公开(公告)号：US20190019719A1

公开(公告)日：2019-01-17

申请号：US16029320

申请日：2018-07-06

Applicant: Brooks Automation, inc.

Inventor： Dana L ATWOOD ,  Jairo MOURA

IPC: H01L21/687 ,  H01L21/677 ,  G05B19/042 ,  G05B19/421

Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

公开(公告)号：US10058998B2

公开(公告)日：2018-08-28

申请号：US15376119

申请日：2016-12-12

Applicant: BROOKS AUTOMATION, INC.

Inventor： Jayaraman Krishnasamy ,  Martin Hosek

IPC: H01L21/67 ,  B25J9/16 ,  H01L21/677 ,  G05B19/416

CPC classification number: B25J9/1664 ,  G05B19/416 ,  G05B2219/40449 ,  G05B2219/40466 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/67766 ,  Y02P90/083

Abstract: A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.

公开(公告)号：US20180202908A1

公开(公告)日：2018-07-19

申请号：US15743222

申请日：2016-07-12

Applicant: Brooks Automation, Inc.

Inventor： Etienne Croquette ,  Matteo Salvetti ,  Rhett Affleck

IPC: G01N1/42 ,  G01N35/00

CPC classification number: G01N1/42 ,  A01N1/0257 ,  G01N33/48 ,  G01N35/00 ,  G01N35/0099 ,  G01N35/02 ,  G01N35/04 ,  G01N2035/00326 ,  G01N2035/0418 ,  G01N2035/0425

Abstract: Cryogenic storage system provides automated storage and retrieval of samples in a cryogenic environment, as well as automated transfer of individual samples between cryogenic environments. Stored samples are maintained under a cryogenic temperature threshold, while also enabling access to the samples. The samples may be organized and tracked by scanning a barcode of each sample. Embodiments may also comprise multiple storage vaults and provide for transfer of individual samples between the storage vaults, as well as between a storage vault and a removable cryogenic storage device.

公开(公告)号：US09881825B2

公开(公告)日：2018-01-30

申请号：US14541934

申请日：2014-11-14

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Michael L. Bufano ,  William Fosnight ,  Christopher Hofmeister ,  Gerarld M. Friedman

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67763 ,  H01L21/67326 ,  H01L21/67353 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/6779 ,  Y10S414/139

Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

公开(公告)号：US09842756B2

公开(公告)日：2017-12-12

申请号：US14537696

申请日：2014-11-10

Applicant: Brooks Automation, Inc.

Inventor： Anthony C. Bonora ,  Richard H. Gould ,  Michael Krolak

IPC: H01L21/677

CPC classification number: H01L21/67766 ,  B65G2201/0297 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14

Abstract: A storage system and methods for operating a storage system are disclosed. The storage system includes a plurality of storage shelves, and each of storage shelves has a shelf plate for supporting a container. Each of the storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain. The rail has some sections that are linear and some sections that are nonlinear. The sections are arranged in a loop. Example configurations of the storage system include one or more of stationary shelves, extended horizontal tracks for a hoist, a conveyor at a level of the storage system, and a manual loading station. The hoist, with an extended horizontal track interfaces with the manual loading station.

公开(公告)号：US09630775B2

公开(公告)日：2017-04-25

申请号：US14229077

申请日：2014-03-28

Applicant: Brooks Automation, Inc.

Inventor： Mark Borodkin ,  David Mejia ,  Werner Willemse ,  Robert Neeper

IPC: G06F7/00 ,  B65G1/137 ,  G01N35/00 ,  G01N35/02 ,  G01N35/04

CPC classification number: B65G1/137 ,  G01N35/0099 ,  G01N35/026 ,  G01N2035/0465

Abstract: An apparatus includes a frame configured to hold sample holders in an array, a longitudinal axis of the sample holder extending outward of an array plane; a drive section connected to the frame; at least one transfer arm rotatably connected to the drive section so that each transfer arm rotates about a rotation axis oriented substantially parallel with the longitudinal axis and includes a sample holder gripper; and at least one push member movably connected to the drive section and being distinct from the sample holder gripper and configured for linear movement along the longitudinal axis, the at least one push member being configured so that engagement with at least a bottom or top surface of the sample holder effects longitudinal translation of the sample holder for one or more of capture and release of the sample holder by the respective transfer arm in the longitudinal direction.

公开(公告)号：US20170084476A1

公开(公告)日：2017-03-23

申请号：US15369573

申请日：2016-12-05

Applicant: BROOKS AUTOMATION, INC.

Inventor： Leigh F. SHARROCK

IPC: H01L21/68 ,  H01L21/677 ,  H01L21/67

CPC classification number: H01L21/681 ,  H01L21/67017 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67772 ,  H01L21/67778 ,  Y10S414/136

Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

公开(公告)号：US20170018446A1

公开(公告)日：2017-01-19

申请号：US15209497

申请日：2016-07-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Bing YIN ,  Jairo T. MOURA ,  Vincent TSANG ,  Aaron GAWLIK ,  Nathan SPIKER

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01L21/68707

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

Abstract translation: 基板处理装置，包括具有包括端部执行器的输送臂的晶片输送装置，与基板输送装置成一体的臂姿势确定性特征，并且被设置为使得基板处理装置的静态检测传感器至少检测至少一个边缘 在运输臂的径向运动中一个手臂姿势确定性特征，以及控制器，其配置成使得边缘的检测影响识别运输臂在飞行中的至少热膨胀方差的比例因子的确定，并且包括 运动效应解算器，被配置为从飞行中的边缘的检测中确定所确定的比例因子与运输臂的每个不同链路相应的每个不同离散方差之间的离散关系，至少确定运输臂的热膨胀方差 在飞行中

公开(公告)号：US20170002802A1

公开(公告)日：2017-01-05

申请号：US15143125

申请日：2016-04-29

Applicant: Brooks Automation, Inc.

Inventor： Paul E. Dresens ,  Gary S. Ash ,  Allen J. Bartlett ,  Bruce R. Andeen ,  Y. Roberto Than ,  Joseph Chopy, JR.

IPC: F04B37/08 ,  F25B45/00 ,  F25B9/14 ,  B01D8/00 ,  F25B9/00

CPC classification number: F04B37/08 ,  B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F24F11/30 ,  F24F2110/50 ,  F25B9/002 ,  F25B9/14 ,  F25B45/00 ,  F25B2309/001 ,  F25B2309/002 ,  F25B2309/1428 ,  F25B2345/001 ,  F25B2345/003 ,  F25J1/0007

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

Abstract translation: 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过感应过多的稀疏氦和相应地重新分配制冷剂，向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。

公开(公告)号：US20160329234A1

公开(公告)日：2016-11-10

申请号：US15215143

申请日：2016-07-20

Applicant: Brooks Automation, Inc.

Inventor： Alexander Krupyshev ,  Robert T. Caveney ,  Daniel Babbs ,  Ulysses Gilchrist

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  H01L21/67

CPC classification number: H01L21/68707 ,  B25J9/042 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67161 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67742

Abstract: A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.