公开(公告)号：US06734437B2

公开(公告)日：2004-05-11

申请号：US10374764

申请日：2003-02-25

Applicant: Setsuo Norioka ,  Toshiaki Miyokawa ,  Naoki Date ,  Jun Sasaki ,  Yuichi Aki ,  Yoshihisa Miura

Inventor： Setsuo Norioka ,  Toshiaki Miyokawa ,  Naoki Date ,  Jun Sasaki ,  Yuichi Aki ,  Yoshihisa Miura

IPC: G01N2300

CPC classification number: H01J37/305 ,  H01J37/18 ,  H01J37/21 ,  H01J37/3056 ,  H01J2237/162 ,  H01J2237/188 ,  H01J2237/216 ,  H01J2237/24405

Abstract: An electron beam irradiation system for shooting an electron beam at a master disk to make recordings. This system is capable of focusing the beam easily and accurately in a corresponding manner to the master disk, thus permitting accurate recordings. The system has a support mechanism portion holding the master disk on it. The support mechanism portion has a slide table on which a focusing stage is placed. The focusing stage has a knife edge and a Faraday cup. The knife edge is located immediately beside the master disk. When recordings are made, an electron beam is first shot at the focusing stage and brought to focus. Then, the beam is shot at the master disk, thus making recordings.

Abstract translation: 一种用于在母盘上拍摄电子束以进行记录的电子束照射系统。 该系统能够以与母盘相对应的方式容易且准确地聚焦光束，从而允许精确的记录。 该系统具有将母盘保持在其上的支撑机构部分。 支撑机构部分具有放置聚焦台的滑动台。 聚焦阶段有刀刃和法拉第杯。 刀刃位于主盘的正上方。 当进行记录时，首先在聚焦阶段拍摄电子束并进行聚焦。 然后，在主盘上拍摄光束，从而进行录制。

公开(公告)号：US20030178582A1

公开(公告)日：2003-09-25

申请号：US10374764

申请日：2003-02-25

Applicant: JEOL LTD. ,  SONY CORPORATION

Inventor： Setsuo Norioka ,  Toshiaki Miyokawa ,  Naoki Date ,  Jun Sasaki ,  Yuichi Aki ,  Yoshihisa Miura

IPC: G21G005/00 ,  A61N005/00

CPC classification number: H01J37/305 ,  H01J37/18 ,  H01J37/21 ,  H01J37/3056 ,  H01J2237/162 ,  H01J2237/188 ,  H01J2237/216 ,  H01J2237/24405

Abstract: An electron beam irradiation system for shooting an electron beam at a master disk to make recordings. This system is capable of focusing the beam easily and accurately in a corresponding manner to the master disk, thus permitting accurate recordings. The system has a support mechanism portion holding the master disk on it. The support mechanism portion has a slide table on which a focusing stage is placed. The focusing stage has a knife edge and a Faraday cup. The knife edge is located immediately beside the master disk. When recordings are made, an electron beam is first shot at the focusing stage and brought to focus. Then, the beam is shot at the master disk, thus making recordings.

Abstract translation: 一种用于在母盘上拍摄电子束以进行记录的电子束照射系统。 该系统能够以与母盘相对应的方式容易且准确地聚焦光束，从而允许精确的记录。 该系统具有将母盘保持在其上的支撑机构部分。 支撑机构部分具有放置聚焦台的滑动台。 聚焦阶段有刀刃和法拉第杯。 刀刃位于主盘的正上方。 当进行记录时，首先在聚焦阶段拍摄电子束并进行聚焦。 然后，在主盘上拍摄光束，从而进行录制。

公开(公告)号：US20030178581A1

公开(公告)日：2003-09-25

申请号：US10372419

申请日：2003-02-24

Inventor： Yoshihisa Miura ,  Yuichi Aki ,  Hiroshi Kawase ,  Masanobu Yamamoto ,  Naoki Date ,  Setsuo Norioka ,  Mitsuru Koizumi ,  Gakuo Komatsubara

