公开(公告)号：US06323567B1

公开(公告)日：2001-11-27

申请号：US09471296

申请日：1999-12-24

申请人： Andrew J. Hazelton ,  Kazuya Ono

发明人： Andrew J. Hazelton ,  Kazuya Ono

IPC分类号： H02K4100

CPC分类号： H02K9/19 ,  H02K41/03

摘要： A circulating system (10) for cooling a shaft-type linear motor (12) is provided herein. The motor (12) includes a magnet array (22) and a coil assembly (16). The circulating system (10) includes coil housing (36) that encircles the coil assembly (16) and defines a fluid passageway (46) between the coil housing (36) and the coil assembly (16). Fluid (44) from a fluid source (42) is forced through an inlet (38) into the fluid passageway (46). The flow rate of the fluid (44) is controlled to maintain an outer surface (111) of the coil housing (36) at a set temperature to control the effect of the motor (12) on the surrounding environment and the surrounding components.

摘要翻译： 本发明提供一种用于冷却轴型线性马达（12）的循环系统（10）。 马达（12）包括磁体阵列（22）和线圈组件（16）。 循环系统（10）包括环绕线圈组件（16）并限定在线圈壳体（36）和线圈组件（16）之间的流体通道（46）的线圈壳体（36）。 来自流体源（42）的流体（44）被迫通过入口（38）进入流体通道（46）。 控制流体（44）的流速以将线圈壳体（36）的外表面（111）保持在设定温度以控制电动机（12）对周围环境和周围部件的影响。

公开(公告)号：US06283041B1

公开(公告)日：2001-09-04

申请号：US09196102

申请日：1998-11-20

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： A47B8500

CPC分类号： H01L21/68785 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/707 ,  G03F7/709 ,  H01J37/3174 ,  H01L21/682 ,  H01L21/68728

摘要： On a sample stand having a chip levelling mechanism for amending the exposure plane of a wafer in relation to the image plane of a projection lens, a dynamic damper is provided for assigning to a holder table the appropriate rigidity in the moving direction of the holder table.

摘要翻译： 在具有用于修正晶片的曝光平面相对于投影透镜的像面的芯片调平机构的样品台上，设置动态阻尼器，用于向保持器台分配保持器台的移动方向上的适当刚性 。

公开(公告)号：US6040675A

公开(公告)日：2000-03-21

申请号：US870982

申请日：1997-06-06

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： B23Q3/15 ,  B23Q1/44 ,  B23Q15/22 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

CPC分类号： G03F7/70691 ,  B23Q15/22 ,  G05B2219/49276 ,  G05B2219/50046

摘要： A supporting apparatus for supporting a table having N degrees of freedom, where N is an integer greater than one. The apparatus includes a stage and a leaf spring mounted on the stage. The spring initially contacts the table at a contact point and has a coefficient of elasticity greater in the horizontal direction and smaller in the vertical direction. The spring also has a characteristic of positive rigidity. A pair of permanent magnets are mounted in an area between the stage and table in a vertical direction for counterbalancing the characteristic of positive rigidity of the leaf spring.

摘要翻译： 一种用于支撑具有N个自由度的表的支撑装置，其中N是大于1的整数。 该装置包括安装在平台上的平台和板簧。 弹簧最初在接触点处接触桌子，并且在水平方向上具有更大的弹性系数，并且在垂直方向上具有较小的弹性系数。 弹簧也具有刚性刚性的特点。 一对永磁体在垂直方向上安装在台架与工作台之间的区域中，用于平衡板簧正刚性的特性。

公开(公告)号：US5747565A

公开(公告)日：1998-05-05

申请号：US26183

申请日：1993-03-01

申请人： Kazuya Ono ,  Akira Yasuda ,  Katsuji Kitagawa

发明人： Kazuya Ono ,  Akira Yasuda ,  Katsuji Kitagawa

IPC分类号： H01F41/12 ,  C08G59/00 ,  C08G59/14 ,  C08G59/20 ,  C08G59/22 ,  C08G59/40 ,  C08G59/50 ,  C08G59/56 ,  C08K3/36 ,  C08L63/00 ,  C09D163/00 ,  H01B3/40 ,  H02K15/12 ,  C08F8/00

