公开(公告)号：US5281890A

公开(公告)日：1994-01-25

申请号：US605862

申请日：1990-10-30

Applicant: Robert C. Kane

Inventor： Robert C. Kane

IPC: H01J3/02 ,  H01J1/30

CPC classification number: H01J3/022

Abstract: A field emission device providing electric-field induced electron emission includes an annular edge emitter for emission of electrons. Emitted electrons are collected, at least in part, by an anode centrally disposed with respect to the annular edge emitter.

Abstract translation: 提供电场感应电子发射的场致发射器件包括用于发射电子的环形边缘发射器。 至少部分地通过相对于环形边缘发射器居中设置的阳极收集发射的电子。

公开(公告)号：US5217401A

公开(公告)日：1993-06-08

申请号：US836558

申请日：1992-02-18

Applicant: Masanori Watanabe ,  Hiroyuki Kado ,  Takao Chikamura ,  Nobuyuki Yoshiike

Inventor： Masanori Watanabe ,  Hiroyuki Kado ,  Takao Chikamura ,  Nobuyuki Yoshiike

IPC: H01J3/02 ,  H01J21/10

CPC classification number: H01J21/105 ,  H01J3/022

Abstract: A field-emission type switching device includes a substrate formed with a recess having a straight edge and serrated edge opposite to the straight edge. A gate electrode is formed at the bottom of the recess. An emitter electrode is provided over the substrate and formed with a serrated edge which is slightly off alignment with the serrate edge of the recess so as to provide an emitter overhanging portion overhanging the recess. Similarly, a collector electrode is provided over the substrate means and formed with a straight edge which is slightly off alignment with the straight edge of the recess so as to provide a collector overhanging portion overhanging the recess. The emitter and collector electrodes are disposed in one plate and the gate electrode is disposed in another plane below the one plane.

Abstract translation: 场发射型切换装置包括形成有具有与直边相反的直边缘和锯齿状边缘的凹部的基板。 栅电极形成在凹部的底部。 发射电极设置在衬底上并且形成有锯齿形边缘，该锯齿形边缘与凹槽的锯齿形边缘稍微偏离对准，以便提供突出于凹部的发射体悬伸部分。 类似地，集电极设置在衬底装置上方并且形成有直线边缘，其与凹部的直边稍微偏离对准，以提供突出于凹部的收集器悬伸部分。 发射极和集电极设置在一个板中，栅电极设置在一个平面下方的另一个平面中。

公开(公告)号：US5204588A

公开(公告)日：1993-04-20

申请号：US819492

申请日：1992-01-10

Applicant: Ryuichi Ugajin ,  Akira Ishibashi

Inventor： Ryuichi Ugajin ,  Akira Ishibashi

IPC: H01J3/02 ,  H01J21/10 ,  H01L29/66 ,  H01L29/772 ,  H03K17/54

CPC classification number: B82Y10/00 ,  H01J21/105 ,  H01J3/022 ,  H01L29/66977 ,  H01L29/772 ,  H03K17/545

Abstract: Disclosed is hererin a quantum phase interference transistor comprising: an emitter for emitting electron waves into a vacuum; a gate electrode for controlling the phase difference between a plurality of electron waves; and a collector for collecting the electron waves; characterized in that the gate electrode has the construction of a capacitor.

公开(公告)号：US5173634A

公开(公告)日：1992-12-22

申请号：US621199

申请日：1990-11-30

Applicant: Robert C. Kane

Inventor： Robert C. Kane

IPC: H01J3/02 ,  H01J21/10

CPC classification number: H01J3/022 ,  H01J21/105 ,  H01J2201/319

Abstract: A field emission device is set forth for providing a current-regulating and potential equilibrium function.

Abstract translation: 阐述了用于提供电流调节和电位平衡功能的场致发射器件。

公开(公告)号：US5136205A

公开(公告)日：1992-08-04

申请号：US675590

申请日：1991-03-26

Applicant: Marko Sokolich ,  Zaher Bardai

Inventor： Marko Sokolich ,  Zaher Bardai

IPC: H01J3/02 ,  H01J9/02 ,  H01J21/10

CPC classification number: H01J9/025 ,  H01J21/105 ,  H01J3/022

Abstract: A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge scanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photoresist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrated with the remainder of an integrated circuit.

