公开(公告)号：US08943890B2

公开(公告)日：2015-02-03

申请号：US13563557

申请日：2012-07-31

申请人： Heewon Jeong ,  Hiroshi Fukuda

发明人： Heewon Jeong ,  Hiroshi Fukuda

IPC分类号： G01P15/097 ,  G01C19/5719 ,  G01P15/125

CPC分类号： G01P15/097 ,  G01C19/5719 ,  G01P15/125

摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.

摘要翻译： 一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。 驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。 以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测 位移量与电容变化相同，从而检测驱动方向上的加速度。

公开(公告)号：US20140260612A1

公开(公告)日：2014-09-18

申请号：US14353635

申请日：2011-11-28

申请人： Takanori Aono ,  Kengo Suzuki ,  Masahide Hayashi ,  Heewon Jeong

发明人： Takanori Aono ,  Kengo Suzuki ,  Masahide Hayashi ,  Heewon Jeong

IPC分类号： G01C19/5705

CPC分类号： G01C19/5705 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00285 ,  G01C19/5783 ,  G01P15/0802 ,  G01P2015/088

摘要： The disclosure provides a composite sensor with high reliability and a method for manufacturing the same. A moving body of an acceleration sensor and an oscillator of an angular velocity sensor are provided on the same sensor wafer, while being partitioned by a wall, and a cap wafer is formed to have a gap that corresponds to each of the sensors. A through hole and a bump are formed in a sensor sealing portion, the acceleration sensor is sealed in an air atmosphere in a first sealing process, and in a second sealing process, the angular velocity sensor is sealed by bringing the sensors and the cap into contact with each other and joining the sensors and the cap in a vacuum atmosphere. Thereafter, a composite sensor wafer is cut, a circuit board and a wiring board are mounted thereon, and a composite sensor is formed.

摘要翻译： 本公开提供了具有高可靠性的复合传感器及其制造方法。 加速度传感器的移动体和角速度传感器的振荡器设置在相同的传感器晶片上，同时由壁分隔，并且盖晶片形成为具有与每个传感器对应的间隙。 在传感器密封部中形成有贯通孔和凸块，在第一密封工序中将加速度传感器密封在空气气氛中，在第二密封工序中，通过将传感器和盖体 彼此接触并在真空环境中连接传感器和盖子。 此后，将复合传感器晶片切割，电路板和布线板安装在其上，并且形成复合传感器。

公开(公告)号：US08643927B2

公开(公告)日：2014-02-04

申请号：US13178480

申请日：2011-07-07

申请人： Chisaki Takubo ,  Heewon Jeong

发明人： Chisaki Takubo ,  Heewon Jeong

IPC分类号： G02B26/08

CPC分类号： G01P15/125 ,  B81B3/001 ,  G01C19/5747 ,  G01P15/0802 ,  G01P2015/0814 ,  G01P2015/0837 ,  G01P2015/0874 ,  G01P2015/088 ,  G02B26/0841 ,  G02B26/105 ,  H01G5/18 ,  H01L21/76898 ,  H01L21/84 ,  H01L23/481 ,  H01L27/13 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： A protrusion formation hole is provided so as to pierce a support substrate. A polysilicon film as an electrical conducting material is embedded in the protrusion formation hole through an oxide silicon film. The polysilicon film partially bulges out of the protrusion formation hole toward a movable section to form a protruding section. In other words, the polysilicon film bulges out of the protrusion formation hole toward the movable section to form the protruding section. Thereby, a movable section included in MEMS can be prevented from sticking to other members.

摘要翻译： 提供突起形成孔以刺穿支撑基板。 作为导电材料的多晶硅膜通过氧化物硅膜被包埋在突起形成孔中。 多晶硅膜从突出形成孔朝向可移动部分部分地凸出以形成突出部分。 换句话说，多晶硅膜从突起形成孔朝向可动部凸出，形成突出部。 由此，能够防止包含在MEMS中的可动部附着在其他部件上。

公开(公告)号：US20130312517A1

公开(公告)日：2013-11-28

申请号：US13983828

申请日：2012-01-10

申请人： Heewon Jeong ,  Masahide Hayashi

发明人： Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01C19/5719 ,  G01C19/5726 ,  G01C19/5733 ,  G01C19/5769 ,  G01P15/0802 ,  G01P2015/0814 ,  H01L29/84

摘要： An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor.A combined sensor according to the invention includes first and second movable portions and first and second dummy portions provided around the first and second movable portions, which are formed in a layer of a laminated substrate. The first dummy portion and the second dummy portion are electrically separated from each other. A first potential is applied to the first movable portion and the first dummy portion and a second potential is applied to the second movable portion and the second dummy portion (see FIG. 2).

