Packaged MEMS Device
    33.
    发明申请
    Packaged MEMS Device 有权
    封装MEMS器件

    公开(公告)号:US20150061048A1

    公开(公告)日:2015-03-05

    申请号:US14011566

    申请日:2013-08-27

    Abstract: A packaged MEMS device may include an embedding arrangement, a MEMS device disposed in the embedding arrangement, a sound port disposed in the embedding arrangement and acoustically coupled to the MEMS device, and a grille within the sound port. Some embodiments relate to a sound transducer component including an embedding material and a substrate-stripped MEMS die embedded into the embedding material. The MEMS die may comprise a diaphragm for sound transduction. The sound transducer component may further comprise a sound port within the embedding material in fluidic or acoustic contact with the diaphragm. Further embodiments relate to a method for packaging a MEMS device or to a method for manufacturing a sound transducer component.

    Abstract translation: 封装的MEMS器件可以包括嵌入布置,布置在嵌入布置中的MEMS器件,布置在嵌入布置中并声耦合到MEMS器件的声音端口和声音端口内的格栅。 一些实施例涉及包括嵌入材料和嵌入到嵌入材料中的剥离衬底的MEMS芯片的声音传感器部件。 MEMS管芯可以包括用于声音传递的隔膜。 声音传感器部件还可以包括与隔膜流体或声学接触的嵌入材料内的声音端口。 另外的实施例涉及用于封装MEMS装置的方法或用于制造声换能器部件的方法。

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