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    Switchable multi perspective detector, optics therefore and method of operating thereof
    21.
    发明授权
    Switchable multi perspective detector, optics therefore and method of operating thereof 有权
    可切换多视角检测器，光学器件及其操作方法

    公开(公告)号：US08963083B2

    公开(公告)日：2015-02-24

    申请号：US13960393

    申请日：2013-08-06

    申请人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

    发明人： Matthias Firnkes ,  Stefan Lanio ,  Gerald Schönecker ,  Dieter Winkler

    IPC分类号： H01J37/26 ,  H01J37/21 ,  H01J37/10 ,  H01J37/147

    CPC分类号： H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J2237/24592

    摘要： A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.

    摘要翻译： 描述了用于检测信号光束的二次带电粒子检测装置。 该装置包括具有至少两个具有主动检测区域的检测元件的检测器装置，其中主动检测区域由间隙（G）分开，粒子光学器件被配置用于将信号光束分离成信号光束的第一部分并进入 信号光束的至少一个第二部分，并且被配置为聚焦信号光束的第一部分和信号光束的至少一个第二部分。 颗粒光学器件包括孔板和孔板中的至少第一内孔开口和孔板中的至少一个第二径向外孔开口，其中第一孔口具有凹形部分，特别地其中第一孔 开口有枕形。

    Modular gas ion source
    23.
    发明授权
    Modular gas ion source 有权
    模块化气体离子源

    公开(公告)号：US08101922B2

    公开(公告)日：2012-01-24

    申请号：US12167734

    申请日：2008-07-03

    申请人： Dieter Winkler ,  Thomas Jasinski ,  Udo Weigel

    发明人： Dieter Winkler ,  Thomas Jasinski ,  Udo Weigel

    IPC分类号： H01T23/00

    CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J2237/006 ,  H01J2237/03 ,  H01J2237/0807

    摘要： A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.

    摘要翻译： 描述了气体场离子源。 气体离子源包括发射器模块。 发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。 所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件， 供电模块的可连接气体供应连接组件。 发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

    GAS FIELD ION SOURCE FOR MULTIPLE APPLICATIONS
    26.
    发明申请
    GAS FIELD ION SOURCE FOR MULTIPLE APPLICATIONS 有权
    用于多种应用的气田离子源

    公开(公告)号：US20080142702A1

    公开(公告)日：2008-06-19

    申请号：US11925609

    申请日：2007-10-26

    申请人： JUERGEN FROSIEN ,  Dieter Winkler

    发明人： JUERGEN FROSIEN ,  Dieter Winkler

    IPC分类号： H01J27/02 ,  H01J37/28

    CPC分类号： H01J27/26 ,  H01J37/08 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/006 ,  H01J2237/0807 ,  H01J2237/0827 ,  H01J2237/244 ,  H01J2237/3174 ,  H01J2237/31749

    摘要： A focused ion beam device is described. The device includes an ion beam column including an enclosure for housing an emitter with an emitter area for generating ions, a first gas inlet adapted to introduce a first gas to the emitter area, a second gas inlet adapted to introduce a second gas different from the first gas to the emitter area, and a switching unit adapted to switch between introducing the first gas and introducing the second gas.

    摘要翻译： 描述了聚焦离子束装置。 该装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的发射极的外壳，适于将第一气体引入发射极区域的第一气体入口，适于引入不同于第二气体的第二气体的第二气体入口 第一气体到发射极区域，以及开关单元，其适于在引入第一气体和引入第二气体之间切换。

    Electrostatic deflection system with low aberrations and vertical beam incidence
    27.
    发明授权
    Electrostatic deflection system with low aberrations and vertical beam incidence 有权
    具有低像差和垂直光束入射的静电偏转系统

    公开(公告)号：US07315029B2

    公开(公告)日：2008-01-01

    申请号：US11241880

    申请日：2005-09-30

    申请人： Dieter Winkler ,  Henry Pearce-Percy ,  Juergen Frosien ,  William J. Devore

    发明人： Dieter Winkler ,  Henry Pearce-Percy ,  Juergen Frosien ,  William J. Devore

