Three-dimensional semiconductor memory devices

    公开(公告)号:US10790358B2

    公开(公告)日:2020-09-29

    申请号:US16515412

    申请日:2019-07-18

    Abstract: A three-dimensional semiconductor memory device includes common source regions, an electrode structure between the common source regions, first channel structures penetrating the electrode structure, and second channel structures between the first channel structures and penetrating the electrode structures. The electrode structure includes electrodes vertically stacked on a substrate. The first channel structures include a first semiconductor pattern and a first vertical insulation layer. The second channel structures include a second vertical insulation layer surrounding a second semiconductor pattern. The second vertical insulation layer has a bottom surface lower than a bottom surface of the first vertical insulation layer.

    SEMICONDUCTOR MEMORY DEVICE
    13.
    发明公开

    公开(公告)号:US20230371265A1

    公开(公告)日:2023-11-16

    申请号:US18136993

    申请日:2023-04-20

    CPC classification number: H10B51/20 H10B51/10 H01L29/41725 H01L29/516

    Abstract: A semiconductor memory device is provided. The semiconductor memory device includes: a conductive layer on a substrate; an insulating isolation layer on the conductive layer; a stack structure on the insulating isolation layer, the stack structure including a plurality of source/drain contact layers and a plurality of gate electrode layers alternately provided along a first direction, perpendicular to an upper surface of the substrate; a vertical channel layer extending through the stack structure and the insulating isolation layer, wherein the vertical channel layer is in contact with each of the plurality of source/drain contact layers, and is connected to the conductive layer; and a gate insulating layer between each of the plurality of gate electrode layers and the vertical channel layer.

    Nonvolatile memory device and a method of adjusting a threshold voltage of a ground selection transistor thereof
    18.
    发明授权
    Nonvolatile memory device and a method of adjusting a threshold voltage of a ground selection transistor thereof 有权
    非易失性存储器件以及调整其接地选择晶体管的阈值电压的方法

    公开(公告)号:US08942042B2

    公开(公告)日:2015-01-27

    申请号:US13772868

    申请日:2013-02-21

    Abstract: A method of adjusting a threshold voltage of a ground selection transistor in a nonvolatile memory device includes providing a first voltage to a gate of a first ground selection transistor in a read operation and providing a second voltage to a gate of a second ground selection transistor in the read operation. The nonvolatile memory device includes at least one string, the string having string selection transistors, memory cells and the first and second ground selection transistors connected in series and stacked on a substrate.

    Abstract translation: 一种在非易失性存储器件中调整接地选择晶体管的阈值电压的方法包括:在读取操作中向第一接地选择晶体管的栅极提供第一电压,并向第二接地选择晶体管的栅极提供第二电压, 读操作。 非易失性存储器件包括至少一个串,串具有串选择晶体管,存储单元以及串联连接并堆叠在基板上的第一和第二接地选择晶体管。

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