Thin film transistor, method of manufacturing the same, and display device
    21.
    发明授权
    Thin film transistor, method of manufacturing the same, and display device 有权
    薄膜晶体管及其制造方法以及显示装置

    公开(公告)号:US08748878B2

    公开(公告)日:2014-06-10

    申请号:US12709805

    申请日:2010-02-22

    IPC分类号: H01L29/786 H01L21/34

    CPC分类号: H01L29/7869

    摘要: The present application provides a thin film transistor and a method of manufacturing same capable of suppressing diffusion of aluminum to oxide semiconductor and selectively etching oxide semiconductor and aluminum oxide. The thin film transistor includes: a gate electrode; a channel layer whose main component is oxide semiconductor; a gate insulating film provided between the gate electrode and the channel layer; a sealing layer provided on the side opposite to the gate electrode, of the channel layer; and a pair of electrodes which are in contact with the channel layer and serve as a source and a drain. The sealing layer includes at least a first insulating film made of a first insulating material, and a second insulating film made of a second insulting material having etching selectivity to each of the oxide semiconductor and the first insulating material and provided between the first insulating film and the channel layer.

    摘要翻译: 本申请提供了能够抑制铝向氧化物半导体的扩散并选择性地蚀刻氧化物半导体和氧化铝的薄膜晶体管及其制造方法。 薄膜晶体管包括:栅电极; 主要成分是氧化物半导体的沟道层; 设置在所述栅极电极和所述沟道层之间的栅极绝缘膜; 设置在沟道层的与栅电极相对的一侧的密封层; 以及与沟道层接触并用作源极和漏极的一对电极。 所述密封层至少包括由第一绝缘材料制成的第一绝缘膜和由具有对所述氧化物半导体和所述第一绝缘材料中的每一个具有蚀刻选择性的第二绝缘材料制成的第二绝缘膜,并且设置在所述第一绝缘膜和 通道层。

    Thin film transistor, display device, and electronic device
    22.
    发明授权
    Thin film transistor, display device, and electronic device 有权
    薄膜晶体管,显示器件和电子器件

    公开(公告)号:US08384080B2

    公开(公告)日:2013-02-26

    申请号:US12964852

    申请日:2010-12-10

    IPC分类号: H01L29/786

    CPC分类号: H01L29/7869 H01L29/78693

    摘要: A thin film transistor, which is capable of improving carrier mobility, and a display device and an electronic device, each of which uses the thin film transistor, are provided. The thin film transistor includes: a gate electrode; an oxide semiconductor layer including a multilayer film including a carrier travel layer configuring a channel and a carrier supply layer for supplying carriers to the carrier travel layer; a gate insulating film provided between the gate electrode and the oxide semiconductor layer; and a pair of electrodes as a source and a drain. A conduction band minimum level or a valence band maximum level corresponding to a carrier supply source of the carrier supply layer is higher in energy than a conduction band minimum level or a valence band maximum level corresponding to a carrier supply destination of the carrier travel layer.

    摘要翻译: 提供能够提高载流子迁移率的薄膜晶体管,以及各自使用薄膜晶体管的显示装置和电子装置。 薄膜晶体管包括:栅电极; 包括多层膜的氧化物半导体层,所述多层膜包括构成沟道的载流子行进层和用于向所述载体行进层供给载体的载体供给层; 设置在所述栅电极和所述氧化物半导体层之间的栅极绝缘膜; 以及一对电极作为源极和漏极。 与载波供电层的载波供给源对应的导带最小电平或价带最大电平的能量高于对应于载波行进层的载波供给目的地的导带最小电平或价带最大电平。

    THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THIN FILM TRANSISTOR, DISPLAY UNIT, AND ELECTRONIC DEVICE
    23.
    发明申请
    THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THIN FILM TRANSISTOR, DISPLAY UNIT, AND ELECTRONIC DEVICE 有权
    薄膜晶体管,制造薄膜晶体管的方法,显示单元和电子器件

    公开(公告)号:US20110180793A1

    公开(公告)日:2011-07-28

    申请号:US13006736

    申请日:2011-01-14

    申请人: Satoshi Taniguchi

    发明人: Satoshi Taniguchi

    摘要: There is provided a thin film transistor including: a gate electrode; a pair of source/drain electrodes; a first oxide semiconductor layer provided between the gate electrode, and the pair of source/drain electrodes, and forming a channel; and a second oxide semiconductor layer provided on the pair of source/drain electrodes side of the first oxide semiconductor layer, and having a polarity different from that of the first oxide semiconductor layer.

