Oxime Derivatives And Use Thereof As Latent Acids
    21.
    发明申请
    Oxime Derivatives And Use Thereof As Latent Acids 有权
    肟衍生物及其用作潜伏酸

    公开(公告)号:US20080085458A1

    公开(公告)日:2008-04-10

    申请号:US11632687

    申请日:2005-07-11

    摘要: The invention pertain to novel photoacid generator compounds of the formula I, II or III wherein R1 is for example C1-C18alkylsulfonyl or phenylsulfonyl, phenyl-C1-C3alkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, all optionally substituted, or R1 is a group X1, X2 and X3 independently of each other are O or S; R′1, is e.g. phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, all optionally substituted; R2 is halogen or C1-C10haloalkyl; X is halogen; Ar1 is for example biphenylyl or fluorenyl, or is substituted naphthyl; Ar′1 is heteroarylene, optionally substituted; R8, R9, R10 and R11 for example are C1-C6alkyl which is unsubstituted or substituted by halogen; or R8, R9 and R10 are phenyl which is unsubstituted or substituted by C1-C4alkyl or halogen; or R10 and R11 together are 1,2-phenylene or C2-C6alkylene which is unsubstituted or substituted by C1-C4alkyl or halogen.

    摘要翻译: 本发明涉及式I,II或III的新型光酸产生剂化合物,其中R 1是例如C 1 -C 18烷基磺酰基或 苯基磺酰基,苯基-C 1 -C 3烷基磺酰基,萘基磺酰基,蒽基磺酰基或菲基磺酰基,全部任意取代,或R 1是基团X, X 1,X 2和X 3 3彼此独立地为O或S; R'1,例如, 亚苯基二磺酰基,亚苯基二磺酰基,二苯基二磺酰基或氧基二苯基二磺酰基,全部任选被取代; R 2是卤素或C 1 -C 10卤代烷基; X是卤素; Ar 1是例如联苯基或芴基,或者是取代的萘基; Ar'1'是亚杂芳基,任选被取代; R 8,R 9,R 10和R 11是例如C 1〜N 未取代或被卤素取代的C 1 -C 6烷基; 或R 8,R 9和R 10是未被取代或被C 1 -C 3烷基取代的苯基, 烷基或卤素; 或R 10和R 11一起是1,2-亚苯基或C 2 -C 6 -C 6亚烷基,其是 未取代或被C 1 -C 4烷基或卤素取代。

    Oxime derivatives and the use thereof as latent acids
    22.
    发明申请
    Oxime derivatives and the use thereof as latent acids 有权
    肟衍生物及其作为潜伏酸的用途

    公开(公告)号:US20060068325A1

    公开(公告)日:2006-03-30

    申请号:US11262104

    申请日:2005-10-27

    IPC分类号: G03C1/76

    摘要: New oxime sulfonate compounds of the formula I, II, III, IV, V, VI and VII R1 is for example C1-C18alkylsulfonyl, R2 is halogen or C1-C10haloalkyl; R3 is for example unsubstitude or substituted phenylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl; Ar1 is for example a direct bond, C1-C12alkylene; —O—C-bond or a —O—Si—bond which cleaves upon the action of an acid; A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11 and A12 are for example a direct bond, —O—, or —S—, or are C1-C12alkylene or phenylene unsubstituted or substituted; Y0 is C1-C12alkylene which is for example substituted by OR4, or SR7; Y2 is e.g. a trivalent radical of C1-C12alkylene; Y3 is e.g. a tetravalent radical of C1-C12alkylene; X is halogen; Ar′1 is for example C1-C12alkyl which is unsubstituted or substituted; Ar″1 is for example phenylene; provided that at least one of the radicals Ar′1, Ar″11 is substituted by 1 to 3 groups of example halogen; R15, R16, R17 and R18 e.g. hydrogen or phenyl; R19, R20, R21, R22 and R23 are e.g. phenyl; are especially suitable for the preparation of photoresists.

