Methods of processing wafer-level assemblies to reduce warpage, and related assemblies
    22.
    发明授权
    Methods of processing wafer-level assemblies to reduce warpage, and related assemblies 有权
    处理晶圆级组件以减少翘曲的方法和相关组件

    公开(公告)号:US09589933B2

    公开(公告)日:2017-03-07

    申请号:US14312147

    申请日:2014-06-23

    Abstract: Wafer-level methods of processing semiconductor devices may involve forming grooves partially through a molding material, the molding material located in streets and at least surrounding stacks of semiconductor dice located on a wafer. Wafer-level methods of preparing semiconductor devices may involve attaching a wafer to a carrier substrate and forming stacks of laterally spaced semiconductor dice on die locations of the wafer. Molding material may be disposed over the die stacks on a surface of the wafer to at least surround the stacks of semiconductor dice with the molding material. Grooves may be formed in the molding material by partially cutting through the molding material between at least some of the stacks of semiconductor dice along streets between the die stacks. The resulting wafer-level assembly may then, when exposed to elevated temperatures during, for example, debonding the wafer from a carrier, exhibit reduced propensity for warping.

    Abstract translation: 处理半导体器件的晶片级方法可以包括部分地通过模制材料形成凹槽,模制材料位于街道上,并且至少围绕位于晶片上的半导体芯片堆叠。 制备半导体器件的晶片级方法可以包括将晶片附着到载体衬底并且在晶片的芯片位置上形成横向间隔开的半导体晶片的堆叠。 模制材料可以设置在晶片的表面上的模具堆叠上,以至少用模制材料围绕半导体晶片的堆叠。 可以通过在模具堆叠之间沿着街道的半导体芯片的至少一些堆叠之间部分地切割模制材料,而在模制材料中形成凹槽。 然后,当例如在晶片脱离载体时暴露于升高的温度时,所得到的晶片级组件可能表现出降低的翘曲倾向。

    METHODS OF PROCESSING WAFER-LEVEL ASSEMBLIES TO REDUCE WARPAGE, AND RELATED ASSEMBLIES
    24.
    发明申请
    METHODS OF PROCESSING WAFER-LEVEL ASSEMBLIES TO REDUCE WARPAGE, AND RELATED ASSEMBLIES 有权
    加工水平组合减少威胁的方法和相关组织

    公开(公告)号:US20150371969A1

    公开(公告)日:2015-12-24

    申请号:US14312147

    申请日:2014-06-23

    Abstract: Wafer-level methods of processing semiconductor devices may involve forming grooves partially through a molding material, the molding material located in streets and at least surrounding stacks of semiconductor dice located on a wafer. Wafer-level methods of preparing semiconductor devices may involve attaching a wafer to a carrier substrate and forming stacks of laterally spaced semiconductor dice on die locations of the wafer. Molding material may be disposed over the die stacks on a surface of the wafer to at least surround the stacks of semiconductor dice with the molding material. Grooves may be formed in the molding material by partially cutting through the molding material between at least some of the stacks of semiconductor dice along streets between the die stacks. The resulting wafer-level assembly may then, when exposed to elevated temperatures during, for example, debonding the wafer from a carrier, exhibit reduced propensity for warping.

    Abstract translation: 处理半导体器件的晶片级方法可以包括部分地通过模制材料形成凹槽,模制材料位于街道上,并且至少围绕位于晶片上的半导体芯片堆叠。 制备半导体器件的晶片级方法可以包括将晶片附着到载体衬底并且在晶片的芯片位置上形成横向间隔开的半导体晶片的堆叠。 模制材料可以设置在晶片的表面上的模具堆叠上,以至少用模制材料围绕半导体晶片的堆叠。 可以通过在模具堆叠之间沿着街道的半导体芯片的至少一些堆叠之间部分地切割模制材料,而在模制材料中形成凹槽。 然后,当例如在晶片脱离载体时暴露于升高的温度时,所得到的晶片级组件可能表现出降低的翘曲倾向。

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