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公开(公告)号：US20140167908A1
公开(公告)日：2014-06-19
申请号：US14185310
申请日：2014-02-20
IPC分类号： H01H37/52
CPC分类号： H01H37/52 , B81B3/0024 , G01K3/005 , G01K5/486 , H01L23/58 , H01L2924/0002 , H01L2924/00
摘要： An integrated circuit comprising a mechanical device for electrical switching comprising a first assembly being thermally deformable and having a beam held at at least two different locations by at least two arms, the beam and the arms being metal and disposed within the same metallization level, and further comprising at least one electrically conducting body. The first assembly has a first configuration at a first temperature and a second configuration at a second temperature different from the first temperature. The beam is out of contact with the electrically conducting body in one configuration in contact with the body in the other configuration. The beam establishes or breaks an electrical link passing through the said at least one electrically conducting body and through the said beam in the different configurations.
摘要翻译： 一种集成电路，包括用于电开关的机械装置，包括可热变形的第一组件，并且具有通过至少两个臂保持在至少两个不同位置处的梁，所述梁和所述臂是金属并且设置在相同的金属化水平内，以及 还包括至少一个导电体。 第一组件具有在第一温度下的第一构型和在与第一温度不同的第二温度下的第二构型。 在与另一种结构中的身体接触的一种结构中，光束与导电体脱离接触。 光束建立或断开通过所述至少一个导电体并通过所述光束的不同构造的电连接。
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12.发明授权Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch 有权用于在微型装置中实现开关功能并用于制造微型开关的方法公开(公告)号：US08420427B2
公开(公告)日：2013-04-16
申请号：US11492671
申请日：2006-07-25
IPC分类号： H01L21/00
CPC分类号： B81B3/0024 , B81B3/0051 , B81B2201/014 , B81B2201/018 , B81B2203/0118 , B81B2203/04 , B81B2207/07 , B81C1/0015 , B81C2201/0107 , B81C2201/0108 , B81C2201/0109 , H01H1/04 , H01H1/504 , H01H59/0009 , H01H61/04 , H01H2001/0042 , H01H2001/0063 , H01H2001/0089 , H01H2059/0072 , H01H2061/006 , H01L23/3735 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/09701 , H02N1/006 , H02N10/00 , Y10T29/49222 , H01L2924/00
摘要： Methods for Implementation of a Switching Function in a Microscale Device and for Fabrication of a Microscale Switch. According to one embodiment, a method is provided for implementing a switching function in a microscale device. The method can include providing a stationary electrode and a stationary contact formed on a substrate. Further, a movable microcomponent suspended above the substrate can be provided. A voltage can be applied between the between a movable electrode of the microcomponent and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode, whereby the movable component is deflected toward the substrate and a movable contact moves into contact with the stationary contact to permit an electrical signal to pass through the movable and stationary contacts. A current can be applied through the first electrothermal component to produce heating for generating force for moving the microcomponent.
摘要翻译： 用于实现微尺度装置中的切换功能以及用于制造微型开关的方法。 根据一个实施例，提供了一种用于在微型设备中实现切换功能的方法。 该方法可以包括提供固定电极和形成在基板上的固定触点。 此外，可以提供悬浮在基板上方的可移动微型部件。 可以在微型组件的可动电极和固定电极之间施加电压，以使可动电极与固定电极静电耦合，由此可动部件朝向基板偏转，并且可动触点移动到与固定触点接触 允许电信号通过可移动和固定触点。 可以通过第一电热部件施加电流以产生用于产生用于移动微型部件的力的加热。
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公开(公告)号：US20130005955A1
公开(公告)日：2013-01-03
申请号：US13448039
申请日：2012-04-16
申请人： Harold Stalford
发明人： Harold Stalford
CPC分类号： H02N10/00 , B81B3/0024 , B81B2201/031 , B81B2201/034 , B81B2201/037 , B81B2201/051 , H02K7/00 , H02N1/002 , H02N11/006
摘要： A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.
摘要翻译： 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。
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公开(公告)号：US08159107B2
公开(公告)日：2012-04-17
申请号：US11757331
申请日：2007-06-01
申请人： Harold L. Stalford
发明人： Harold L. Stalford
IPC分类号： H01L41/08
CPC分类号： H02N10/00 , B81B3/0024 , B81B2201/031 , B81B2201/034 , B81B2201/037 , B81B2201/051 , H02K7/00 , H02N1/002 , H02N11/006
摘要： A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.
摘要翻译： 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。
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公开(公告)号：US08120133B2
公开(公告)日：2012-02-21
申请号：US11519142
申请日：2006-09-11
申请人： Flavio Pardo
发明人： Flavio Pardo
IPC分类号： H01L29/12
CPC分类号： H01H61/04 , B81B3/0024 , B81B2201/018 , H01H2001/0047 , H01H2061/006 , H01H2061/008
摘要： A micro-electromechanical actuator employs metal for the hot arm and silicon for at least the flexible portion of the cold arm. The cold arm made of silicon is coupled to a metal wire that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.
摘要翻译： 微机电致动器至少将冷臂的柔性部分用于热臂和硅的金属。 由硅制成的冷臂联接到与其一起移动的金属线，并且当至少两个这样的致动器形成开关时，用于承载要切换的信号。 第一芯片上的这种开关的阵列可以与倒装芯片接合到第一芯片的第二芯片协同地布置，第二芯片具有将电控制电流路由到各种热臂以加热它们的电线， 信号由各种开关切换。
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公开(公告)号：US20100231652A1
公开(公告)日：2010-09-16
申请号：US12786268
申请日：2010-05-24
IPC分类号： B41J2/05
CPC分类号： B41J2/14427 , B41J2002/14435 , B41J2202/03 , B41J2202/15 , B81B3/0024 , B81B2201/032 , B81B2201/052
摘要： An inkjet nozzle assembly comprises: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator comprises: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.