    IPC分类号： G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

    CPC分类号： H01J37/1477 ,  H01J2237/1518 ,  H01J2237/28 ,  H01J2237/3175

    摘要： Embodiments of the present invention may be utilized to improve electron beam deflection. One embodiment provides an electrostatic deflection system with electrodes that minimize aberrations and to achieve vertical incidence simultaneously. By using at least two stages of deflection for a deflection direction, the present invention allows the deflected electron beam to pass a back focal plane of an objective lens while deflection capacitors are not disposed across the back focal plane. As a result, deflection electrodes can have an angle of 120° to minimize aberrations and simultaneously achieve vertical incidence of the electron beam on a target to avoid distortions or changes in magnification with height variations of the target or focus variations.

    摘要翻译： 本发明的实施例可用于改善电子束偏转。 一个实施例提供一种静电偏转系统，其具有最小化像差并且同时实现垂直入射的电极。 通过对偏转方向使用至少两个偏转级，本发明允许偏转的电子束通过物镜的后焦平面，而偏转电容器不跨过后焦平面设置。 结果，偏转电极可以具有120°的角度以最小化像差并且同时实现电子束在靶上的垂直入射，以避免目标或焦点变化的高度变化引起的变形或放大变化。

    Multiple electron beam device
    28.
    发明授权
    Multiple electron beam device 有权
    多电子束装置

    公开(公告)号：US07282711B2

    公开(公告)日：2007-10-16

    申请号：US10491939

    申请日：2002-10-04

    申请人： Dieter Winkler ,  Pavel Adamec ,  Achim Göhl ,  Helmut Banzhof

    发明人： Dieter Winkler ,  Pavel Adamec ,  Achim Göhl ,  Helmut Banzhof

    IPC分类号： H01J37/21

    CPC分类号： H01J37/28 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/21 ,  H01J37/304 ,  H01J37/3174 ,  H01J2237/216 ,  H01J2237/2446 ,  H01J2237/2826 ,  H01J2237/30433 ,  H01J2237/3045

    摘要： The invention provides electron multiple beam devices (1) for probing or structuring a non-transparent specimen (20) with primary electron beams (14) with an array of electron beam sources (3) to generate multiple primary electron beams (14), an electron sensor (12) with electron sensor segments (12a) to detect electrons of the primary electron beams (14) and at least one anode (7) to direct the primary electron beams (14) towards the electron sensor (12). The electron sensor (12) serves to inspect the primary electron beams (14), calibrate the positions of the primary electron beams (14) and possibly adjust final focus length (13) and currents of the primary electron beams before or after a probing or structuring the upper surface (20a) of a non-transparent specimens (20). Further, methods to inspect primary electron beams (14), to adjust final focus lengths (13) and to calibrate the multiple electron beam device (1) are provided.

    摘要翻译： 本发明提供了用于用具有电子束源阵列（3）的一次电子束（14）探测或构造非透明样品（20）以产生多个一次电子束（14）的电子多光束装置（1）， 电子传感器（12），其具有用于检测一次电子束（14）的电子和至少一个阳极（7）的电子传感器段（12a），以将一次电子束（14）引向电子传感器（12）。 电子传感器（12）用于检查一次电子束（14），校准一次电子束（14）的位置，并可能在探测之前或之后校准一次电子束的最终聚焦长度（13）和电流 构造不透明样品（20）的上表面（20a）。 此外，提供了检查一次电子束（14），调整最终聚焦长度（13）和校准多个电子束装置（1）的方法。

    Charged particle beam apparatus and method for operating the same
    29.
    发明授权
    Charged particle beam apparatus and method for operating the same 有权
    带电粒子束装置及其操作方法

    公开(公告)号：US07274018B2

    公开(公告)日：2007-09-25

    申请号：US11396751

    申请日：2006-04-03

    申请人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

    发明人： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

    IPC分类号： H01J37/28

    CPC分类号： H01J37/285 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/049 ,  H01J2237/2855 ,  H01J2237/2857

    摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam resulting in a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.

    摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的一次束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主束的准直之间切换，导致 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度;用于聚集所述带电粒子的一次束的聚光透镜;用于偏转所述主要束带电的扫描装置 颗粒，用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。