IPC: G21G005/00 ,  A61N005/00

CPC classification number: H01J37/18 ,  G11B7/261 ,  H01J37/305 ,  H01J37/3056 ,  H01J2237/162 ,  H01J2237/188

Abstract: An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad 18 connected to a vacuum chamber 14 containing an electron beam column 15 and in a condition that the static pressure floating pad 18 is attached to a subject 1 to be irradiated without contacting, and an electron beam irradiating the subject 1 to be irradiated through an electron beam path 19 of the static pressure floating pad 18, whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad 18 is separated from the subject 1 to be irradiated. A vacuum seal valve 30 including a piston to open and close the electron beam path 19 is provided within the static pressure floating pad 18. When the static pressure floating pad 18 is separated from the subject 1, the vacuum seal valve 30 is structured to be activated to close the electron beam path 19 so as to prevent the air from flowing into the vacuum chamber 14. In this structure, the vacuum seal valve 30 is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.

Abstract translation: 部分真空法中的电子束照射装置由连接到包含电子束柱15的真空室14的静压浮动垫18构成，并且在将静压浮动垫18附着到被检体1的状态下 照射不经接触的电子束，以及通过静压浮动垫18的电子束路径19照射待被检体1的电子束，由此即使在真空室和电子束柱中也可以将真空室和电子束柱保持在所需的真空度 条件是静压浮动垫18与待照射的被检体1分离。 在静压浮动垫18内设置包括打开和关闭电子束通道19的活塞的真空密封阀30.当静压浮动垫18与被检体1分离时，真空密封阀30构成为 激活以闭合电子束路径19，以防止空气流入真空室14.在该结构中，真空密封阀30形成为圆形截面并具有窄尖端的锥形形状，以便 实现高真空密封而没有间隙，从而可以确保真空室和电子束柱中的真空度。

公开(公告)号：US4524261A

公开(公告)日：1985-06-18

申请号：US533822

申请日：1983-09-19

Applicant: Paul F. Petric ,  Michael S. Foley

Inventor： Paul F. Petric ,  Michael S. Foley

IPC: B01J3/00 ,  H01J37/18 ,  H01J37/317 ,  H01L21/027 ,  B23K15/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/18 ,  H01J37/3174 ,  H01J2237/0264 ,  H01J2237/162 ,  H01J2237/188 ,  H01J2237/2006

Abstract: Localized vacuum envelope apparatus includes a housing member having a bottom plate with a downwardly extending first sleeve and an upwardly extending flange. The flange includes ports for vacuum pumping and is adapted for attachment to an electron beam column. The apparatus further includes a lower plate having a second downwardly extending sleeve and an upper plate having a third downwardly extending sleeve. The first, second and third sleeves, which can have a truncated conical shape and are concentric, define vacuum zones. Channels are provided for connecting the vacuum zones to individual ports. The tips of the sleeves are coplanar and form the tip of the vacuum envelope. A noncontacting graded vacuum seal is formed between the tip of the vacuum envelope and a workpiece. The housing member and the upper plate can be ferromagnetic material to provide double magnetic shielding.

Abstract translation: 局部真空包封装置包括具有底板的壳体构件，底板具有向下延伸的第一套筒和向上延伸的凸缘。 凸缘包括用于真空泵送的端口，并且适于附接到电子束柱。 该装置还包括具有第二向下延伸套筒的下板和具有第三向下延伸套筒的上板。 可以具有截头圆锥形并且同心的第一，第二和第三套筒限定了真空区域。 提供通道用于将真空区域连接到各个端口。 袖子的尖端是共面的并形成真空外壳的尖端。 在真空外壳的尖端和工件之间形成非接触式分级真空密封。 外壳构件和上板可以是铁磁材料，以提供双重磁屏蔽。