摘要翻译： 喷墨喷嘴组件包括：具有喷嘴开口和墨入口的喷嘴室; 以及用于通过喷嘴开口喷射墨水的热弯曲致动器。 致动器包括：用于连接到驱动电路的主动梁; 与激活光束融合的第一被动束; 和与第二第一无源光束融合的第二无源光束。 第一无源光束夹在有源光束和第二无源光束之间，使得当电流通过有源光束时，有源光束相对于被动光束扩展，导致致动器弯曲并通过喷嘴喷射墨水 开放
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公开(公告)号：US07760065B2
公开(公告)日：2010-07-20
申请号：US11772039
申请日：2007-06-29
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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公开(公告)号：US20080061387A1
公开(公告)日：2008-03-13
申请号：US11519142
申请日：2006-09-11
申请人： Flavio Pardo
发明人： Flavio Pardo
IPC分类号： H01L29/82
CPC分类号： H01H61/04 , B81B3/0024 , B81B2201/018 , H01H2001/0047 , H01H2061/006 , H01H2061/008
摘要： A micro-electromechanical actuator employs metal for the hot arm and silicon for at least the flexible portion of the cold arm. The cold arm made of silicon is coupled to a metal wire that moves with it and is used to carry the signal to be switched when at least two of such actuators are formed into a switch. Arrays of such switches on a first chip may be cooperatively arranged with a second chip that is flip-chip bonded to the first chip, the second chip having thereon wires routing the electrical control currents to the various hot arms for heating them as well as the signals to be switched by the various switches.
摘要翻译： 微机电致动器至少将冷臂的柔性部分用于热臂和硅的金属。 由硅制成的冷臂联接到与其一起移动的金属线，并且当至少两个这样的致动器形成开关时，用于承载要切换的信号。 第一芯片上的这种开关的阵列可以与倒装芯片接合到第一芯片的第二芯片协同地布置，第二芯片具有将电控制电流路由到各种热臂以加热它们的电线， 信号由各种开关切换。
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公开(公告)号：US20070241635A1
公开(公告)日：2007-10-18
申请号：US11279954
申请日：2006-04-17
申请人： Scott Hunter , Gregory Simelgor
发明人： Scott Hunter , Gregory Simelgor
IPC分类号： H02N10/00
CPC分类号： H02N11/006 , B81B3/0024 , B81B2201/032
摘要： A thermal bimorph that exhibits improved layer adhesion and an enhanced bending response is disclosed. The thermal bimorph incorporates corrugations that extend fully through the bimorph to its two major surfaces. In some embodiments, the thermal bimorph is asymmetrically corrugated.
摘要翻译： 公开了一种具有改进的层粘合性和增强的弯曲响应的热双压电晶片。 热双压电晶片包括完全穿过双压电晶片到其两个主要表面的波纹。 在一些实施例中，热双压电晶片是不对称的波纹状的。
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公开(公告)号：US06917086B2
公开(公告)日：2005-07-12
申请号：US10817270
申请日：2004-04-02
IPC分类号： B81B3/00 , B81B7/00 , H01H1/04 , H01H1/50 , H01H59/00 , H01H61/04 , H01L21/302 , H01L23/373 , H01L23/522 , H01L27/12 , H01L29/86 , H02N1/00 , H02N10/00 , H01L29/82 , H01L21/00
CPC分类号： B81B3/0024 , B81B3/0051 , B81B2201/014 , B81B2201/018 , B81B2203/0118 , B81B2203/04 , B81B2207/07 , B81C1/0015 , B81C2201/0107 , B81C2201/0108 , B81C2201/0109 , H01H1/04 , H01H1/504 , H01H59/0009 , H01H61/04 , H01H2001/0042 , H01H2001/0063 , H01H2001/0089 , H01H2059/0072 , H01H2061/006 , H01L23/3735 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/09701 , H02N1/006 , H02N10/00 , Y10T29/49222 , H01L2924/00
摘要： Trilayered Beam MEMS Device and Related Methods. According to one embodiment, a method for fabricating a trilayered beam is provided. The method can include depositing a sacrificial layer on a substrate and depositing a first conductive layer on the sacrificial layer. The method can also include forming a first conductive microstructure by removing a portion of the first conductive layer. Furthermore, the method can include depositing a structural layer on the first conductive microstructure, the sacrificial layer, and the substrate and forming a via through the structural layer to the first conductive microstructure. Still furthermore, the method can include the following: depositing a second conductive layer on the structural layer and in the via; forming a second conductive microstructure by removing a portion of the second conductive layer, wherein the second conductive microstructure electrically communicates with the first conductive microstructure through the via; and removing a sufficient amount of the sacrificial layer so as to separate the first conductive microstructure from the substrate, wherein the structural layer is supported by the substrate at a first end and is freely suspended above the substrate at an opposing second end.
摘要翻译： 三层梁MEMS器件及相关方法。 根据一个实施例，提供一种制造三层梁的方法。 该方法可以包括在衬底上沉积牺牲层并在牺牲层上沉积第一导电层。 该方法还可以包括通过去除第一导电层的一部分来形成第一导电微结构。 此外，该方法可以包括在第一导电微结构，牺牲层和衬底上沉积结构层，并且通过结构层将通孔形成到第一导电微结构。 此外，该方法可以包括以下：在结构层和通孔中沉积第二导电层; 通过去除所述第二导电层的一部分来形成第二导电微结构，其中所述第二导电微结构通过所述通孔与所述第一导电微结构电连通; 以及去除足够量的牺牲层以便将第一导电微结构与衬底分开，其中结构层在第一端由衬底支撑并且在相对的第二端处自由地悬挂在衬底上方。
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