利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

40 条记录 (耗时 0.037 秒)

    Energy-efficient, laser-based method and system for processing target material
    35.
    发明授权
    Energy-efficient, laser-based method and system for processing target material 失效

    公开(公告)号：US06727458B2

    公开(公告)日：2004-04-27

    申请号：US09941389

    申请日：2001-08-28

    申请人： Donald V. Smart

    发明人： Donald V. Smart

    IPC分类号： B23K2600

    CPC分类号： B23K26/0736 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  Y10S438/94 ,  Y10T29/49156 ,  H01L2924/00

    摘要： An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material. The rise time (less than about 1 ns) is fast enough to efficiently couple laser energy to the target material, the pulse duration (typically 2-10 ns) is sufficient to process the target material, and the fall time (a few ns) is rapid enough to prevent the undesirable changes to the material surrounding the target material.

    Controlling laser polarization
    37.
    发明授权
    Controlling laser polarization 有权
    控制激光极化

    公开(公告)号：US06381259B2

    公开(公告)日：2002-04-30

    申请号：US09770275

    申请日：2001-01-29

    申请人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    发明人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    IPC分类号： H01S310

    CPC分类号： B23K26/0736 ,  B23K26/0624 ,  B23K26/0643 ,  B23K26/0665 ,  B23K2101/38 ,  B23K2103/12

    摘要： A laser polarization control apparatus includes a polarization modifying device and a controller. The polarization modifying device receives a laser beam and modifies the polarization of the laser beam. The controller adjusts an input to the polarization modifying device in order to control modification of the polarization of the laser beam based on alignment of a structure to be processed by the laser beam. The polarization modifying device is configured for incorporation into a laser processing system that produces the laser beam received by the polarization modifying device and that focuses the laser beam modified by the polarization modifying device onto a workpiece that includes the structure to be processed by the laser beam. An analyzer tool receives the laser beam modified by the polarization modification device and measures the modification of the polarization of the laser beam by the polarization modification device. A plurality of inputs are applied to the polarization modifying device to control modification of the polarization of the laser beam, and the laser beam modified by the polarization modification device is analyzed using the analyzer tool in order to measure modification of the polarization of the laser beam by the polarization modification device. The relationship between the inputs to the polarization control device and the modification of the polarization of the laser beam is stored.

    摘要翻译： 激光偏振控制装置包括偏振修正装置和控制器。 偏振改变装置接收激光束并修改激光束的偏振。 控制器调整偏振修正装置的输入，以便基于由激光束处理的结构的对准来控制激光束的偏振的修改。 偏振修改装置被配置成结合到激光处理系统中，该激光处理系统产生由偏振修改装置接收的激光束，并且将由偏振修正装置修改的激光束聚焦在工件上，该工件包括要被激光束处理的结构 。 分析器工具接收由偏振修正装置修改的激光束并且通过偏振修正装置测量激光束的偏振的修改。 多个输入被施加到偏振修改装置以控制激光束的偏振的修改，并且使用分析器工具分析由偏振修正装置修改的激光束，以便测量激光束的偏振的修改 通过偏振改性装置。 存储偏振控制装置的输入与激光束的偏振的修正之间的关系。

    Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train
    38.
    发明授权
    Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 有权
    使用放大的波长移位脉冲串来处理目标材料的节能方法和系统

    公开(公告)号：US06340806B1

    公开(公告)日：2002-01-22

    申请号：US09585693

    申请日：2000-06-01

    申请人： Donald V. Smart ,  Donald J. Svetkoff

    发明人： Donald V. Smart ,  Donald J. Svetkoff

    IPC分类号： B23K2600

    CPC分类号： H01S3/2308 ,  B23K26/0624 ,  B23K26/0736 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L2924/0002 ,  H01S3/06754 ,  H01S3/2375 ,  H01S3/302 ,  H01S2301/08 ,  H01L2924/00

    摘要： An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser having a first wavelength for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a fiber amplifier subsystem for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The subsystem also includes a wavelength shifter in the form of an optical fiber for controllably shifting the first wavelength to a second, larger wavelength to obtain an amplified, wavelength-shifted, pulse train. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified, wavelength-shifted, pulse train onto the target material. The subsystem may also include a filter coupled to the optical fiber to narrow bandwidth of the amplified, wavelength-shifted, pulse train. The second wavelength may be at the absorption edge of silicon.