Abstract translation: 场致发射器件采用横跨场发射阴极尖端的空气桥形式的阳极。 阳极仅在其相对端支撑，留下空气桥下的区域打开。 一排阴极发射器采用一系列平行的横向间隔开的阳极空气桥，每个空气桥扫描一排阴极。 空气桥之间的横向间隔有助于在制造期间去除下面的光致抗蚀剂，并且如果需要，则建立均匀的真空。 阳极和阴极之间的间隙基本上小于先前可获得的，导致尺寸和阳极工作电压水平的显着降低。 空气桥阳极的制造可以与集成电路的其余部分集成。

公开(公告)号：US5134641A

公开(公告)日：1992-07-28

申请号：US594733

申请日：1990-10-09

Applicant: Dirk Friede ,  Volker Bruckner ,  Rudolf Baumgartl ,  Hans-Jurgen Cirkel

Inventor： Dirk Friede ,  Volker Bruckner ,  Rudolf Baumgartl ,  Hans-Jurgen Cirkel

IPC: H01J35/22 ,  H01J3/02 ,  H01J17/40 ,  H01J33/00 ,  H01J37/075 ,  H01J37/077 ,  H01S3/09 ,  H01S3/0971 ,  H05G2/00

CPC classification number: H05G2/003 ,  H01J17/40 ,  H01J3/025 ,  H01J33/00 ,  H01S3/09716

Abstract: A plasma X-ray tube, which can be referred to as a one-chamber ionizing tube for pre-ionizing TE lasers, in particular excimer lasers, includes an extended, box-like housing with a U-shaped hollow cathode which is disposed in the interior of the housing and is also elongated. The open side of the hollow electrode faces an X-ray target which is in the form of a gas-tight foil. Between the X-ray target and the hollow cathode is a long wire-shaped igniting electrode. When a positive voltage or a voltage pulse is applied to the igniting electrode, an electrical field is formed around it. Electrons that are present are forced onto a long, spiral path and gas atoms are ionized under the influence of the electrical field and because of ambient radiation. Electron avalanches form and lead to initiation of a wire discharge. When the accelerator voltage, which is typically at most between 60 kV and 120 kV, is applied to the hollow cathode low-pressure plasma, ions are extracted and accelerated against the hollow cathode. When the ions impact, secondary electrons are emitted from the hollow cathode and are accelerated in the opposite direction, so that an electron beam forms and strikes the X-ray target to generate X-ray retarding radiation. The plasma X-ray tube is fundamentally suitable as an electron gun, with a suitable electron-beam permeable configuration of a foil that covers the window opening in the target retaining wall and serves as an electron window.

Abstract translation: 等离子体X射线管，其可以被称为用于预电离TE激光器的单室电离管，特别是准分子激光器，包括具有U形中空阴极的延伸的盒状壳体，其设置在 外壳的内部也是细长的。 中空电极的开放面面对呈气密箔形式的X射线靶。 在X射线靶和空心阴极之间是长线形点火电极。 当向点火电极施加正电压或电压脉冲时，在其周围形成电场。 存在的电子被强制到长的螺旋路径上，并且气体原子在电场的影响下以及由于环境辐射而被电离。 形成电子雪崩并导致引线放电。 当通常在60kV和120kV之间的加速器电压被施加到空心阴极低压等离子体时，离子被提取并抵抗空心阴极加速。 当离子撞击时，二次电子从空心阴极发射并沿相反方向加速，使得电子束形成并撞击X射线靶以产生X射线延迟辐射。 等离子体X射线管基本上适合作为电子枪，具有覆盖目标挡土墙中的窗口开口并用作电子窗口的箔的合适的电子束可透过构型。

公开(公告)号：US5126633A

公开(公告)日：1992-06-30

申请号：US737240

申请日：1991-07-29

Applicant: Tzvi Avnery ,  Arthur W. Sommerstein ,  Rolfe W. Graham

Inventor： Tzvi Avnery ,  Arthur W. Sommerstein ,  Rolfe W. Graham

IPC: H01J3/02 ,  H01J33/00 ,  H01J37/06

CPC classification number: H01J3/029 ,  H01J33/00 ,  H01J37/06

Abstract: A novel electron beam apparatus and technique wherein a plurality of longitudinally extending heated filaments is employed, each similarly offset laterally of a central longitudinal axis, but with successive filaments alternately disposed on opposite sides of said axis and cooperating with a first low velocity accelerating stage comprising staggered grid slots and openings, and a high velocity second accelerating stage to provide long uniform longitudinal electron beams.

