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公开(公告)号:US20070267746A1
公开(公告)日:2007-11-22
申请号:US11383595
申请日:2006-05-16
Applicant: Kerry Bernstein , Timothy Dalton , Timothy Harrison Daubenspeck , Jeffrey Peter Gambino , Mark David Jaffe , Christopher David Muzzy , Wolfgang Sauter , Edmund Sprogis , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Dalton , Timothy Harrison Daubenspeck , Jeffrey Peter Gambino , Mark David Jaffe , Christopher David Muzzy , Wolfgang Sauter , Edmund Sprogis , Anthony Kendall Stamper
CPC classification number: H01L24/10 , H01L23/13 , H01L23/481 , H01L23/49833 , H01L23/5385 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/73 , H01L25/0652 , H01L25/0655 , H01L2224/13 , H01L2224/13099 , H01L2224/14181 , H01L2224/16225 , H01L2224/16235 , H01L2224/17181 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/73257 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/1305 , H01L2924/1306 , H01L2924/14 , H01L2924/15174 , H01L2924/15192 , H01L2924/15311 , H01L2924/15787 , H05K1/145 , H05K3/222 , H05K2201/10674 , Y10T436/171538 , Y10T436/172307 , H01L2924/00014 , H01L2924/00
Abstract: An electronic device and method of packaging an electronic device. The device including: a first substrate, a second substrate and an integrated circuit chip having a first side and an opposite second side, a first set of chip pads on the first side and a second set of chip pads on the second side of the integrated circuit chip, chip pads of the first set of chip pads physically and electrically connected to corresponding substrate pads on the first substrate and chip pads of the second set of chip pads physically and electrically connected to substrate pads of the substrate.
Abstract translation: 一种电子装置和包装电子装置的方法。 该装置包括:第一基板,第二基板和具有第一侧和相对的第二侧的集成电路芯片,在第一侧上的第一组芯片焊盘和在集成的第二侧上的第二组芯片焊盘 电路芯片,第一组芯片焊盘的芯片焊盘物理和电连接到第一衬底上的对应衬底焊盘,并且第二组芯片焊盘的芯片焊盘物理和电连接到衬底的衬底焊盘。
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公开(公告)号:US08421126B2
公开(公告)日:2013-04-16
申请号:US13164173
申请日:2011-06-20
Applicant: Kerry Bernstein , Timothy Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
IPC: H01L27/085
CPC classification number: H01L25/0657 , H01L21/76895 , H01L23/481 , H01L23/522 , H01L23/5329 , H01L25/50 , H01L27/0688 , H01L2225/06513 , H01L2225/06527 , H01L2924/0002 , H01L2924/00
Abstract: Semiconductor structures. The semiconductor structures include two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers or bonding them back to back utilizing an inter-substrate dielectric layer and a bonding layer between the buried oxide layers. The structures include contacts formed in the upper wafer to devices in the lower wafer and wiring levels formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
Abstract translation: 半导体结构。 半导体结构包括两个绝缘体上硅晶片,其中制造了器件,并且利用掩埋氧化物层将它们背靠背接合,或者使用衬底间介质层和掩埋氧化物层之间的结合层将它们背靠背连接。 这些结构包括形成在上晶片中的触点与下晶片中的器件和形成在上晶片上的布线电平。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号:US07989312B2
公开(公告)日:2011-08-02
申请号:US12612957
申请日:2009-11-05
Applicant: Kerry Bernstein , Timothy Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
CPC classification number: H01L25/0657 , H01L21/76895 , H01L23/481 , H01L23/522 , H01L23/5329 , H01L25/50 , H01L27/0688 , H01L2225/06513 , H01L2225/06527 , H01L2924/0002 , H01L2924/00
Abstract: A semiconductor structure and method of fabricating the structure. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
Abstract translation: 一种半导体结构及其制造方法。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅,并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触,并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号:US20090121260A1
公开(公告)日:2009-05-14
申请号:US11939612
申请日:2007-11-14
Applicant: Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Stephen Ellinwood Luce , Anthony Kendall Stamper
IPC: H01L29/78
