公开(公告)号：US06910932B2

公开(公告)日：2005-06-28

申请号：US09832875

申请日：2001-04-12

Applicant: Timothy R. Brumleve ,  Duane A. Stafford ,  Steven C. Hansen ,  Katsumi Fukutome

Inventor： Timothy R. Brumleve ,  Duane A. Stafford ,  Steven C. Hansen ,  Katsumi Fukutome

IPC: H01J9/395 ,  H01J61/20 ,  H01J61/24 ,  H01J61/28 ,  H01J9/38

CPC classification number: H01J9/395 ,  H01J61/20 ,  H01J61/28

Abstract: A solid mercury-releasing material and a method of dispensing precise amounts of mercury into the light emitting chamber of a discharge lamp without introducing the other dispenser components into the chamber are disclosed. The solid material includes an amalgam of one or more metals and mercury in the form of particles of high purity, uniform size and uniform composition.

Abstract translation: 公开了一种固体汞释放材料和将精确量的汞分配到放电灯的发光室中而不将其它分配器组件引入室中的方法。 固体材料包括一种或多种金属的汞齐和高纯度，均匀的尺寸和均匀组成的颗粒形式的汞。

公开(公告)号：US20050134182A1

公开(公告)日：2005-06-23

申请号：US10999768

申请日：2004-11-30

Applicant: Toshihiko Ishigami ,  Mikio Matsuda ,  Toshio Hiruta

Inventor： Toshihiko Ishigami ,  Mikio Matsuda ,  Toshio Hiruta

IPC: F21S8/10 ,  F21Y101/00 ,  H01J61/073 ,  H01J61/12 ,  H01J61/20 ,  H01J61/22 ,  H01J61/28 ,  H01J61/82 ,  H01J61/88 ,  H01J17/20

CPC classification number: H01J61/28 ,  F21S41/17 ,  H01J61/125 ,  H01J61/22 ,  H01J61/34 ,  H01J61/827

Abstract: A metal halide lamp comprises a refractory, light-transmitting hermetic vessel, a pair of electrodes sealed in the hermetic vessel, a discharge medium including a halide and a rare gas, and metal storing means storing at least one selected from the group consisting of potassium (K), rubidium (Rb) and cesium (Cs), the metal storing means being heated during lighting and gradually discharging at least one metal in the hermetic vessel.

Abstract translation: 金属卤化物灯包括耐火透光密封容器，密封在密封容器中的一对电极，包括卤化物和稀有气体的放电介质，以及存储选自钾 （K），铷（Rb）和铯（Cs），金属储存装置在照明期间加热并逐渐排出密封容器中的至少一种金属。

公开(公告)号：US20050073231A1

公开(公告)日：2005-04-07

申请号：US10957035

申请日：2004-10-01

Applicant: Kazuhiko Machida

Inventor： Kazuhiko Machida

IPC: H01T1/20 ,  H01J17/30 ,  H01J17/40 ,  H01T4/12 ,  H01J17/26 ,  H01J61/28

CPC classification number: H01T4/12 ,  H01J17/30 ,  H01J17/40 ,  H01T2/00

Abstract: A discharge tube is disclosed that includes: an airtight tube having first and second end surfaces each including a metallized surface; first and second discharge electrodes joined to the respective metallized surfaces; and multiple trigger lines formed on the inner wall surface of the airtight tube to extend along the axial directions of the airtight tube. The first and second discharge electrodes are joined to the metallized surfaces so that a discharge gap is formed between the first and second discharge electrodes and the airtight tube is hermetically sealed. The trigger lines include one or more first trigger lines connected to the metallized surfaces and multiple second trigger lines isolated from the metallized surfaces. The second trigger lines are formed at equal intervals on the inner wall surface of the airtight tube and each first trigger line is formed between a corresponding pair of the second trigger lines.

