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    Charged particle beam microscope with minicolumn
    31.
    发明授权
    Charged particle beam microscope with minicolumn 有权
    小柱带电粒子束显微镜

    公开(公告)号：US07075092B2

    公开(公告)日：2006-07-11

    申请号：US10823968

    申请日：2004-04-13

    申请人： Dieter Winkler ,  Hans-Peter Feuerbaum ,  Joseph Bach

    发明人： Dieter Winkler ,  Hans-Peter Feuerbaum ,  Joseph Bach

    IPC分类号： H01J37/26 ,  H01J37/285

    CPC分类号： H01J37/18 ,  H01J37/28

    摘要： One embodiment of the present invention is an electron microscope that includes: (a) a main vacuum chamber housing a stage therein and connected to a vacuum pump; (b) a load lock for loading a specimen into said main vacuum chamber; (c) a minicolumn non-translatably positioned inside said main chamber; and (d) a vacuum pump situated inside the main vacuum chamber and external to and connected to the minicolumn.

    摘要翻译： 本发明的一个实施例是一种电子显微镜，其包括：（a）主真空室，其容纳在其中并连接到真空泵的台; （b）用于将样本装载到所述主真空室中的装载锁; （c）不可平移地定位在所述主室内的小柱; 和（d）位于主真空室内的真空泵，在真空室外部并连接到小柱。

    Method and apparatus for operating a burner of a heat engine, in particular of a gas turbine installation
    32.
    发明申请
    Method and apparatus for operating a burner of a heat engine, in particular of a gas turbine installation 审中-公开
    用于操作热机的燃烧器，特别是燃气轮机装置的方法和装置

    公开(公告)号：US20060096297A1

    公开(公告)日：2006-05-11

    申请号：US11256113

    申请日：2005-10-24

    申请人： Timothy Griffin ,  Dieter Winkler

    发明人： Timothy Griffin ,  Dieter Winkler

    IPC分类号： F23R3/40

    CPC分类号： F23C13/00 ,  F23C2900/13002 ,  F23L7/007 ,  F23L2900/07001 ,  F23R3/40 ,  Y02E20/322 ,  Y02E20/344

    摘要： The invention describes a method and an apparatus for operating a burner of a heat engine, in particular of a gas turbine installation, having a burner inlet, to which a mixture of a fuel and an oxygen-enriched carrier gas is fed for combustion within a combustion chamber which adjoins the burner inlet in the direction of flow. The invention is distinguished by the following method steps: providing a first oxygen-enriched carrier gas stream, known as the first oxidizer mixture, with which the fuel is admixed to form a first fuel/oxidizer mixture, and providing a second oxygen-enriched carrier gas stream, known as the second oxidizer mixture, catalyzing the first fuel/oxidizer mixture to form a catalyzed first fuel/oxidizer mixture, in which the fuel is at least partially oxidized, mixing the catalyzed first fuel/oxidizer mixture with the second oxidizer mixture to form a second fuel/oxidizer mixture, and igniting and burning the second fuel/oxidizer mixture.

    摘要翻译： 本发明描述了一种用于操作具有燃烧器入口的特别是燃气轮机装置的热机的燃烧器的方法和装置，燃料和富氧载体的混合物向该燃烧器入口供入燃烧， 燃烧室，其沿着流动方向邻接燃烧器入口。 本发明的区别在于以下方法步骤：提供称为第一氧化剂混合物的第一富氧载体气流，燃料与其混合以形成第一燃料/氧化剂混合物，并提供第二富氧载体 称为第二氧化剂混合物，催化第一燃料/氧化剂混合物以形成催化的第一燃料/氧化剂混合物，其中燃料至少部分被氧化，将催化的第一燃料/氧化剂混合物与第二氧化剂混合物 以形成第二燃料/氧化剂混合物，并点燃和燃烧第二燃料/氧化剂混合物。