    摘要翻译: 式I,II,III,IV,V,VI和VII的新的肟磺酸酯化合物

    Oxime derivatives and the use thereof as photoinitiators
    25.
    发明授权
    Oxime derivatives and the use thereof as photoinitiators 有权
    肟衍生物及其作为光引发剂的用途

    公开(公告)号:US06806024B1

    公开(公告)日:2004-10-19

    申请号:US09914433

    申请日:2001-08-27

    IPC分类号: G03F7004

    摘要: Radically photopolymerizable compositions comprising (a) at least one ethylenically unsaturated photopolymerizable compound; (b) as photoinitiator, at least one compound of formulae (I, II, III, IV, V and/or VI), wherein m is 0 or 1; n is 0, 1, 2 or 3; x is 1 or 2; R1 is inter alia phenyl, naphthyl, anthracyl or phenanthryl, a heteroaryl radical, C2-C12alkenyl, C4-C8cycloalkenyl, or C6-C12bicycloalkenyl; R′1 is inter alia C2-C12alkylene, or phenylene; R2 has one of the meanings of R1 or inter alia is phenyl; y is 1 or 2; R3 if x is 1 inter alia is C1-C18alkylsulfonyl, or phenyl-C1-C3alkylsulfonyl, R3 if x is 2, is for example C2-C12alkylenedisulfonyl; R4 and R5 inter alia are hydrogen, halogen, or C1-C8alkyl; R6, R7, R8 inter alia are hydrogen, R26Y—, or phenyl; R9 inter alia is C5-C8cycloalkyl, or phenyl; A is for example —S—, —O—, or —NR10—; Q is C1-C8-alkylene optionally interrupted by —O—; X is —O— or —NR9—; R10 inter alia is hydrogen, or phenyl; and (c) at least one coinitiator; are especially suitable for the preparation of color filter systems.

    摘要翻译: 自由基光聚合组合物,其包含(a)至少一种烯属不饱和光聚合化合物; (b)作为光引发剂,至少一种式(I,II,III,IV,V和/或VI)的化合物,其中m为0或1; n为0,1,2或3; x为1或2; R 1特别是苯基,萘基,蒽基或菲基,杂芳基,C 2 -C 12烯基,C 4 -C 8环烯基或C 6 -C 12双环烯基; R'1特别是C 2 -C 12亚烷基或亚苯基; R2具有R 1的含义之一,尤其是苯基; y为1或2; 如果x是1,则R3如果是C 1 -C 18烷基磺酰基,或苯基-C 1 -C 3烷基磺酰基,如果x是2,则R 3是例如C 2 -C 12亚烷基二磺酰基; R4和R5尤其是氢,卤素或C1-C8烷基; R6,R7,R8特别是氢,R26Y-或苯基; R9尤其是C5-C8环烷基或苯基; A是例如-S-,-O-或-NR 10 - ; Q是任选被-O-间隔的C1-C8-亚烷基; X是-O-或-NR 9 - ; R 10尤其是氢或苯基; 和(c)至少一种共引发剂; 特别适用于制备滤色器系统。

    Oxime derivatives and the use thereof as latent acids
    26.
    发明授权
    Oxime derivatives and the use thereof as latent acids 有权
    肟衍生物及其作为潜伏酸的用途

    公开(公告)号:US06261738B1

    公开(公告)日:2001-07-17

    申请号:US09533952

    申请日:2000-03-23

    IPC分类号: G03G7004

    摘要: Compounds of formula I, II and III, wherein wherein R1 is for example hydrogen, C1-C12alkyl, C3-C30cycloalkyl, C2-C12alkenyl, C4-C8cycloalkenyl, phenyl, which is unsubstituted or substituted, naphthyl, anthracyl or phenanthryl, unsubstituted or substituted, heteroaryl radical which is unsubstituted or substituted; wherein all radicals R1 with the exception of hydrogen can additionally be substituted by a group having a —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid; R′1 is for example phenylene, naphthylene, diphenylene or oxydiphenylene, wherein these radicals are unsubstituted or substituted; R2 is halogen or C1-C10haloalkyl; R3 is for example C1-C18alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, wherein the groups are unsubstituted or substituted, or R3 is e.g. C2-C6haloalkanoyl, or halobenzoyl, R′3 is for example phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, wherein these radicals are unsubstituted or substituted, X is halogen; are especially suitable as phototsensitive acid-donors in chemically amplified resist formulations.