CPC分类号： C08G59/56 ,  C08G59/226 ,  C08G59/4014 ,  C08G59/4021 ,  C08G59/4035 ,  C08G59/5073 ,  C09D163/00 ,  Y10S525/934

摘要： A powder coating composition is disclosed which includes (a) 100 parts by weight of a mixed epoxy resin having an epoxy equivalent of 800-2000 and containing (a-1) a diglycidyl ether of bisphenol A having an epoxy equivalent of 180-2500 and (a-2) a rubber-modified epoxy resin having an epoxy equivalent of 180-2500 and obtained by reaction of a diglycidyl ether of bisphenol A with a carboxyl terminated acrylonitrile-butadiene copolymer; (b) a mixed curing agent consisting of (b-1) 0.05-5 parts by weight of an imidazole compound, (b-2) 0.5-10 parts by weight of dicyanodiamide and (b-3) 1-10 parts by weight of a dihydrazide of a dibasic carboxylic acid; and (c) 50-100 parts by weight of silica.

摘要翻译： 公开了一种粉末涂料组合物，其包括（a）100重量份环氧当量为800-2000的混合环氧树脂，并含有（a-1）环氧当量为180-2500的双酚A的二缩水甘油醚，和 （a-2）环氧当量为180-2500的橡胶改性环氧树脂，通过双酚A的二缩水甘油醚与羧基封端的丙烯腈 - 丁二烯共聚物的反应获得; （b）由（b-1）0.05-5重量份咪唑化合物组成的混合固化剂，（b-2）0.5-10重量份二氰基二酰胺和（b-3）1-10重量份 二元羧酸的二酰肼; 和（c）50-100重量份二氧化硅。

公开(公告)号：US5440397A

公开(公告)日：1995-08-08

申请号：US356776

申请日：1994-12-12

申请人： Kazuya Ono ,  Yukio Yamane

发明人： Kazuya Ono ,  Yukio Yamane

IPC分类号： G03F7/20 ,  G03F9/00 ,  G12B5/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  G03B27/10 ,  G01N21/86 ,  G03B27/53

CPC分类号： G03F9/70

摘要： An exposure apparatus and an exposure method capable of performing high-precision superposition exposure by preventing the thermal deformation of a position measurement target, for controlling positioning of a moved member, from influencing the correction of an error in the positioning of the moved member. The exposure apparatus projects an image of a pattern, formed on a mask, onto a photosensitive substrate through a projection optical system. A stage, on which the photosensitive substrate is mounted, is movable in at least X-axis and Y-axis directions in an imaging plane of the projection optical system. Position measuring devices measure the position of the stage in each of the two directions and are disposed so that the Abbe error is substantially zero with respect to the position at which the substrate is exposed to the pattern image. A pattern detector is disposed on a measuring axis of the position measuring devices with respect to one of the two directions to optically detect an alignment pattern formed on the photosensitive substrate. A rotation measuring device measures the amount of rotation of a measurement target of the position measuring devices with respect to the X- and Y-axis directions, and a controller controls the position and the amount of rotation of the stage on the basis of the amount of rotation measured by the rotation measuring device, the positions measured by the position measuring devices, and information regarding the position of the pattern detected by the pattern detector.

摘要翻译： 一种能够通过防止位置测量对象的热变形来控制移动构件的定位而影响移动构件定位误差的校正的能够进行高精度叠加曝光的曝光装置和曝光方法。 曝光装置通过投影光学系统将形成在掩模上的图案的图像投影到感光基板上。 安装感光基板的平台可以在投影光学系统的成像平面中沿至少X轴和Y轴方向移动。 位置测量装置测量两个方向中的每个方向上的平台的位置并且被布置成使得相对于衬底暴露于图案图像的位置的阿贝误差基本为零。 图案检测器相对于两个方向中的一个方向设置在位置测量装置的测量轴上，以光学地检测在感光基板上形成的对准图案。 旋转测量装置测量位置测量装置相对于X轴方向和Y轴方向的测量目标的旋转量，并且控制器基于量的量控制台的位置和旋转量 通过旋转测量装置测量的旋转，由位置测量装置测量的位置以及关于由图案检测器检测到的图案的位置的信息。