Abstract translation: 公开了一种放电管，其包括：气密管，其具有各自包括金属化表面的第一和第二端面; 连接到各个金属化表面的第一和第二放电电极; 以及形成在气密管的内壁表面上的多个触发线，以沿着气密管的轴向延伸。 第一放电电极和第二放电电极接合到金属化表面，使得在第一和第二放电电极之间形成放电间隙，气密管被密封。 触发线包括连接到金属化表面的一个或多个第一触发线和与金属化表面隔离的多个第二触发线。 第二触发线在气密管的内壁表面上以相等的间隔形成，并且每个第一触发线形成在相应的一对第二触发线之间。

公开(公告)号：US6137236A

公开(公告)日：2000-10-24

申请号：US203696

申请日：1998-12-02

Applicant: Leonardus G. M. Michiels ,  Petrus F. J. Van Den Boom ,  Petrus H. Antonis

Inventor： Leonardus G. M. Michiels ,  Petrus F. J. Van Den Boom ,  Petrus H. Antonis

IPC: H01J9/385 ,  H01J9/395 ,  H01J9/40 ,  H01J61/24 ,  H01J61/28 ,  H01J65/04 ,  H05B41/16

CPC classification number: H01J65/048 ,  H01J61/24 ,  H01J9/395 ,  H01J61/70

Abstract: A light-transmissive discharge vessel (1) encloses a discharge space (10) which contains an ionizable filling comprising an evaporable component. The low-pressure discharge lamp is also provided with coil for maintaining an electric discharge in the discharge space, and with a carrier (3) with a resilient body (30) and an open holder (31). The resilient body (30) is clamped inside a tube (14) which communicates with the discharge space (10). The holder (31) is clamped inside the resilient body (30). In the absence of the holder (31), the resilient body (30) can be inserted in a released state in the tube (14) with play (x).

Abstract translation: 光透射放电容器（1）包围放电空间（10），该放电空间包含可蒸发组分的可电离填充物。 低压放电灯还设置有用于保持放电空间中的放电的线圈，以及具有弹性体（30）和开口支架（31）的托架（3）。 弹性体（30）夹在与放电空间（10）连通的管（14）内。 夹持器（31）夹在弹性体（30）的内​​部。 在没有保持器（31）的情况下，弹性体（30）能够以释放（x）的形式在管（14）中以释放状态插入。

公开(公告)号：US6099375A

公开(公告)日：2000-08-08

申请号：US274870

申请日：1999-03-23

Applicant: Massimo della Porta

Inventor： Massimo della Porta

IPC: H01J9/385 ,  H01J9/395 ,  H01J61/04 ,  H01J61/24 ,  H01J61/28

CPC classification number: H01J61/28 ,  H01J61/04 ,  H01J61/24 ,  H01J9/385 ,  H01J9/395 ,  H01J61/26

Abstract: A mercury dispensing support strip capable of dispensing mercury and sorbing reactive gases. In one embodiment, the support strip of the invention includes at least one track of mercury releasing material deposited on one face of the support strip. At least one track of getter material is also deposited on the same face of the support strip. The tracks of mercury releasing and getter materials are deposited on the support strip such that the mechanical strains exerted by the materials on points of the support strip that are substantially symmetric with respect to a central axis of said first surface of said mercury dispensing support strip are substantially equivalent.

公开(公告)号：US6049162A

公开(公告)日：2000-04-11

申请号：US70028

申请日：1998-04-30

Applicant: Christoph Schultheiss ,  Vladimir Engelko ,  Gerd Kraft ,  Gustav Schumacher ,  Georg Muller

Inventor： Christoph Schultheiss ,  Vladimir Engelko ,  Gerd Kraft ,  Gustav Schumacher ,  Georg Muller

IPC: H01J3/02 ,  H01J37/06 ,  H01J17/26 ,  H01J61/28

CPC classification number: H01J3/02 ,  H01J37/06 ,  H01J2237/06375 ,  H01J2237/316

Abstract: In a pulsed electron beam source based on the vacuum principle, comprising a vacuum diode having a multi-point emission cathode with a flange and a plurality of emission points, a control grid, a pulse generator, a magnetic compression unit consisting of field coils, a drift chamber, a target chamber and a synchronization unit, the multipoint emission cathode is embedded in a shield electrode, and the shield electrode is connected to the cathode base by way of a resistor which is so sized that the shield electrode is capable of freely floating.