Abstract translation: 一种新颖的电子束装置和技术，其中使用多个纵向延伸的加热细丝，各自类似地偏离中心纵向轴线横向，但是连续的细丝交替地设置在所述轴线的相对侧上并且与第一低速加速台配合，包括 交错网格槽和开口，以及高速第二加速级，以提供长均匀的纵向电子束。

公开(公告)号：US5097178A

公开(公告)日：1992-03-17

申请号：US655882

申请日：1991-02-14

Applicant: Susumu Nishihara

Inventor： Susumu Nishihara

IPC: H05H9/00 ,  H01J3/02 ,  H01J23/06 ,  H01J37/06 ,  H01J49/08

CPC classification number: H01J3/024 ,  H01J23/06

Abstract: A RF electron gun, such as for use in a linear electron accelerator, having a cathode activating device which, in one embodiment, includes means for altering the phase of the accelerating electric field to accelerate emitted electrons in the reverse direction to cause them to strike the cathode, thereby activating the cathode. In another embodiment, laser light is directed onto the cathode for activation thereof and, in a further embodiment, the electric field is positioned and directed at the cathode to cause the activation thereof.

Abstract translation: 用于线性电子加速器的RF电子枪具有阴极激活装置，在一个实施例中，阴极激活装置包括用于改变加速电场的相位以加速发射的电子在相反方向上的装置，以使它们发射 阴极，从而激活阴极。 在另一个实施例中，激光被引导到阴极上用于激活它，并且在另一实施例中，电场被定位并且指向阴极以引起其激活。

公开(公告)号：US5059859A

公开(公告)日：1991-10-22

申请号：US507798

申请日：1990-04-12

Applicant: Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

Inventor： Junji Endo ,  Takeshi Kawasaki ,  Masahiro Tomita ,  Shigeto Isakozawa ,  Toshimitu Miyada ,  Yutaka Kaneko

IPC: H01J3/02 ,  H01J37/073

CPC classification number: H01J3/029 ,  H01J37/073

Abstract: A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.

Abstract translation: 多级加速型的带电粒子束产生装置包括带电粒子束源和多级加速管，该多级加速管具有多个级联地布置在管内的多个级上的加速电极。 多个外屏蔽电极在多级加速管的径向外侧分别配置成相同的电位分别与相关的加速电极相同。 最后，将多个分压电阻器设置在多级加速管的外侧或外屏蔽电极与多级加速管之间，以分别对加速电极施加预定电位。

公开(公告)号：US5003226A

公开(公告)日：1991-03-26

申请号：US437749

申请日：1989-11-16

Applicant: Malcolm W. McGeoch

Inventor： Malcolm W. McGeoch

IPC: H01J3/02

CPC classification number: H01J3/025

Abstract: An apparatus is disclosed for producing an electron stream comprising an elongated first electrode and an elongated, surrounding electrode defining an exit aperture and spaced from the first electrode by an interelectrode distance. An gas source introduces ionizable gas between the electrodes. The interelectrode distance is typically less than the mean free path for molecular collisions in the gas, to thereby physically impede the flow of the gas in the interelectrode area. A magnetic field is applied between and parallel to the electrodes and an electric field is applied between the electrodes, both combining to discharge the gas. An extractor screen is juxtaposed to the exit aperture to attract an electron stream from the discharge. In preferred embodiments, the source of gas is pulsed and the screen is substantially transparent to electrons but only semi-transparent to gas molecules, thereby impeding their passage through the exit aperture.

Abstract translation: 公开了一种用于产生电子流的装置，其包括细长的第一电极和限定出口孔的细长周围电极，并且通过电极间距离与第一电极间隔开。 气体源在电极之间引入可电离气体。 电极间距离通常小于气体中分子碰撞的平均自由程，从而物理地阻止电极间区域中的气体的流动。 在电极之间并且平行于电极施加磁场，并且在电极之间施加电场，两者结合以排出气体。 提取器屏幕与出口孔并置以吸引来自放电的电子流。 在优选实施例中，气体源是脉冲式的，并且屏幕对电子基本上是透明的，但仅对气体分子是半透明的，从而阻止它们通过出口孔。