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21.发明授权Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method 有权通过减去实施该方法的方法和装置在同一基板上制造具有不同频率的薄体声波谐振器（FBAR）的方法公开(公告)号：US06787048B2
公开(公告)日：2004-09-07
申请号：US09799202
申请日：2001-03-05
IPC分类号： H01B1300
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , H04R17/10
摘要： A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. The resonator is fabricated on a substrate by fabricating a bottom electrode layer and a piezoelectric (PZ) layer over the bottom electrode layer. A selected portion of the PZ layer is partially etched. Then, a top electrode is fabricated over the selected portion of the PZ layer.
摘要翻译： 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过在底部电极层上制造底部电极层和压电（PZ）层，在衬底上制造谐振器。 部分蚀刻PZ层的选定部分。 然后，在PZ层的选定部分上制造顶部电极。
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22.发明授权Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide 有权具有铅钪钽氧化物压电层的薄膜体声波谐振器滤波器公开(公告)号：US06774746B2
公开(公告)日：2004-08-10
申请号：US10031240
申请日：2002-04-02
申请人： Roger W. Whatmore , Paul B. Kirby , Qingxin Su , Eiju Komuro
发明人： Roger W. Whatmore , Paul B. Kirby , Qingxin Su , Eiju Komuro
IPC分类号： H03H954
CPC分类号： H03H9/605 , H03H2003/0471
摘要： An electric filter comprises a plurality of thin film bulk acoustic resonators arranged in series and in parallel which have different thicknesses of one or more non-piezoelectric layers, for example top electrode.
摘要翻译： 电滤波器包括串联和并联布置的多个薄膜体声波谐振器，其具有不同厚度的一个或多个非压电层，例如顶部电极。
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23.发明授权Method for making thin film bulk acoustic resonators (FBARS) with different frequencies on a single substrate and apparatus embodying the method 有权在单个基板上制造具有不同频率的薄膜体声波谐振器（FBARS）的方法和体现该方法的装置的方法公开(公告)号：US06617249B2
公开(公告)日：2003-09-09
申请号：US09799148
申请日：2001-03-05
IPC分类号： H01L21302
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10S438/926 , Y10S438/94 , Y10S438/942 , Y10S438/97 , Y10S438/976
摘要： A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by introducing a mass loading top electrode layer. For a substrate having multiple resonators, the top mass loading electrode layer is introduced for only selected resonator to provide resonators having different resonance frequencies on the same substrate.
摘要翻译： 公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。 通过引入质量负载顶部电极层在基板上制造FBAR。 对于具有多个谐振器的衬底，仅为选定的谐振器引入顶部质量负载电极层，以在同一衬底上提供具有不同谐振频率的谐振器。
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公开(公告)号：US06566979B2
公开(公告)日：2003-05-20
申请号：US09799153
申请日：2001-03-05
IPC分类号： H03H956
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10T29/42
摘要： A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. A resonator is fabricated on a substrate, and its top electrode 56 is oxidized to form a oxide layer 58. For a substrate having multiple resonators, the top electrode 56 of only selected resonator is oxidized to provide resonators having different resonance frequencies on the same substrate.
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公开(公告)号：US08963403B2
公开(公告)日：2015-02-24
申请号：US13310109
申请日：2011-12-02
申请人： Takashi Yamane
发明人： Takashi Yamane
CPC分类号： H03H3/04 , H03H9/132 , H03H9/564 , H03H9/568 , H03H2003/0471
摘要： In a piezoelectric device, a lower covering layer, a piezoelectric material layer, a lower electrode layer, and an upper electrode layer, which define common layers, and an upper covering layer, which defines a specific layer, are laminated on a substrate. The piezoelectric material layer is sandwiched between a pair of electrodes. First to third vibration regions are provided in which the electrodes are superimposed with the piezoelectric material layer therebetween when viewed in a transparent manner in the direction in which the layers are laminated. The upper covering layer includes only a portion having with a first thickness in the first vibration region, includes a portion having the first thickness and a portion having a second thickness that is smaller than the first thickness in the second vibration region, and includes only a portion having the second thickness in the third vibration region.
摘要翻译： 在基板上层压压电元件，将覆盖层，压电材料层，下电极层和上电极层，以及限定特定层的上覆盖层层叠。 压电材料层夹在一对电极之间。 提供了第一至第三振动区域，其中当层压层的方向以透明的方式观察时，电极与其间的压电材料层叠加。 上覆盖层仅包括在第一振动区域中具有第一厚度的部分，包括具有第一厚度的部分和具有小于第二振动区域中的第一厚度的第二厚度的部分，并且仅包括 在第三振动区域具有第二厚度的部分。
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公开(公告)号：US08941450B2
公开(公告)日：2015-01-27
申请号：US13431669
申请日：2012-03-27
CPC分类号： H03H9/173 , H03H3/04 , H03H9/0095 , H03H9/02086 , H03H9/131 , H03H9/132 , H03H9/568 , H03H9/605 , H03H2003/0471
摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. A frequency control film is provided on an upper side of a resonance area in which the upper electrode and the lower electrode face each other in at least one of the main resonator and the sub resonator. The frequency control film has multiple convex patterns, and the convex patterns are arranged with a common pitch for spurious adjustment and with different areas in the main resonator and the sub resonator.
摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 频率控制膜设置在谐振区域的上侧，其中上电极和下电极在主谐振器和子谐振器中的至少一个中彼此面对。 频率控制膜具有多个凸形图案，并且凸形图案以公共间距布置以进行杂散调整，并且在主谐振器和子谐振器中具有不同的区域。
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公开(公告)号：US08756777B2
公开(公告)日：2014-06-24
申请号：US12647794
申请日：2009-12-28
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： H04R17/00 , H03H9/205 , H03H9/56 , H03H9/64 , H03H9/15 , H03H9/17 , H03H9/54 , H03H9/60 , H03H3/00 , H03H3/007
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.
摘要翻译： 一种制造包括第一和第二谐振器的梯形滤波器的方法包括：在其上形成有第一和第二谐振器的各个下电极的基板的整个表面上形成压电膜，在压电膜上形成导电膜， 导电膜上的膜; 在所述第二区域中的规定区域中形成所述第二膜的图案; 在所述基板的整个表面上形成第一膜; 蚀刻第一膜，在第二区域中形成第一膜，第二膜和导电膜的图案，并且在第一区域中形成第一膜和导电膜的图案，以从导体形成相应的上电极 电影; 然后蚀刻压电膜，分别在第一和第二区域形成压电膜的各自图案。
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公开(公告)号：US08344590B2
公开(公告)日：2013-01-01
申请号：US13431642
申请日：2012-03-27
摘要： An acoustic wave device includes a main resonator and a sub resonator each having a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on an upper side of the piezoelectric film. The sub resonator has a mass addition film on the upper electrode in a resonance area in which the upper electrode and the lower electrode face each other. At least one of the main resonator and the sub resonator is provided with a frequency control film on an upper side of the resonance area, and the frequency control film has a weight per unit area smaller than a weight of the mass addition film per unit area.
摘要翻译： 声波装置包括主谐振器和子谐振器，每个具有基板，设置在基板上的下电极，设置在下电极上的压电膜和设置在压电膜上侧的上电极。 副谐振器在上电极和上电极彼此面对的共振区域中的上电极上具有质量加成膜。 主谐振器和副谐振器中的至少一个在谐振区域的上侧设置有频率控制膜，频率控制膜的每单位面积的重量比单位面积的质量加成膜的重量小 。
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公开(公告)号：US20100134210A1
公开(公告)日：2010-06-03
申请号：US12683092
申请日：2010-01-06
申请人： Keiichi Umeda
发明人： Keiichi Umeda
CPC分类号： H03H9/564 , H03H3/04 , H03H9/105 , H03H9/175 , H03H2003/025 , H03H2003/0414 , H03H2003/0471
摘要： A piezoelectric resonator includes an acoustic reflective layer including first acoustic impedance sub-layers made of a material with relatively low acoustic impedance and second acoustic impedance sub-layers made of a material with relatively high acoustic impedance. A thin-film laminate is disposed on the acoustic reflective layer. The thin-film laminate includes a piezoelectric thin-film, a first electrode, a second electrode greater than the first electrode, and a mass-adding film. The second electrode is disposed on the acoustic reflective layer. The mass-adding film is disposed in at least one portion of a region outside a piezoelectric vibrational section and extends around the first electrode. The second electrode extends over the piezoelectric vibrational section to a region containing the mass-adding film.
摘要翻译： 压电谐振器包括声反射层，其包括由具有较低声阻抗的材料制成的第一声阻抗子层和由具有较高声阻抗的材料制成的第二声阻抗子层。 薄膜层叠体设置在声反射层上。 薄膜层压体包括压电薄膜，第一电极，大于第一电极的第二电极和质量添加膜。 第二电极设置在声反射层上。 质量添加膜设置在压电振动部分外部的区域的至少一部分中，并且围绕第一电极延伸。 第二电极在压电振动部分上延伸到包含质量添加膜的区域。
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30.发明授权Piezoelectric resonator, piezoelectric filter, and duplexer and communication device using the same 失效压电谐振器，压电滤波器和双工器以及使用其的通信装置公开(公告)号：US07675389B2
公开(公告)日：2010-03-09
申请号：US11916792
申请日：2006-06-22
CPC分类号： H03H9/588 , H03H3/04 , H03H9/605 , H03H2003/0471
摘要： Three or more piezoelectric resonators having resonance frequencies different from one another are realized on the same substrate. First through third frequency adjustment layers of first through third piezoelectric resonators, respectively, provided on the same substrate 101 are formed by varying, among the frequency adjustment layers, the ratio of area (depressions 109 and 110) to be etched to area not to be etched.
摘要翻译： 在相同的基板上实现具有彼此不同的谐振频率的三个或更多个压电谐振器。 分别设置在同一基板101上的第一至第三压电谐振器的第三至第三频率调节层通过在频率调整层之间改变要蚀刻的面积（凹陷109和110）与不被蚀刻的区域的比率 蚀刻。
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