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    Electron microscope
    24.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US5552602A

    公开(公告)日：1996-09-03

    申请号：US398684

    申请日：1995-03-06

    申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Tadokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa

    IPC分类号： G01N23/04 ,  G01R31/305 ,  H01J37/26

    CPC分类号： G01R31/305 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/226

    摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.

    摘要翻译： 通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。 为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。 光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。 因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

    Charged particle beam generating apparatus of multi-stage acceleration type
    25.
    发明授权
    Charged particle beam generating apparatus of multi-stage acceleration type 失效
    多级加速型带电粒子束发生装置

    公开(公告)号：US5059859A

    公开(公告)日：1991-10-22

    申请号：US507798

    申请日：1990-04-12

    申请人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

    发明人： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

    IPC分类号： H01J3/02 ,  H01J37/073

    CPC分类号： H01J3/029 ,  H01J37/073

    摘要： A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

    摘要翻译： 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管，该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后，将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间，以分别对加速电极施加预定电位。

    Focusing device for a television electron microscope
    26.
    发明授权
    Focusing device for a television electron microscope 失效
    用于电视电子显微镜的聚焦装置

    公开(公告)号：US4680469A

    公开(公告)日：1987-07-14

    申请号：US766272

    申请日：1985-08-16

    申请人： Setsuo Nomura ,  Shigeto Isakozawa

    发明人： Setsuo Nomura ,  Shigeto Isakozawa

    IPC分类号： H01J37/26

    CPC分类号： H01J37/26

    摘要： Focusing device for a transmission type electron microscope displaying an enlarged image on a television monitor, in which the incident angle of the electron beam on the sample is varied with a constant frequency and the focal length of the objective electron lens is so controlled that there is no change between the image observed before change of the incident angle of the electron beam and that observed thereafter, wherein timing for changing the incident angle is set during the blanking intervals of the vertical synchronizing signal of the television so that fluctuations of the image can be clearly detected.

    摘要翻译： 在电视监视器上显示放大图像的透射型电子显微镜的聚焦装置，其中电子束在样品上的入射角以恒定频率变化，并且目标电子透镜的焦距被控制为存在 在电子束的入射角变化之前观察到的图像和其后观察到的图像之间没有变化，其中在电视机的垂直同步信号的消隐间隔期间设置用于改变入射角的定时，使得图像的波动可以 明确检测。

    Sample evaluation/process observation system and method
    27.
    发明授权
    Sample evaluation/process observation system and method 失效
    样本评估/过程观察系统和方法

    公开(公告)号：US5783830A

    公开(公告)日：1998-07-21

    申请号：US873788

    申请日：1997-06-12

    申请人： Hiroshi Hirose ,  Hidemi Koike ,  Shigeto Isakozawa ,  Yuji Sato ,  Mikio Ichihashi ,  Motohide Ukiana

    发明人： Hiroshi Hirose ,  Hidemi Koike ,  Shigeto Isakozawa ,  Yuji Sato ,  Mikio Ichihashi ,  Motohide Ukiana

    IPC分类号： H01J37/305 ,  H01J37/20

    CPC分类号： H01J37/3056 ,  H01J37/265 ,  H01J2237/20 ,  H01J2237/26

    摘要： A sample evaluation/process observation system includes a common sample stage which accommodates a plurality of samples to be processed. The common sample stage is provided with a processing/observing notch and also with a movement mechanism. The movement mechanism functions to sequentially move the plurality of samples to the notch to cause the samples to be exposed to a predetermined processing beam and observing beam. The system further includes a beam processing device in which the common sample stage can be mounted and which functions to irradiate the predetermined processing beam on the plurality of samples through the notch to thereby sequentially perform beam processing operation over the samples. The system further includes a beam observation device in which the common sample stage can be mounted and which functions to irradiate the predetermined observing beam on the plurality of samples through the notch to sequentially observe and evaluate shapes of the plurality of samples. A mark is formed on one sample by a focused ion beam device so that positioning of the mark realizes automatic processing of a part of the sample to be processed. Further, the common sample stage is used in a high-acceleration transmission electron microscope and a high-acceleration scanning electron microscope and focused ion beam device.