公开(公告)号：US5206313A

公开(公告)日：1993-04-27

申请号：US867368

申请日：1992-04-13

申请人： Kazuya Ono ,  Mikio Osa ,  Masao Kubo ,  Katsuji Kitagawa

发明人： Kazuya Ono ,  Mikio Osa ,  Masao Kubo ,  Katsuji Kitagawa

IPC分类号： C08G59/18 ,  C08G59/40 ,  C08J3/12 ,  C08J3/20 ,  C08J3/24 ,  C08L63/00 ,  C09D5/03 ,  C09D5/46 ,  C09D163/00

CPC分类号： C08J3/24 ,  C09D163/00 ,  C08J2363/00 ,  Y10S525/934

摘要： A powder coating composition in which epoxy resin particles and curing agent particles are uniformly distributed is prepared by heating a specific powdery blend of (a) at least one crystalline epoxy resin, (b) at least one crystalline curing agent and (c) at least one non-crystalline epoxy resin and/or at least one non-crystalline curing agent at a specific temperature so that the crystalline particles are bonded with each other with the non-crystalline substance serving as a binder.

摘要翻译： 通过加热（a）至少一种结晶环氧树脂，（b）至少一种结晶固化剂和（c）至少一种结晶性固化剂的特定粉末混合物，制备其中环氧树脂颗粒和固化剂颗粒均匀分布的粉末涂料组合物 一种非结晶环氧树脂和/或至少一种非结晶固化剂，使得结晶颗粒彼此结合，非结晶性物质用作粘合剂。

公开(公告)号：US08228484B2

公开(公告)日：2012-07-24

申请号：US12068323

申请日：2008-02-05

申请人： Kazuya Ono ,  Yuichi Shibazaki

发明人： Kazuya Ono ,  Yuichi Shibazaki

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/70833

摘要： An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

摘要翻译： 曝光装置是曝光装置，其通过在投影光学系统和基板之间填充液体而曝光基板，并且经由投影光学系统和液体将图案图像投影到基板上，其中投影光学系统具有第一组 包括与液体接触的光学构件和与第一组不同的第二组; 第一组由第一个支持成员支持; 并且第二组与第一组分离，并且由与第一支撑构件不同的第二支撑构件支撑。

公开(公告)号：US20100062269A1

公开(公告)日：2010-03-11

申请号：US12446694

申请日：2007-10-25

申请人： Hiroaki Ogita ,  Norio Kobayashi ,  Kazuya Ono

发明人： Hiroaki Ogita ,  Norio Kobayashi ,  Kazuya Ono

IPC分类号： B32B27/10 ,  B32B29/00 ,  B32B27/08 ,  B05D3/02

CPC分类号： B32B27/10 ,  B32B27/20 ,  B32B27/30 ,  B32B29/00 ,  Y10T428/31895

摘要： To provide a laminated packaging material wherein a plant-origin material is used as the main material constituting a laminated paper packaging material for foods; a laminated packaging material being excellent in oxygen-barrier performance; a method of producing a barrier laminated packaging material in a small number of steps; a method of producing a barrier laminated packaging material whereby the structure of the laminate can be simplified without a need for a petroleum-derived adhesive and the laminate thickness can be reduced; and a method of producing a barrier laminated packaging material which is free from the occurrence of defects such as pinholes in spite of having a thin barrier layer.[Means for Solving Problems] A laminated packaging material for foods which is a laminated packaging material comprising a paper core layer, a barrier layer and a thermoplastic resin layer, wherein the barrier layer is made of polyvinyl alcohol, while the thermoplastic resin layer is made of a resin composition containing a plant-origin plastic and having melt extrudability.

