Abstract:
Methods and structures are disclosed for advanced interconnects in sub-micron and sub-half-micron integrated circuit devices fabricated using a single damascene process. a dielectric etch-stop layer (e.g., silicon nitride) is deposited subsequent to rather than prior to CMP processing of the previous metallization layer (e.g., the conductive plug). This scheme effectively eliminates the effect of CMP-induced erosion on the etch-stop layer and therefore allows an extremely thin etch stop to be used. Moreover, a high etch-selectivity can be obtained for the trench etch, and all etch-stop material is removed from beneath the interconnect metal, thereby reducing parasitic effects. A patterned dielectric layer is used as a metal cap in place of the standard blanket silicon nitride layer, thus preventing the formation of blisters and bubbles associated with trapped moisture and gasses, and reducing interconnect capacitance.
Abstract:
A technique for fabricating a dual damascene interconnect structure using a low dielectric constant material as a dielectric layer or layers. A low dielectric constant (low-.epsilon.) dielectric material is used to form an inter-level dielectric (ILD) layer between metallization layers and in which via and trench openings are formed in the low-.epsilon. ILD. The dual damascene technique allows for both the via and trench openings to be filled at the same time.
Abstract:
A method of utilizing electroless copper deposition to form interconnects on a semiconductor wafer. Once a via or a trench is formed in a dielectric layer, a titanium nitride (TiN) or tantalum (Ta) barrier layer is blanket deposited. Then, a contact displacement technique is used to form a thin activation seed layer of copper on the barrier layer. An electroless deposition technique is then used to auto-catalytically deposit copper on the activated barrier layer. The electroless copper deposition continues until the via/trench is filled. Subsequently, the surface is polished by an application of chemical-mechanical polishing (CMP) to remove excess copper and barrier material from the surface, so that the only copper and barrier material remaining are in the via/trench openings. Then an overlying silicon nitride (SiN) layer is formed above the exposed copper in order to form a dielectric barrier layer. The copper interconnect is fully encapsulated from the adjacent material by the TiN (or Ta) and the SiN layers.
Abstract:
An electroless deposition apparatus and a method of electroless deposition that uses a single process chamber for performing multiple processes by moving through the process chamber a variety of fluids one at a time in a sequential order.
Abstract:
The present disclosure disclose a diaphragm dome, the diaphragm dome includes a first carbon fiber layer and a second carbon fiber layer which are alternatively arranged by stacking, the first carbon fiber layer and the second carbon fiber layer are respectively a single-layer structure formed by an one-way extended carbon fiber bundle, an extending direction of the carbon fiber bundle of the first carbon fiber layer is perpendicular to an extending direction of the carbon fiber bundle of the second carbon fiber layer, and a thickness difference exists between the first carbon fiber layer and the second carbon fiber layer. In the diaphragm dome provided by the present disclosure, the material has larger specific strength, thus can reduce the thickness of the diaphragm dome, the carbon fiber layers of the diaphragm dome are well adhered, which is not readily layered, and has good water resistance.
Abstract:
Systems and methods for a readiness dialog box for a call over network (CON) are provided. In some embodiments, the readiness dialog box is presented to the callers prior to the onset of the call. It presents the other participant's and their status. For example, it may indicate which participants are online, but not yet ready, those who are ready, and those not available. It also enables the caller to send messages (both preconfigured and customized) to the other participants. Once sufficient participants have joined, the call may start. Sufficiency of participants could include a quorum of individuals, may require that specific participants are ready, everyone is ready, or may be time dependent. The participant requirements may be configured by the individual setting up the call based upon call type.
Abstract:
A sound generating device is provided in the present disclosure. The sound generating device includes a shell providing a receiving cavity, a sound generating body received in the receiving cavity and assembled to the shell, sound absorbing material filled in the receiving cavity, and an isolating member attached on the sound generating body. The sound generating body includes at least one air hole, and the isolating member covers the at least one air hole, the isolating member is configured for isolating the sound absorbing material from entering the sound generating body. The present disclosure further provides a method for making a sound generating device.
Abstract:
Systems and methods for visualization of a call over network (CON) are provided. In some embodiments, the visualization of a call over network may be effectuated by three functionalities: a readiness dialog box that enables the facilitation of the call, the inclusion of visualization and participant features within the call, and a visualized summary after the call. The readiness dialog box is presented to the callers prior to the onset of the call. It presents the other participant's and their status. It also enables the caller to send messages (both preconfigured and customized) to the other participants. Once sufficient participants have joined, the call may start. Once the call starts, it may be visualized by displaying on a single or multi channels, which caller is speaking, and any additional indications they may be providing. The caller may likewise be provided a set of participant features that allow the user to interact with the call. After the call concludes, a visualized summary of the call can then be generated. The summary includes any of the recording, transcriptions, scenario information, speaker information and the duration each speaker was talking, etc.
Abstract:
First information is received at a first pulse width modulation (PWM) module responsive to a chip select signal being asserted at a chip select input of a communication bus of the first PWM module during a first time. The first information is latched at a control register of the first PWM module in response to a first logic transition of the chip select signal. A first PWM signal is provided at a first output of the first PWM module beginning a predetermined amount of time after the first logic transition of the chip select signal, the first PWM signal generated by the first PWM module based upon the first information.
Abstract:
A suspension includes a flexure and a plurality of electrical traces formed on the flexure. Each electrical trace has a trace body and a bonding pad arranged for connecting with a slider, and the bonding pad is a free end before connecting with the slider and is capable of bending to the trace body flexibly, and the bonding pad includes a trace body layer and a solder layer formed on the trace body layer, thereby the bonding pads of the electrical traces connecting with the slider by reflowing the solder layer. The present invention uses no extra solder balls, so as to reduce the manufacturing cost and the corresponding apparatus cost. The invention also discloses a manufacturing method of a suspension, and a connecting method for a suspension and a slider.