Semiconductor structure and method of wafer bonding

    公开(公告)号:US12080622B2

    公开(公告)日:2024-09-03

    申请号:US18136329

    申请日:2023-04-18

    摘要: A semiconductor structure includes a glass substrate and a device structure. The glass substrate includes a glass layer, a heat dissipation layer and a silicon nitride layer stacked from bottom to top. The device structure includes at least one semiconductor device integrated in a device layer situated over the silicon nitride layer of the glass substrate. Or, the glass substrate includes a glass layer and a silicon nitride layer stacked from bottom to top. The device structure includes at least one semiconductor device integrated in a device layer, and a heat dissipation layer is stacked on the device layer, wherein the heat dissipation layer is bonded with the silicon nitride layer of the glass substrate. The present invention also provides a method of wafer bonding for manufacturing said semiconductor structure.

    LAYOUT OF INTEGRATED CIRCUIT
    34.
    发明公开

    公开(公告)号:US20240290771A1

    公开(公告)日:2024-08-29

    申请号:US18657811

    申请日:2024-05-08

    IPC分类号: H01L27/02

    CPC分类号: H01L27/0207

    摘要: An integrated circuit layout includes an upper active region comprising a first edge and a second edge extending along a first direction and respectively adjacent to an upper cell boundary by a distance D3 and a distance D4. A first gate line is disposed on the upper active region, extends along a second direction, and protrudes from the first edge by a length L3. A second gate line is disposed on the upper active region, extends along the second direction, and protrudes from the second edge by a length L4. Two dummy gate lines respectively extend along the second direction and are disposed at two sides of the upper active region and away from the upper cell boundary by a distance S. The first direction and the second direction are perpendicular. The distances D3, D4, S and the lengths L3 and L4 have the relationships: L3≤D3−S, L4≤D4−S, and D3≠D4.

    STATIC RANDOM ACCESS MEMORY AND METHOD FOR FABRICATING THE SAME

    公开(公告)号:US20240284651A1

    公开(公告)日:2024-08-22

    申请号:US18123992

    申请日:2023-03-21

    发明人: Chia-Chen Sun

    IPC分类号: H10B10/00

    CPC分类号: H10B10/12

    摘要: A method for fabricating a static random access memory (SRAM) includes the steps of forming a first fin-shaped structure for a first pull-down (PD) transistor on a substrate, forming a second fin-shaped structure for a second PD transistor on the substrate, forming a third fin-shaped structure for a first pass gate (PG) transistor on the substrate, and forming a fourth fin-shaped structure for a second PG transistor on the substrate. Preferably, the first fin-shaped structure and the second fin-shaped structure include a first recess therebetween and the third fin-shaped structure and the fourth fin-shaped structure include no recess therebetween.

    TRANSISTOR WITH EMBEDDED INSULATING STRUCTURE SET

    公开(公告)号:US20240266435A1

    公开(公告)日:2024-08-08

    申请号:US18120980

    申请日:2023-03-13

    IPC分类号: H01L29/78 H01L29/66

    CPC分类号: H01L29/7835 H01L29/6659

    摘要: A transistor with an embedded insulating structure set includes a substrate. A gate is disposed on the substrate. A first lightly doped region is disposed at one side of the gate. A second lightly doped region is disposed at another side of the gate. The first lightly doped region and the second lightly doped region have the same conductive type. The first lightly doped region is symmetrical to the second lightly doped region. A first source/drain doped region is disposed within the first lightly doped region. A second source/drain doped region is disposed within the second lightly doped region. A first insulating structure set is disposed within the first lightly doped region and the first source/drain doped region. The first insulating structure set includes an insulating block embedded within the substrate. A sidewall of the insulating block contacts the gate dielectric layer.