公开(公告)号：US20160320180A1

公开(公告)日：2016-11-03

申请号：US14721914

申请日：2015-05-26

Applicant: Honeywell International Inc.

Inventor： Grant H. Lodden ,  Robert D. Horning

IPC: G01B11/27 ,  G01P15/13 ,  G02B6/43 ,  G02B6/12 ,  G02B6/42

CPC classification number: G01B11/272 ,  B81B2201/0228 ,  B81B2201/04 ,  B81B2203/053 ,  G01C19/5621 ,  G01C19/5656 ,  G01C25/00 ,  G01P15/093 ,  G01P15/13 ,  G01P21/00 ,  G01P2015/0822 ,  G02B6/12 ,  G02B6/4295 ,  G02B6/43 ,  G02B2006/12138

Abstract: System and methods for highly integrated optical readout MEMS sensors are provided. In one embodiment, a method for an integrated waveguide optical-pickoff sensor comprises: launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port.

Abstract translation: 提供了高集成度光读出MEMS传感器的系统和方法。 在一个实施例中，一种用于集成波导光学传感器传感器的方法包括：将由激光光源产生的激光束发射到在第一衬底内单片制造的集成波导光学传感器中，所述集成波导光学传感器包括光输入 端口，耦合端口和光输出端口; 以及通过测量光输出端口处的激光束的衰减来检测激光束从耦合端口到与耦合端口分离的传感器部件之间的间隙的耦合量。

公开(公告)号：US20060145321A1

公开(公告)日：2006-07-06

申请号：US11316442

申请日：2005-12-22

Applicant: John Fisher

Inventor： John Fisher

IPC: H01L23/02

CPC classification number: G02B6/4226 ,  B81B2201/04 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3692 ,  G02B7/00 ,  G02B7/026

Abstract: Provided is a microcomponent holder for retaining a micro-scale component. The microcomponent holder includes at least one aperture for receiving a micro-scale component therein. At least one loop-shaped support member is disposed about the aperture for contacting the micro-scale component to retain the micro-scale component within the microcomponent holder. The invention allows for retaining of microscale objects, such as lenses or other parts of micro-optical, micro-mechanical, micro-electromechanical, and other micro-scale systems.

Abstract translation: 提供了用于保持微尺度部件的微部件保持器。 微元件支架包括用于在其中接收微尺度部件的至少一个孔。 至少一个环形支撑构件设置在孔周围，用于接触微尺度部件以将微尺度部件保持在微部件保持器内。 本发明允许保留诸如透镜或微光学，微机械，微机电和其他微尺度系统的其它部件的微尺寸物体。

公开(公告)号：US20060037933A1

公开(公告)日：2006-02-23

申请号：US10923026

申请日：2004-08-23

Applicant: Wei-Ya Wang ,  Chung-Yuan Cheng ,  Tzu-Yang Wu ,  Keven Hung ,  Fei-Yuh Chen

Inventor： Wei-Ya Wang ,  Chung-Yuan Cheng ,  Tzu-Yang Wu ,  Keven Hung ,  Fei-Yuh Chen

IPC: C23F1/00 ,  B44C1/22

CPC classification number: C23F4/00 ,  B81B2201/04 ,  G02B26/0833

Abstract: A mirror process uses a tungsten passivation layer to prevent metal-spiking induced mirror bridging and improve mirror curvature. A mirror structure is patterned on a first sacrificial layer overlying a substrate. A tungsten passivation layer is then blanket deposited to cover the top and sidewalls of the mirror structure. A second sacrificial layer is formed overlying the tungsten passivation layer. A releasing process with an etchant including XeF2 is performed to remove the second sacrificial layer, the tungsten passivation layer and the first sacrificial layer simultaneously.