公开(公告)号：US20170263414A1

公开(公告)日：2017-09-14

申请号：US15174323

申请日：2016-06-06

Applicant: Taiwan Electron Microscope Instrument Corporation

Inventor： FU-RONG CHEN ,  Tsu-Wei HUANG ,  Shih-Yi LIU ,  I-Jiun CHEN ,  CHIH WEI CHEN ,  Ying-Shuo TSENG ,  Yu-Shan HUANG ,  Hsin-Yu LIN ,  Jian-Min FANG ,  Chin-Liang HSU ,  LI-CHIAO YANG

IPC: H01J37/26 ,  H01J37/16 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/162 ,  H01J2237/166 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/202

Abstract: An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes on downstream of charged particle beam generator and has a first surface and a second surface. A space between charged particle beam generator and the first surface of film is a vacuum environment. The bearing unit disposes at a side of second surface of film and has a bearing surface and a back surface. The object disposes on the bearing surface of the bearing unit and a distance between an analyzed surface of the object and the film is less than a predetermined spacing. A liquid space exists between the analyzed surface and the film to be filled a liquid.

公开(公告)号：US20150332891A1

公开(公告)日：2015-11-19

申请号：US14704453

申请日：2015-05-05

Applicant: MART PETRUS MARIA BIERHOFF ,  BART BUIJSSE ,  CORNELIS SANDER KOOIJMAN ,  HUGO VAN LEEUWEN ,  HENDRIK GEZINUS TAPPEL ,  COLIN AUGUST SANFORD ,  SANDER RICHARD MARIE STOKS ,  STEVEN BERGER ,  BEN JACOBUS MARIE BORMANS ,  KOEN ARNOLDUS WILHELMUS DRIESSEN ,  JOHANNES ANTONIUS HENDRICUS W. G. PERSOON

Inventor： MART PETRUS MARIA BIERHOFF ,  BART BUIJSSE ,  CORNELIS SANDER KOOIJMAN ,  HUGO VAN LEEUWEN ,  HENDRIK GEZINUS TAPPEL ,  COLIN AUGUST SANFORD ,  SANDER RICHARD MARIE STOKS ,  STEVEN BERGER ,  BEN JACOBUS MARIE BORMANS ,  KOEN ARNOLDUS WILHELMUS DRIESSEN ,  JOHANNES ANTONIUS HENDRICUS W. G. PERSOON

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/21 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract translation: 用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易 正在获取图像并了解该图像与其余样本之间的关系。 此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。

公开(公告)号：US09078935B2

公开(公告)日：2015-07-14

申请号：US13625864

申请日：2012-09-24

Applicant: KRONES AG

Inventor： Josef Knott ,  Patrick Engelhard ,  Hans Scheuren

IPC: A61L2/08

CPC classification number: A61L2/087 ,  A61L2202/23 ,  H01J2237/162 ,  H01J2237/31

Abstract: A method of sterilizing containers, and in particular of plastics material containers is disclosed, wherein an inner wall of the containers is sterilized by being acted upon with charge carriers. A sterilization device which includes a charge generation device is introduced into the container (10 ) through an opening in the container and generates the charge carriers in the interior of the container.

Abstract translation: 公开了一种消毒容器的方法，特别是塑料容器的灭菌方法，其中容器的内壁通过与电荷载体一起作用而被消毒。 包括电荷产生装置的消毒装置通过容器中的开口引入容器（10），并在容器的内部产生电荷载体。

公开(公告)号：US20150129763A1

公开(公告)日：2015-05-14

申请号：US14395263

申请日：2013-04-11

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Shinsuke Kawanishi ,  Tomohisa Ohtaki ,  Masahiko Ajima ,  Sukehiro Ito

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/10

CPC classification number: H01J37/261 ,  H01J37/09 ,  H01J37/10 ,  H01J37/147 ,  H01J37/16 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/0245 ,  H01J2237/043 ,  H01J2237/063 ,  H01J2237/10 ,  H01J2237/162 ,  H01J2237/164 ,  H01J2237/2003 ,  H01J2237/2448 ,  H01J2237/2602 ,  H01J2237/2605

Abstract: A charged particle beam device (1) includes a charged particle optical lens barrel (10), a support housing (20) equipped with the charged particle optical lens barrel (10) thereon, and an insertion housing (30) inserted in the support housing (20). A first aperture member (15) is disposed in the vicinity of the center of the magnetic field of an objective lens, and a second aperture member (15) is disposed so as to externally close an opening part provided at the upper side of the insertion housing (30). Further, when a primary charged particle beam (12) is irradiated to a sample (60) arranged under the lower side of the second aperture member (31), secondary charged particles thus emitted are detected by a detector (16).