Abstract translation: 在基于真空原理的脉冲电子束源中，包括具有法兰和多个发射点的多点发射阴极的真空二极管，控制栅格，脉冲发生器，由场线圈组成的磁压缩单元， 漂移室，目标室和同步单元，多点发射阴极嵌入屏蔽电极中，屏蔽电极通过电阻器连接到阴极基座，电阻器的尺寸使得屏蔽电极能够自由地 浮动

公开(公告)号：US6031241A

公开(公告)日：2000-02-29

申请号：US1696

申请日：1997-12-31

Applicant: William T. Silfvast ,  Mark A. Klosner ,  Gregory M. Shimkaveg

Inventor： William T. Silfvast ,  Mark A. Klosner ,  Gregory M. Shimkaveg

IPC: H01J35/20 ,  G01J3/10 ,  G03F7/20 ,  H01J61/12 ,  H01J61/28 ,  H01J61/30 ,  H05G2/00 ,  G21G4/00

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G01J3/10 ,  G03F7/70016 ,  G03F7/70033 ,  G03F7/70916 ,  G03F7/70983 ,  H01J61/12 ,  H01J61/28 ,  H01J61/30 ,  H05G2/005

Abstract: Capillary discharge extreme ultraviolet lamp sources for EUV microlithography and other applications. The invention covers operating conditions for a pulsed capillary discharge lamp for EUVL and other applications such as resist exposure tools, microscopy, interferometry, metrology, biology and pathology. Techniques and processes are described to mitigate against capillary bore erosion, pressure pulse generation, and debris formation in capillary discharge-powered lamps operating in the EUV. Additional materials are described for constructing capillary discharge devices fore EUVL and related applications. Further, lamp designs and configurations are described for lamps using gasses and metal vapors as the radiating species.

Abstract translation: 毛细管放电极紫外灯源用于EUV微光刻等应用。 本发明涵盖用于EUVL的脉冲毛细管放电灯和诸如抗蚀剂曝光工具，显微镜，干涉测量，计量学，生物学和病理学的其它应用的操作条件。 描述了技术和过程，以减轻在EUV中操作的毛细管放电动力灯中的毛细管孔侵蚀，压力脉冲产生和碎片形成。 描述了用于在EUVL和相关应用之前构建毛细管放电装置的附加材料。 此外，对于使用气体和金属蒸气作为辐射种类的灯描述了灯的设计和配置。

公开(公告)号：US5986405A

公开(公告)日：1999-11-16

申请号：US976521

申请日：1997-11-21

Applicant: Bennie J. De Maagt ,  Claudio Boffito

Inventor： Bennie J. De Maagt ,  Claudio Boffito

IPC: H01J61/28 ,  H01J17/20 ,  H01J1/02 ,  H01J7/24 ,  H01J61/12

CPC classification number: H01J61/28 ,  H01J61/26 ,  H01J61/34 ,  H01J61/82

Abstract: The high pressure discharge lamp has a discharge vessel (1) mounted in an outer envelope (4) in which an oxygen dispenser (30) is disposed. The oxygen dispenser (30) contains silver oxide and may be disposed at a location where it obtains a temperature of at least 340.degree. C. during operation of the lamp, at which temperature the oxide is decomposed and oxygen is released. The deposit of black coatings originating from hydrocarbon contaminations is thereby prevented.

Abstract translation: 高压放电灯具有安装在其中设置有氧分配器（30）的外封套（4）中的放电容器（1）。 氧气分配器（30）含有氧化银，并且可以在灯的操作期间在其中获得至少340℃的温度的位置处，在该温度下氧化物被分解并释放氧气。 因此防止了源自碳氢化合物污染物的黑色涂层的沉积。