Abstract translation: 镜面处理使用钨钝化层来防止金属尖峰引起的反射镜桥接并改善镜面曲率。 在覆盖衬底的第一牺牲层上图案化镜面结构。 钨钝化层然后被覆盖沉积以覆盖镜结构的顶部和侧壁。 覆盖钨钝化层的第二牺牲层被形成。 执行包括XeF 2＆gt; 2的蚀刻剂的释放过程以同时去除第二牺牲层，钨钝化层和第一牺牲层。

公开(公告)号：US11994620B2

公开(公告)日：2024-05-28

申请号：US16829812

申请日：2020-03-25

Applicant: INNOVIZ TECHNOLOGIES LTD

Inventor： Amit Steinberg ,  Alon Gan

IPC: G01S7/481 ,  B60S1/02 ,  B81B3/00 ,  G01H1/00 ,  G01S7/48 ,  G01S7/484 ,  G01S7/4863 ,  G01S7/4911 ,  G01S7/4914 ,  G01S7/497 ,  G01S17/06 ,  G01S17/10 ,  G01S17/32 ,  G01S17/42 ,  G01S17/58 ,  G01S17/89 ,  G01S17/931 ,  G02B26/12

CPC classification number: G01S7/4817 ,  B60S1/02 ,  B81B3/0018 ,  G01H1/00 ,  G01S7/4802 ,  G01S7/4808 ,  G01S7/4814 ,  G01S7/4815 ,  G01S7/4816 ,  G01S7/484 ,  G01S7/4863 ,  G01S7/4911 ,  G01S7/4914 ,  G01S7/497 ,  G01S17/06 ,  G01S17/10 ,  G01S17/32 ,  G01S17/42 ,  G01S17/58 ,  G01S17/89 ,  G01S17/931 ,  B81B2201/04 ,  G01S2007/4975 ,  G02B26/122

Abstract: A LIDAR system may include: a first housing containing a processor configured to control a light source to enable light flux of the light source to vary over a scan of a field of view; a second housing located in a vehicle remote from the first housing, the second housing containing a controllable light deflector, and an actuator configured to move the light deflector; and a data conduit configured to interconnect the first housing and the second housing, the data conduit is associated with a forward path from the first housing to the second housing and a return path from the second housing to the first housing, wherein the data conduit is configured to cooperate with the processor and the actuator such that the forward path conveys signals for controlling the actuator and the return path conveys reflections signals indicative of light reflected from objects in the field of view.

公开(公告)号：US11977220B2

公开(公告)日：2024-05-07

申请号：US17111309

申请日：2020-12-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： William Craig McDonald ,  James Norman Hall ,  Terry Alan Bartlett

IPC: G02B5/08 ,  B81B3/00 ,  B81B7/00 ,  G02B6/35 ,  G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/0056 ,  B81B3/0078 ,  B81B3/0086 ,  B81B7/0022 ,  G02B6/352 ,  B81B2201/04 ,  G02B5/08 ,  G02F2203/12

Abstract: A digital micromirror device comprises an array of micromirror pixels, the array comprising a first micromirror pixel and a second micromirror pixel. The first micromirror pixel comprises a hinge, where the hinge is configured to tilt toward a first raised address electrode and toward a second raised address electrode. The first micromirror pixel also comprises a first micromirror coupled to the hinge, where the first micromirror has a sculpted edge. The second micromirror pixel comprises a second micromirror, where a first gap between a first point on the sculpted edge and a nearest point to the first point on the second micromirror is larger than a second gap between a second point on the sculpted edge and a nearest point to the second point on the second micromirror.

公开(公告)号：US11835712B2

公开(公告)日：2023-12-05

申请号：US17304873

申请日：2021-06-28

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Laurent Mollard ,  Christel Dieppedale ,  Stéphane Fanget ,  Daivid Fowler

IPC: G02B6/293 ,  G02B26/10 ,  G02B26/08 ,  H10N30/20 ,  G02B26/06 ,  G02B27/00 ,  G02B6/35

CPC classification number: G02B26/10 ,  G02B6/29301 ,  G02B6/29314 ,  G02B6/3504 ,  G02B6/3566 ,  G02B26/06 ,  G02B26/0858 ,  G02B26/103 ,  G02B27/0087 ,  H10N30/20 ,  B81B2201/04

Abstract: The present invention relates to a scanner provided with a vibratory beam on or in which is formed a phased array intended to extract according to either one of two parallel faces of the beam a light radiation that could be emitted by a light source.