    摘要翻译: 式I,II和III的化合物,其中R1是例如氢,C1-C12烷基,C3-C30环烷基,C2-C12链烯基,C4-C8环烯基,苯基,未取代或取代的萘基,蒽基或菲基,未取代或取代的, 未取代或取代的杂芳基; 其中除氢之外的所有基团R1可以另外被具有在酸作用下切割的-O-C键或-O-Si键的基团取代; R'1是例如亚苯基,亚萘基,亚二苯基或氧联二苯基,其中这些基团是未取代的或被取代的; R2是卤素或C1-C10卤代烷基; R3是例如C1-C18烷基磺酰基,苯基磺酰基,萘基磺酰基,蒽磺酰基或菲基磺酰基,其中基团是未取代的或被取代的,或者R3是例如。 C 2 -C 6卤代烷酰基或卤代苯甲酰基,R'3是例如亚苯基二磺酰基,萘基二磺酰基,二苯基二磺酰基或氧基二苯基二磺酰基,其中这些基团是未取代的或被取代的,X是卤素; 在化学放大抗蚀剂配方中特别适合作为光敏酸供体。

    Latent acids and their use
    28.
    发明申请
    Latent acids and their use 有权
    潜在酸及其用途

    公开(公告)号:US20110217654A1

    公开(公告)日:2011-09-08

    申请号:US13028323

    申请日:2011-02-16

    摘要: The invention pertains to a compound generating an acid of the formula I or II, for instance corresponding sulfonium and iodonium salts, as well as corresponding sulfonyloximes wherein X is CH2 or CO; Y is O, NR4, S, O(CO), O(CO)O, O(CO)NR4, OSO2, O(CS), or O(CS)NR4; R1 is for example C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, C3-C30cycloalkyl, C3-C30cycloalkyl-C1-C18alkyl, interrupted C2-C18alkyl, interrupted C3-C30cycloalkyl, interrupted C3-C30cycloalkyl-C1-C18alkyl, interrupted C4-C30cycloalkenyl, phenyl, naphthyl, anthracyl, phenanthryl, biphenylyl, fluorenyl or heteroaryl, all unsubstituted or are substituted; or R1 is NR12R13; R2 and R3 are for example C3-C30cycloalkylene, C3-C30cycloalkyl-C1-C18alkylene, C1-C18alkylene, C1-C10haloalkylene, C2-C12alkenylene, C4-C30cycloalkenylene, phenylene, naphthylene, anthracylene, phenanthrylene, biphenylene or heteroarylene; all unsubstituted or substituted; R4 is for example C3-C30cycloalkyl, C3-C30cycloalkyl-C1-C18alkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl; R12 and R13 are for example C3-C30cycloalkyl, C3-C30cycloalkyl-C1-C18alkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, Ar, (CO)R15, (CO)OR15 or SO2R15; and Ar is phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl or heteroaryl, all unsubstituted or substituted.

    摘要翻译: 本发明涉及产生式I或II的酸的化合物,例如相应的锍盐和碘鎓盐,以及其中X是CH 2或CO的相应的磺酰肟; Y是O,NR4,S,O(CO),O(CO)O,O(CO)NR4,OSO2,O(CS)或O(CS)NR4; R 1是例如C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基,C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,间断的C 2 -C 18烷基,间断的C 3 -C 30环烷基, 间断的C 3 -C 30环烷基-C 1 -C 18烷基,间断的C 4 -C 30环烯基,苯基,萘基,蒽基,菲基,联苯基,芴基或杂芳基,全部未取代或被取代; 或R1是NR12R13; R2和R3是例如C 3 -C 30亚环烷基,C 3 -C 30环烷基-C 1 -C 18亚烷基,C 1 -C 18亚烷基,C 1 -C 10卤代亚烷基,C 2 -C 12亚烯基,C 4 -C 30亚环烯基,亚苯基,亚萘基,亚蒽基,亚菲基,亚联苯基或亚杂芳基。 全部未取代或取代; R4是例如C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12链烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基; R 12和R 13例如为C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基,Ar,(CO)R 15 CO)OR15或SO2R15; 并且Ar是苯基,联苯基,芴基,萘基,蒽基,菲基或杂芳基,全部是未取代或取代的。