摘要翻译： 本发明的目的是提供一种组合传感器，其能够抑制由电位差产生的静电力的影响，并且防止S / N比的降低或传感器的灵敏度的变化。 根据本发明的组合传感器包括第一和第二可移动部分以及设置在第一和第二可移动部分周围的第一和第二虚拟部分，其形成在层压基板的层中。 第一虚拟部分和第二虚拟部分彼此电分离。 第一电位施加到第一可动部和第一虚拟部，第二电位施加到第二可动部和第二虚拟部（参照图2）。

公开(公告)号：US20130098152A1

公开(公告)日：2013-04-25

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。

公开(公告)号：US20130319075A1

公开(公告)日：2013-12-05

申请号：US13976372

申请日：2011-11-24

申请人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

发明人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01P21/00

CPC分类号： G01P21/00 ,  G01C19/5776 ,  G01C21/16

摘要： Reliability and accuracy of a sensor are secured while adjustment cost of a sensor module is suppressed. A signal component analysis part 10 receives a signal output from a signal processing part 7 before passing through a low-pass filter 8, analyzes whether or not application of a fragile frequency with respect to a physical quantity is equal to or more than a threshold level, if the application of the fragile frequency is equal to or more than the threshold level, outputs output stop signals to output signal control parts 9, 16. The output signal control parts 9, 16 receive control signals output from the signal component analysis part 10, and outputs an acceleration signal and a physical quantity signal from which noise has been removed by the low-pass filters 8, 15 through the signal processing parts 7, 14.

摘要翻译： 确保传感器模块的调整成本得到抑制，从而确保传感器的可靠性和精度。 信号分量分析部分10在通过低通滤波器8之前接收从信号处理部分7输出的信号，分析相对于物理量的脆弱频率的施加是否等于或大于阈值水平 如果脆弱频率的应用等于或大于阈值电平，则将输出停止信号输出到输出信号控制部9,16。输出信号控制部9,16接收从信号分量分析部10输出的控制信号 并且通过信号处理部件7,14输出通过低通滤波器8,15除去噪声的加速度信号和物理量信号。

公开(公告)号：US08327706B2

公开(公告)日：2012-12-11

申请号：US12832965

申请日：2010-07-08

申请人： Heewon Jeong ,  Yasushi Goto

发明人： Heewon Jeong ,  Yasushi Goto

IPC分类号： G01P15/08

CPC分类号： G01P3/22 ,  G01C19/5747 ,  G01C19/5762

摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

摘要翻译： 提供了一种高性能角速率检测装置。 包括驱动框架和科里奥利框架的驱动部分通过共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁悬浮，从而使驱动部分振动。 即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。 因此，可以获得对安装环境变化坚固的高性能角速度检测装置。

公开(公告)号：US20090049909A1

公开(公告)日：2009-02-26

申请号：US12191600

申请日：2008-08-14

申请人： Masahiro Matsumoto ,  Yasushi Okada ,  Hisao Sonobe ,  Heewon Jeong

发明人： Masahiro Matsumoto ,  Yasushi Okada ,  Hisao Sonobe ,  Heewon Jeong

IPC分类号： G01C19/00

CPC分类号： B60T8/3675 ,  G01C19/5719

摘要： A hydraulic controller including a cabinet, a hydraulic pipe block having a passage, a linearly driving actuator having a piston to open and close the passage in the hydraulic pipe block, a printed wiring board having a circuit for driving the linearly driving actuator, and a vibrating angular velocity sensor having two vibrators which can move in a Coriolis force detection direction orthogonal to vibration directions, wherein the vibrating angular velocity sensor is disposed on the printed wiring board in order that the vibration directions of the vibrators may be substantially parallel to a driving direction of the piston, and that the Coriolis force detection direction may be substantially orthogonal to the driving direction of the piston.

摘要翻译： 一种液压控制器，包括机壳，具有通道的液压管块，具有用于打开和关闭液压管块中的通道的活塞的线性驱动致动器，具有用于驱动线性驱动致动器的电路的印刷线路板，以及 具有两个振动器的振动角速度传感器，所述两个振动器能够以与振动方向正交的科里奥利力检测方向移动，其中振动角速度传感器设置在印刷线路板上，以使得振动器的振动方向可基本上平行于驱动 活塞的方向，科里奥利力检测方向可以与活塞的驱动方向基本正交。

公开(公告)号：US09182421B2

公开(公告)日：2015-11-10

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/5747 ,  G01C19/574

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。

公开(公告)号：US09086427B2

公开(公告)日：2015-07-21

申请号：US14001634

申请日：2012-01-11

申请人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi ,  Makoto Yamamoto

发明人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi ,  Makoto Yamamoto

IPC分类号： G01P15/00 ,  G01C19/5776 ,  B60W50/00

CPC分类号： G01P15/00 ,  B60W2050/0055 ,  B60W2050/0056 ,  G01C19/5776

摘要： An object of the invention is to provide an inertial sensor with small delay and high accuracy. An inertial sensor 1 includes an acceleration detecting element 2 that detects an acceleration of at least one axis of a vehicle; a first filter 6 that limits a detection signal of the acceleration to a first band; a second filter 7 that limits a detection signal of the acceleration to a second band; a vehicle control variable calculation section 8 that calculates a vehicle control variable Gxc on the basis of the detection signal of the acceleration limited to the second band; and a sensor signal output section 9 that outputs the detection signal of the acceleration limited to the first band and the vehicle control variable.

摘要翻译： 本发明的目的是提供一种具有小延迟和高精度的惯性传感器。 惯性传感器1包括检测车辆的至少一个轴的加速度的加速度检测元件2; 第一滤波器6，其将加速度的检测信号限制到第一频带; 第二滤波器7，其将加速度的检测信号限制到第二频带; 基于限于第二频带的加速度的检测信号计算车辆控制变量Gxc的车辆控制变量运算部8; 以及传感器信号输出部9，其输出限制在第一频带的加速度的检测信号和车辆控制变量。