    摘要翻译： 提供了一种用于在微观区域中处理诸如微结构的目标材料而不引起围绕目标材料的材料的电气和/或物理特性的不期望的变化的能量效率方法和系统。 该系统包括用于产生处理控制信号的控制器和用于基于处理控制信号产生调制的驱动波形的信号发生器。 波形具有亚纳秒上升时间。 该系统还包括具有用于以重复率产生激光脉冲串的第一波长的增益切换的脉冲半导体种子激光器。 驱动波形泵浦激光器，使得脉冲串的每个脉冲具有预定的形状。 此外，该系统包括光纤放大器子系统，用于光学放大脉冲串以获得放大的脉冲串，而不显着改变预定形状的脉冲。 放大的脉冲具有很小的失真，并且具有与来自激光器的原始脉冲串相当的相对时间功率分布。 每个放大的脉冲具有基本上正方形的时间功率密度分布，急剧上升时间，脉冲持续时间和下降时间。 子系统还包括光纤形式的波长移位器，用于将第一波长可控地移位到第二较大波长以获得放大的波长偏移脉冲序列。 该系统还包括用于将放大的波长偏移的脉冲序列的至少一部分传送和聚焦到目标材料上的光束传送和聚焦子系统。 子系统还可以包括耦合到光纤的滤波器，以窄带放大的，波长偏移的脉冲串的带宽。 第二波长可以在硅的吸收边缘。

    Controlling laser polarization
    39.
    发明授权
    Controlling laser polarization 失效
    控制激光极化

    公开(公告)号：US06181728B2

    公开(公告)日：2001-01-30

    申请号：US09109482

    申请日：1998-07-02

    申请人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    发明人： James J. Cordingley ,  Donald V. Smart ,  Michael Plotkin ,  William Lauer

    IPC分类号： H01S310

    CPC分类号： B23K26/0736 ,  B23K26/0624 ,  B23K26/0643 ,  B23K26/0665 ,  B23K2101/38 ,  B23K2103/12

    摘要： A laser polarization control apparatus includes a polarization modifying device, such as a liquid crystal variable retarder, and a controller. The polarization modifying device receives a laser beam and modifies the polarization of the laser beam. The controller, which is connected to the polarization modifying device, adjusts an input to the polarization modifying device in order to control modification of the polarization of the laser beam based on alignment of a structure to be processed by the laser beam. For example, the polarization of the laser beam may be rotated to correspond with the alignment of a link in a semiconductor device to be cut by the laser beam. The polarization modifying device is configured for incorporation into a laser processing system that produces the laser beam received by the polarization modifying device and that focuses the laser beam modified by the polarization modifying device onto a workpiece that includes the structure to be processed by the laser beam. An analyzer tool receives the laser beam modified by the polarization modification device and measures the modification of the polarization of the laser beam by the polarization modification device.

    摘要翻译： 激光偏振控制装置包括诸如液晶可变延迟器的偏振修正装置和控制器。 偏振改变装置接收激光束并修改激光束的偏振。 连接到偏振修正装置的控制器调整偏振修正装置的输入，以便基于由激光束处理的结构的对准来控制激光束的偏振的改变。 例如，激光束的偏振可以旋转以对应于要被激光束切割的半导体器件中的连接件的对准。 偏振修改装置被配置成结合到激光处理系统中，该激光处理系统产生由偏振修改装置接收的激光束，并且将由偏振修正装置修改的激光束聚焦在工件上，该工件包括要被激光束处理的结构 。 分析器工具接收由偏振修正装置修改的激光束并且通过偏振修正装置测量激光束的偏振的修改。

    Laser processing
    40.
    发明授权
    Laser processing 失效
    激光加工

    公开(公告)号：US5998759A

    公开(公告)日：1999-12-07

    申请号：US774107

    申请日：1996-12-24

    申请人： Donald V. Smart

    发明人： Donald V. Smart

    IPC分类号： H01L21/768 ,  B23K26/00

    CPC分类号： H01L21/76894 ,  B23K26/0622 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/362 ,  B23K26/40 ,  B23K26/402 ,  B23K2201/40 ,  B23K2203/42 ,  B23K2203/50

    摘要： A controlled, switched laser system for vaporizing a target structure on a substrate includes a diode-pumped, solid-state laser for producing a laser output, a controllable switch for controlling the on/off state and power level of the laser, and a wavelength shifter. The wavelength shifter shifts the wavelength of the laser output from a conventional wavelength to a wavelength beyond the absorption edge of the substrate but shorter than 1.2 .mu.m in order to obtain a decrease in absorption of the laser output by the substrate due to the shift in the wavelength of the laser output. The wavelength shifter is removably insertable into the switched laser system so as to enable the switched laser system to operate at the conventional wavelength and at the wavelength beyond the absorption edge of the substrate. Heating of the substrate and hence damage to the substrate is limited due to the wavelength being beyond the absorption edge of the substrate. Good depth of focus of the laser beam output is maintained relative to spot size of the laser beam output due to the wavelength being less than about 1.2 .mu.m.

    摘要翻译： 用于蒸发衬底上的目标结构的受控切换激光系统包括用于产生激光输出的二极管泵浦固体激光器，用于控制激光器的开/关状态和功率电平的可控开关，以及波长 移位器 波长移位器将激光输出的波长从常规波长移动到超过基板的吸收边缘的波长但短于1.2μm，以便由于基板的偏移而使基板的激光输出的吸收降低 激光输出的波长。 波长移位器可移除地插入到切换的激光系统中，以便使切换的激光系统能够以常规波长和超过基板的吸收边缘的波长进行操作。 由于波长超过衬底的吸收边缘，衬底的加热和衬底的损坏受到限制。 由于波长小于约1.2μm，激光束输出的良好的聚焦深度保持相对于激光束输出的光斑尺寸。