    摘要翻译： 样本评估/过程观察系统包括容纳多个待处理样本的公共样本阶段。 公共样品台具有处理/观察凹口，并且还具有移动机构。 移动机构用于将多个样本顺序地移动到凹口，以使样本暴露于预定的处理束和观察波束。 该系统还包括其中可以安装公共样本台的束处理装置，并且其功能是通过凹口对多个采样上的预定处理光束照射，从而顺序地对采样进行光束处理操作。 该系统还包括其中可以安装公共样品台的束观察装置，并且其功能是通过凹口将多个样品上的预定观察光束照射，以依次观察和评估多个样品的形状。 通过聚焦离子束装置在一个样品上形成标记，使得标记的定位实现待处理样品的一部分的自动处理。 此外，普通样品台用于高加速度透射电子显微镜和高加速度扫描电子显微镜和聚焦离子束装置。

    Transmission type electron microscope
    28.
    发明授权
    Transmission type electron microscope 失效
    透射型电子显微镜

    公开(公告)号：US5013915A

    公开(公告)日：1991-05-07

    申请号：US298886

    申请日：1989-01-11

    申请人： Shigeto Isakozawa ,  Toshiyuki Ohashi

    发明人： Shigeto Isakozawa ,  Toshiyuki Ohashi

    IPC分类号： H01J37/22

    CPC分类号： H01J37/224 ,  H01J2237/2445 ,  H01J2237/26

    摘要： The present invention relates to an electron microscope which is suited for observing an electron microscope image as a TV image. It is desirable to prevent extraneous matters from dropping onto electron-beam illuminants (3, 8) for a TV camera. In order to solve this problem, the electron-beam illuminant for a TV camera is disposed between a projection lens system (1) and a fluorescent substance (6) for observing the image so that it can be inserted into and removed from the optical axis of an electron beam.

    摘要翻译： PCT No.PCT / JP88 / 00482 Sec。 371日期：1989年1月11日 102（e）日期1989年1月11日PCT PCT日期为1988年5月20日。本发明涉及一种适合于观察电子显微镜图像作为TV图像的电子显微镜。 期望防止外来物质掉落到用于电视摄像机的电子束照明器（3,8）上。 为了解决这个问题，用于电视摄像机的电子束照明器设置在投影透镜系统（1）和荧光物质（6）之间，用于观察图像，使得其可以插入光轴和从光轴去除 的电子束。

    Sample tilting device in electron microscope
    29.
    发明授权
    Sample tilting device in electron microscope 失效
    电子显微镜样品倾斜装置

    公开(公告)号：US4950909A

    公开(公告)日：1990-08-21

    申请号：US223643

    申请日：1988-07-25

    申请人： Takashi Yokoto ,  Shigeto Isakozawa

    发明人： Takashi Yokoto ,  Shigeto Isakozawa

    IPC分类号： G01N23/00 ,  B23Q1/54 ,  H01J37/20

    CPC分类号： B23Q1/5462 ,  H01J37/20

    摘要： A sample tilting device for use in an electron microscope provided with a microscope column in which a sample is illuminated by an electron beam. The sample is held in the microscope column and is removably supported by the microscope column so as to be capable of conically moving around a predetermined position. The sample is displacable in a direction transverse to the longitudinal axis of the electron beam by way of a threadable coupling between a motor and the shaft, with the shaft being axially displacable. The motor is supported by the microscope column so as to be rotatable together with the sample around a line passing through a predetermined position and crossing the axis of the electron beam.

    Image distortion-free, image rotation-free electron microscope
    30.
    发明授权
    Image distortion-free, image rotation-free electron microscope 失效
    图像无失真，无图像旋转电子显微镜

    公开(公告)号：US4494000A

    公开(公告)日：1985-01-15

    申请号：US393332

    申请日：1982-06-29

    申请人： Kazuo Shii ,  Hiroyuki Kobayashi ,  Morioki Kubozoe ,  Shigeto Isakozawa

    发明人： Kazuo Shii ,  Hiroyuki Kobayashi ,  Morioki Kubozoe ,  Shigeto Isakozawa

    IPC分类号： H01J37/141 ,  H01J37/04 ,  H01J37/10 ,  H01J37/26 ,  G01N23/00

    CPC分类号： H01J37/04 ,  H01J37/265

    摘要： A transmission electron microscope comprises an imaging electron lens system constituted in at least five stages by an objective lens, a group of intermediate lenses and a group of projector lenses to which excitation currents are applied with alternately different polarities. Lens current control means is provided for controlling the excitation currents in such a manner that the lenses belonging to the intermediate lens group and the projector lens group, respectively, serve as reduction lens when the microscope is operated in a predetermined range of low magnifications, while all the electron lenses serve as magnifying lenses in a predetermined range of high magnitudes. When the magnification is changed over, the lens current control means regulates the excitation currents in such a manner that the difference between the excitation currents supplied to the intermediate lens group and the projector lens group, respectively, is maintained substantially constant.

    摘要翻译： 透射电子显微镜包括通过物镜至少五级构成的成像电子透镜系统，一组中间透镜和一组投影透镜，以相反的极性施加激励电流。 提供透镜电流控制装置，用于控制激励电流，使得属于中间透镜组的透镜组和投影透镜组的透镜在显微镜在低倍率的预定范围内操作时分别用作还原透镜，同时 所有电子透镜都用作预定范围的高倍数的放大透镜。 当倍率变化时，透镜电流控制装置以这样的方式调节激励电流，使得分别提供给中间透镜组的激励电流和投影透镜组之间的差保持基本上恒定。