Method for manufacturing semiconductor device
    21.
    发明申请
    Method for manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US20070045805A1

    公开(公告)日:2007-03-01

    申请号:US11491037

    申请日:2006-07-24

    Abstract: A semiconductor device which is excellent in chemical and physical strength and circumstance resistance is provided. A first stacked film including a first base material and a first adhesive layer is adhered so as to cover one surface of a stacked body including an integrated circuit, the stacked body is sealed by adhering a second stacked film including a second base material and a second adhesive layer so as to cover the other surface of the stacked body, and the first stacked film and the second stacked film are cut. Then, a side surface of the first stacked film and the second stacked film, which is exposed by the cutting, is irradiated with laser light.

    Abstract translation: 提供了具有优异的化学和物理强度和环境阻力的半导体器件。 将包括第一基材和第一粘合剂层的第一叠层膜粘合以覆盖包括集成电路的层叠体的一个表面,通过将包括第二基材和第二基材的第二叠层膜 粘合剂层以覆盖层叠体的另一面,并且切割第一层叠膜和第二层叠膜。 然后,用激光照射通过切割曝光的第一层叠膜和第二层叠膜的侧面。

    Manufacturing method of semiconductor device
    29.
    发明申请
    Manufacturing method of semiconductor device 有权
    半导体器件的制造方法

    公开(公告)号:US20070077691A1

    公开(公告)日:2007-04-05

    申请号:US11522455

    申请日:2006-09-18

    Inventor: Ryosuke Watanabe

    Abstract: It is an object of the present invention to provide a manufacturing method of a semiconductor device where a semiconductor element is prevented from being damaged and throughput speed thereof is improved, even in a case of thinning or removing a supporting substrate after forming the semiconductor element over the supporting substrate. According to one feature of the present invention, a method for manufacturing a semiconductor device includes the steps of forming a plurality of element groups over an upper surface of a substrate; forming an insulating film so as to cover the plurality of element groups; selectively forming an opening to the insulating film which is located in a region between neighboring two element groups in the plurality of element groups to expose the substrate; forming a first film so as to cover the insulating film and the opening; exposing the element groups by removing the substrate; forming a second film so as to cover the surface of the exposed element groups; and cutting off between the plurality of element groups so as not to expose the insulating film.

    Abstract translation: 本发明的目的是提供一种半导体器件的制造方法,即使在形成半导体元件之后,在使半导体元件变薄或去除支撑基板的情况下,也可以防止半导体元件受到损坏并且其吞吐速度得到改善 支撑基板。 根据本发明的一个特征,一种制造半导体器件的方法包括以下步骤:在衬底的上表面上形成多个元件组; 形成绝缘膜以覆盖所述多个元件组; 选择性地形成位于所述多个元件组中相邻的两个元件组之间的区域中的绝缘膜的开口以露出所述衬底; 形成第一膜以覆盖绝缘膜和开口; 通过去除衬底暴露元件组; 形成第二膜以覆盖暴露的元件组的表面; 并且在多个元件组之间切断以便不暴露绝缘膜。

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