COMPOSITE MATERIALS CONTAINING METALLIZED CARBON NANOTUBES AND NANOFIBERS
    22.
    发明申请
    COMPOSITE MATERIALS CONTAINING METALLIZED CARBON NANOTUBES AND NANOFIBERS 审中-公开
    包含金属化碳纳米管和纳米纤维的复合材料

    公开(公告)号:US20100261058A1

    公开(公告)日:2010-10-14

    申请号:US12759387

    申请日:2010-04-13

    摘要: A method and apparatus are provided for the cost effective formation of a composite material which includes metallized carbon nanotubes and/or nanofibers that can be used to form portions of an energy storage device, such as a lithium ion battery. In one embodiment, carbon nanotubes are formed on a host substrate using a catalytic chemical vapor deposition process. An initiation-adhesion layer is formed over the carbon nanotubes and a metallic layer is then deposited on the initiation-adhesion layer and each layer is formed using a wet deposition process. In one embodiment, portions of the host substrate are used to form an electrochemical storage device that may be integrated with other formed electrochemical storage devices to create an interconnected battery array. The battery array may be formed as a woven sheet, panel, or other flexible structure depending upon the type of host substrate material. In one case, the host substrate material may be a flexible fibrous material that has multiple layers formed thereon to form a fiber battery, such as a lithium ion battery.

    摘要翻译: 提供了一种用于成本有效地形成复合材料的方法和装置,所述复合材料包括可用于形成诸如锂离子电池的能量存储装置的部分的金属化碳纳米管和/或纳米纤维。 在一个实施方案中,使用催化化学气相沉积工艺在主体衬底上形成碳纳米管。 在碳纳米管上形成起始粘合层,然后在起始粘合层上沉积金属层,并且使用湿沉积工艺形成每个层。 在一个实施例中,主机衬底的部分用于形成电化学存储器件,其可以与其它形成的电化学存储器件集成以产生互连的电池阵列。 取决于主机基板材料的类型,电池阵列可以形成为编织片,面板或其它柔性结构。 在一种情况下,主体衬底材料可以是其上形成有多层以形成诸如锂离子电池的纤维电池的柔性纤维材料。

    THREE-DIMENSIONAL BATTERY WITH HYBRID NANO-CARBON LAYER
    23.
    发明申请
    THREE-DIMENSIONAL BATTERY WITH HYBRID NANO-CARBON LAYER 审中-公开
    具有混合纳米碳层的三维电池

    公开(公告)号:US20100151318A1

    公开(公告)日:2010-06-17

    申请号:US12634095

    申请日:2009-12-09

    摘要: A Li-ion battery cell is formed from deposited thin-film layers and comprises a high-surface-area 3-D battery structure. The high-surface-area 3-D battery structure includes a fullerene-hybrid material deposited onto a surface of a conductive substrate and a conformal metallic layer deposited onto the fullerene-hybrid material. The fullerene-hybrid material is made up of chains of fullerene “onions” linked by carbon nanotubes to form a high-surface-area layer on the conductive substrate and has a “three-dimensional” surface. The conformal metallic layer acts as the active anode material in the Li-ion battery and also has a high surface area, thereby forming a high-surface-area anode. The Li-ion battery cell also includes an ionic electrolyte-separator layer, an active cathodic material layer, and a metal current collector for the cathode, each of which is deposited as a conformal thin film.

    摘要翻译: 锂离子电池由沉积的薄膜层形成,并包括高表面积的三维电池结构。 高表面积3-D电池结构包括沉积在导电基底的表面上的富勒烯杂化材料和沉积在富勒烯杂化材料上的保形金属层。 富勒烯杂化材料由碳纳米管连接的富勒烯“洋葱”链构成,在导电性基材上形成高表面积层,具有“三维”表面。 保形金属层用作锂离子电池中的活性阳极材料,并且还具有高表面积,从而形成高表面积阳极。 锂离子电池单元还包括用于阴极的离子电解质分离器层,活性阴极材料层和金属集流体,其每个被沉积为保形薄膜。

    Compact apparatus and method for storing and loading semiconductor wafer carriers

    公开(公告)号:US07607881B2

    公开(公告)日:2009-10-27

    申请号:US11764735

    申请日:2007-06-18

    IPC分类号: B65G65/00

    摘要: An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated port for receipt of wafer carriers from an overhead factory transport, allows for local interconnection among a plurality of the inventive apparatuses, and enables independent loading of the factory load port and the tool load port. An inventive wafer handling method which divides a lot of wafers into sublots and distributes the sublots among tools configured to perform the same process is also provided.

    BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY
    27.
    发明申请
    BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY 审中-公开
    批量设备机器人和方法阵列工程转让光伏工厂

    公开(公告)号:US20080292433A1

    公开(公告)日:2008-11-27

    申请号:US11747391

    申请日:2007-05-11

    IPC分类号: B65H5/00

    摘要: The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work-pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.

    摘要翻译: 本发明通常包括用于自动化大批量批量工件制造工厂的设备,其包括能够每小时生产1,000个或更多个工件的高生产率工厂结构中的工件处理和工件加工。 工件可以从堆叠的供应提供给设备到并行阵列。 另外,工件可以通过阵列在制造架构之间转移到阵列批量传输。 工件可以在并行批量传输操作的同时在制造架构内转移。 机器人操作可以在机器人设备之间,机器人设备和处理设备之间以及处理设备内。

    Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
    28.
    发明申请
    Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application 失效
    用于制造太阳能电池应用的大面积多晶硅片的设备

    公开(公告)号:US20070158654A1

    公开(公告)日:2007-07-12

    申请号:US11325089

    申请日:2006-01-03

    IPC分类号: H01L29/00

    摘要: A method and apparatus for forming a semiconductor sheet suitable for use as a solar cell by depositing an array of solidified drops of a feed material on a sheet support. The desired properties of the sheet fabricated with the teaching of this invention are: flatness, low residual stress, minority carrier diffusion length greater than 40 microns, and minimum grain dimension at least two times the minority carrier diffusion length. In one embodiment, the deposition chamber is adapted to form and process sheets that have a surface area of about 1,000-2,400 cm2.

    摘要翻译: 一种用于形成适合用作太阳能电池的半导体片的方法和装置,该方法和装置通过在片材载体上沉积馈送材料的凝固液滴阵列。 通过本发明的教导制造的片材的期望性质是:平坦度,低残余应力,大于40微米的少数载流子扩散长度,以及最小晶粒尺寸至少是少数载流子扩散长度的两倍。 在一个实施例中,沉积室适于形成和处理具有约1,000-2,400cm 2的表面积的片材。

    Method and apparatus for chemical-mechanical jet etching of semiconductor structures
    29.
    发明授权
    Method and apparatus for chemical-mechanical jet etching of semiconductor structures 失效
    半导体结构化学机械喷射蚀刻的方法和装置

    公开(公告)号:US06699356B2

    公开(公告)日:2004-03-02

    申请号:US09932396

    申请日:2001-08-17

    IPC分类号: B05C500

    摘要: A chemical-mechanical jet etching method rapidly removes large amounts of material in wafer thinning, or produces large-scale features on a silicon wafer, gallium arsenide substrate, or similar flat semiconductor workpiece, at etch rates in the range of 10-100 microns of workpiece thickness per minute. A nozzle or array of nozzles, optionally including a dual-orifice nozzle, delivers a high-pressure jet of machining etchant fluid to the surface of the workpiece. The machining etchant comprises a liquid or gas, carrying particulate material. The liquid may be a chemical etchant, or a solvent for a chemical etchant, if desired. The areas which are not to be etched may be shielded from the jet by a patterned mask, or the jet may be directed at areas from which material is to be removed, as in wafer thinning or direct writing, depending on the size of the desired feature or etched area.

    摘要翻译: 化学机械喷射蚀刻方法在硅片,砷化镓衬底或类似的平坦半导体工件上快速去除大量晶片薄化中的材料,或在10-100微米范围内的蚀刻速率下产生大尺寸特征 工件厚度每分钟。 可选地包括双孔喷嘴的喷嘴或喷嘴阵列将蚀刻剂流体的高压射流输送到工件的表面。 加工蚀刻剂包括携带颗粒材料的液体或气体。 如果需要,液体可以是化学蚀刻剂或化学蚀刻剂的溶剂。 不被蚀刻的区域可以通过图案化掩模与射流屏蔽,或者喷射可以被引导到要从中除去材料的区域,如在晶片变薄或直接写入中,这取决于所需的尺寸 特征或蚀刻区域。