandstrom ,  Palash P. Das ,  Igor V. Fomenkov ,  Herve A. Besaucele ,  Robert G. Ozarski

    IPC分类号： G03F7/20 ,  H01S3/03 ,  H01S3/036 ,  H01S3/08 ,  H01S3/134 ,  H01S3/225 ,  H01S3/00

    CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/134 ,  H01S3/225 ,  H01S3/036 ,  H01S3/08009 ,  H01S3/2251 ,  H01S3/2256

    摘要： A laser-illuminated wafer-exposing system such as a stepper or scanner having a first light intensity detector located within the exposing system near a mask and second light intensity detector located near the output of the laser. A feedback control system controls the output of the laser based on signals detected by at least one of the detectors. The feedback control system includes a processor programmed with an algorithm which is used to control the laser discharge voltage in order to provide light pulses having desired intensity at the mask with the laser operating in a burst mode. The algorithm utilizes at least the following parameters; a previously measured pulse energy, a calculated energy error, a calculated dose error, a value for the rate of change of pulse energy with voltage, and at least one reference voltage. In a preferred embodiment the algorithm uses the pulse energy measured with the light intensity detector located near the mark to provide the feedback control and uses the light intensity detector at the output of the laser to assure that the output of the laser is maintained within a predetermined range.

    摘要翻译： 激光照射的晶片曝光系统，例如步进器或扫描仪，其具有位于掩模附近的曝光系统内的第一光强度检测器和位于激光器输出附近的第二光强度检测器。 反馈控制系统基于由至少一个检测器检测到的信号来控制激光器的输出。 反馈控制系统包括用算法编程的处理器，该算法用于控制激光放电电压，以在激光器以突发模式工作的情况下在掩模处提供具有期望强度的光脉冲。 该算法至少使用以下参数; 先前测量的脉冲能量，计算的能量误差，计算的剂量误差，脉冲能量随电压的变化率的值和至少一个参考电压。 在优选实施例中，算法使用位于标记附近的光强度检测器测量的脉冲能量来提供反馈控制，并且在激光器的输出处使用光强度检测器，以确保激光器的输出保持在预定的 范围。