Abstract translation: 带电粒子束装置（1）包括带电粒子光学透镜镜筒（10），在其上装有带电粒子光学透镜镜筒（10）的支撑壳体（20）和插入支撑壳体 （20）。 第一孔径构件（15）设置在物镜的磁场的中心附近，并且第二孔径构件（15）设置成外部封闭设置在插入件的上侧的开口部分 住房（30）。 此外，当将初级带电粒子束（12）照射到布置在第二孔径构件（31）的下侧下方的样品（60）时，由检测器（16）检测如此发射的二次带电粒子。

公开(公告)号：US08610061B2

公开(公告)日：2013-12-17

申请号：US13313606

申请日：2011-12-07

Applicant: Kenji Matsumoto

Inventor： Kenji Matsumoto

IPC: H01J37/28 ,  H01J37/18

CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J2237/162 ,  H01J2237/2006

Abstract: A seal member to be contacted with an observation object is provided at an open end of a lens barrel so that the observation object can be attracted to the lens barrel via the seal member and fixed in direct and close contact with the lens barrel when a vacuum is created in the lens barrel by a vacuum pump. In other words, instead of providing a sample chamber, the observation object is fixed in close contact with the lens barrel to prevent relative movement therebetween by a suction force even without a sample chamber. In this configuration, the interior of the lens barrel can be maintained in a vacuum state despite the absence of a sample chamber and no adverse effect occurs during observation because the lens barrel and the observation object are not moved relative to each other by vibration.

Abstract translation: 与观察对象接触的密封构件设置在镜筒的开口端，使得观察对象可以经由密封构件被吸引到镜筒并且当真空直接和紧密接触时被固定在镜筒上 通过真空泵在镜筒中产生。 换句话说，代替提供样品室，观察对象被固定成与透镜筒紧密接触，以防止即使没有样品室也可以通过吸力而相对移动。 在这种构造中，尽管没有样品室，镜筒的内部可以保持在真空状态，并且在观察期间不会发生不利影响，因为透镜镜筒和观察对象不通过振动相对于彼此移动。

公开(公告)号：US20130084211A1

公开(公告)日：2013-04-04

申请号：US13625864

申请日：2012-09-24

Applicant: KRONES AG

Inventor： Josef Knott ,  Patrick Engelhard ,  Hans Scheuren

IPC: A61L2/08 ,  G21K5/00

CPC classification number: A61L2/087 ,  A61L2202/23 ,  H01J2237/162 ,  H01J2237/31

Abstract: A method of sterilizing containers (10), and in particular of plastics material containers, wherein an inner wall (10a) of these containers (10) is sterilized by being acted upon with charge carriers, and wherein a sterilization device is introduced to this end into the container (10) through an opening (10b) in this container (10), and this sterilization device (2) has a charge carrier generation device (12). According to the invention the charge carrier generation device (12) is introduced into the container (10) at least in part and generates the charge carriers in the interior of the container (10).

Abstract translation: 一种消毒容器（10）的方法，特别是对塑料材料容器进行灭菌的方法，其中这些容器（10）的内壁（10a）通过用电荷载体进行灭菌，并且其中向该端引入灭菌装置 通过该容器（10）中的开口（10b）进入容器（10），并且该消毒装置（2）具有载电子产生装置（12）。 根据本发明，电荷载体产生装置（12）至少部分地引入容器（10）中，并在容器（10）的内部产生电荷载体。