CPC classification number: G06F17/5077 , H01L21/6835 , H01L21/76895 , H01L21/84 , H01L23/481 , H01L23/535 , H01L24/83 , H01L25/0657 , H01L25/50 , H01L27/0688 , H01L29/045 , H01L2221/6835 , H01L2221/68359 , H01L2221/68368 , H01L2224/83894 , H01L2224/9202 , H01L2225/06513 , H01L2924/01019 , H01L2924/01029 , H01L2924/0132 , H01L2924/1305 , H01L2924/14 , H01L2924/19041 , H01L2924/01007 , H01L2924/01022 , H01L2924/00
Abstract: A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
Abstract translation: 双面集成电路芯片,制造双面集成电路芯片的方法和双面集成电路芯片的设计结构。 该方法包括从具有在其中制造的器件的两个绝缘体上硅晶片上去除背面硅,并利用掩埋氧化物层将它们背对背地接合。 然后在上晶片中形成与下晶片中的器件接触,并在上晶片上形成布线层。 下晶片可以包括布线水平。 下部晶片可以包括用于触点的着陆焊盘。 与下晶片的硅层的接触可以被硅化。
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公开(公告)号:US07462509B2
公开(公告)日:2008-12-09
申请号:US11383595
申请日:2006-05-16
Applicant: Kerry Bernstein , Timothy Dalton , Timothy Harrison Daubenspeck , Jeffrey Peter Gambino , Mark David Jaffe , Christopher David Muzzy , Wolfgang Sauter , Edmund Sprogis , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Dalton , Timothy Harrison Daubenspeck , Jeffrey Peter Gambino , Mark David Jaffe , Christopher David Muzzy , Wolfgang Sauter , Edmund Sprogis , Anthony Kendall Stamper
CPC classification number: H01L24/10 , H01L23/13 , H01L23/481 , H01L23/49833 , H01L23/5385 , H01L24/13 , H01L24/45 , H01L24/48 , H01L24/73 , H01L25/0652 , H01L25/0655 , H01L2224/13 , H01L2224/13099 , H01L2224/14181 , H01L2224/16225 , H01L2224/16235 , H01L2224/17181 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/73257 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/1305 , H01L2924/1306 , H01L2924/14 , H01L2924/15174 , H01L2924/15192 , H01L2924/15311 , H01L2924/15787 , H05K1/145 , H05K3/222 , H05K2201/10674 , Y10T436/171538 , Y10T436/172307 , H01L2924/00014 , H01L2924/00
Abstract: An method of packaging an electronic device. The method for packaging the device including: providing a first substrate, a second substrate and an integrated circuit chip having a first side and an opposite second side, a first set of chip pads on the first side and a second set of chip pads on the second side of the integrated circuit chip, chip pads of the first set of chip pads physically and electrically connected to corresponding substrate pads on the first substrate and chip pads of the second set of chip pads physically and electrically connected to substrate pads of the substrate.
Abstract translation: 一种封装电子设备的方法。 用于封装器件的方法包括:提供第一衬底,第二衬底和具有第一侧和相对第二侧的集成电路芯片,第一组芯片焊盘和第二组芯片焊盘, 集成电路芯片的第二侧,第一组芯片焊盘的芯片焊盘物理和电连接到第一衬底上的相应衬底焊盘,并且第二组芯片焊盘的芯片焊盘物理和电连接到衬底的衬底焊盘。
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公开(公告)号:US20080213948A1
公开(公告)日:2008-09-04
申请号:US12029575
申请日:2008-02-12
Applicant: Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC: H01L21/84
CPC classification number: H01L21/76898 , H01L21/84 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
Abstract: A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
Abstract translation: 具有相对侧的布线电平的半导体器件以及制造与相对侧的器件和布线电平接触的半导体结构的方法。 该方法包括在绝缘体上硅衬底上制造器件,其中器件的第一接触和第一侧的第一接触处的布线电平,去除下硅层以暴露所述掩埋氧化物层,形成第二接触器件 通过掩埋氧化物层形成掩埋氧化物层上方的布线电平到第二触点。
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公开(公告)号:US07285477B1
公开(公告)日:2007-10-23
申请号:US11383563
申请日:2006-05-16
Applicant: Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
Inventor: Kerry Bernstein , Timothy Joseph Dalton , Jeffrey Peter Gambino , Mark David Jaffe , Paul David Kartschoke , Anthony Kendall Stamper
IPC: H01L21/30
CPC classification number: H01L21/76898 , H01L21/84 , H01L23/481 , H01L23/522 , H01L27/1203 , H01L2924/0002 , H01L2924/00
Abstract: A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
Abstract translation: 具有相对侧的布线电平的半导体器件以及制造与相对侧的器件和布线电平接触的半导体结构的方法。 该方法包括在绝缘体上硅衬底上制造器件,其中器件的第一接触和第一侧的第一接触处的布线电平,去除下硅层以暴露所述掩埋氧化物层,形成第二接触器件 通过掩埋氧化物层形成掩埋氧化物层上方的布线电平到第二触点。
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