摘要翻译： 提供一种层叠包装材料，其中使用植物来源材料作为构成食品的层压纸包装材料的主要材料; 层压包装材料，其阻氧性能优异; 以少量的步骤制造阻挡层叠包装材料的方法; 制造阻挡层压包装材料的方法，由此可以简化层压体的结构，而不需要石油衍生的粘合剂，并且可以降低层压体的厚度; 以及制造阻挡层叠包装材料的方法，该屏障层压包装材料即使具有薄的阻挡层也不会发生诸如针孔的缺陷。 解决问题的手段作为包含纸芯层，阻挡层和热塑性树脂层的层压包装材料的食品用层压包装材料，其中阻隔层由聚乙烯醇制成，而热塑性树脂层被制成 的含有植物来源的塑料并具有熔体挤出性的树脂组合物。

公开(公告)号：US20080073982A1

公开(公告)日：2008-03-27

申请号：US11793332

申请日：2005-12-22

申请人： Kazuya Ono ,  Hisashi Tanimura ,  Hiroaki Takaiwa

发明人： Kazuya Ono ,  Hisashi Tanimura ,  Hiroaki Takaiwa

IPC分类号： G03F7/20 ,  H01L21/68 ,  H02K41/02

CPC分类号： G03F7/70725 ,  G03F7/70816 ,  H01L21/682 ,  H02K7/09 ,  H02K41/03 ,  H02K2201/18

摘要： A magnetic guide apparatus includes a guide member that has a guide plane provided along a first direction, and a moving body that has a facing plane facing the guide plane to be spaced apart from the guide plane. Magnetic attractive force is permitted to operate between the guide plane and the facing plane, such that the moving body is moved along the first direction while movement to a second direction, which is orthogonal to the first direction and parallel to the guide plane, is controlled. A first groove section is formed along the first direction on the guide plane and a second groove section is formed along the first direction so as to face the first groove section on the facing plane.

摘要翻译： 导引装置包括具有沿着第一方向设置的导向面的引导构件和具有面向导向面的面向与导向面间隔开的面对面的移动体。 磁吸引力被允许在引导平面和面对平面之间操作，使得移动体沿着第一方向移动，同时向与第一方向正交且平行于引导平面的第二方向的移动被控制 。 沿着第一方向在引导平面上形成第一槽部分，并且沿着第一方向形成第二槽部分，以面对面对面上的第一槽部分。

公开(公告)号：US07088423B2

公开(公告)日：2006-08-08

申请号：US10945652

申请日：2004-09-21

申请人： Kazuya Akiyama ,  Kenji Kamei ,  Kazuya Ono

发明人： Kazuya Akiyama ,  Kenji Kamei ,  Kazuya Ono

IPC分类号： G03B27/42 ,  G03B27/54

CPC分类号： G03F7/2028

摘要： An edge exposing apparatus includes a photo detector and a lighting time measuring circuit for detecting a decrease in performance of light source units. The lighting time measuring circuit detects a ready state ((stabilization of luminous intensity) of the light source units, for example by measuring a lighting time for a startup (switch-on) of the light source units. When the measuring circuit detects a preset lighting time, or when the photo detector detects a luminous intensity below a preset value, the light source units are determined to have lowered performance, and are switched off. When a decrease in performance of one unit is detected, a replacement light source unit is started while continuing edge exposure with one or more other light source unit(s). When a ready state is detected, the edge exposure with the one light source unit is terminated (switch-off), and edge exposure is performed with the replacement light source unit.

摘要翻译： 边缘曝光装置包括光检测器和用于检测光源单元的性能降低的点亮时间测量电路。 照明时间测量电路例如通过测量光源单元的启动（接通）的点亮时间来检测光源单元的准备状态（发光强度的稳定），当测量电路检测到预设 照明时间，或者当光检测器检测到低于预设值的发光强度时，光源单元被确定为具有降低的性能并被关闭，当检测到一个单元的性能降低时，替换光源单元 在使用一个或多个其他光源单元进行持续边缘曝光时开始，当检测到就绪状态时，一个光源单元的边缘曝光被终止（关闭），并且利用替换光进行边缘曝光 源单位。