    Premix burner
    33.
    发明授权
    Premix burner 有权
    预混燃烧器

    公开(公告)号：US07013648B2

    公开(公告)日：2006-03-21

    申请号：US10989029

    申请日：2004-11-16

    申请人： Timothy Griffin ,  Frank Reiss ,  Dieter Winkler

    发明人： Timothy Griffin ,  Frank Reiss ,  Dieter Winkler

    IPC分类号： F23D14/62

    CPC分类号： F23D14/62 ,  F23C2900/07002 ,  F23C2900/9901 ,  F23D17/002 ,  F23R3/286

    摘要： A premix burner includes a swirler (7) for a combustion air stream and a device for injection of fuel into the combustion air stream. The swirler (7) includes one or more inlet openings for combustion air of the combustion air stream entering the burner. The device for injection of fuel into the combustion air stream includes one or more first fuel lines (8) with first fuel injection openings (4). The opening diameter and/or the injection angle of the injection openings varies with respect to the axial and/or radial direction. Alternatively or in addition, some of the first fuel injection openings (4) may be arranged in one or more first groups of closely grouped fuel injection openings (4) so that each of the first groups forms one fuel jet with a large cross section. An improved mixing of the fuel with the combustion air is achieved with the burner in particular in cases in which the fuel is injected at the end of the burner facing the combustion chamber.

    摘要翻译： 预混燃烧器包括用于燃烧空气流的旋流器（7）和用于将燃料喷射到燃烧空气流中的装置。 旋流器（7）包括用于燃烧空气流进入燃烧器的燃烧空气的一个或多个入口。 用于将燃料喷射到燃烧空气流中的装置包括具有第一燃料喷射开口（4）的一个或多个第一燃料管线（8）。 喷射开口的开口直径和/或喷射角度相对于轴向和/或径向方向变化。 或者或另外，一些第一燃料喷射开口（4）可以布置在紧密分组的燃料喷射开口（4）的一个或多个第一组中，使得每个第一组形成具有大横截面的一个燃料喷射。 燃烧器与燃烧空气的改进的混合是通过燃烧器实现的，特别是在燃烧器面向燃烧室的燃烧器端部喷射燃料的情况下。

    Device and method for controlling focussed electron beams
    34.
    发明授权
    Device and method for controlling focussed electron beams 有权
    用于控制聚焦电子束的装置和方法

    公开(公告)号：US06943507B2

    公开(公告)日：2005-09-13

    申请号：US10474464

    申请日：2002-04-08

    申请人： Dieter Winkler ,  Pavel Adamec

    发明人： Dieter Winkler ,  Pavel Adamec

    IPC分类号： H01J37/073 ,  H01J37/304 ,  H01J29/52

    CPC分类号： H01J37/073 ,  H01J37/304 ,  H01J2237/06316 ,  H01J2237/0635 ,  H01J2237/31774

    摘要： The invention provides a focussing electron beam device with a single or an array of field emitter beam sources to generate electron beams with field emitter beam sources, at least one anode capable of accelerating the electrons of the electron beams towards a specimen, focussing components capable of focussing the electron beams onto the specimen and a control circuit that a) senses for deviations of the actual current values of the electron beams from desired current values; b) controls first voltages V1 to adjust the actual current values of the electron beams to the desired current values and c) controls second voltages V2 to adjust the actual focus positions of the electron beams to the desired focus positions. The voltage control circuit adjusts the actual current values of the electron beams to the desired current values and makes it possible to adjust the current values of an array of electron beams to a single value. Furthermore, a focussing electron beam device is disclosed with an array of field emitter beam sources integrated onto a substrate, which makes it possible to have arrays of field emitter beam sources with thousands or even millions of field emitter beam sources. With the integration of the control circuits for each field emitter beam source it is possible to adjust the current values and focus positions of each electron beam individually. Furthermore, methods are disclosed describing the operation of a single field emitter beam source or an array of field emitter beam sources.

    摘要翻译： 本发明提供一种聚焦电子束装置，其具有单个或阵列的场致发射束源，以产生具有场致发射束源的电子束，至少一个阳极，能够将电子束的电子加速朝向检体， 将电子束聚焦到样本上，以及控制电路，其a）感测电子束的实际电流值与期望电流值的偏差; b）控制第一电压V 1以将电子束的实际电流值调整到期望的电流值，并且c）控制第二电压V 2以将电子束的实际焦点位置调整到期望的焦点位置。 电压控制电路将电子束的实际电流值调整到期望的电流值，并且可以将电子束阵列的电流值调整为单个值。 此外，公开了一种聚焦电子束器件，其集成在衬底上的场发射器束源的阵列，这使得可以具有数千甚至数百万场发射器束源的场发射器束源的阵列。 通过对每个场发射器束源的控制电路的集成，可以单独地调整每个电子束的电流值和聚焦位置。 此外，公开了描述单个场发射器束源或场发射器束源的阵列的操作的方法。

    Catalytically operating burner
    35.
    发明授权
    Catalytically operating burner 失效
    催化操作燃烧器

