Method of lower profile MEMS package with stress isolations
    21.
    发明授权
    Method of lower profile MEMS package with stress isolations 有权
    具有应力分离的低剖面MEMS封装的方法

    公开(公告)号:US09446941B2

    公开(公告)日:2016-09-20

    申请号:US14568845

    申请日:2014-12-12

    Applicant: Apple Inc.

    Abstract: MEMS packages, modules, and methods of fabrication are described. In an embodiment, a MEMS package includes a MEMS die and an IC die mounted on a front side of a surface mount substrate, and a molding compound encapsulating the IC die and the MEMS die on the front side of the surface mount substrate. In an embodiment, a landing pad arrangement on a back side of the surface mount substrate forms and anchor plane area for bonding the surface mount substrate to a module substrate that is not directly beneath the MEMS die.

    Abstract translation: 描述了MEMS封装,模块和制造方法。 在一个实施例中,MEMS封装包括安装在表面安装基板的正面上的MEMS管芯和IC管芯,以及在表面安装基板的前侧封装IC管芯和MEMS管芯的模塑料。 在一个实施例中,在表面安装基板的背侧上的着陆焊盘布置形成并固定平面区域,用于将表面安装基板粘合到不直接在MEMS管芯下方的模块基板。

Patent Agency Ranking