    Oxime derivatives and use thereof as latent acids
    29.
    发明授权
    Oxime derivatives and use thereof as latent acids 有权
    肟衍生物及其用作潜伏酸

    公开(公告)号:US07687220B2

    公开(公告)日:2010-03-30

    申请号:US11632687

    申请日:2005-07-11

    IPC分类号: G03F7/028 C07C259/08

    摘要: The invention pertain to novel photoacid generator compounds of the formula I, II or III wherein R1 is for example C1-C18alkylsulfonyl or phenylsulfonyl, phenyl-C1-C3alkylsulfonyl, , naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, all optionally substituted, or R1 is a group X1, X2 and X3 independently of each other are O or S; R′1, is e.g. phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, all optionally substituted; R2 is halogen or C1-C10haloalkyl; X is halogen; Ar1 is for example biphenylyl or fluorenyl, or is substituted naphthyl; Ar′1 is heteroarylene, optionally substituted; R8, R9, R10 and R11 for example are C1-C6alkyl which is unsubstituted or substituted by halogen; or R8, R9 and R10 are phenyl which is unsubstituted or substituted by C1-C4alkyl or halogen; or R10 and R11 together are 1,2-phenylene or C2-C6alkylene which is unsubstituted or substituted by C1-C4alkyl or halogen.

    摘要翻译: 本发明涉及式I,II或III的新型光致酸产生剂化合物,其中R 1为例如C 1 -C 18烷基磺酰基或苯基磺酰基,苯基-C 1 -C 3烷基磺酰基,萘基磺酰基,蒽磺酰基或菲基磺酰基,均为任选取代的,或者R 1为基团X 1 ,X2和X3彼此独立地为O或S; R'1,例如 亚苯基二磺酰基,亚苯基二磺酰基,二苯基二磺酰基或氧基二苯基二磺酰基,全部任选被取代; R2是卤素或C1-C10卤代烷基; X是卤素; Ar1为例如联苯基或芴基,或为取代的萘基; Ar'1是杂亚芳基,任选取代; R8,R9,R10和R11例如是未被取代或被卤素取代的C1-C6烷基; 或R 8,R 9和R 10为未被取代或被C 1 -C 4烷基或卤素取代的苯基; 或R 10和R 11一起是1,2-亚苯基或未被取代或被C 1 -C 4烷基或卤素取代的C 2 -C 6亚烷基。

    Sulfonate derivatives and the use thereof as latent acids

    公开(公告)号:US20080286693A1

    公开(公告)日:2008-11-20

    申请号:US11999116

    申请日:2007-12-04

    IPC分类号: G03F7/20

    摘要: Chemically amplified photoresist compositions comprising,(a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid; and (b) a compound of the formula Ia, Ib, IIa, IIb, IIIa, IIIb, IVa, IVb, Va, Vb or VIa wherein n is 1 or 2; m is 0 or 1; X0 is —[CH2]h—X or —CH═CH2; h is 2, 3, 4, 5 or 6; R1, when n is 1, is for example optionally substituted phenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl; R1, when n is 2, is for example optionally substituted phenylene or naphthylene; R2 for example has one of the meanings of R1; X is for example —OR20, —NR21R22, —SR23; X′ is —X1-A3-X-; X1 and X2 are for example —O—, —S— or a direct bond; A3 is e.g. phenylene; R3 has for example one of the meanings given for R1; R4 has for example one of the meaning given for R2; R5 and R6 e.g. are hydrogen; G i.a. is —S— or —O—; R7 when n is 1, e.g. is phenyl, optionally substituted, when n is 2, is for example phenylene; R8 and R9 e.g. are C1-C18alkyl; R10 has one of the meanings given for R7; R11 i.a. is C1-C18alkyl; R12, R13, R14, R15 R16, R17 and R18 for example are hydrogen or C1-C18alkyl; R20, R21, R22 and R23 i.a. are phenyl or C1-C18alkyl; give high resolution with good resist profile.