    公开(公告)号：US06887067B2

    公开(公告)日：2005-05-03

    申请号：US09843836

    申请日：2001-04-30

    申请人： Timothy Griffin ,  Peter Jansohn ,  Verena Schmidt ,  Dieter Winkler

    发明人： Timothy Griffin ,  Peter Jansohn ,  Verena Schmidt ,  Dieter Winkler

    IPC分类号： B01J35/04 ,  F23C13/00 ,  F23D14/18 ,  F23R3/40 ,  F23D21/00

    CPC分类号： F23C13/00 ,  F23R3/40

    摘要： A catalytically operating burner with a catalyzer structure (4), useful in particular for a gas turbine system, has a heat-resistant carrier material (10) that forms the walls of several adjoining channels (13). The channels (13) pervade the catalyzer structure (4) in longitudinal direction and permit that a gaseous reaction mixture flows through the catalyzer structure (4). The walls are coated at least in part with a catalyst. In order to improve the catalytic conversion within the catalyzer structure (4), communicating openings (14) are constructed in the walls between an inlet end and an outlet end of the catalyzer structure (4). Adjoining channels (13) are able to communicate with each other through the communicating openings (14).

    摘要翻译： 具有催化剂结构（4）的催化操作燃烧器，特别适用于燃气轮机系统，具有形成几个相邻通道（13）的壁的耐热载体材料（10）。 通道（13）在纵向方向上遍及催化剂结构（4），并允许气态反应混合物流过催化剂结构（4）。 至少部分地用催化剂涂覆壁。 为了改善催化剂结构（4）内的催化转化，在催化剂结构（4）的入口端和出口端之间的壁中构造连通开口（14）。 相邻通道（13）能够通过连通开口（14）彼此连通。

    Charged particle source with automated tip formation
    36.
    发明授权
    Charged particle source with automated tip formation 有权
    具有自动尖端形成的带电粒子源

    公开(公告)号：US08330130B2

    公开(公告)日：2012-12-11

    申请号：US12253042

    申请日：2008-10-16

    申请人： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

    发明人： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

    IPC分类号： G01J1/00

    CPC分类号： H01J37/073 ,  H01J27/26 ,  H01J37/08 ,  H01J37/265 ,  H01J37/304 ,  H01J2237/06341 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/30466 ,  H01J2237/30477 ,  H01J2237/31749

    摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.

    摘要翻译： 描述带电粒子束装置。 该装置包括发射器单元，其包括发射极尖端; 电压供应单元，适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件，其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元，适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

    Stable emission gas ion source and method for operation thereof
    38.
    发明授权
    Stable emission gas ion source and method for operation thereof 有权
    稳定的排放气体离子源及其操作方法

    公开(公告)号：US08143589B2

    公开(公告)日：2012-03-27

    申请号：US12420384

    申请日：2009-04-08

    申请人： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

    发明人： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

    IPC分类号： H01J37/08

    CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/0807 ,  H01J2237/28

    摘要： A method of operating a focused ion beam device for emitting during operation a focused ion beam including ions of a gas generated at a first partial pressure, comprising cleaning an emitter tip positioned in an emitter tip region of the focused ion beam device, the cleaning comprises introducing the gas into the emitter tip region such that the gas has a second partial pressure of at least two times the first pressure. Further, a focused ion beam device is provided, comprising a gas field emitter tip (13) in an emitter tip region emitting an ion beam including ions of a gas, a gas inlet for supplying a gas with different pressures (110), a gas outlet (120), a pressure measurement device for measuring the pressure in the emitter tip region and a control unit (130) for controlling switching between an operation mode and a cleaning mode, further controlling the pressures in the emitter tip region and being connected to the pressure measurement device.

    摘要翻译： 一种操作聚焦离子束装置的方法，用于在操作期间发射包括以第一分压产生的气体的离子的聚焦离子束，包括清洁位于聚焦离子束装置的发射极尖端区域中的发射极尖端，所述清洁包括 将气体引入发射极尖端区域，使得气体具有至少两倍于第一压力的第二分压。 此外，提供聚焦离子束装置，其包括发射极尖端区域中的气体发射极尖端（13），其发射包括气体离子的离子束，用于供应不同压力的气体的气体入口（110），气体 出口（120），用于测量发射极尖端区域中的压力的​​压力测量装置和用于控制操作模式和清洁模式之间的切换的控制单元（130），进一步控制发射极尖端区域中的压力并连接到 压力测量装置。