公开(公告)号：US5917276A

公开(公告)日：1999-06-29

申请号：US741162

申请日：1996-10-29

Applicant: Frans J. Traksel ,  Antonius J. Spaapen

Inventor： Frans J. Traksel ,  Antonius J. Spaapen

IPC: H01J9/38 ,  H01J9/395 ,  H01J61/24 ,  H01J61/28 ,  H01J1/62 ,  H01J17/22 ,  H01J19/70 ,  H01J63/04

CPC classification number: H01J61/28 ,  H01J9/395

Abstract: In a method according to the invention, a capsule (20) having a glass wall (21) and containing mercury is positioned in a radiation-transmitting discharge vessel, after which the discharge vessel is provided with a rare gas and closed, means for maintaining an electric discharge are arranged in or adjacent the discharge vessel, and the capsule is opened by fusion after the discharge vessel has been closed in that the capsule is heated by irradiation (42) with a parallel beam of radiation through the wall of the discharge vessel. The wall of the capsule has for this radiation an absorption coefficient which amounts at least ten times that of the wall portion of the discharge vessel. The method according to the invention renders possible a comparatively simple lamp construction.A low-pressure mercury discharge lamp is provided with a radiation-transmitting discharge vessel (10) which is closed in a gastight manner and has an ionizable filling comprising mercury, while a capsule (20) with a glass wall (21) having an opening (24) is arranged in the discharge vessel, and the lamp is in addition provided with means (31A, 31B) for maintaining an electric discharge in a discharge space (13) surrounded by the discharge vessel. The capsule (20) is accessible to radiation of at least a wavelength lying in a range from 100 nm to 5 .mu.m from outside the discharge vessel (10) through a wall portion (11) thereof, and the wall (21) of the capsule (20) has an absorption coefficient for this radiation which amounts at least ten times that of the wall portion (11) of the discharge vessel.

Abstract translation: 在根据本发明的方法中，具有玻璃壁（21）并含有汞的胶囊（20）位于辐射透射放电容器中，之后放电容器设有稀有气体并封闭，用于保持 在放电容器中或邻近放电容器设置放电，并且在放电容器已经封闭之后通过熔化来打开胶囊，因为通过照射（42）加热胶囊，平行辐射束通过放电容器的壁 。 胶囊的壁对于该辐射具有的吸收系数至少等于放电容器的壁部分的吸收系数的十倍。 根据本发明的方法使得相对简单的灯构造成为可能。 一种低压汞放电灯设置有以气密方式封闭并具有包含汞的可电离填充物的辐射透射放电容器（10），而具有玻璃壁（21）的胶囊（20）具有开口 （24）布置在放电容器中，并且该灯还具有用于在由放电容器包围的放电空间（13）内保持放电的装置（31A，31B）。 胶囊（20）能够通过其壁部（11）从放电容器（10）的外部至少波长在100nm至5μm的范围内的辐射进入，并且所述胶囊（20）的壁（21） 胶囊（20）对于该辐射具有吸收系数，该吸收系数至少等于放电容器的壁部分（11）的吸收系数的十倍。

公开(公告)号：US5831385A

公开(公告)日：1998-11-03

申请号：US777785

申请日：1995-06-07

Applicant: Antonio Schiabel ,  Claudio Boffito

Inventor： Antonio Schiabel ,  Claudio Boffito

IPC: H01J61/20 ,  B22F1/00 ,  H01J7/10 ,  H01J7/14 ,  H01J9/395 ,  H01J61/24 ,  H01J61/26 ,  H01J61/28 ,  H01J17/26 ,  H01J7/18 ,  H01K1/56

CPC classification number: H01J7/10 ,  B22F1/0003 ,  H01J61/24 ,  H01J7/14 ,  H01J9/395 ,  H01J61/72

Abstract: A mercury dispensing device is disclosed that includes a mercury dispenser having the formula Ti.sub.x Zr.sub.y Hg.sub.z in which x and y are between 0 and 13, inclusive, the quantity x+y is between 3 and 13, inclusive, and z is 1 or 2; and a promoter that comprises copper, silicon and possibly a third metal selected among the transition elements. A getter material selected among titanium, zirconium, tantalum, niobium, vanadium and mixtures thereof, and alloys of these metals with nickel, iron or aluminum can be included in the device. The mercury dispenser, promoter and optional getter material are provided preferably in the form of powders compressed as a pellet, or contained in a ring-shaped metallic support or rolled on the surfaces of a metallic strip. Also disclosed is a process for introducing mercury into electron tubes by making use of the above-mentioned mercury-dispensing devices.

Abstract translation: 公开了一种汞分配装置，其包括具有式TixZryHgz的水银分配器，其中x和y在0和13之间，包括x和y的含量在3和13之间，z是1或2; 以及包含选自过渡元素中的铜，硅和可能的第三金属的促进剂。 选自钛，锆，钽，铌，钒及其混合物的吸气剂材料，以及这些金属与镍，铁或铝的合金可以包括在该装置中。 汞分配器，促进剂和任选的吸气剂材料优选以以颗粒压缩的粉末的形式提供，或者包含在环形金属支撑体中或在金属带的表面上滚动。 还公开了通过使用上述汞分配装置将汞引入电子管的方法。