High performance high voltage isolators

    公开(公告)号:US11881449B2

    公开(公告)日:2024-01-23

    申请号:US16916748

    申请日:2020-06-30

    CPC classification number: H01L23/5223 H01L23/5227 H01L23/585

    Abstract: An integrated circuit includes a semiconductor substrate and a plurality of dielectric layers over the semiconductor substrate, including a top dielectric layer. A metal plate or metal coil is located over the top dielectric layer; a metal ring is located over the top dielectric layer and substantially surrounds the metal plate or metal coil. A protective overcoat overlies the metal ring and overlies the metal plate or metal coil. A trench opening is formed through the protective overcoat, with the trench opening exposing the top dielectric layer between the metal plate/coil and the metal ring, the trench opening substantially surrounding the metal plate or metal coil.

    DIELECTRIC CRACK SUPPRESSION FABRICATION AND SYSTEM

    公开(公告)号:US20230197634A1

    公开(公告)日:2023-06-22

    申请号:US17558017

    申请日:2021-12-21

    CPC classification number: H01L23/562 H01L23/585 H01L28/10

    Abstract: An integrated circuit with a first conductive region, a second conductive region, a plurality of dielectric layers of a first material type between the first conductive region and the second conductive region, and at least one dielectric layer of a second material type, between a first dielectric layer in the plurality of dielectric layers of a first material type and a second dielectric layer in the plurality of dielectric layers of the first material type. Each dielectric layer of a first material type has a thickness in a range from 0.5 μm to 5.0 μm, and the at least one dielectric layer of a second material type is not contacting a metal and has a thickness less than 2.0 μm, and the second material type differs from the first material type in at least one of compression stress or elements in the first material type as compared to elements in the second material type.

Patent Agency Ranking