VARYING THICKNESS INDUCTOR
    25.
    发明申请
    VARYING THICKNESS INDUCTOR 审中-公开
    变化厚度电感器

    公开(公告)号:US20160358709A1

    公开(公告)日:2016-12-08

    申请号:US15242007

    申请日:2016-08-19

    IPC分类号: H01F41/04 H01F27/28

    摘要: A method includes forming a first conductive spiral and a second conductive spiral of a spiral inductor coupled to a substrate. The second conductive spiral overlays the first conductive spiral. A first portion of an innermost turn of the spiral inductor has a first thickness in a direction perpendicular to the substrate. The first portion of the innermost turn includes a first portion of the first conductive spiral and does not include the second conductive spiral. A second portion of the innermost turn includes a first portion of the second conductive spiral. A portion of an outermost turn of the spiral inductor has a second thickness in the direction perpendicular to the substrate. The second thickness is greater than the first thickness. The portion of the outermost turn includes a second portion of the first conductive spiral and a second portion of the second conductive spiral.

    摘要翻译: 一种方法包括形成耦合到衬底的螺旋电感器的第一导电螺旋和第二导电螺旋。 第二导电螺旋覆盖第一导电螺旋。 螺旋电感器的最内圈的第一部分在垂直于衬底的方向上具有第一厚度。 最内圈的第一部分包括第一导电螺旋的第一部分,并且不包括第二导电螺旋。 最内圈的第二部分包括第二导电螺旋的第一部分。 螺旋电感器的最外圈的一部分在垂直于衬底的方向上具有第二厚度。 第二厚度大于第一厚度。 最外圈的部分包括第一导电螺旋的第二部分和第二导电螺旋的第二部分。