MEMS tunable capacitor based on angular vertical comb drives
    28.
    发明申请
    MEMS tunable capacitor based on angular vertical comb drives 失效
    基于角度垂直梳齿驱动的MEMS可调电容器

    公开(公告)号:US20050013087A1

    公开(公告)日:2005-01-20

    申请号:US10850958

    申请日:2004-05-21

    IPC分类号: B81B5/00 H01G5/06 H01G5/00

    摘要: A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.

    摘要翻译: 描述了具有角度垂直梳驱动(AVC)致动器的MEMS可调谐电容器,其中在紧凑的空间中实现高电容和宽的连续调谐范围。 梳指旋转一个较小的垂直角度,这允许比常规侧梳驱动装置更宽的调谐范围。 该装置的制造是直接的,并涉及单个深反应离子蚀刻步骤,随后释放和平面外组装角梳。