Solder plating process
    31.
    发明授权
    Solder plating process 失效
    焊接电镀工艺

    公开(公告)号:US4263106A

    公开(公告)日:1981-04-21

    申请号:US108963

    申请日:1979-12-31

    申请人: Paul A. Kohl

    发明人: Paul A. Kohl

    摘要: A process for electroplating tin, lead or alloys of tin and lead from aqueous acidic baths. The baths comprise lactones, lactams, cyclic sulfate esters, cyclic imides and cyclic oxazolinones. The additives assist in providing a process which permits high speed plating with excellent layer properties such as smooth platings free from dendritic growth and having constant plating thickness over wide areas.

    摘要翻译: 从含水酸性浴中电镀锡,铅或锡的合金的方法。 浴包括内酯,内酰胺,环硫酸酯,环状酰亚胺和环状恶唑啉酮。 添加剂有助于提供允许高速电镀的方法,其具有优异的层性质,例如没有树枝状生长的光滑电镀并且在宽的区域上具有恒定的电镀厚度。

    Packaging For Micro Electro-Mechanical Systems And Methods Of Fabricating Thereof
    33.
    发明申请
    Packaging For Micro Electro-Mechanical Systems And Methods Of Fabricating Thereof 有权
    微机电系统的包装及其制造方法

    公开(公告)号:US20100307786A1

    公开(公告)日:2010-12-09

    申请号:US12797649

    申请日:2010-06-10

    IPC分类号: H05K5/06

    摘要: Embodiments of the present disclosure provide systems and methods for producing micro electro-mechanical device packages. Briefly described, in architecture, one embodiment of the system, among others, includes a micro electro-mechanical device formed on a substrate layer; and a thermally decomposable sacrificial structure protecting at least a portion of the micro electro-mechanical device, where the sacrificial structure is formed on the substrate layer and surrounds a gas cavity enclosing an active surface of the micro electro-mechanical device. Other systems and methods are also provided.

    摘要翻译: 本公开的实施例提供了用于生产微机电装置包装的系统和方法。 简要描述,在架构中,系统的一个实施例包括形成在基底层上的微电子机械装置; 以及可热分解的牺牲结构,其保护所述微机电装置的至少一部分,其中所述牺牲结构形成在所述基底层上并且围绕包围所述微机电装置的有效表面的气体腔。 还提供了其他系统和方法。

    Micro-electromechanical switched tunable inductor
    34.
    发明授权
    Micro-electromechanical switched tunable inductor 有权
    微机电开关可调谐电感

    公开(公告)号:US07847669B2

    公开(公告)日:2010-12-07

    申请号:US11999527

    申请日:2007-12-06

    摘要: Disclosed is an integrated tunable inductor having mutual micromachined inductances fabricated in close proximity to a tunable inductor that is switched in and out by micromechanical ohmic switches to change the inductance of the integrated tunable inductor. To achieve a large tuning range and high quality factor, silver is preferably used as the structural material to co-fabricate the inductors and micromachined switches, and silicon is selectively removed from the backside of the substrate. Using this method, exemplary tuning of 47% at 6 GHz is achievable for a 1.1 nH silver inductor fabricated on a low-loss polymer membrane. The effect of the quality factor on the tuning characteristic of the integrated inductor is evaluated by comparing the measured result of substantially identical inductors fabricated on various substrates. To maintain the quality factor of the silver inductor, the device may be encapsulated using a low-cost wafer-level polymer packaging technique.

    摘要翻译: 公开了一种集成的可调电感器,其具有相互微机电感应,其紧密接近可调电感器,该可调谐电感器由微机械欧姆开关导入和切出以改变集成可调电感器的电感。 为了实现大的调谐范围和高品质因素,优选使用银作为用于共同制造电感器和微加工开关的结构材料,并且硅从衬底的背面选择性地去除。 使用这种方法,在低损耗聚合物膜上制造的1.1nH银电感器可以实现在6GHz下47%的示例性调谐。 通过比较在各种衬底上制造的基本相同的电感器的测量结果来评估质量因子对集成电感器的调谐特性的影响。 为了保持银电感器的品质因素,可以使用低成本晶圆级聚合物封装技术封装器件。