公开(公告)号：US11703679B2

公开(公告)日：2023-07-18

申请号：US16625695

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B2201/04 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81B2203/0154

Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.

公开(公告)号：US20190179134A1

公开(公告)日：2019-06-13

申请号：US15836521

申请日：2017-12-08

Applicant: Texas Instruments Incorporated

Inventor： Adam Joseph Fruehling ,  James Norman Hall

IPC: G02B26/06 ,  G09G3/34 ,  G02B26/08

CPC classification number: G02B26/06 ,  B81B2201/04 ,  G02B26/0833 ,  G02B26/0841 ,  G09G3/3466

Abstract: In methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator, an example apparatus includes: an electrode with spring legs; a base electrode; a mirror displacement determiner to determine a periodic signal corresponding to a displacement distance of the electrode beyond an instability point of the electrode; and a voltage source to output a periodic voltage to the base electrode in response to the periodic signal. The periodic voltage causes the spring legs to vary displacement of the electrode with respect to the base electrode according to the periodic voltage. The displacement includes distances beyond the instability point.

公开(公告)号：US20170227761A1

公开(公告)日：2017-08-10

申请号：US15496868

申请日：2017-04-25

Applicant: Naoki NAKAMURA ,  Daisuke ICHll ,  Hiromichi ATSUMI ,  Naoki MIYATAKE ,  Yuki HAYASHI

Inventor： Naoki NAKAMURA ,  Daisuke ICHll ,  Hiromichi ATSUMI ,  Naoki MIYATAKE ,  Yuki HAYASHI

IPC: G02B26/12 ,  G02B27/10 ,  G02B27/01 ,  G02B26/10

CPC classification number: G02B26/126 ,  B81B2201/04 ,  B81B2201/042 ,  G02B26/10 ,  G02B26/101 ,  G02B26/105 ,  G02B27/01 ,  G02B27/0101 ,  G02B27/104 ,  G02B2027/011 ,  G02B2027/013 ,  G02B2027/0141 ,  G02B2027/0145 ,  G03B21/2013 ,  G03B21/2033 ,  G09G5/00

Abstract: An image display apparatus includes a light source device including a light source unit; a scanning optical system including an image forming unit on which an intermediate image is formed by light from the light source unit; and a virtual image optical system configured to guide light of the intermediate image by using a reflecting mirror and a curved transmissive reflection member. The scanning optical system includes an optical scanning unit configured to scan the light from the light source unit in a main scanning direction and a sub-scanning direction of the image forming unit. The image forming unit is a transmissive member curved with a convex surface toward the reflecting mirror.

公开(公告)号：US20170129775A1

公开(公告)日：2017-05-11

申请号：US15416206

申请日：2017-01-26

Applicant: Raytheon Company

Inventor： Buu Q. Diep ,  Adam M. Kennedy ,  Thomas Allan Kocian ,  Mark Lamb

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0058 ,  B81B7/0041 ,  B81B2201/0207 ,  B81B2201/04 ,  B81C1/00269 ,  B81C1/00317 ,  B81C2203/0109 ,  B81C2203/0118 ,  B81C2203/0145 ,  B81C2203/019

Abstract: A microelectromechanical systems (MEMS) package includes a substrate extending between a first pair of outer edges to define a length and a second pair of outer edges to define a width. A seal ring assembly is disposed on the substrate and includes at least one seal ring creating a first boundary point adjacent to at least one MEMS device and a second boundary point adjacent at least one of the outer edges. The package further includes a window lid on the seal ring assembly to define a seal gap containing the at least one MEMS device. The seal ring assembly anchors the window lid to the substrate at the second boundary point such that deflection of the window lid into the seal gap is reduced.