    摘要翻译: 提供一种薄膜晶体管,包括:栅电极; 一对源极/漏极; 设置在所述栅极电极和所述一对源极/漏极电极之间并形成沟道的第一氧化物半导体层; 以及设置在所述第一氧化物半导体层的所述一对源极/漏极侧的第二氧化物半导体层,并且具有与所述第一氧化物半导体层的极性不同的极性。

    Field-effect semiconductor device and method for making the same
    25.
    发明授权
    Field-effect semiconductor device and method for making the same 有权
    场效半导体器件及其制造方法

    公开(公告)号:US07160766B2

    公开(公告)日:2007-01-09

    申请号:US10772375

    申请日:2004-02-06

    IPC分类号: H01L21/338

    摘要: A method for making a filed-effect semiconductor device includes the steps of forming a gate electrode on a semiconductor layer composed of a gallium nitride-based compound semiconductor represented by the formula AlxInyGa1−x−yN, wherein x+y=1, 0≦x≦1, and 0≦y≦1; and forming a source electrode and a drain electrode by self-alignment using the gate electrode as a mask. A field-effect semiconductor device fabricated by the method is also disclosed.

    摘要翻译: 一种场效应半导体器件的制造方法包括以下步骤:在由式Al x Y y表示的基于氮化镓的化合物半导体构成的半导体层上形成栅电极, 其中x + y = 1,0 <= x <= 1,0 <= y <= 1; 并且使用栅电极作为掩模,通过自对准形成源电极和漏电极。 还公开了通过该方法制造的场效应半导体器件。

    Planar microlens array and method of making same
    27.
    发明授权
    Planar microlens array and method of making same 失效
    平面微透镜阵列及其制作方法

    公开(公告)号:US5867321A

    公开(公告)日:1999-02-02

    申请号:US700397

    申请日:1996-12-13

    IPC分类号: G02B3/00 G02B27/10 G09F9/00

    摘要: A microlens array of high converging efficiency is provided, independently of the array and lens filling rate of microlens arrays, with a method of manufacturing microlens arrays using the diffusion process. A multitude of refractive-index distribution type microlenses formed by diffusing in a planar transparent substrate a substance contributing to increasing the refractive index of the substrate are two-dimensionally and regularly arranged on the surface of the substrate. The microlenses are densely arranged on the surface of the substrate, and diffusion fronts of the microlenses form regions where the diffusion fronts are fused with those of the adjoining microlenses. The length of a region where certain two adjoining microlenses are fused together, in the direction of a straight line connecting the centers of the two microlenses is less than 20% of the array pitch of the microlenses in the above-mentioned direction.

    摘要翻译: PCT No.PCT / JP95 / 02681 Sec。 371日期1996年12月13日第 102(e)日期1996年12月13日PCT 1995年12月26日PCT PCT。 公开号WO96 / 21169 日期1996年7月11日提供了一种高收敛效率的微透镜阵列,与微透镜阵列的阵列和透镜填充率无关,具有使用扩散过程制造微透镜阵列的方法。 通过在平面透明基板中漫射形成的多个折射率分布型微透镜,有助于提高基板的折射率的物质被二维规则地布置在基板的表面上。 微透镜密集地布置在衬底的表面上,并且微透镜的扩散前沿形成区域,其中扩散前沿与邻接的微透镜的那些熔融。 在连接两个微透镜的中心的直线的方向上将某些两个相邻的微透镜熔合在一起的区域的长度小于上述方向上的微透镜的阵列间距的20%。

    Gas sensor
    29.
    发明授权
    Gas sensor 失效
    气体传感器

    公开(公告)号:US3952567A

    公开(公告)日:1976-04-27

    申请号:US586813

    申请日:1975-06-13

    CPC分类号: G01N27/12

    摘要: A gas sensor comprising as a gas sensible material a spinel-type ferrite represented by the general formula AFe.sub.2 O.sub.4 in which A stands for at least one member selected from the group consisting of Li, Mg, Mn, Fe, Co, Ni, Cu, Zn and Pb is provided. In many cases, a catalyzer or a recovering agent need not be incorporated in this gas sensor, and it is characterized in that it is hardly influenced by moisture in the atmosphere.

    摘要翻译: 一种气体传感器,其特征在于,作为气体感知材料,由通式AFe 2 O 4表示的尖晶石型铁氧体,A表示选自Li,Mg,Mn,Fe,Co,Ni,Cu,Zn 并提供Pb。 在许多情况下,催化剂或回收剂不需要并入该气体传感器中,其特征在于其几乎不受气氛中的水分的影响。